DE19517467A1 - Measurement device for mechanical sizes - consists of distortion body, interferometer with beam splitters and two reflectors, light wave conductor illumination, and light wave conductor sampling device - Google Patents
Measurement device for mechanical sizes - consists of distortion body, interferometer with beam splitters and two reflectors, light wave conductor illumination, and light wave conductor sampling deviceInfo
- Publication number
- DE19517467A1 DE19517467A1 DE1995117467 DE19517467A DE19517467A1 DE 19517467 A1 DE19517467 A1 DE 19517467A1 DE 1995117467 DE1995117467 DE 1995117467 DE 19517467 A DE19517467 A DE 19517467A DE 19517467 A1 DE19517467 A1 DE 19517467A1
- Authority
- DE
- Germany
- Prior art keywords
- light wave
- wave conductor
- interferometer
- reflectors
- lever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 title abstract description 7
- 238000005286 illumination Methods 0.000 title abstract 3
- 238000005070 sampling Methods 0.000 title abstract 3
- 238000005259 measurement Methods 0.000 title description 7
- 230000008878 coupling Effects 0.000 claims abstract description 6
- 238000010168 coupling process Methods 0.000 claims abstract description 6
- 238000005859 coupling reaction Methods 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Description
Die Erfindung betrifft eine Vorrichtung zur Messung mechanischer Größen der im Oberbegriff des An spruchs 1 genannten Art.The invention relates to a device for measurement mechanical quantities of the in the preamble of the An Art 1 mentioned.
Im Stand der Technik ist es bekannt, die mechani schen Größen Druck und Kraft interferometrisch zu messen. Die Patentschrift DD 1 37 619 beschreibt eine Vorrichtung zur interferometrischen Kraftmes sung bei der der Meßreflektor direkt am Verfor mungskörper angeordnet ist. Dies hat zur Folge, daß aufgrund der kleinen möglichen Deformationen nur ein begrenztes Auflösungsvermögen erreicht wird.In the prior art it is known to mechani interferometric pressure and force measure up. The patent specification DD 1 37 619 describes a device for interferometric force measurement solution with the measuring reflector directly on the verfor mung body is arranged. This has the consequence that due to the small possible deformations only a limited resolution is achieved.
In der Patentschrift DD 2 39 867 ist eine Vorrich tung zur interferometrischen Druckmessung beschrie ben. Dort ist am freien Ende einer Röhrenfeder ein Retroreflektor eines Interferometers angeordnet. Auch bei dieser Vorrichtung ist das Auflösungsver mögen begrenzt, da aus mechanischen Gründen die De formation bestimmte Werte nicht überschreiten darf.In the patent specification DD 2 39 867 is a Vorrich described for interferometric pressure measurement ben. There is a tubular spring at the free end Retroreflector of an interferometer arranged. In this device too, the resolution is like limited, because for mechanical reasons the De formation must not exceed certain values.
Der Erfindung liegt die Aufgabe zugrunde, Vorrich tungen, insbesondere zur Druck- und Kraftmessung zu schaffen, die hohe Auflösungen und Genauigkeiten besitzen, Interferometer enthalten und vollständig lichtwellenleitergekoppelt sind.The invention is based, Vorrich the task tion, in particular for pressure and force measurement create high resolutions and accuracies own, contain interferometer and complete optical fiber are coupled.
Die Aufgabe wird erfindungsgemäß dadurch gelöst, daß mit einem Grundkörper ein Verformungskörper fest verbunden ist. Am Verformungskörper ist eine Koppel befestigt, welche die Verbindung zwischen dem Verformungskörper und dem Ende eines Hebels herstellt. Der Hebel ist so gelagert, daß eine große Übersetzung vorhanden ist, wenn am anderen Ende des Hebels der Meßreflektor eines Interferome ters angeordnet wird. Referenzreflektor und Strah lenteiler des Interferometers werden fest am Grund körper angebracht. Das Interferometer wird mit mo nochromatischer Strahlung mittels Lichtwellen leiter und einer Auskoppeloptik versorgt. Zur Aus wertung der Interferenz des Lichtes erfolgt eine Abtastung mit mehreren Lichtwellenleitern.According to the invention, the object is achieved by that with a base body a deformation body is firmly connected. There is one on the deformation body Coupling attached, which is the connection between the deformation body and the end of a lever manufactures. The lever is mounted so that a great translation exists when on the other End of the lever of the measuring reflector of an interferome ters is arranged. Reference reflector and beam Interferometer dividers become firmly attached to the bottom body attached. The interferometer is used with mo still chromatic radiation by means of light waves conductor and a decoupling optics. To the end The interference of the light is evaluated Scanning with several optical fibers.
