DE2101945A1 - Metallic coatings prodn - on semiconductor or dielectric substrates - Google Patents
Metallic coatings prodn - on semiconductor or dielectric substratesInfo
- Publication number
- DE2101945A1 DE2101945A1 DE19712101945 DE2101945A DE2101945A1 DE 2101945 A1 DE2101945 A1 DE 2101945A1 DE 19712101945 DE19712101945 DE 19712101945 DE 2101945 A DE2101945 A DE 2101945A DE 2101945 A1 DE2101945 A1 DE 2101945A1
- Authority
- DE
- Germany
- Prior art keywords
- masking layer
- solution
- base body
- layer
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title abstract 5
- 239000004065 semiconductor Substances 0.000 title description 3
- 238000000576 coating method Methods 0.000 title 1
- 230000000873 masking effect Effects 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000011230 binding agent Substances 0.000 claims abstract description 12
- 239000002904 solvent Substances 0.000 claims abstract description 6
- 230000008020 evaporation Effects 0.000 claims abstract description 3
- 238000001704 evaporation Methods 0.000 claims abstract description 3
- 238000004519 manufacturing process Methods 0.000 claims description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052744 lithium Inorganic materials 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 230000002209 hydrophobic effect Effects 0.000 claims description 3
- YLGXILFCIXHCMC-JHGZEJCSSA-N methyl cellulose Chemical compound COC1C(OC)C(OC)C(COC)O[C@H]1O[C@H]1C(OC)C(OC)C(OC)OC1COC YLGXILFCIXHCMC-JHGZEJCSSA-N 0.000 claims description 3
- 229920002545 silicone oil Polymers 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 4
- 238000010304 firing Methods 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 52
- 230000000694 effects Effects 0.000 description 4
- SRBFZHDQGSBBOR-IOVATXLUSA-N D-xylopyranose Chemical compound O[C@@H]1COC(O)[C@H](O)[C@H]1O SRBFZHDQGSBBOR-IOVATXLUSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- PYMYPHUHKUWMLA-UHFFFAOYSA-N arabinose Natural products OCC(O)C(O)C(O)C=O PYMYPHUHKUWMLA-UHFFFAOYSA-N 0.000 description 1
- SRBFZHDQGSBBOR-UHFFFAOYSA-N beta-D-Pyranose-Lyxose Natural products OC1COC(O)C(O)C1O SRBFZHDQGSBBOR-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/5138—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of Mn and Mo, e.g. for the Moly-manganese method
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1258—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by using a substrate provided with a shape pattern, e.g. grooves, banks, resist pattern
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0568—Resist used for applying paste, ink or powder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/125—Inorganic compounds, e.g. silver salt
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Chemically Coating (AREA)
Abstract
Description
Verfahren zur Herstellung metallischer Schichten auf einem Grundkörpe r Die Erfindung betrifft ein Verfahren zur Herstellung von vorzugsweise hartlötfähigen, metallischen, strukturierten Schichten auf einem Grundkörper.Process for the production of metallic layers on a base body The invention relates to a process for the production of preferably brazeable, metallic, structured layers on a base body.
Bei einem bekannten Verfahren wird zunächst auf einen Grundkörper, der aus Halbleitermaterial oder aus einem elektrischen Isolator bestehen kann, eine oder mehrere Metallschichten aufgebracht. Dies kann dadurch geschehen, daß auf eine Siliciumscheibe eine als Haftschicht wirkende Titanschicht und auf diese eine den elektrischen Strom leitende Gold schicht aufgedampft werden. Auf diesen doppelten Metallfilm wird eine Fotoschicht aufgetragen, die entsprechend den herzustemenden Strukturen belichtet und entwickelt wird. Dann werden die Gold schicht und die Titanschicht außerhalb der verbliebenen Fotoschicht durch Ätzen entfernt. Schließlich wird die Photomaske abgetrennt.In a known method, a base body is first applied, which can consist of semiconductor material or an electrical insulator, a or several metal layers are applied. This can be done in that on a Silicon wafer a titanium layer acting as an adhesive layer and on this one the electroconductive gold layer are vapor-deposited. On these double Metal film is applied a photo layer, which corresponds to the to be manufactured Structures is exposed and developed. Then the gold layer and the titanium layer removed by etching outside the remaining photo layer. Eventually the Photomask separated.
