DE202022105660U1 - Photoacoustic gas sensor, in particular for detecting methane - Google Patents

Photoacoustic gas sensor, in particular for detecting methane Download PDF

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Publication number
DE202022105660U1
DE202022105660U1 DE202022105660.9U DE202022105660U DE202022105660U1 DE 202022105660 U1 DE202022105660 U1 DE 202022105660U1 DE 202022105660 U DE202022105660 U DE 202022105660U DE 202022105660 U1 DE202022105660 U1 DE 202022105660U1
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Germany
Prior art keywords
measuring chamber
gas
window
laser beam
housing
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DE202022105660.9U
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German (de)
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Sensirion AG
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Sensirion AG
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Priority to DE202022105660.9U priority Critical patent/DE202022105660U1/en
Publication of DE202022105660U1 publication Critical patent/DE202022105660U1/en
Priority to PCT/EP2023/077930 priority patent/WO2024074728A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/064—Stray light conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/121—Correction signals
    • G01N2201/1211—Correction signals for temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/121—Correction signals
    • G01N2201/1214—Correction signals for humidity

Abstract

Fotoakustischer Gassensor (1) zur Bestimmung eines Wertes, der das Vorhandensein oder die Konzentration einer Komponente in einem Gas anzeigt, aufweisend:- eine Messkammer (2) zur Aufnahme des Gases, die eine Öffnung (3) aufweist, die durch eine gasdurchlässige Membran (4) verschlossen ist, damit das Gas durch die Öffnung (3) in die Messkammer (2) eintreten kann, wobei die Messkammer (2) an einem ersten Ende (2a) der Messkammer (2) durch ein Fenster (5) verschlossen ist,- einen mit der Messkammer (2) verbundenen Kanal (6),- ein Mikrofon (7), das den Kanal (6) auf einer Seite begrenzt, wobei das Mikrofon (7) über den Kanal (6) in akustischer Verbindung mit der Messkammer (2) steht,- ein Lichtquellenmodul (8) mit einem hermetisch verschlossenem Gehäuse (9) und einem Laser (10), der in dem Gehäuse (9) angeordnet und so konfiguriert ist, dass er einen Laserstrahl (11) erzeugt, wobei das Lichtquellenmodul (8) weiterhin eine Kollimationsoptik aufweist, die in dem Gehäuse (9) angeordnet und so konfiguriert ist, dass sie den Laserstrahl (11) kollimiert, und wobei das Gehäuse (9) ein Modulfenster (12) aufweist, das die Messkammer (2) an einem dem ersten Ende (2a) gegenüberliegenden zweiten Ende (2b) der Messkammer (2) begrenzt und durch das der kollimierte Laserstrahl (11) in die Messkammer (2) einstrahlbar ist, und- eine hinter dem Fenster (5) angeordnete Strahlenfalle (16) zum Absorbieren des Laserstrahls (11) nach einem Durchgang durch die Messkammer (2) und das Fenster (5).Photoacoustic gas sensor (1) for determining a value indicative of the presence or concentration of a component in a gas, comprising:- a measuring chamber (2) for receiving the gas, having an opening (3) through a gas-permeable membrane ( 4) is closed so that the gas can enter the measuring chamber (2) through the opening (3), the measuring chamber (2) being closed at a first end (2a) of the measuring chamber (2) by a window (5), - a channel (6) connected to the measuring chamber (2), - a microphone (7) delimiting the channel (6) on one side, the microphone (7) being in acoustic communication with the measuring chamber via the channel (6). (2),- a light source module (8) having a hermetically sealed housing (9) and a laser (10) arranged in the housing (9) and configured to generate a laser beam (11), the Light source module (8) further comprises collimation optics, which are arranged in the housing (9) and s o is configured such that it collimates the laser beam (11), and wherein the housing (9) has a module window (12) which opens the measuring chamber (2) at a second end (2b) of the measuring chamber (2) opposite the first end (2a) 2) and through which the collimated laser beam (11) can be radiated into the measuring chamber (2), and - a beam trap (16) arranged behind the window (5) for absorbing the laser beam (11) after it has passed through the measuring chamber (2 ) and the window (5).

DE202022105660.9U 2022-10-07 2022-10-07 Photoacoustic gas sensor, in particular for detecting methane Active DE202022105660U1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE202022105660.9U DE202022105660U1 (en) 2022-10-07 2022-10-07 Photoacoustic gas sensor, in particular for detecting methane
PCT/EP2023/077930 WO2024074728A1 (en) 2022-10-07 2023-10-09 Photo-acoustic gas sensor, particularly for detecting methane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202022105660.9U DE202022105660U1 (en) 2022-10-07 2022-10-07 Photoacoustic gas sensor, in particular for detecting methane

Publications (1)

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DE202022105660U1 true DE202022105660U1 (en) 2023-01-24

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DE202022105660.9U Active DE202022105660U1 (en) 2022-10-07 2022-10-07 Photoacoustic gas sensor, in particular for detecting methane

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WO (1) WO2024074728A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116930091A (en) * 2023-09-14 2023-10-24 武汉理通微芬科技有限公司 Gas analysis device based on non-resonance photoacoustic cell

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3938365A (en) 1973-11-29 1976-02-17 Massachusetts Institute Of Technology Detecting trace gaseous species acoustically in response to radiation from an intense light source
EP3550286A1 (en) 2019-04-17 2019-10-09 Sensirion AG Photoacoustic gas sensor device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE266861T1 (en) * 1995-09-04 2004-05-15 Siemens Building Tech Ag PHOTOACOUSTIC GAS SENSOR AND USE THEREOF
US7710566B2 (en) * 2005-05-27 2010-05-04 Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The Desert Research Institute Method and apparatus for photoacoustic measurements
EP4019960A1 (en) * 2020-12-23 2022-06-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gas measuring cell for a photoacoustic sensor and method for detecting a property of a sample gas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3938365A (en) 1973-11-29 1976-02-17 Massachusetts Institute Of Technology Detecting trace gaseous species acoustically in response to radiation from an intense light source
EP3550286A1 (en) 2019-04-17 2019-10-09 Sensirion AG Photoacoustic gas sensor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116930091A (en) * 2023-09-14 2023-10-24 武汉理通微芬科技有限公司 Gas analysis device based on non-resonance photoacoustic cell
CN116930091B (en) * 2023-09-14 2023-12-12 武汉理通微芬科技有限公司 Gas analysis device based on non-resonance photoacoustic cell

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Publication number Publication date
WO2024074728A1 (en) 2024-04-11

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