DE20023029U1 - Linear motion device with laser position measuring device - Google Patents

Linear motion device with laser position measuring device

Info

Publication number
DE20023029U1
DE20023029U1 DE20023029U DE20023029U DE20023029U1 DE 20023029 U1 DE20023029 U1 DE 20023029U1 DE 20023029 U DE20023029 U DE 20023029U DE 20023029 U DE20023029 U DE 20023029U DE 20023029 U1 DE20023029 U1 DE 20023029U1
Authority
DE
Germany
Prior art keywords
rotor
linear motion
motion device
reflector
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20023029U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosch Rexroth AG
Original Assignee
Rexroth Star GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rexroth Star GmbH filed Critical Rexroth Star GmbH
Priority to DE20023029U priority Critical patent/DE20023029U1/en
Priority claimed from DE2000131687 external-priority patent/DE10031687A1/en
Publication of DE20023029U1 publication Critical patent/DE20023029U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/58—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02052—Protecting, e.g. shock absorbing, arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (13)

1. Linearbewegungseinrichtung (10; 110; 210), umfassend:
  • - ein auf einer Basis (14) angeordnetes Führungselement (16; 216) mit einer Längsachse (A),
  • - einen auf dem Führungselement (16; 216) in Richtung dessen Längsachse (A) längsbeweglich abgestützten Läufer (16; 116; 216) und
  • - eine die Position des Läufers (16; 116; 216) relativ zum Führungselement (12; 212) erfassende Positionsmesseinrich­ tung (18) mit einer Lasereinheit (20) und einem am Läufer (16; 116; 216) angeordneten Reflektor (24; 124; 224),
dadurch gekennzeichnet, dass der Reflektor (24; 124; 224) am bzw. im Läufer (16; 116; 216) versenkt angeordnet ist.A linear motion device ( 10 ; 110 ; 210 ) comprising:
  • a guide element ( 16 ; 216 ) arranged on a base ( 14 ) with a longitudinal axis (A),
  • - One on the guide element ( 16 ; 216 ) in the direction of its longitudinal axis (A) longitudinally supported rotor ( 16 ; 116 ; 216 ) and
  • - A position of the rotor ( 16 ; 116 ; 216 ) relative to the guide element ( 12 ; 212 ) detecting Positionmesseinrich device ( 18 ) with a laser unit ( 20 ) and one on the rotor ( 16 ; 116 ; 216 ) arranged reflector ( 24 ; 124 ; 224 ),
characterized in that the reflector ( 24 ; 124 ; 224 ) is sunk on or in the rotor ( 16 ; 116 ; 216 ). 2. Linearbewegungseinrichtung nach Anspruch 1, dadurch gekennzeichnet, dass der Reflektor (24; 124; 224) in einer Ausnehmung (16b; 116b; 216b) des Läufers (16; 116; 216) ange­ ordnet ist, welche vorzugsweise in einer zur Längsachse (A) des Führungselements (12; 212) im Wesentlichen orthogonal verlaufen­ den Endfläche (16a; 116a; 216a) des Läufers (16; 116; 216) vorgesehen ist.2. Linear motion device according to claim 1, characterized in that the reflector ( 24 ; 124 ; 224 ) in a recess ( 16 b; 116 b; 216 b) of the rotor ( 16 ; 116 ; 216 ) is arranged, which is preferably in a The end face ( 16 a; 116 a; 216 a) of the rotor ( 16 ; 116 ; 216 ) is provided essentially orthogonal to the longitudinal axis (A) of the guide element ( 12 ; 212 ). 3. Linearbewegungseinrichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Ausnehmung (16b; 116b; 216b) bei der Herstellung des Läufers (16; 116; 216) in diesen eingeformt ist.3. Linear motion device according to claim 2, characterized in that the recess ( 16 b; 116 b; 216 b) is molded into the rotor ( 16 ; 116 ; 216 ) during manufacture. 4. Linearbewegungseinrichtung nach Anspruch 2, dadurch gekennzeichnet, dass die Ausnehmung (16b; 116b; 216b) nachträglich in den Läufer (16; 116; 216) eingebracht ist. 4. Linear motion device according to claim 2, characterized in that the recess ( 16 b; 116 b; 216 b) is subsequently introduced into the rotor ( 16 ; 116 ; 216 ). 5. Linearbewegungseinrichtung nach einem der Ansprüche 2 bis 4, dadurch gekennzeichnet, dass die Ausnehmung (16b; 216b) ein Sackloch ist.5. Linear movement device according to one of claims 2 to 4, characterized in that the recess ( 16 b; 216 b) is a blind hole. 6. Linearbewegungseinrichtung nach einem der Ansprüche 2 bis 4, dadurch gekennzeichnet, dass die Ausnehmung (116b) wenigstens eine zur Längsrichtung (A) im Wesentlichen parallel verlaufende offene Seite (116 g) aufweist.6. Linear movement device according to one of claims 2 to 4, characterized in that the recess ( 116 b) has at least one open side (116 g) running essentially parallel to the longitudinal direction (A). 