DE1796226B2 - Method for stabilizing the temperature dependence of the frequency constants of piezoelectric ceramics - Google Patents

Method for stabilizing the temperature dependence of the frequency constants of piezoelectric ceramics

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Publication number
DE1796226B2
DE1796226B2 DE1796226A DE1796226A DE1796226B2 DE 1796226 B2 DE1796226 B2 DE 1796226B2 DE 1796226 A DE1796226 A DE 1796226A DE 1796226 A DE1796226 A DE 1796226A DE 1796226 B2 DE1796226 B2 DE 1796226B2
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temperature
temperature dependence
ceramic
titanate
stabilizing
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DE1796226A
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DE1796226A1 (en
DE1796226C3 (en
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Helmut Dipl.-Chem. Dr. 8000 Muenchen Thomann
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Siemens AG
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Siemens AG
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/50Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/51Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on compounds of actinides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/02Electrets, i.e. having a permanently-polarised dielectric
    • H01G7/025Electrets, i.e. having a permanently-polarised dielectric having an inorganic dielectric
    • H01G7/026Electrets, i.e. having a permanently-polarised dielectric having an inorganic dielectric with ceramic dielectric
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/04Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions

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Description

Die Erfindung betrifft ein Verfahren zur Beseitigung der Zeitabhängigkeit des Temperaturverhaltens der materialabhängigen Frequenzkonstanten piezoelektrischer Keramik.The invention relates to a method for eliminating the time dependency of the temperature behavior the material-dependent frequency constants of piezoelectric ceramics.

Es ist bekannt, piezoelektrische Keramik als elektromechanische Umsetzer in mechanischen Filtern für die Elektronik zu verwenden. Bei dieser Verwendung der Keramik spielt die Temperaturabhängigkeit der Frequenzkonstanten der mechanischen Schwingung der Keramik eine ganz wesentliche Rolle. Es sind viele Versuche angestellt worden, diese Temperaturabhängigkeit möglichst klein zu machen. Ein Weg, der hierzu beschritten wurde, ist derjenige, ein homogenes Material aus mehreren Komponenten zu verwenden. Ein typischer Vertreter hierfür ist das Bleizirkonat-Titanat mit in bestimmten Grenzen festgelegtem Verhältnis Titan zu Zirkon. Gegebenenfalls sind einem solchen Material noch weitere Stoffe als Dotierung oder Substitution hinzugefügt. So wurde gefunden, daß sich die Temperaturabhängigkeit der Frequenzkonstanten bei Bleizirkonat-Titanat, insbesondere bei Zusammensetzungen Zirkon zu Titan im Bereich der Phasengrenze zwischen rhomboedrischer und tetragonaler Struktur besonders stark beeinflussen läßt. Vorteilhafterweise sind an dieser Phasengrenze auch besonders hohe Kopplungsfaktoren festzustellen. It is known to use piezoelectric ceramics as electromechanical To use converters in mechanical filters for electronics. In this use the ceramic plays the temperature dependence of the frequency constants of the mechanical vibration ceramics play a very important role. Many attempts have been made to find this temperature dependence to make it as small as possible. One path that has been taken to achieve this is one to use homogeneous material made up of several components. A typical representative of this is that Lead zirconate titanate with a fixed ratio of titanium to zirconium within certain limits. Possibly other substances are added to such a material as doping or substitution. So became found that the temperature dependence of the frequency constants in lead zirconate titanate, in particular in the case of compositions zirconium to titanium in the area of the phase boundary between rhombohedral and tetragonal structure can be influenced particularly strongly. Advantageously, are at this phase boundary also determine particularly high coupling factors.

Es wurde aber festgestellt, daß die Temperaturabhängigkeit eines wie oben beschriebenen Materials nicht zeitunabhängig ist, sondern daß sie sich nach Vornahme eines Bearbeitungsvorganges, z. B. nach dem Zuschneiden, nach dem Aufbringen der Elektroden und'oder nach der Polarisation des Materials noch für lange Zeit ändert.However, it was found that the temperature dependence of a material as described above is not time-independent, but that it is after performing a processing operation, z. B. after after cutting, after applying the electrodes and 'or after polarizing the material will change for a long time.

