DE2118674A1 - - Google Patents
Info
- Publication number
- DE2118674A1 DE2118674A1 DE19712118674 DE2118674A DE2118674A1 DE 2118674 A1 DE2118674 A1 DE 2118674A1 DE 19712118674 DE19712118674 DE 19712118674 DE 2118674 A DE2118674 A DE 2118674A DE 2118674 A1 DE2118674 A1 DE 2118674A1
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712118674 DE2118674B2 (de) | 1971-04-17 | 1971-04-17 | Verfahren zur herstellung von beugungsgittern mit unsymmetrischem furchenprofil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712118674 DE2118674B2 (de) | 1971-04-17 | 1971-04-17 | Verfahren zur herstellung von beugungsgittern mit unsymmetrischem furchenprofil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2118674B2 DE2118674B2 (de) | 1972-06-08 |
| DE2118674A1 true DE2118674A1 (enExample) | 1972-06-08 |
Family
ID=5804979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712118674 Pending DE2118674B2 (de) | 1971-04-17 | 1971-04-17 | Verfahren zur herstellung von beugungsgittern mit unsymmetrischem furchenprofil |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE2118674B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997027504A1 (en) * | 1996-01-26 | 1997-07-31 | Landis & Gyr Technology Innovation Ag | Surface pattern |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4287235A (en) * | 1979-05-29 | 1981-09-01 | Massachusetts Institute Of Technology | X-ray lithography at ˜100 A linewidths using X-ray masks fabricated by shadowing techniques |
| JPS60230601A (ja) * | 1984-05-01 | 1985-11-16 | Masayasu Negishi | 膜処理方法 |
-
1971
- 1971-04-17 DE DE19712118674 patent/DE2118674B2/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997027504A1 (en) * | 1996-01-26 | 1997-07-31 | Landis & Gyr Technology Innovation Ag | Surface pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2118674B2 (de) | 1972-06-08 |