Dieses Verfahren ist, da es mehrere voneinander unabhängige Arbeitsgänge aufweist, für die bereichsweise Herstellung von metallischen Schichten vor allem bei der Fertigung von integrierten Schaltkreisen technologisch aufwendig.This procedure is because there are several independent operations has, especially for the regional production of metallic layers technologically complex in the manufacture of integrated circuits.
Der vorliegenden Erfindung liegt daher die Aufgabe zugrunde, begrenzte metallische Schichten, die zudem hartlötfähig sein sollen, in möglichst wenigen Verfahrensschritten zu schaffen.The present invention is therefore based on the object of limited metallic layers, which should also be capable of brazing, in as few as possible To create procedural steps.
Diese Aufgabe wird erfindungsgemäß durch folgende Verfahrensschritte gelöst: å) Aufbringen einer Maskierungaschicht auf den Grundkörper, b) Entfernen der Maskierungsschicht von den Bereichen der Oberfläche des Grundkörpers, die mit der metallischen Schicht bedeckt werden sollen, c) Aufbringen einer mit einem Bindemittel versehenen, metallischen Lösung auf die Bereiche des Grundkörpers, die nicht von der Maskierungsschicht bedeckt werden, mit den Bedingungen, daß die Oberflächenspannung der Lösung kleiner ist als der Absolutbetrag der Grenzflächenspannung zwisehen Grundkörper und Lösung, daß die Oberflächenspannung der lösung größer ist, als die Grenzflächenspannung zwischen der Lösung ünd der Maskierungsschicht und daß die Grenzflächenspannung zwischen der Lösung und der Maskierungsschicht größer ist als null, d) Verdunsten des Lösungsmittels, e) Entfernen der Maskierungsschicht, wobei das Bindemittel nicht angegriffen wird.According to the invention, this object is achieved by the following process steps solved: å) application of a masking layer to the base body, b) removal of the masking layer from the areas of the surface of the base body that have the metallic layer are to be covered, c) applying one with a binder provided, metallic solution on the areas of the base body that are not from the masking layer are covered, with the conditions that the surface tension of the solution is smaller than the absolute amount of the interfacial tension between the base bodies and solution that the surface tension of the solution is greater than the interfacial tension between the solution and the masking layer and that the interfacial tension between the solution and the masking layer is greater than zero, d) evaporation of the solvent, e) removing the masking layer, whereby the binder is not is attacked.
Durch die Erfindung wird es ermöglicht, auf einfache Art eine metallische Schicht auf einem Grundkörper herzustellen.The invention makes it possible to produce a metallic one in a simple manner Produce layer on a base body.
Auf den mit einer Maskierungsschicht versehenen Grundkörper muß lediglich noch eine geeignete, mit einem Bindemittel versehene Lösung aufgebracht werden, die die angegebenen Bedingungen erfüllt. Als eine besonders vorteilhafte Lösung hat sich dabei eine Lösung von Lithiummolybdad in destilliertem Wasser erwiesen, während als Bindemittel zweckmäßigerweise Tylose Verwendung findet.All that has to be done on the base body provided with a masking layer is a suitable solution with a binding agent can also be applied, that meets the specified conditions. As a particularly advantageous solution a solution of lithium molybdad in distilled water has proven to be while Tylose is expediently used as a binder.
Durch Einhaltung der für die Oberflächenspannungen und Grenzflächenspannungen angegebenen Bedingungen wird erreicht, daß sich die Lösungs in den Löchern der Maskierungsschicht auf dem Grundkörper ansammelt, und daß die Maskierungsschicht unbenetzt bleibt. Diese Wirkung kann in einer Weiterbildung der Erfindung noch dadurch verstärkt werden, daß die Oberfläche der Maskierungsschicht durch Behandlung mit Silikonöl oder einem anderen Feuchtigkeit abstoßenden Mittel hydrophob gemacht wird.By adhering to the requirements for surface tension and interfacial tension specified conditions is achieved that the solution in the holes of the masking layer on the base body accumulates, and that the masking layer remains unwetted. These In a further development of the invention, the effect can be reinforced by that the surface of the masking layer by treatment with silicone oil or a other moisture repellant is rendered hydrophobic.
Das erfindungsgemäße Verfahren eignet sich besonders für die Herstellung mit Gleitbahnen auf einem Aluminiumoxid-Grundkörper. Grundsätzlich kann es jedoch auf jedem halbleitenden oder isolierenden, besonders keramischen, Material angewandt werden.The method according to the invention is particularly suitable for production with slideways on an aluminum oxide base. In principle, however, it can applied to any semiconducting or insulating, especially ceramic, material will.
