DE2220533A1 - MONITORING THE AIR BEARING OF A SILICON INNER HOLE SAW - Google Patents

MONITORING THE AIR BEARING OF A SILICON INNER HOLE SAW

Info

Publication number
DE2220533A1
DE2220533A1 DE19722220533 DE2220533A DE2220533A1 DE 2220533 A1 DE2220533 A1 DE 2220533A1 DE 19722220533 DE19722220533 DE 19722220533 DE 2220533 A DE2220533 A DE 2220533A DE 2220533 A1 DE2220533 A1 DE 2220533A1
Authority
DE
Germany
Prior art keywords
bearing
air
monitoring
gas
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722220533
Other languages
German (de)
Inventor
Hans Stut
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19722220533 priority Critical patent/DE2220533A1/en
Priority to CH1742572A priority patent/CH550991A/en
Priority to FR7245662A priority patent/FR2182433A5/fr
Priority to JP4463473A priority patent/JPS5316856B2/ja
Priority to GB52173A priority patent/GB1344818A/en
Publication of DE2220533A1 publication Critical patent/DE2220533A1/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/12—Sliding-contact bearings for exclusively rotary movement characterised by features not related to the direction of the load
    • F16C17/24—Sliding-contact bearings for exclusively rotary movement characterised by features not related to the direction of the load with devices affected by abnormal or undesired positions, e.g. for preventing overheating, for safety
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0644—Details of devices to control the supply of liquids to the bearings

Description

SIEMENS AKTIENGESELLSCHAFT - ; München 2, 2 6 APR 1972SIEMENS AKTIENGESELLSCHAFT - ; Munich 2, 2 6 APR 1972

■ο -, . j „.. -u · Witteisbacherplatz 2 ■ ο -,. j ".. -u · Witteisbacherplatz 2

Berlxn und München * Berlxn and Munich *

72/106372/1063

Überwachung eines Luftlagers einer Silicium-InnenlochsägeMonitoring of an air bearing of a silicon inner diameter saw

Die Erfindung betrifft eine Vorrichtung zur Überwachung eines Luft-, Gas- oder öllagers, wie sie z.B. in Vorrichtungen zum Schneiden, von Silicium mit diamantbe-legten Innenlochsägeblättern benutzt v/erden.The invention relates to a device for monitoring an air, gas or oil storage, such as those used in devices for Cutting silicon with diamond-coated inner diameter saw blades uses v / earth.

Der Betrieb von Luft-, Gas- oder Öllagern in solchen Vorrichtungen setzt sehr enge Luftspalten in der Größenordnung von etwa 2o/um voraus, in welchen das tragende Medium Luft, Gas oder Öl unter Druck hineingepreßt wird. . \ The operation of air, gas or oil bearings in such devices requires very narrow air gaps in the order of magnitude of about 20 / μm, into which the supporting medium air, gas or oil is forced under pressure. . \

Die Dicke des Lagerspaltes ist dabei abhängig von dem Druck, unter welchem das Medium im Lagerspalt steht. .The thickness of the bearing gap depends on the pressure under which the medium stands in the bearing gap. .

Bekanntgewordene Vorrichtungen benutzen zwar Einrichtungen, mit welchen der Druck des Mediums überwacht und die Anlage bei Unterschreiten eines gewissen Druckes abgeschaltet wird, so daß eine durch Ausfall des Druckes hervorgerufene fehlerhafte Berührung der Lagerflächen und dadurch eine Beschädigung des Lagers vermieden werden kann.Known devices use devices with which the pressure of the medium is monitored and the system is switched off when falling below a certain pressure, so that a faulty one caused by failure of the pressure Contact with the bearing surfaces and thereby damage to the bearing can be avoided.

Es gibt aber weitere Ursachen, die dazu führen können, daß die den Lagerspalt begrenzenden Flächen des Luft-, Gas- oder öllagers sich während des Betriebes berühren und zur Zer- · störung des Lagers führen.But there are other causes that can lead to the fact that the bearing gap delimiting surfaces of the air, gas or oil bearings come into contact with each other during operation and lead to disruption of the bearing.

