DE19623749A1 - Laser rays control method in profiling operation for eye surgery - Google Patents

Laser rays control method in profiling operation for eye surgery

Info

Publication number
DE19623749A1
DE19623749A1 DE19623749A DE19623749A DE19623749A1 DE 19623749 A1 DE19623749 A1 DE 19623749A1 DE 19623749 A DE19623749 A DE 19623749A DE 19623749 A DE19623749 A DE 19623749A DE 19623749 A1 DE19623749 A1 DE 19623749A1
Authority
DE
Germany
Prior art keywords
lsbh
laser beam
called
beam profile
prisms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19623749A
Other languages
German (de)
Inventor
Vladimir Prof Dr Semchishen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19623749A priority Critical patent/DE19623749A1/en
Publication of DE19623749A1 publication Critical patent/DE19623749A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0043—Inhomogeneous or irregular arrays, e.g. varying shape, size, height
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00814—Laser features or special beam parameters therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F2009/00861—Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872—Cornea

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Ophthalmology & Optometry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Surgery (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The optical light shaping beam homogeniser (LSBH) microlens plate is formed with a multitude of concave lenses by lithography or etching processes. A laser beam projected through the plate and a convex lens is able to profile an excising operation, for example on the cornea of an eye. The microlens formation is generated by lithography or etching and consists of a variety of diameters (D) and separation (T) according, for example, to a Gaussian distribution.

Description

Stand der TechnikState of the art

Bisher erfolgt die Bearbeitung von Ober­ flächen, z. B. der Augenhornhaut, durch einen zuvor homogenisierten Laserstrahl, der über eine sich öffnende Blende für die sphärische Abtragung aufbereitet wurde. Andere Verfahren nutzen einen Schlitz oder Fleck der durch Scansysteme die sphärische Abtragung bewirkt.So far, processing has been carried out by waiters surfaces, e.g. B. the cornea by one previously homogenized laser beam, the via an opening aperture for the spherical ablation has been prepared. Other methods use a slot or Spot of spherical by scanning systems Removal causes.

Kritik des Standes der TechnikCritique of the state of the art

Bei dem Blendenverfahren wird durch die notwendige Homogenisierung des Laserstrah­ les sehr viel Leistung des Lasers nutzlos vernichtet. Nachteil des Scansystems sind sehr lange Behandlungszeiten.In the aperture process, the necessary homogenization of the laser beam les very much power of the laser useless destroyed. Disadvantages of the scanning system are very long treatment times.

Problemproblem

Der Erfindung liegt das Problem zugrunde, sowohl die benötigte Laserleistung zu re­ duzieren, als auch die Behandlungszeiten zu verringern und den optischen Aufwand zu reduzieren.The invention is based on the problem to re both the required laser power reduce, as well as the treatment times to reduce and the visual effort to reduce.

Erzielbare VorteileAchievable advantages

Die Behandlung erfolgt in sehr kurzer Zeit und entlastet den Patienten. Der benötigte Laser kann wesentlich leistungsschwä­ cher sein, als die bisher verwendeten. Da sich keine Teile während der Behand­ lung mehr im Strahlengang bewegen, ist die Steuerung einfacher und natürlich auch extrem störsicher. The treatment takes place in a very short time and relieves the patient. The one needed Laser can be significantly underperforming be more than the previously used. Since there are no parts during the treatment move more in the beam path is the Control easier and of course also extremely interference-free.  

Beschreibung des AusführungsbeispielsDescription of the embodiment

In der Oberfläche einer planparallelen Platte wird mittels Lithografie und Ätzver­ fahren eine Mikrolinsenanordnung aufge­ bracht (Bild 1). Ihre Durchmesser D und Ab­ stände T sind diskrete Beträge i(D) und i(T) mit i = 0, +/-1, +/-2, . . ., +/-N. Die An­ ordnung der Mikrolinsen folgt dem gefor­ derten Verteilungsgesetz, z. B. der GAUSS- Verteilung. Die anschließende Politur er­ gibt das Höhenprofil H (Bild 2a, b, c, d). Dieser Prozeß bestimmt den Divergenswinkel des LSBH-Elementes. Bild 3 zeigt die Auf­ sicht eines LSBH-Elementes.A microlens array is applied to the surface of a plane-parallel plate by means of lithography and etching processes ( Figure 1). Their diameter D and from stands T are discrete amounts i (D) and i (T) with i = 0, +/- 1, +/- 2,. . ., +/- N. The arrangement of the microlenses follows the required distribution law, e.g. B. the GAUSS distribution. The subsequent polishing gives the height profile H ( Fig. 2a, b, c, d). This process determines the divergent angle of the LSBH element. Figure 3 shows the top view of an LSBH element.