Schließlich besteht noch eine Weiterbildung der Erfindung darin daß zur Herstellung der Maskierungsschicht eine fotoempfindliche Schicht oder eine Wachsschicht verwendet wird.Finally, a further development of the invention is that a photosensitive layer or a wax layer to produce the masking layer is used.
Diese zur Bildung der Maskierungsschicht angegebenen Schichten ermöglichen eine schnelle und genaue Herstelung der gew~unschten Maskenstruktur.These layers specified for forming the masking layer make it possible a fast and precise production of the desired mask structure.
Weitere Merkmale und Einzelheiten ergeben sich aus der nachfolgenden Beschreibung eines Ausführungsbeispiels anhand der Figuren.Further features and details emerge from the following Description of an embodiment based on the figures.
Es zeigen: Fig. 1: Einen Schnitt durch einen Grundkörper und eine auf diesem vorgesehene fotoempfindliche Schicht, Fig. 2: Den Gegenstand der Figur 1 nach Herstellung der gewünschten Maskierungsschicht, Fig. 3: Den Gegenstand der Figur 2 mit der aufgebrachten Lösung, Fig. 4: Den Gegenstand der Figur 3 nach dem Entfernen der Maskierungsschicht.They show: FIG. 1: A section through a base body and a photosensitive layer provided on this, Fig. 2: The object of the figure 1 after the production of the desired masking layer, FIG. 3: The object of Figure 2 with the applied solution, Fig. 4: The subject of Figure 3 after Removing the masking layer.
In den Figuren werden sich entsprechende Teile mit den gleichen Bezugszeichen versehen.In the figures, corresponding parts are given the same reference symbols Mistake.
Auf einen Grundkörper 1, der aus Aluminiumoxid (A1203) besteht, wird eine fotoempfindliche Schicht oder Maskierungsschicht 2 aufgebracht (Fig.1). Die gewünschte Struktur wird auf übliche Art durch Belichten und bereichsweises Entfernen der fotoempfindlichen Schicht 2 hergestellt, so daß in der fotoempfindlichen Schicht 2, wie in der Figur 2 dargestellt, Locher oder Gräben 3 entstehen.On a base body 1 made of aluminum oxide (A1203) is a photosensitive layer or masking layer 2 is applied (Fig.1). the The desired structure is created in the usual way by exposure and removal in certain areas of the photosensitive layer 2 made so that in the photosensitive layer 2, as shown in Figure 2, holes or trenches 3 arise.
Die derart behandelte fotoempfindliche Schicht 2 soll im weiteren als Maskierungsschicht 2 bezeichnet werden, da nun in ihr bereits die gewünschten Strukturen der noch herzustellenden metallischen Schichten enthalten sind.The photosensitive layer 2 treated in this way is intended in the following can be referred to as masking layer 2, since it already contains the desired Structures of the metallic layers still to be produced are included.
Anstelle einer fotoempfindlichen Schicht kann zur Herstellung der Maskierungsschicht 2, wie sie in der Figur 2 dargestellt ist, auch eine aus Wachs aufgedampfte Maske verwendet werden.Instead of a photosensitive layer, the Masking layer 2, as shown in FIG. 2, also made of wax vapor-deposited mask can be used.
Der mit der Maskierungsschicht 2 versehene Grundkörper 1 wird in eine mit Tylose als Bindemittel versehene Lösung von Lithiummolybdad (2 Li2O.MoO3) getaucht, oder mit dieser Lösung besprüht. Die Oberflächenspannung dieser Lösung ist kleiner als der Absolutbetrag der Grenzflächenspannung zwischen dem Grundkörper 1 und der Lösung. Dadurch wird eine vollständige Benetzung des Grundkörpers 1 erreicht.The base body 1 provided with the masking layer 2 is converted into a solution of lithium molybdad (2 Li2O.MoO3) with Tylose as a binding agent, immersed, or sprayed with this solution. The surface tension of this solution is lower as the absolute amount of the interfacial tension between the base body 1 and the Solution. As a result, complete wetting of the base body 1 is achieved.
