DE20300498U1 - Pressure sensor for aggressive chemical and explosion protected environments has monolithic ceramic body and membrane - Google Patents

Pressure sensor for aggressive chemical and explosion protected environments has monolithic ceramic body and membrane

Info

Publication number
DE20300498U1
DE20300498U1 DE20300498U DE20300498U DE20300498U1 DE 20300498 U1 DE20300498 U1 DE 20300498U1 DE 20300498 U DE20300498 U DE 20300498U DE 20300498 U DE20300498 U DE 20300498U DE 20300498 U1 DE20300498 U1 DE 20300498U1
Authority
DE
Germany
Prior art keywords
membrane
pressure sensor
ceramic body
cover plate
contact surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20300498U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huba Control AG
Original Assignee
Huba Control AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huba Control AG filed Critical Huba Control AG
Priority to DE20300498U priority Critical patent/DE20300498U1/en
Priority to NL1022776A priority patent/NL1022776C1/en
Priority to ITRM20030047 priority patent/ITRM20030047U1/en
Priority to FR0304588A priority patent/FR2849191B3/en
Publication of DE20300498U1 publication Critical patent/DE20300498U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Abstract

A pressure sensor (1) has a monolithic ceramic body (3) with integrated membrane (5) and Wheatstone bridge strain gauge pressure transducer (7) on the opposite side to the pressure (P) transmitting medium (27).

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (7)