Ein Ausführungsbeispiel der Erfindung ist in den Zeichnungen 1 bis 3 dargestellt.An embodiment of the invention is shown in the drawings 1 to 3.

Es zeigt auf den Seiten 5 und 6:It shows on pages 5 and 6:

Abb. 1 Aufsicht der lithografischen Maske, Fig. 1 top view of the lithographic mask,

Abb. 2a, b, c, d die Wirkung der Politur. Fig. 2a, b, c, d the effect of the polish.

Claims (2)

1. Eine Optik zur Profilierung von Laser­ strahlen, insbesondere von Excimerlasern, hier Lichtstrahlformung und Homogenisator (Light Shaping Beam Homogenizer: LSBH) ge­ nannt, dadurch gekennzeichnet, daß das recht­ eckige Laserstrahlprofil von einer Mikro­ senkombination auf einer einzigen Glas­ platte geformt und homogenisiert wird. Das LSBH-Element besteht aus einer irre­ gulären Anordnung von Mikrolinsen. Ihre geometrische Anordnung und ihre Durchmes­ ser folgen einem geforderten Verteilungs­ gesetz: z. B. einer GAUSS-Verteilung. Das durch das LSBH-Element geformte Laser­ strahlprofil wird mit einer Sammellinse auf das zu bearbeitende Objekt reell abge­ bildet. Hierbei bestimmt die Brennweite der Sammellinse den Druchmesser des geform­ ten Strahlprofiles.1. An optics for profiling lasers, in particular excimer lasers, here called light beam shaping and homogenizer (Light Shaping Beam Homogenizer: LSBH) called ge, characterized in that the rectangular laser beam profile is shaped and homogenized by a micro sink combination on a single glass plate . The LSBH element consists of an irregular arrangement of microlenses. Their geometric arrangement and their diameters follow a required distribution law: z. B. a GAUSS distribution. The laser beam profile formed by the LSBH element is actually imaged with a converging lens on the object to be processed. Here, the focal length of the converging lens determines the diameter of the shaped beam profile. 2. Die abbildende Sammellinse aus 1. kann auch durch ein Linsensystem oder ein anamorphotisches Prismenpaar ersetzt wer­ den, dadurch gekennzeichnet, daß die Abbildung des durch den LSBH geformten Laserstrahl­ profiles durch eine Linsenkombination mit positiver Brennweite oder auch durch an­ amorphotische Prismenpaare, BREWSTER-Fern­ rohr genannt, bewirkt wird.2. The imaging lens from 1. can also through a lens system or a anamorphic pair of prisms replaced who the, characterized in that the figure of the laser beam formed by the LSBH profiles through a combination of lenses with positive focal length or by amorphous pairs of prisms, BREWSTER-Fern called pipe, is effected.
DE19623749A 1996-06-14 1996-06-14 Laser rays control method in profiling operation for eye surgery Ceased DE19623749A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19623749A DE19623749A1 (en) 1996-06-14 1996-06-14 Laser rays control method in profiling operation for eye surgery

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19623749A DE19623749A1 (en) 1996-06-14 1996-06-14 Laser rays control method in profiling operation for eye surgery

Publications (1)

Publication Number Publication Date
DE19623749A1 true DE19623749A1 (en) 1997-05-07

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DE19623749A Ceased DE19623749A1 (en) 1996-06-14 1996-06-14 Laser rays control method in profiling operation for eye surgery

Country Status (1)