7. Linearbewegungseinrichtung nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass der Reflektor (24; 124; 224) bei der Herstellung des Läufers (16; 116; 216) in diesem ausgebildet ist.7. Linear motion device according to one of claims 1 to 6, characterized in that the reflector ( 24 ; 124 ; 224 ) is formed in the manufacture of the rotor ( 16 ; 116 ; 216 ) in this. 8. Linearbewegungseinrichtung nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass der Reflektor (24; 124; 224) nach­ träglich in der Ausnehmung (16b; 116b; 216b) angeordnet ist.8. Linear movement device according to one of claims 1 to 6, characterized in that the reflector ( 24 ; 124 ; 224 ) is later arranged in the recess ( 16 b; 116 b; 216 b). 9. Linearbewegungseinrichtung nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass der Läufer (116; 116; 216) als Guss- oder Spritzgussteil aus Kunststoff gefertigt ist, beispielsweise faserverstärktem Kunststoff, vorzugsweise glasfaser-verstärktem Kunststoff (GFK) oder kohlefaser-verstärktem Kunststoff (CFK).9. Linear motion device according to one of claims 1 to 8, characterized in that the rotor ( 116 ; 116 ; 216 ) is made as a cast or injection-molded part made of plastic, for example fiber-reinforced plastic, preferably glass fiber reinforced plastic (GRP) or carbon fiber reinforced Plastic (CFRP). 10. Linearbewegungseinrichtung nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Lasereinheit (18) eine Auswerte­ einheit (30) zum Auswerten der reflektierten Laserstrahlung (R) umfasst.10. Linear movement device according to one of claims 1 to 9, characterized in that the laser unit ( 18 ) comprises an evaluation unit ( 30 ) for evaluating the reflected laser radiation (R). 11. Linearbewegungseinrichtung nach Anspruch 10, dadurch gekennzeichnet, dass die Auswerteeinheit (30) eine Korrektureinheit zur Berücksichtigung von Umgebungseinflüssen umfasst. 11. Linear motion device according to claim 10, characterized in that the evaluation unit ( 30 ) comprises a correction unit for taking environmental influences into account. 12. Linearbewegungseinrichtung nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass im Bereich der Austrittsöffnung der Laserstrahlung (L) oder/und im Bereich des Reflektors (24) eine Schutzvorrichtung (28), vorzugsweise in Form eines Rohrs, vorge­ sehen ist.12. Linear motion device according to one of claims 1 to 11, characterized in that in the region of the outlet opening of the laser radiation (L) and / or in the region of the reflector ( 24 ), a protective device ( 28 ), preferably in the form of a tube, is provided. 13. Linearbewegungseinrichtung nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, dass eine Vorrichtung zum Aufweiten der von der Lasereinheit (18) emittierten Laserstrahlung (L) vorgesehen ist.13. Linear motion device according to one of claims 1 to 12, characterized in that a device for expanding the laser radiation (L) emitted by the laser unit ( 18 ) is provided.
DE20023029U 2000-06-29 2000-06-29 Linear motion device with laser position measuring device Expired - Lifetime DE20023029U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20023029U DE20023029U1 (en) 2000-06-29 2000-06-29 Linear motion device with laser position measuring device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE20023029U DE20023029U1 (en) 2000-06-29 2000-06-29 Linear motion device with laser position measuring device
DE2000131687 DE10031687A1 (en) 2000-06-29 2000-06-29 Linear motion device with laser measurement equipment e.g. glass dimension measuring scale, has inner bore on movable runner for accommodating laser beam reflector

Publications (1)

Publication Number Publication Date
DE20023029U1 true DE20023029U1 (en) 2002-11-21

Family

ID=26006227

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20023029U Expired - Lifetime DE20023029U1 (en) 2000-06-29 2000-06-29 Linear motion device with laser position measuring device

Country Status (1)

Country Link
DE (1) DE20023029U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2572823A1 (en) * 2011-09-20 2013-03-27 Mitutoyo Corporation Precision feeding device with laser interferometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2572823A1 (en) * 2011-09-20 2013-03-27 Mitutoyo Corporation Precision feeding device with laser interferometer
US9227286B2 (en) 2011-09-20 2016-01-05 Mitutoyo Corporation Precision feeding device and precision transfer equipment

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20030102

R150 Term of protection extended to 6 years

Effective date: 20030610

R081 Change of applicant/patentee

Owner name: BOSCH REXROTH MECHATRONICS GMBH, DE

Free format text: FORMER OWNER: REXROTH STAR GMBH, 97424 SCHWEINFURT, DE

Effective date: 20060125

R151 Term of protection extended to 8 years

Effective date: 20060825

R152 Term of protection extended to 10 years

Effective date: 20080911

R071 Expiry of right