Durch das wählbare Hebelübersetzungsverhältnis kön nen die relativ kleinen Deformationen des Verfor mungskörpers erheblich vergrößert und interferome trisch mit einer hohen Auflösung gemessen werden.Due to the selectable leverage ratio the relatively small deformations of the deformation body significantly enlarged and interferome be measured with a high resolution.
Da Verformungskörper, Koppeln, Gelenke und Hebel aus hochwertigen Materialien wie Federstahl, Quarz, Keramik und Aluminium hergestellt werden können, sind außerdem hohe Genauigkeiten erzielbar. Because deformation bodies, couplings, joints and levers made of high quality materials such as spring steel, quartz, Ceramic and aluminum can be made high accuracies can also be achieved.
Vorteilhafte Ausgestaltungen der erfindungsgemäßen Vorrichtung sind in den Unteransprüchen angegeben.Advantageous embodiments of the invention Device are specified in the subclaims.
Die Erfindung wird im folgenden anhand von Ausfüh rungsbeispielen näher erläutert werden. In der zu gehörigen Zeichnung zeigen:The invention is based on Ausfüh tion examples are explained in more detail. In the too show the corresponding drawing:
Fig. 1 einen Teil-Längsschnitt einer Vorrich tung zur Druckmessung und Fig. 1 shows a partial longitudinal section of a Vorrich device for pressure measurement and
Fig. 2 eine Seitenansicht einer Vorrichtung zur Kraftmessung, die mehrere Koppeln, Gelenke und Hebel besitzt. Fig. 2 is a side view of a device for force measurement, which has several couplings, joints and levers.
In Fig. 1 wird der Verformungskörper 2 in Form ei ner kreisförmigen Membran in Abhängigkeit vom zu messenden Druck deformiert. Ein Koppelelement 3 ist mittels der Gelenke 4 mit dem Verformungskörper 2 und dem Hebel 5 verbunden. Der Hebel 5 ist mit Hilfe eines Gelenkes 4 am Grundkörper 1 so gela gert, daß ein großes Hebelübersetzungsverhältnis entsteht. Der in dieser Weise vergrößerte Deforma tionsweg des Verformungskörpers 2 kann hochauf lösend gemessen werden, wenn am freien Ende des He bels 5 der Meßreflektor 6 eines Interferometers an geordnet wird. Referenzreflektor 6 und Strahlentei ler 7 des Interferometers sind fest mit dem Grund körper 1 verbunden. Die Versorgung des Interferometers mit monochromatischer Strahlung er folgt mittels der Lichtwellenleiterbeleuchtungsein heit 8. Zur Gewinnung des Meßsignals werden die In terferenzerscheinungen mit der Lichtwellenleiterab tasteinheit 9 abgetastet. In Fig. 1, the deformation body 2 is deformed in the form of egg ner circular membrane depending on the pressure to be measured. A coupling element 3 is connected to the deformation element 2 and the lever 5 by means of the joints 4 . The lever 5 is gela gert with the aid of a joint 4 on the base body 1 that a large lever transmission ratio arises. The in this way enlarged deformation path of the deformation body 2 can be measured in high resolution if the measuring reflector 6 of an interferometer is arranged at the free end of the lever 5 . Reference reflector 6 and Strahlentei ler 7 of the interferometer are firmly connected to the base body 1 . The interferometer is supplied with monochromatic radiation by means of the optical waveguide lighting unit 8 . To obtain the measurement signal, the interference phenomena are scanned with the optical waveguide scanning unit 9 .
