DE19622472C1 - Cooling device for thermally loaded oscillating mirror - Google Patents

Cooling device for thermally loaded oscillating mirror

Info

Publication number
DE19622472C1
DE19622472C1 DE1996122472 DE19622472A DE19622472C1 DE 19622472 C1 DE19622472 C1 DE 19622472C1 DE 1996122472 DE1996122472 DE 1996122472 DE 19622472 A DE19622472 A DE 19622472A DE 19622472 C1 DE19622472 C1 DE 19622472C1
Authority
DE
Germany
Prior art keywords
mirror
cooling
oscillating mirror
cooling medium
cooling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1996122472
Other languages
German (de)
Inventor
Bernd Dipl Ing Anders
Jan Dipl Phys Hoffmann
Sergej Dr Semjonov
Peter Prof Dr Ing Seyffarth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SCHWEISTECHNISCHE LEHR und VER
Original Assignee
SCHWEISTECHNISCHE LEHR und VER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCHWEISTECHNISCHE LEHR und VER filed Critical SCHWEISTECHNISCHE LEHR und VER
Priority to DE1996122472 priority Critical patent/DE19622472C1/en
Application granted granted Critical
Publication of DE19622472C1 publication Critical patent/DE19622472C1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The device provides indirect cooling of the oscillating mirror (3) using a cooling medium circulated through a cooling circuit (4) incorporated in a mounting base (1) supporting the mirror via a rotary bearing (2). The mirror is thermally coupled to the mounting base and the cooling circuit via a second cooling medium (5). The second cooling medium may be contained within a flexible cuff (6), which encloses the bearing between the mounting base and the mirror.

Description

Die Erfindung betrifft eine Kühleinrichtung zum indirekten Kühlen eines thermisch belasteten Schwingspiegels nach dem Oberbegriff des Patentanspruches 1.The invention relates to a cooling device for indirect cooling a thermally stressed oscillating mirror according to the generic term of Claim 1.

Es ist bekannt, daß die Bearbeitungsergebnisse von Strahlungs­ quellen (Hochleistungslasern) beim Schweißen und Oberflächenbe­ arbeiten mit Schwingspiegeloptiken maßgeblich von den optischen Eigenschaften der Fokussierelemente abhängen.It is known that the processing results of radiation swell (high power lasers) during welding and surface treatment work with oscillating mirror optics largely from the optical Depending on the properties of the focusing elements.

Insbesondere kann die thermische Belastung von Fokussierspiegeln zu veränderten Fokussiereigenschaften der Bearbeitungsoptik führen. Aus diesem Grund werden thermisch hochbelastete Optiken in der Regel wassergekühlt. Zu diesem Zweck wird der Spiegelkörper in der Regel auf einen wasserdurchströmten Grundkörper aufgesetzt. ("Materialbearbeitung durch Laserstrahl", Handbuch für Ausbildung und Praxis, Düsseldorf: Dt. Verl. für Schweißtechnik, DSV-Verlag 1993).In particular, the thermal load on focusing mirrors can increase change the focusing properties of the processing optics. For this reason, thermally highly stressed optics in the Usually water-cooled. For this purpose, the mirror body in the Usually placed on a body through which water flows. ("Material processing by laser beam", manual for training and practice, Düsseldorf: Dt. Publisher for welding technology, DSV publishing house 1993).

Weiter sind aus den Druckschriften DE-OS 33 30 626 A1 und der US-PS 3.836.236 jeweils Spiegel bekannt, deren Grundkörper von einem Kühlmedium durchströmt werden. Allerdings ist hier kein Lager zwischen Grundkörper und Spiegelkörper vorgesehen.Furthermore, from the publications DE-OS 33 30 626 A1 and US-PS 3,836,236 each mirror known, the base body of one Coolant to be flowed through. However, there is no warehouse here provided between base body and mirror body.

Insbesondere bei Schwingspiegeloptiken, ist die Wärmeabfuhr beim Einsatz von Multi-kW-Strahlungsquellen auf diesem Wege konstruktiv schwierig zu realisieren. Die Erfindung will hier Abhilfe schaffen.Heat dissipation is particularly important in the case of oscillating mirror optics Use of multi-kW radiation sources constructively in this way difficult to realize. The invention seeks to remedy this.