VPA 9/i1o/2o31 LH./Au - 2 -VPA 9 / i1o / 2o31 LH./Au - 2 -

309845/0656309845/0656

Zu ihnen zählen Ablagerungen von Schmutz, der z. B. mit dem Kühlmittel der Innenlochsäge in den Spalt eindringen kann und sich im Lagerspalt ansammelt, Unwuchten, die z. E. durch den Betrieb mit hohen Umdrehungsgeschwindigkeiten entstehen, wodurch die Iiagerflächen sich periodisch "berühren kennen, außerdem Kräfte, die durch Unrundheiten und durch den Riemenzug des kraftschlüssigen Antriebes auf den rotierenden Teil des Lagers derart wirken, daß es ebenfalls zu Berührungen der Lagerflächen miteinander und damit zur Beschädigung des Lagers führt.They include deposits of dirt that z. B. penetrate the gap with the coolant of the inner diameter saw can and accumulates in the bearing gap, imbalances that z. E. caused by the operation at high rotational speeds, whereby the bearing surfaces "touch" each other periodically know, as well as forces caused by out-of-roundness and the belt pull of the non-positive drive act on the rotating part of the bearing in such a way that the bearing surfaces also come into contact with one another and thus leads to damage to the bearing.

Aufgabe der Erfindung ist es, die genannten Ursachen, die zu Zerstörungen des Lagers führen können, frühzeitig zu erkennen und die gegenseitige Berührung der Lagerflächen und die dadurch hervorgerufene Zerstörung des Lagers zu verhindern.The object of the invention is to address the above-mentioned causes, which can lead to the destruction of the bearing, at an early stage recognize and the mutual contact of the bearing surfaces and the resulting destruction of the bearing impede.

Die Aufgabe wird dadurch gelöst, daß die den Luft-, Gasoder Ölspalt des Lagers begrenzenden Flächen des feststehenden und des rotierenden Teiles des Lagers, die die Elektroden eines komplexen, weitgehend kapazitiven Widerstandes bilden, über einen Vorwiderstand mit einer Gleichspannungsquelle zu einem Stromkreis zusammengeschlossen sind, wobei der rotierende Teil über Schleifbürsten angeschlossen ist, und an den Stromkreis eine Meßeinrichtung zur Auswertung der Änderungen des Widerstandes infolge der Veränderungen des Luftspaltes angeschlossen ist.The object is achieved in that the surfaces of the fixed bearing which delimit the air, gas or oil gap of the bearing and the rotating part of the bearing, which has the electrodes of a complex, largely capacitive resistor form, via a series resistor with a DC voltage source are interconnected to form a circuit, the rotating part being connected via grinding brushes is, and to the circuit a measuring device for evaluating the changes in resistance as a result the changes in the air gap is connected.

Die Meßeinrichtung zur Auswertung der Änderung des Widerstandes des Luftspaltes besteht aus einem Oszillographen und/oder einer elektronischen Auswerteinrichtung, über welche der Zustand des Lagers überwacht und die Vorrichtung, in der das Lager eingebaut ist, in Abhängigkeit vom Zustand des Lagers abgeschaltet wird.The measuring device for evaluating the change in resistance of the air gap consists of an oscilloscope and / or an electronic evaluation device, via which monitors the condition of the bearing and the device in which the bearing is installed, depending on the condition of the warehouse is switched off.

VPA 9/11o/2o31 - 3 -VPA 9 / 11o / 2o31 - 3 -

309845/0655309845/0655

Mit Hilfe dieser Überwachungseinrichtung können auch kurzzeitige Berührungen der Lagerflächen rechtzeitig erkannt werden und einer Zerstörung des Lagers vorgebeugt werden.With the help of this monitoring device, even brief contact with the storage areas can be timely can be recognized and a destruction of the warehouse can be prevented.

Anhand der Figur soll die Erfindung, näher erläutert werden.The invention is to be explained in more detail with the aid of the figure will.