1. Drucksensor (1) mit einem monolithischen Keramikkörper (3), einer Membran (5) und einer Verstärkerelektronikplatte (21), wobei sich die Membran (5) bei entsprechender Druckbeaufschlagung durch ein Medium durchzubiegen vermag und Umsetzungsmittel (7) trägt, die dazu bestimmt sind, die Durchbiegung der Membran in ein auswertbares Signal umzusetzen, dadurch gekennzeichnet, dass die Membran (5) in den Keramikkörper (3) integriert ist und die Umsetzungsmittel (7) auf ihrer dem Medium abgewandten Seite trägt.1. Pressure sensor ( 1 ) with a monolithic ceramic body ( 3 ), a membrane ( 5 ) and an amplifier electronics plate ( 21 ), the membrane ( 5 ) being able to bend through a medium when pressurized accordingly and carrying conversion means ( 7 ) that contribute to this are intended to convert the deflection of the membrane into an evaluable signal, characterized in that the membrane ( 5 ) is integrated in the ceramic body ( 3 ) and carries the conversion means ( 7 ) on its side facing away from the medium. 2. Drucksensor (1) gemäss Anspruch 1, zusätzlich enthaltend eine Deckplatte (9), wobei der Keramikkörper (3) und die Deckplatte (9) zusammen eine vakuumdichte Kammer ausbilden, dadurch gekennzeichnet, dass die Deckplatte (9) zwischen der Verstärkerelektronikplatte (21) und dem Keramikkörper (3) angeordnet ist, wobei die Deckplatte (9) mit einem ringförmigen Verbindungsmittel (11) an dem Keramikkörper (3) so befestigt ist, dass die vakuumdichte Kammer (13) durch die der Membran zugewandten Seite der Deckplatte (9) und der dem Medium abgewanden Seite der Membran (5) ausgebildet wird.2. Pressure sensor ( 1 ) according to claim 1, additionally containing a cover plate ( 9 ), the ceramic body ( 3 ) and the cover plate ( 9 ) together forming a vacuum-tight chamber, characterized in that the cover plate ( 9 ) between the amplifier electronics plate ( 21 ) and the ceramic body ( 3 ), the cover plate ( 9 ) being attached to the ceramic body ( 3 ) with an annular connecting means ( 11 ) such that the vacuum-tight chamber ( 13 ) passes through the side of the cover plate ( 9 ) and the side of the membrane ( 5 ) facing away from the medium is formed. 3. Drucksensor (1) gemäss Anspruch 2, dadurch gekennzeichnet, dass das Verbindungsmittel (11) zwischen der Deckplatte (9) und dem Keramikkörper (3) eine ringförmige Glaslotschicht ist. 3. Pressure sensor ( 1 ) according to claim 2, characterized in that the connecting means ( 11 ) between the cover plate ( 9 ) and the ceramic body ( 3 ) is an annular glass solder layer. 4. Drucksensor (1) gemäss Anspruch 2 oder 3, dadurch gekennzeichnet, dass die Deckplatte (9) membranseitig eine Vertiefung aufweist, die das Volumen der vakuumdichten Kammer (13) vergrössert.4. Pressure sensor ( 1 ) according to claim 2 or 3, characterized in that the cover plate ( 9 ) has a recess on the membrane side, which increases the volume of the vacuum-tight chamber ( 13 ). 5. Drucksensor (1) gemäss einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Umsetzungsmittel (7) über erste Leiterbahnen (29) radial mit ersten Kontaktflächen (19) verbunden sind, wobei die ersten Kontaktflächen (19)ausserhalb der Membran (5) auf dem Keramikkörper (3) angeordnet und durch das Verbindungsmittel (11) vollständig umgeben sind.5. Pressure sensor ( 1 ) according to one of claims 1 to 4, characterized in that the conversion means ( 7 ) via first conductor tracks ( 29 ) are radially connected to first contact surfaces ( 19 ), the first contact surfaces ( 19 ) outside the membrane ( 5 ) are arranged on the ceramic body ( 3 ) and are completely surrounded by the connecting means ( 11 ). 6. Drucksensor (1) gemäss einem der Ansprüche 2 bis 5, dadurch gekennzeichnet, dass die Deckplatte (9) radial ausserhalb der Membran (5) metallische Durchkontaktierungen (15) aufweist, wobei die Durchkontaktierungen (15) membranseitig mit den ersten Kontaktflächen verbundenen dritte Kontaktflächen (17) und der auf der der Verstärkerelektronikplatte zugewandten Seite vierte Kontaktflächen (23) aufweist, die über zweite Leiterbahnen (31) mit fünften Kontaktflächen (33) der Deckplatte (9) verbunden sind, wobei die fünften Kontaktflächen (33) ausserdem mit zweiten Kontaktflächen (25) der Verstärkerelektronikplatte (21) metallisch verbunden sind.6. Pressure sensor ( 1 ) according to one of claims 2 to 5, characterized in that the cover plate ( 9 ) radially outside of the membrane ( 5 ) has metallic vias ( 15 ), the vias ( 15 ) on the membrane side connected to the first contact surfaces third Contact surfaces ( 17 ) and on the side facing the amplifier electronics plate has fourth contact surfaces ( 23 ) which are connected via second conductor tracks ( 31 ) to fifth contact surfaces ( 33 ) of the cover plate ( 9 ), the fifth contact surfaces ( 33 ) also having second ones Contact surfaces ( 25 ) of the amplifier electronics board ( 21 ) are metallically connected. 7. Drucksensor (1) gemäss einem der Ansprüche 2 bis 6, dadurch gekennzeichnet, dass die Umsetzungs­ mittel (7) in einer Wheatstonschen Brücken­ schaltung angeordnete Dehnungsstreifen sind.7. Pressure sensor ( 1 ) according to one of claims 2 to 6, characterized in that the implementation means ( 7 ) in a Wheatstone bridge circuit are stretch marks.
DE20300498U 2002-12-18 2003-01-13 Pressure sensor for aggressive chemical and explosion protected environments has monolithic ceramic body and membrane Expired - Lifetime DE20300498U1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE20300498U DE20300498U1 (en) 2002-12-18 2003-01-13 Pressure sensor for aggressive chemical and explosion protected environments has monolithic ceramic body and membrane
NL1022776A NL1022776C1 (en) 2002-12-18 2003-02-25 Pressure sensor.
ITRM20030047 ITRM20030047U1 (en) 2002-12-18 2003-03-05 PRESSURE SENSOR.
FR0304588A FR2849191B3 (en) 2002-12-18 2003-04-11 PRESSURE SENSOR WITH CERAMIC BODY

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE20219718 2002-12-18
DE20300498U DE20300498U1 (en) 2002-12-18 2003-01-13 Pressure sensor for aggressive chemical and explosion protected environments has monolithic ceramic body and membrane

Publications (1)

Publication Number Publication Date
DE20300498U1 true DE20300498U1 (en) 2003-04-17

Family

ID=7978150

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20300498U Expired - Lifetime DE20300498U1 (en) 2002-12-18 2003-01-13 Pressure sensor for aggressive chemical and explosion protected environments has monolithic ceramic body and membrane

Country Status (1)

Country Link
DE (1) DE20300498U1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2098845A1 (en) 2008-03-08 2009-09-09 Huba Control Ag Ceramic pressure sensor
EP2230489A1 (en) 2009-03-21 2010-09-22 Huba Control Ag Pressure sensor for exhaust gas recirculation systems of combustion motors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2098845A1 (en) 2008-03-08 2009-09-09 Huba Control Ag Ceramic pressure sensor
EP2230489A1 (en) 2009-03-21 2010-09-22 Huba Control Ag Pressure sensor for exhaust gas recirculation systems of combustion motors

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Legal Events

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R207 Utility model specification

Effective date: 20030522

R021 Search request validly filed

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R150 Term of protection extended to 6 years

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R151 Term of protection extended to 8 years

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R152 Term of protection extended to 10 years

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