Aufgabe der Erfindung ist es, Maßnahmen anzugeben, mit denen die langzeitliche Änderung der Temperaturabhängigkeit der Frequenzkonstante beseitigt werden kann bzw. durch die der darin verborgene Alterungseffekt wesentlich beschleunigt werden kann.The object of the invention is to provide measures with which the long-term change in Temperature dependence of the frequency constant can be eliminated or by which the hidden therein The aging effect can be accelerated significantly.

ίο Diese Aufgabe wird durch ein Verfahren gelöst, das erfindungsgemäß dadurch gekennzeichnet ist, daß ein polarisierter Keramikkörper nach der letzten Erwärmung auf Temperaturen höher als etwa 80° C mehrmalig aufeinanderfolgend einem Temperaturzyklus unterworfen wird, bei dem das Material mit einer Geschwindigkeit von höchstens etwa 30° C/h bis auf eine vom Material abhängige Maximaltemperatur unterhalb der Curietemperatur erwärmt und wieder auf die vorgesehene Betriebstemperatur, vorzugsweise die Zimmertemperatur, abgekühlt wird. Diese Maximaltemperatur beträgt, insbesondere für Bleizirkonat-Titanat mit einem Verhältnis Zirkon zu Titan im Bereich der Phasengrenze, etwa 80° C. In vielen Fällen genügt es bereits, den Temperaturzyklus 3- bis 4mal ablaufen zu lassen. Bezüglich der angegebenen Geschwindigkeit ist zu sagen, daß bei langsamerer Erwärmung oder Abkühlung etwa mit 10 oder 20° C/h im allgemeinen noch mehr Erfolg erzielt wird. Dabei ist aber zu bedenken, daß ein so langsam ablaufender Prozeß fertigungstechnisch häufig unerwünscht ist. Aus diesen Angaben kann sich der Fachmann im übrigen die für den jeweiligen Anwendungsfall günstigste Geschwindigkeit auswählen. ίο This task is solved by a method which is characterized according to the invention in that a polarized ceramic body after the last Heating to temperatures higher than about 80 ° C several times in succession in a temperature cycle is subjected, in which the material at a rate of at most about 30 ° C / h heated to a maximum temperature below the Curie temperature, depending on the material, and is cooled again to the intended operating temperature, preferably room temperature. This maximum temperature is, in particular for lead zirconate-titanate with a ratio of zirconium to Titanium in the area of the phase boundary, around 80 ° C. In many cases, it is enough to just start the temperature cycle To run 3 to 4 times. With regard to the specified speed, it should be said that at Slower heating or cooling at around 10 or 20 ° C / h is generally more successful is achieved. It should be noted, however, that such a slow process is technically manufacturing is often undesirable. From this information, the person skilled in the rest of the for the respective Select the best speed for use case.

Zu der Erfindung führten die folgenden Überlegungen: Den Untersuchungen nach zu schließen, dürfte die zeitliche Änderung der Temperaturabhängigkeit der Frequenzkonstanten der piezoelektrischen Keramik darauf beruhen, daß sich nach einem mit einer Erwärmung der Keramik verbundenen Bearbeitungsprozeß der thermodynamische Gleichgewichtszustand nur sehr langsam einstellt. Es liegen also praktisch eingefrorene Zustände vor, die nun durch das erfindungsgemäße Verfahren beschleunigt in ein Gleichgewicht übergeführt werden. Wie sich gezeigt hat, darf der erfindungsgemäße Temperaturzyklus bei Bleizirkonat-Titanat nur bis zu einer Temperatur von etwa 80° C ausgedehnt werden. Temperaturen wesentlich darüber, etwa über 100° C, bringen erfahrungsgemäß eher Nachteile als Vorteile. Wesentlich unter 80° C zu bleiben hat sich wenigstens im allgemeinen Fall wenig bewährt. Bei zu niedrigen Endtemperaturen mußten nämlich, um das gleiche Ergebnis zu erreichen, wesentlich mehr Temperaturzyklen durchgeführt werden, als sie bei z. B. 80° C Endtemperatur erforderlich waren. Als besonders wirkungsvoll erwies sich das erfindungsgemäße Verfahren bei Materialien wieThe following considerations led to the invention: According to the investigations, to conclude is likely to be the change over time of the temperature dependence of the frequency constants of the piezoelectric Ceramic are based on the fact that after a processing process associated with heating the ceramic the thermodynamic state of equilibrium adjusts only very slowly. So there are practically frozen states, which are now accelerated by the method according to the invention into a Balance to be transferred. As has been shown, the temperature cycle according to the invention may in the case of lead zirconate titanate, can only be expanded up to a temperature of about 80 ° C. Temperatures experience shows that significantly above this, for example above 100 ° C, have disadvantages rather than advantages. Essential Staying below 80 ° C has proven to be of little use, at least in the general case. If the final temperature is too low namely, had to achieve the same result, significantly more temperature cycles be carried out as they are at z. B. 80 ° C final temperature were required. As special The method according to the invention proved to be effective with materials such as

Pb Zr 0,54, Ti 0,46 O3 + 1 «/0 Nd2O3,Pb Zr 0.54, Ti 0.46 O 3 + 1 «/ 0 Nd 2 O 3 ,

Pb Zr 0,51, Ti 0,49 O3 + l,2°/oMnÖ„,Pb Zr 0.51, Ti 0.49 O 3 + 1.2 ° / oMnÖ ",

Pb Zr 0,49, Ti 0,51 O3 + 0,5 Vo Fe2OJ,Pb Zr 0.49, Ti 0.51 O 3 + 0.5 Vo Fe 2 OJ,

Pb Zr 0,57, Ti 0,43 O3 + 0,5 % Fe2O3,Pb Zr 0.57, Ti 0.43 O 3 + 0.5% Fe 2 O 3 ,

Pb Zr 0,45, Ti 0,40 (Mg 0,075, Wo 0,075) O3.Pb Zr 0.45, Ti 0.40 (Mg 0.075, Wo 0.075) O 3 .

Die Prozentangaben sind Gewichtsprozente.The percentages are percentages by weight.

Claims (5)

Patentansprüche:Patent claims: 1. Verfahren zur Beseitigung der zeitlichen Änderung der Temperaturabhängigkeit der Frequenzkonstanten piezoelektrischer Keramik, dadurch gekennzeichnet, daß der polarisierte Keramikkörper nach dem letzten Bearbeitungsvorgang, bei dem eine Erwärmung auf 80° C und höher eintritt, mehrmalig aufeinanderfolgend einem Temperaturzyklus unterworfen wird, bei dem er mit einer Geschwindigkeit von höchstens etwa 30° C/h bis auf eine vom Material abhängige Maximaltemperatur unterhalb der Curie-Temperatur erwärmt und wieder abgekühlt wird.1. Procedure for eliminating the change over time in the temperature dependence of the frequency constants piezoelectric ceramic, characterized in that the polarized Ceramic body after the last machining process, during which it is heated to 80 ° C and higher, is repeatedly subjected to a temperature cycle in succession which it runs at a rate of no more than about 30 ° C / h except for one that depends on the material Maximum temperature below the Curie temperature is heated and cooled again. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß 80° C als Maximaltemperatur gewählt wird.2. The method according to claim 1, characterized in that 80 ° C as the maximum temperature is chosen. 3. Anwendung des Verfahrens nach Anspruch 1 oder 2 auf eine Bleizirkonat-Titanat-Keramik mit einem Verhältnis Zirkonat zu Titanat im Bereich der Phasengrenze rhomboedrisch zu tetragonal.3. Application of the method according to claim 1 or 2 to a lead zirconate-titanate ceramic with a ratio of zirconate to titanate in the area of the phase boundary rhombohedral to tetragonal. 4. Anwendung nach Anspruch 2 auf eine dotierte oder substituierte Bleizirkonat-Titanat-Keramik. 4. Application according to claim 2 to a doped or substituted lead zirconate titanate ceramic. 5. Anwendung nach Anspruch 4 auf mit einem oder mehreren der Elemente Neodym, Mangan, Eisen, Magnesium, Wolfram dotierte oder substituierte Keramik.5. Application according to claim 4 with one or more of the elements neodymium, manganese, Iron, magnesium, tungsten doped or substituted ceramics.
DE1796226A 1968-09-25 1968-09-25 Method for stabilizing the temperature dependence of the frequency constants of piezoelectric ceramics Expired - Lifetime DE1796226C3 (en)

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DE1796226A1 DE1796226A1 (en) 1972-04-27
DE1796226B2 true DE1796226B2 (en) 1975-03-06
DE1796226C3 DE1796226C3 (en) 1975-10-23

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