Der Deformationsweg des Verformungskörpers 2 kann noch wesentlich weiter vergrößert werden, wenn zur Übersetzung mehrere Koppeln 3, Gelenke 4 und Hebel 5 angeordnet werden, so wie in Fig. 2 dargestellt. Fig. 2 zeigt eine Anordnung zur Messung der Größe Kraft. Am Grundkörper 1 ist ein Verformungskörper 2 in Form einer Biegefeder angebracht.The deformation path of the deformation body 2 can be increased significantly further if several couplers 3 , joints 4 and levers 5 are arranged for translation, as shown in FIG. 2. Fig. 2 shows an arrangement for measuring the magnitude of force. A deformation body 2 in the form of a spiral spring is attached to the base body 1 .
Die Anordnung mehrerer Koppeln 3, Gelenke 4 und He bel 5 bewirkt bei relativ kleinen geometrischen Ab messungen am Ende des letzten Hebels 5 einen we sentlich größeren Weg als nur mit einem Hebel 5. Am Ende des letzten Hebels 5 ist wieder der Meßreflek tor 6 des Interferometers befestigt. Die interfero metrische Messung entspricht der in Fig. 1 be schriebenen Vorrichtung.The arrangement of several couplers 3 , joints 4 and He bel 5 causes at relatively small geometric dimensions from the end of the last lever 5 we a much larger way than only with a lever 5th At the end of the last lever 5 , the measuring reflector 6 of the interferometer is fastened again. The interferometric measurement corresponds to the device described in FIG. 1.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1995117467 DE19517467C2 (en) | 1995-05-12 | 1995-05-12 | Device for measuring mechanical quantities |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1995117467 DE19517467C2 (en) | 1995-05-12 | 1995-05-12 | Device for measuring mechanical quantities |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE19517467A1 true DE19517467A1 (en) | 1997-02-13 |
| DE19517467C2 DE19517467C2 (en) | 1998-10-22 |
Family
ID=7761758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1995117467 Expired - Fee Related DE19517467C2 (en) | 1995-05-12 | 1995-05-12 | Device for measuring mechanical quantities |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE19517467C2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014219262A1 (en) * | 2014-09-24 | 2016-03-24 | Conti Temic Microelectronic Gmbh | Optical pressure measuring device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2341310A1 (en) * | 1973-02-21 | 1974-08-22 | Nagema Veb K | DEVICE, IN PARTICULAR FOR FORCE MEASUREMENT WITH DIRECT DIGITAL OUTPUT SIGNAL |
| DE3012811A1 (en) * | 1979-07-10 | 1981-01-29 | Nagema Veb K | MEASURING TRANSDUCERS, IN PARTICULAR FOR DIGITAL FORCE MEASUREMENT |
| US4665747A (en) * | 1985-04-19 | 1987-05-19 | Muscatell Ralph P | Flight instrument using light interference for pressure sensing |
| DE3902569A1 (en) * | 1988-05-09 | 1989-11-16 | Nagema Veb K | Interferometric force measuring device |
| DE3931021A1 (en) * | 1989-09-16 | 1991-04-18 | Hommelwerke Gmbh | POWER KNIFE |
-
1995
- 1995-05-12 DE DE1995117467 patent/DE19517467C2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2341310A1 (en) * | 1973-02-21 | 1974-08-22 | Nagema Veb K | DEVICE, IN PARTICULAR FOR FORCE MEASUREMENT WITH DIRECT DIGITAL OUTPUT SIGNAL |
| DE3012811A1 (en) * | 1979-07-10 | 1981-01-29 | Nagema Veb K | MEASURING TRANSDUCERS, IN PARTICULAR FOR DIGITAL FORCE MEASUREMENT |
| US4665747A (en) * | 1985-04-19 | 1987-05-19 | Muscatell Ralph P | Flight instrument using light interference for pressure sensing |
| DE3902569A1 (en) * | 1988-05-09 | 1989-11-16 | Nagema Veb K | Interferometric force measuring device |
| DE3931021A1 (en) * | 1989-09-16 | 1991-04-18 | Hommelwerke Gmbh | POWER KNIFE |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014219262A1 (en) * | 2014-09-24 | 2016-03-24 | Conti Temic Microelectronic Gmbh | Optical pressure measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19517467C2 (en) | 1998-10-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |