DE2162948C3 - - Google Patents

Info

Publication number
DE2162948C3
DE2162948C3 DE19712162948 DE2162948A DE2162948C3 DE 2162948 C3 DE2162948 C3 DE 2162948C3 DE 19712162948 DE19712162948 DE 19712162948 DE 2162948 A DE2162948 A DE 2162948A DE 2162948 C3 DE2162948 C3 DE 2162948C3
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19712162948
Other languages
German (de)
Other versions
DE2162948B2 (de
DE2162948A1 (de
Inventor
Karl 7100 Heilbronn Stadtler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs GmbH
Original Assignee
Licentia Patent Verwaltungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs GmbH filed Critical Licentia Patent Verwaltungs GmbH
Priority to DE19712162948 priority Critical patent/DE2162948B2/de
Publication of DE2162948A1 publication Critical patent/DE2162948A1/de
Publication of DE2162948B2 publication Critical patent/DE2162948B2/de
Application granted granted Critical
Publication of DE2162948C3 publication Critical patent/DE2162948C3/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE19712162948 1971-12-18 1971-12-18 Verfahren zum Herstellen von Diffusionszonen in einem Halbleiterkörper Granted DE2162948B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19712162948 DE2162948B2 (de) 1971-12-18 1971-12-18 Verfahren zum Herstellen von Diffusionszonen in einem Halbleiterkörper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712162948 DE2162948B2 (de) 1971-12-18 1971-12-18 Verfahren zum Herstellen von Diffusionszonen in einem Halbleiterkörper

Publications (3)

Publication Number Publication Date
DE2162948A1 DE2162948A1 (de) 1973-06-28
DE2162948B2 DE2162948B2 (de) 1974-08-01
DE2162948C3 true DE2162948C3 (enExample) 1975-04-03

Family

ID=5828434

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712162948 Granted DE2162948B2 (de) 1971-12-18 1971-12-18 Verfahren zum Herstellen von Diffusionszonen in einem Halbleiterkörper

Country Status (1)

Country Link
DE (1) DE2162948B2 (enExample)

Also Published As

Publication number Publication date
DE2162948B2 (de) 1974-08-01
DE2162948A1 (de) 1973-06-28

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)