In ihr ist das Luft-, Gas- oder Öllager, wie es in einer Schneidvorrichtung mit einer Innenlochsäge verwendet wird, mit dem feststehenden Teil 1 .und dem rotierenden Teil 2 dargestellt. Diese Lagerteile sind elektrisch über den Vorwiderstand 3 an eine Gleichspannungsquelle 4 angeschlossen, wobei der rotierende Teil 2 über Schleifbürsten verbunden ist. An den Klemmen 7 und 8 des Stromkreises ist die Meßeinrichtung 9 angeschlossen, die mit der Abschaltautomatik 1o der."Einrichtung, in welche das Lager 1, 2 eingebaut ist, verbunden ist. Die Meßeinrichtung 9 kann auch aus einem Oszillographen zur Beobachtung der Widerstands änderungen bestehen. .In it is the air, gas or oil store, like it is in one Cutting device with an inner diameter saw is used, with the fixed part 1. And the rotating part 2 shown. These bearing parts are electrically connected to a DC voltage source 4 via the series resistor 3, the rotating part 2 via abrasive brushes connected is. The measuring device 9 is connected to the terminals 7 and 8 of the circuit, the one with the automatic switch-off 1o of the "device in which the bearing 1, 2 is installed, is connected. The measuring device 9 can also consist of an oscilloscope to observe changes in resistance. .

In diesem Stromkreis wirkt der Luftspalt 11 mit den beiden angrenzenden Flächen des feststehenden und des rotierenden Teiles des "Lagers wie die Kapazität in der Schaltung eines Kondensatormikrophons. Ändert sich die Kapazität des Luftspaltes 11, so ändert sich auch die Spannung an der Kapazität, die mit der Meßeinrichtung 1o erfaßt wird. Auf diese Weise können Schwingungen des rotierenden Lagerteiles nach Frequenz, Phase und Amplitude, gegebenenfalls synchron mit der Drehzahl des Lagers ausgewertet und auf Unwuchten, Unrundheiten und auf Querkräfte durch den Riemenzug geschlossen werden.In this circuit, the air gap 11 acts with the two adjacent surfaces of the stationary and the rotating Part of the "camp like the capacitance in the circuit of a condenser microphone. If the capacitance of the air gap changes 11, the voltage across the capacitance, which is detected with the measuring device 1o, also changes. To this Way can vibrations of the rotating bearing part according to frequency, phase and amplitude, possibly synchronously evaluated with the speed of the bearing and for imbalances, Out-of-roundness and lateral forces can be inferred from the belt pull.

VPA 9/11o/2o31 - 4 -VPA 9 / 11o / 2o31 - 4 -

309845/0655309845/0655

Verschmutzungen des Luftspaltes lassen sich als Real-Komponenten des komplexen Widerstandes indentifizieren und "beeinflussen die absolute Höhe der Meßspannung.Dirt in the air gap can be considered real components of the complex resistance identify and "influence the absolute level of the measuring voltage.

Berührungen der Lagerflächen können als ohmsche Kontakte ausgemacht werden, die zu einem Zusammenbruch der Meßspannung führen.Contact with the bearing surfaces can be identified as ohmic contacts which lead to a collapse of the measuring voltage.

Anhand der obengenannten Meßwerte können die Verhältnisse im Lagerspalt in der Meßeinrichtung ausgewertet und bei sich einstellenden Fehlern die Vorrichtung, in der das Lager eingebaut ist, rechtzeitig abgeschaltet und vor Zerstörungen bewahrt werden.On the basis of the above-mentioned measured values, the conditions in the bearing gap can be evaluated in the measuring device and on your own Adjusting errors, the device in which the bearing is installed is switched off in good time and protected from destruction will.

2 Patentansprüche 1 Figur2 claims 1 figure

VPA 9/11o/2o31 - 5 -VPA 9 / 11o / 2o31 - 5 -

309845/0656309845/0656

Claims (1)