Country Link
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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000010049A1 (en) * 1998-08-13 2000-02-24 Asclepion-Meditec Ag Medical hand piece for a laser radiation source
WO2000028910A1 (en) * 1998-11-12 2000-05-25 Asclepion-Meditec Ag Dermatological hand piece
DE19746483C5 (en) * 1997-10-22 2005-02-24 Asclepion-Meditec Ag Device for shaping optical lenses by material removal
EP1540409A2 (en) * 2002-09-20 2005-06-15 Corning Incorporated Random microlens array for optical beam shaping and homogenization
WO2006017543A1 (en) 2004-08-06 2006-02-16 Visx, Incorporated Lenslet array for beam homogenization
DE102005019257A1 (en) * 2005-04-26 2006-11-16 Carl Zeiss Jena Gmbh Optics for profile shaping of radiation
EP1580579A3 (en) * 2004-03-24 2007-06-13 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer and laser irradiation apparatus
DE102006047941A1 (en) * 2006-10-10 2008-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for homogenizing radiation with non-regular microlens arrays
CN104865782A (en) * 2014-02-20 2015-08-26 卡西欧计算机株式会社 Light source unit including laser diodes as light sources and microlens array and projector
US9352415B2 (en) 2005-02-15 2016-05-31 Carl Zeiss Meditec Ag Method for generating an ablation program, method for ablating a body and means for carrying out said method
US10816155B2 (en) 2016-09-23 2020-10-27 Carl Zeiss Jena Gmbh Lighting device for a vehicle
US11537078B2 (en) 2016-09-23 2022-12-27 Carl Zeiss Jena Gmbh Lighting device for vehicles

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19746483C5 (en) * 1997-10-22 2005-02-24 Asclepion-Meditec Ag Device for shaping optical lenses by material removal
EP1514633A3 (en) * 1997-10-22 2005-05-11 Carl Zeiss Meditec AG Device for shaping objects
US7859684B2 (en) 1997-10-22 2010-12-28 Carl Zeiss Meditec Ag Object figuring device
US7128737B1 (en) 1997-10-22 2006-10-31 Carl Zeiss Meditec Ag Object figuring device
US7545515B2 (en) 1997-10-22 2009-06-09 Carl Zeiss Meditec Ag Object shaping device
WO2000010049A1 (en) * 1998-08-13 2000-02-24 Asclepion-Meditec Ag Medical hand piece for a laser radiation source
US6537270B1 (en) 1998-08-13 2003-03-25 Asclepion-Meditec Ag Medical hand piece for a laser radiation source
WO2000028910A1 (en) * 1998-11-12 2000-05-25 Asclepion-Meditec Ag Dermatological hand piece
EP1540409A2 (en) * 2002-09-20 2005-06-15 Corning Incorporated Random microlens array for optical beam shaping and homogenization
EP1540409A4 (en) * 2002-09-20 2008-08-06 Corning Inc Random microlens array for optical beam shaping and homogenization
EP1580579A3 (en) * 2004-03-24 2007-06-13 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer and laser irradiation apparatus
US7486856B2 (en) 2004-03-24 2009-02-03 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer and laser irradiation apparatus
EP1779179A4 (en) * 2004-08-06 2012-01-25 Amo Mfg Usa Llc Lenslet array for beam homogenization
EP1779179A1 (en) * 2004-08-06 2007-05-02 Visx, Incorporated Lenslet array for beam homogenization
WO2006017543A1 (en) 2004-08-06 2006-02-16 Visx, Incorporated Lenslet array for beam homogenization
US10960491B2 (en) 2005-02-15 2021-03-30 Carl Zeiss Meditec Ag Method for generating an ablation program, method for ablating a body and means for carrying out said method
US9352415B2 (en) 2005-02-15 2016-05-31 Carl Zeiss Meditec Ag Method for generating an ablation program, method for ablating a body and means for carrying out said method
DE102005019257B4 (en) * 2005-04-26 2007-10-25 Carl Zeiss Jena Gmbh Optics for profile shaping of radiation
US7443589B2 (en) 2005-04-26 2008-10-28 Carl Zeiss Sms Gmbh Optical component for beam shaping
DE102005019257A1 (en) * 2005-04-26 2006-11-16 Carl Zeiss Jena Gmbh Optics for profile shaping of radiation
DE102006047941A1 (en) * 2006-10-10 2008-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for homogenizing radiation with non-regular microlens arrays
US7839573B2 (en) 2006-10-10 2010-11-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for homogenizing radiation by means of irregular microlens arrays
DE102006047941B4 (en) * 2006-10-10 2008-10-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for homogenizing radiation with non-regular microlens arrays
CN104865782A (en) * 2014-02-20 2015-08-26 卡西欧计算机株式会社 Light source unit including laser diodes as light sources and microlens array and projector
US10816155B2 (en) 2016-09-23 2020-10-27 Carl Zeiss Jena Gmbh Lighting device for a vehicle
US11537078B2 (en) 2016-09-23 2022-12-27 Carl Zeiss Jena Gmbh Lighting device for vehicles

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OAV Applicant agreed to the publication of the unexamined application as to paragraph 31 lit. 2 z1
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