DE20106831U1 - Fine positioning device - Google Patents

Fine positioning device

Info

Publication number
DE20106831U1
DE20106831U1 DE20106831U DE20106831U DE20106831U1 DE 20106831 U1 DE20106831 U1 DE 20106831U1 DE 20106831 U DE20106831 U DE 20106831U DE 20106831 U DE20106831 U DE 20106831U DE 20106831 U1 DE20106831 U1 DE 20106831U1
Authority
DE
Germany
Prior art keywords
lever mechanism
central beam
fine positioning
drive element
positioning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20106831U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems Wetzlar GmbH
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Microsystems Wetzlar GmbH, Leica Microsystems CMS GmbH filed Critical Leica Microsystems Wetzlar GmbH
Priority to DE20106831U priority Critical patent/DE20106831U1/en
Publication of DE20106831U1 publication Critical patent/DE20106831U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (10)

1. Vorrichtung zur Feinpositionierung mit einem Doppelparallelfeder-Element, das einen Rahmen, zwei Seitenbalken und einen Mittelbalken aufweist, wobei der Mittelbalken über mindestens je zwei Biegesteege beweglich an den Seitenbalken befestigt ist, die über mindestens je zwei weitere Biegestege beweglich an dem Rahmen befestigt sind, dadurch gekennzeichnet, dass ein Antriebselement vorgesehen ist, das über einen Hebelmechanismus den Mittelbalken bewegt.1. Device for fine positioning with a double parallel spring element, which has a frame, two side beams and a central beam, the central beam being movably attached to the side beams via at least two bending webs which are movably attached to the frame via at least two further bending webs , characterized in that a drive element is provided which moves the central beam via a lever mechanism. 2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass das Doppelparallelfeder-Element einstückig gefertigt ist.2. Device according to claim 1, characterized in that that the double parallel spring element is made in one piece. 3. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die Vorrichtung ein Federelement und/oder ein Dämpfungselement aufweist.3. Device according to claim 1, characterized in that the device is a spring element and / or a damping element having. 4. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass das Antriebselement mindestens ein Piezoelement beinhaltet.4. The device according to claim 1, characterized in that the drive element contains at least one piezo element. 5. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass das der Hebelmechanismus mindestens ein Gelenk beinhaltet.5. The device according to claim 1, characterized in that the lever mechanism includes at least one joint. 6. Vorrichtung nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass das der Hebelmechanismus ein Kreuzfedergelenk beinhaltet.6. Device according to one of claims 1 to 5, characterized characterized that the lever mechanism is a cross spring joint includes. 7. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass der Hebelmechanismus eine Übersetzung von 1 zu 5 aufweist. 7. The device according to claim 1, characterized in that that the lever mechanism has a ratio of 1 to 5.   8. Vorrichtung nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass das Antriebselement primär eine im Wesentlichen senkrecht zum Mittelbalken angeordnet ist.8. Device according to one of claims 1 to 7, characterized in that the drive element is primarily a substantially perpendicular to the Middle bar is arranged. 9. Autofokussystem, dadurch gekennzeichnet, dass das Autofokussystem eine Vorrichtung nach einem der Ansprüche 1 bis 8, beinhaltet.9. autofocus system, characterized in that the Autofocus system a device according to one of claims 1 to 8, includes. 10. Koordinaten-Meßgerät, dadurch gekennzeichnet, dass das Koordinaten-Meßgerät eine Vorrichtung nach einem der Ansprüche 1 bis 8, beinhaltet.10. Coordinate measuring device, characterized in that the coordinate measuring device is a device according to one of claims 1 to 8, includes.
DE20106831U 2001-04-19 2001-04-19 Fine positioning device Expired - Lifetime DE20106831U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20106831U DE20106831U1 (en) 2001-04-19 2001-04-19 Fine positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20106831U DE20106831U1 (en) 2001-04-19 2001-04-19 Fine positioning device

Publications (1)

Publication Number Publication Date
DE20106831U1 true DE20106831U1 (en) 2001-09-27

Family

ID=7955982

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20106831U Expired - Lifetime DE20106831U1 (en) 2001-04-19 2001-04-19 Fine positioning device

Country Status (1)

Country Link
DE (1) DE20106831U1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10248426A1 (en) * 2002-10-17 2004-05-06 Deutsches Zentrum für Luft- und Raumfahrt e.V. Linear Stepper Motor
DE102011121928B4 (en) * 2011-08-01 2015-03-05 Physik Instrumente (Pi) Gmbh & Co. Kg Arrangement for operating a dynamic nanofocusing system
EP3428708A1 (en) * 2017-07-10 2019-01-16 FZMB GmbH Forschungszentrum für Medizintechnik und Biotechnologie Device for moving an optical element along the optical axis of a microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10248426A1 (en) * 2002-10-17 2004-05-06 Deutsches Zentrum für Luft- und Raumfahrt e.V. Linear Stepper Motor
DE102011121928B4 (en) * 2011-08-01 2015-03-05 Physik Instrumente (Pi) Gmbh & Co. Kg Arrangement for operating a dynamic nanofocusing system
US9557518B2 (en) 2011-08-01 2017-01-31 Physik Instrumente (Pi) Gmbh & Co. Kg Method and arrangement for operating a dynamic nano focusing system
EP3428708A1 (en) * 2017-07-10 2019-01-16 FZMB GmbH Forschungszentrum für Medizintechnik und Biotechnologie Device for moving an optical element along the optical axis of a microscope

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20011031

R150 Term of protection extended to 6 years

Effective date: 20040511

R081 Change of applicant/patentee

Owner name: LEICA MICROSYSTEMS CMS GMBH, DE

Free format text: FORMER OWNER: LEICA MICROSYSTEMS WETZLAR GMBH, 35578 WETZLAR, DE

Effective date: 20051018

R151 Term of protection extended to 8 years

Effective date: 20070522

R152 Term of protection extended to 10 years

Effective date: 20090506

R071 Expiry of right