DE2146310A1 - Interferometer und Verfahren zu seiner Herstellung - Google Patents

Interferometer und Verfahren zu seiner Herstellung

Info

Publication number
DE2146310A1
DE2146310A1 DE19712146310 DE2146310A DE2146310A1 DE 2146310 A1 DE2146310 A1 DE 2146310A1 DE 19712146310 DE19712146310 DE 19712146310 DE 2146310 A DE2146310 A DE 2146310A DE 2146310 A1 DE2146310 A1 DE 2146310A1
Authority
DE
Germany
Prior art keywords
source
grid
energy
grating
hologram
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712146310
Other languages
German (de)
English (en)
Inventor
Wright H. Los Catos Calif. Huntley jun. (V.StA.). P
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOLOGRAF CORP
Original Assignee
HOLOGRAF CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOLOGRAF CORP filed Critical HOLOGRAF CORP
Publication of DE2146310A1 publication Critical patent/DE2146310A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
DE19712146310 1970-09-21 1971-09-16 Interferometer und Verfahren zu seiner Herstellung Pending DE2146310A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7379170A 1970-09-21 1970-09-21

Publications (1)

Publication Number Publication Date
DE2146310A1 true DE2146310A1 (de) 1972-03-30

Family

ID=22115827

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712146310 Pending DE2146310A1 (de) 1970-09-21 1971-09-16 Interferometer und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (1) US3738753A (enExample)
DE (1) DE2146310A1 (enExample)
FR (1) FR2108311A5 (enExample)
GB (1) GB1364563A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung
DE3810165C1 (enExample) * 1988-03-25 1989-07-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3851180A (en) * 1973-06-18 1974-11-26 Oki Electric Ind Co Ltd Apparatus for measuring the diameter of fine wires
US4112295A (en) * 1974-12-30 1978-09-05 Instytut Geodezji I Kartograffi Apparatus for direct measurement of displacements with a holographic scale
US4037325A (en) * 1975-01-13 1977-07-26 Quality Measurement Systems, Inc. Linear glass scale height gage
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings
US4265542A (en) * 1977-11-04 1981-05-05 Computervision Corporation Apparatus and method for fine alignment of a photomask to a semiconductor wafer
US4215480A (en) * 1977-12-16 1980-08-05 James Neill Holdings Limited Distance measuring gauge
US4265534A (en) * 1977-12-23 1981-05-05 Remijan Paul W Optical apparatus and method for producing the same
US4395124A (en) * 1977-12-23 1983-07-26 Randwal Instrument Co., Inc. Apparatus for position encoding
DE2857265A1 (de) * 1977-12-23 1981-01-29 P Remijan Optical apparatus and method for producing same
EP0311144B1 (en) * 1983-11-04 1993-07-14 Sony Magnescale, Inc. Optical instrument for measuring displacement
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
GB2185314B (en) * 1986-01-14 1990-09-26 Canon Kk Encoder
DE3700777C2 (de) * 1986-01-14 1994-05-05 Canon Kk Vorrichtung zur Erfassung der Position eines Objektes
DE3706277C2 (de) * 1986-02-28 1995-04-27 Canon Kk Drehungsmeßgeber
JPH073344B2 (ja) * 1987-06-15 1995-01-18 キヤノン株式会社 エンコ−ダ−
JPH0718714B2 (ja) * 1988-05-10 1995-03-06 キヤノン株式会社 エンコーダー
US5198873A (en) * 1988-10-19 1993-03-30 Canon Kabushiki Kaisha Encoder utilizing interference using multi-mode semiconductor laser
JP2547826B2 (ja) * 1988-10-19 1996-10-23 キヤノン株式会社 マルチモード半導体レーザを使用する干渉計測装置
US5050993A (en) * 1989-06-14 1991-09-24 Rockwell International Corporation Diffraction encoded position measuring apparatus
EP0425726B1 (de) * 1989-11-02 1993-05-12 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
DE4006365A1 (de) * 1990-03-01 1991-10-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE4033013C2 (de) * 1990-10-18 1994-11-17 Heidenhain Gmbh Dr Johannes Polarisationsoptische Anordnung
US5771098A (en) * 1996-09-27 1998-06-23 Fed Corporation Laser interferometric lithographic system providing automatic change of fringe spacing
US5969342A (en) * 1997-05-30 1999-10-19 Feng; Maria Q. Multiplexable optical fiber displacement, strain acceleration and pressure sensors and method of operating the same
US7460231B2 (en) * 2006-03-27 2008-12-02 Asml Netherlands B.V. Alignment tool for a lithographic apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1096022A (en) * 1963-06-21 1967-12-20 Cooke Conrad Reginald Improvements in or relating to apparatus for detecting and indicating the extent of relative movement
GB1088838A (en) * 1964-11-19 1967-10-25 Nat Res Dev Diffraction grating
DE1548707C3 (de) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Fotoelektrischer Schrittgeber

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung
DE3810165C1 (enExample) * 1988-03-25 1989-07-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
US5009506A (en) * 1988-03-25 1991-04-23 Dr. Johannes Heidenhain Gmbh Photoelectric position-measuring arrangement having a plurality of shiftable grids

Also Published As

Publication number Publication date
US3738753A (en) 1973-06-12
FR2108311A5 (enExample) 1972-05-19
GB1364563A (en) 1974-08-21

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