Weiterhin ist die Oberflächenspannung dieser Lösung größer als die Grenzflächenspannung zwischen der MaskierutgE-schicht 2 und der Lösung, die ihrerseits größer als null ist. Dies bewirkt, daß die Maskierungsschicht 2 nicht benetzt wird. Dadurch sammelt sich die Lösung, wie in der Figur 3 dargestellt, in den Löchern oder Gräben 3 der Maskierungsschicht 2. Dieser Effekt wird noch dadurch erhöht, daß sich ein aus Keramik bestehender Grundkörper 1 leicht benetzt. Weiterhin kann die Wasser abstoßende Wirkung der Maskierungsschicht 2 noch dadurch verstärkt werden, daß deren Oberfläche mit einem geeigneten hydrophoben Mittel, wie Silikonöl, bestrichen wird.Furthermore, the surface tension of this solution is greater than that Interfacial tension between the MaskierutgE layer 2 and the solution, which in turn is greater than zero. This has the effect that the masking layer 2 is not wetted. As a result, the solution collects in the holes, as shown in FIG. 3 or trenches 3 of the masking layer 2. This effect is further increased by that a base body 1 made of ceramic is slightly wetted. Furthermore can the water-repellent effect of the masking layer 2 can be reinforced by that their surface is coated with a suitable hydrophobic agent, such as silicone oil will.
Nach dem Verdunsten des Lösungsmittels, also des destillierten Wassers1 wird das zurückgebliebene Lithiummolybdad hart und bildet die in der Figur 3 mit 4 bezeichneten metallischen Schichten. Das Bindemittel xylose bewirkt ein gutes Haften der metallischen Schichten 4 auf dem Grundkörper 1.After the solvent, i.e. the distilled water, has evaporated 1 the remaining lithium molybdad becomes hard and forms the one in FIG 4 designated metallic layers. The xylose binder does a good job Adhesion of the metallic layers 4 to the base body 1.
Wie in der Fig. 4 dargestellt, wird die Maskierungsschicht 2 durch ein geeignetes Lösungsmittel entfernt. Dieses Lösungsmittel darf dabei das Bindemittel der metallischen Schichten 4 nicht angreifen. Als geeignet hat sich hierfür Aceton erwiesen.As shown in FIG. 4, the masking layer 2 is through a suitable solvent removed. This solvent may be the binder the metallic layers 4 do not attack. Acetone has proven to be suitable for this proven.
Schließlich wird das Molybdänoxid der metallischen Schicht 2 zu Molybdän reduziert. Dann wird die metallische Schicht 2 in bekannter Weise in den Grundkörper 1 eingebrannt.Finally, the molybdenum oxide of the metallic layer 2 becomes molybdenum reduced. The metallic layer 2 is then inserted into the base body in a known manner 1 branded.
Die Erfindung ermöglicht die Herstellung sehr feiner und sehr genauer metallischer Schichten, die hartlötfähig sind, auf einem vorzugsweise aus keramischem Material bestehenden Grundkörper. Anwendungsmöglichkeiten bestehen beispielsweise bei der Fertigung von Leiterplatten, Halbleitergehäusens und für Anschlüsse bei der Flip-chip-Montage.The invention enables the manufacture to be very finer and very precise metallic layers that can be brazed, preferably made of ceramic Material existing base body. Possible applications exist, for example in the manufacture of printed circuit boards, semiconductor housings and for connections the flip-chip assembly.
8 Patentansprüche 4 Figuren8 claims 4 figures
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19712101945 DE2101945A1 (en) | 1971-01-15 | 1971-01-15 | Metallic coatings prodn - on semiconductor or dielectric substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19712101945 DE2101945A1 (en) | 1971-01-15 | 1971-01-15 | Metallic coatings prodn - on semiconductor or dielectric substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2101945A1 true DE2101945A1 (en) | 1972-07-20 |
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Application Number | Title | Priority Date | Filing Date |
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DE19712101945 Pending DE2101945A1 (en) | 1971-01-15 | 1971-01-15 | Metallic coatings prodn - on semiconductor or dielectric substrates |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2451485A1 (en) * | 1973-12-13 | 1975-06-19 | Ibm | METALIZATION METHOD OF UNFIRED CERAMIC MATERIAL |
-
1971
- 1971-01-15 DE DE19712101945 patent/DE2101945A1/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2451485A1 (en) * | 1973-12-13 | 1975-06-19 | Ibm | METALIZATION METHOD OF UNFIRED CERAMIC MATERIAL |
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