Der im Patentanspruch 1 angegebenen Erfindung liegt das Problem zugrunde, eine Kühleinrichtung mit einer trägheitsarmen, flüssig­ keitsgekühlten Schwingspiegeloptik zu schaffen, mit der Scanning­ frequenzen von auch mehr als 50 Hz in zwei Raumrichtungen unabhängig voneinander realisiert werden.The invention specified in claim 1 is the problem based, a cooling device with a low-inertia, liquid to create speed-cooled oscillating mirror optics with the scanning frequencies of more than 50 Hz in two spatial directions can be realized independently.

Dieses Problem wird durch die kennzeichnenden Merkmale des Patent­ anspruches 1 gelöst, die durch die Unteransprüche 2 bis 4 präzi­ siert und ergänzt sind.This problem is compounded by the characteristic features of the patent Claim 1 solved by the sub-claims 2 to 4 preci are added and supplemented.

Die Erfindung sieht zwei über eine Wärmebrücke miteinander verbundene Kühlmedien vor. Der Träger des Schwingspiegels wird von einem Kühlkreislauf durchströmt. Der Schwingspiegel selbst ist von einem zweiten nicht kontinuierlich durchströmten drucklosen Kühl­ medium umgeben.The invention sees two over a thermal bridge with each other connected cooling media. The carrier of the oscillating mirror is from flows through a cooling circuit. The oscillating mirror itself is from a second pressure-free cooling which is not continuously flowed through medium surrounded.

Die erfindungsgemäße Kühleinrichtung hat den Vorteil, daß Schwingspiegelfrequenzen von mehr als 50 Hz in zwei Raumrichtungen realisierbar sind, bei Laserstrahlleistungen im Multikilowatt-Bereich.The cooling device according to the invention has the advantage that Oscillating mirror frequencies of more than 50 Hz in two spatial directions are realizable with laser beam powers in Multi kilowatt range.

Ein Ausführungsbeispiel der Erfindung wird anhand der beigefügten Zeichnung näher erläutert.An embodiment of the invention is based on the attached Drawing explained in more detail.

Das beigefügte Figur zeigt anschaulich den prinzipiellen Aufbau der gekühlten Schwingspiegeleinheit.The attached figure shows the basic structure of the cooled oscillating mirror unit.

Die Kühleinrichtung besteht aus einem Grundkörper 1, der über ein Lager 2 den Spiegelkörper 3 aufnimmt. Der Grundkörper 1 ist an einen nicht näher dargestellten Kühlkreislauf 4 angeschlossen. Das Lager 3 ist als Kugelgelenk ausgeführt und in geeigneter Weise mit dem Grundkörper 1 fest verbunden. Der Spiegelkörper 3 ist über ein zweites Kühlmedium 5 thermisch an den Grundkörper 1 und den Kühlkreislauf 4 gekoppelt. Das Kühlmedium 5 ist gegenüber der Umgebung mittels flexibler Manschette 6 abgedichtet. Die Anregung des Spiegelkörpers 3 erfolgt beispielsweise mechanisch oder magnetisch.The cooling device consists of a base body 1 , which receives the mirror body 3 via a bearing 2 . The base body 1 is connected to a cooling circuit 4 , not shown. The bearing 3 is designed as a ball joint and is suitably firmly connected to the base body 1 . The mirror body 3 is thermally coupled to the base body 1 and the cooling circuit 4 via a second cooling medium 5 . The cooling medium 5 is sealed from the environment by means of a flexible sleeve 6 . The excitation of the mirror body 3 takes place, for example, mechanically or magnetically.

Claims (4)