PatentansprücheClaims "T. ^Vorrichtung zur Überwachung eines Luft-, Gas oder Öllagers, dadurch gekennzeichnet, daß die den Luft- Gas- oder Ölspalt.des Lagers, "begrenzenden Flächen des feststehenden und des rotierenden Teiles des Lagers, die die Elektroden eines komplexen, im wesentlichen kapazitiven Widerstandes bilden, über einen Vorwiderstand mit einer Gleichspannungsquelle zu einem Stromkreis zusammengeschlossen sind, wobei der rotierende Teil über Schleifbürsten angeschlossen ist, und an den Stromkreis eine Meßeinrichtung zur Auswertung der Änderungen des komplexen Widerstandes infolge Veränderungen des Lagerspaltes angeschlossen ist."T. ^ device for monitoring an air, gas or oil store, characterized in that the surfaces delimiting the air, gas or oil gap of the bearing " the fixed and rotating parts of the bearing, which form the electrodes of a complex, essentially capacitive Form resistance, via a series resistor with a DC voltage source are connected together to form a circuit, the rotating part being connected via grinding brushes is, and to the circuit a measuring device for evaluating the changes in the complex resistance is connected due to changes in the bearing gap. •2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet , daß die Meßeinrichtung zur Auswertung der Änderungen des komplexen Widerstandes des Lagerspaltes aus einem Oszillographen und/oder einer elektronischen Auswerteinrichtung besteht, über welche die Vorrichtung,in die das Luft- Gas- oder Ölläger eingebaut ist, in Abhängigkeit -vom Zustand des Lagers abgeschaltet wird.• 2. Device according to Claim 1, characterized that the measuring device for evaluating the changes in the complex resistance of the bearing gap from an oscilloscope and / or an electronic one There is an evaluation device via which the device in which the air, gas or oil storage is installed, depending on -is switched off from the state of the warehouse. VPA 9/11o/2o31VPA 9 / 11o / 2o31 309845/0655309845/0655 Leerse iteBlank
DE19722220533 1972-04-26 1972-04-26 MONITORING THE AIR BEARING OF A SILICON INNER HOLE SAW Pending DE2220533A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19722220533 DE2220533A1 (en) 1972-04-26 1972-04-26 MONITORING THE AIR BEARING OF A SILICON INNER HOLE SAW
CH1742572A CH550991A (en) 1972-04-26 1972-11-29 OPERATIONAL MONITORING DEVICE OF A MECHANICAL AIR, GAS OR OIL STORAGE.
FR7245662A FR2182433A5 (en) 1972-04-26 1972-12-21
JP4463473A JPS5316856B2 (en) 1972-04-26 1973-04-19
GB52173A GB1344818A (en) 1972-04-26 1973-10-16 Apparatus for monitoring a fluid bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722220533 DE2220533A1 (en) 1972-04-26 1972-04-26 MONITORING THE AIR BEARING OF A SILICON INNER HOLE SAW

Publications (1)

Publication Number Publication Date
DE2220533A1 true DE2220533A1 (en) 1973-11-08

Family

ID=5843367

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722220533 Pending DE2220533A1 (en) 1972-04-26 1972-04-26 MONITORING THE AIR BEARING OF A SILICON INNER HOLE SAW

Country Status (5)

Country Link
JP (1) JPS5316856B2 (en)
CH (1) CH550991A (en)
DE (1) DE2220533A1 (en)
FR (1) FR2182433A5 (en)
GB (1) GB1344818A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2407065A1 (en) * 1974-02-14 1975-08-21 Precitec Gmbh Flame cutting device - has an electrode for capacitive distance measurement between burner nozzle and workpiece
DE2935218A1 (en) * 1979-08-31 1981-03-26 Barmag Ag, 42897 Remscheid High speed spindle with critical damping - gives indication when metallic contact occurs between shaft and bearings by amplified current initiating alarm
DE3122810A1 (en) * 1981-06-09 1982-12-30 Rotoflow Corp., 90064 Los Angeles, Calif. Shaft mounting device
DE19832364A1 (en) * 1998-07-18 2000-01-20 Kloeckner Humboldt Wedag Process for monitoring and controlling the operation of rotary drums with slide shoes and slide shoe bearings therefor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111649067B (en) * 2020-05-29 2021-07-20 北京理工大学 Gas bearing assembly detection device, method and system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2407065A1 (en) * 1974-02-14 1975-08-21 Precitec Gmbh Flame cutting device - has an electrode for capacitive distance measurement between burner nozzle and workpiece
DE2935218A1 (en) * 1979-08-31 1981-03-26 Barmag Ag, 42897 Remscheid High speed spindle with critical damping - gives indication when metallic contact occurs between shaft and bearings by amplified current initiating alarm
DE3122810A1 (en) * 1981-06-09 1982-12-30 Rotoflow Corp., 90064 Los Angeles, Calif. Shaft mounting device
DE19832364A1 (en) * 1998-07-18 2000-01-20 Kloeckner Humboldt Wedag Process for monitoring and controlling the operation of rotary drums with slide shoes and slide shoe bearings therefor

Also Published As

Publication number Publication date
JPS4920547A (en) 1974-02-23
CH550991A (en) 1974-06-28
GB1344818A (en) 1974-01-23
FR2182433A5 (en) 1973-12-07
JPS5316856B2 (en) 1978-06-03

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