1. Kühleinrichtung zum indirekten Kühlen eines thermisch belasteten Schwingspiegels, dadurch gekennzeichnet, daß ein an einen ein erstes Kühlmedium enthaltenden Kühlkreislauf (4) angeschlossener Grundkörper (1) über ein Lager (2) einen Spiegelkörper (3) mit Spiegeloberfläche aufnimmt und daß der Spiegelkörper (3) über ein zweites Kühlmedium (5) thermisch an den Grundkörper (1) und den Kühlkreislauf (4) gekoppelt ist.1. Cooling device for indirect cooling of a thermally stressed oscillating mirror, characterized in that a base body ( 1 ) connected to a cooling circuit ( 4 ) containing a first cooling medium receives a mirror body ( 3 ) with a mirror surface via a bearing ( 2 ) and that the mirror body ( 3 ) is thermally coupled to the base body ( 1 ) and the cooling circuit ( 4 ) via a second cooling medium ( 5 ). 2. Einrichtung nach Anspruch 1, dadurch gekennzeichnet, daß das Kühlmedium (5) gegenüber der Umgebung mittels flexibler Manschette (6) abgedichtet ist.2. Device according to claim 1, characterized in that the cooling medium ( 5 ) is sealed from the environment by means of a flexible sleeve ( 6 ). 3. Einrichtung nach Anspruch 1 und 2, dadurch gekennzeichnet, daß das Lager (2) als Kugelgelenk ausgeführt ist.3. Device according to claim 1 and 2, characterized in that the bearing ( 2 ) is designed as a ball joint. 4. Einrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß das zweite Kühlmedium (5) den Spiegelkörper (3) kontinuierlich drucklos umgibt.4. Device according to one of claims 1 to 3, characterized in that the second cooling medium ( 5 ) surrounds the mirror body ( 3 ) continuously without pressure.
DE1996122472 1996-06-05 1996-06-05 Cooling device for thermally loaded oscillating mirror Expired - Lifetime DE19622472C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE1996122472 DE19622472C1 (en) 1996-06-05 1996-06-05 Cooling device for thermally loaded oscillating mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1996122472 DE19622472C1 (en) 1996-06-05 1996-06-05 Cooling device for thermally loaded oscillating mirror

Publications (1)

Publication Number Publication Date
DE19622472C1 true DE19622472C1 (en) 1997-12-11

Family

ID=7796155

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996122472 Expired - Lifetime DE19622472C1 (en) 1996-06-05 1996-06-05 Cooling device for thermally loaded oscillating mirror

Country Status (1)

Country Link
DE (1) DE19622472C1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10217200A1 (en) * 2002-04-18 2003-10-30 Winter Pipeline Gmbh Improving the quality of welding, coating and hardening and quenching of metal workpieces comprises using a laser arrangement of high power and liquid-cooled mirrors
EP1376185A2 (en) * 2002-06-20 2004-01-02 Nikon Corporation Minimizing thermal distortion effects on EUV mirror
DE19955574B4 (en) * 1999-11-18 2005-07-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mass-optimized mirror for laser processing and method for cooling the mass-optimized mirror in laser processing
WO2012174108A1 (en) * 2011-06-16 2012-12-20 Nikon Corporation Mirror assembly for an exposure apparatus
WO2014001188A1 (en) * 2012-06-25 2014-01-03 Carl Zeiss Smt Gmbh Method and cooling system for cooling an optical element for euv applications

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) * 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
DE3330626A1 (en) * 1983-08-25 1987-06-25 Wisotzki Juergen Mirror for laser technology

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836236A (en) * 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
DE3330626A1 (en) * 1983-08-25 1987-06-25 Wisotzki Juergen Mirror for laser technology

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19955574B4 (en) * 1999-11-18 2005-07-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mass-optimized mirror for laser processing and method for cooling the mass-optimized mirror in laser processing
DE10217200A1 (en) * 2002-04-18 2003-10-30 Winter Pipeline Gmbh Improving the quality of welding, coating and hardening and quenching of metal workpieces comprises using a laser arrangement of high power and liquid-cooled mirrors
EP1376185A2 (en) * 2002-06-20 2004-01-02 Nikon Corporation Minimizing thermal distortion effects on EUV mirror
EP1376185A3 (en) * 2002-06-20 2004-05-19 Nikon Corporation Minimizing thermal distortion effects on EUV mirror
WO2012174108A1 (en) * 2011-06-16 2012-12-20 Nikon Corporation Mirror assembly for an exposure apparatus
US9323157B2 (en) 2011-06-16 2016-04-26 Nikon Corporation Mirror assembly for an exposure apparatus
WO2014001188A1 (en) * 2012-06-25 2014-01-03 Carl Zeiss Smt Gmbh Method and cooling system for cooling an optical element for euv applications
JP2015529836A (en) * 2012-06-25 2015-10-08 カール・ツァイス・エスエムティー・ゲーエムベーハー Method and cooling system for cooling optical elements for EUV applications
US9671584B2 (en) 2012-06-25 2017-06-06 Carl Zeiss Smt Gmbh Method and cooling system for cooling an optical element for EUV applications

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8100 Publication of the examined application without publication of unexamined application
D1 Grant (no unexamined application published) patent law 81
8380 Miscellaneous part iii

Free format text: DER ANMELDER IST ZU AENDERN IN: SCHWEISSTECHNISCHE LEHR- UND VERSUCHSANSTALT MECKLENBURG-VORPOMMERNGMBH, 18059 ROSTOCK, DE

8364 No opposition during term of opposition
8330 Complete disclaimer