DE1615197A1 - Atomizing device working with plasma - Google Patents

Description

GOKSQLIMiESB YÄÖ1ÜE COEPOHASIOH _S Eooliestery

With P.lasnia aEDeiteade

Me ^ efindimg concerns the dusting in particular = "other" a disintegration-yo ^ rielituns with at least two "mafoiiiig from each other with; S "i? Rosi supplied Ka ilHod-3a -" = Paarea sura Yerbessem of the deadening, gene or ErMtaens sinss aa signed place arranged old, object.

Tuj? daa as "Z &r-atäubaa;" known © phenomenon the sounds of a Toaen-PlagnaaBswo a discharge ίί'ΐχ '! fer-riclitimg bssuiiraiitiQ.' !? Work -related- ·. Typi «= · fiiib.oe-föeiae i-7ö3? Doa the ions da & u. ' used-, an object au 1> © ftcii5: sß <m _v 'around this si ?, clean “au © rhitseii, or

009 828/148 0

BATH

to remove material from the object and to auzurlagör-n on a carrier. One of the Advantages of the sputtering is the high energy transfer between the flaoting ion \ ^r tnd the material taken by dea ion »$ eim dös Eerstauben ztun'Anlagerji a 5Ϊ1 ·" * MEOE küföi'ii'em '^ generated by dae

The o ^ ict detached iJaterfall "resembles high energy , which are extraordinarily dense and stick very strongly" In addition, there is the fact that with the mud-potting technique: a rich selection of! film and fjfcägeriaateri can all be used, for example dielectrics can be used Metals or · metals on dielectrics & gestSubt · "-. · .-- ■■ -. ■ -.... · ...-: ■ ._..., -., ..---.-.- ■. ■■. ■■ ■ ._ ■ .-- ■■ «__ ■

This sputtering was previously accomplished with one that * a single anode and a SiGe cathode or ¹ but several mechanischgetrennteV - ^ but electrically connected anodes and cathodes atif ^ · "^ pointed · While are iclie with such a device * * applied ΈίΐΜβ of goods Quality, but there are a number of limits _a oil application rate is of course a function of the quantity of the atomized material on the carrier, which in turn depends on the number and intensity of the ions hitting the object. Concentration and the content of a lonea-Plasiaas lot '

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BATH ORIGINAL

hence an I "actor" which limits the HGrsfcellunegeachtfindigfceit of Sllmea. For practical reasons, the ion intensity does not apply. "In known nebulizers" do not increase because of the voltage drop between. The anode and cathode are generally low and / for example only about $ 0 volts, while the plasma resistance is a more or less fixed value, so that there is an upper limit for the plasma current and thus for the ion intensity . The uniformity of the applied film layer is another limitation resulting from the variations in ion intensity or concentration across and in the direction of the longitudinal axis of the plasma, and in particular was in the vicinity of the cathode The creation of good uniformity therefore requires the use of relatively small objects and drags , which must be aligned with respect to the plasma and with respect to one another, so that only the smallest possible changes, such as ions, bombardment and in the flow of material to the carrier, take place The flexibility with regard to the order is given to the known devices in a certain way, and Bwar ijis = "special in cases in which there is a conscious" disparity ", required, wall 0-0 PlasEa parameters 00 9 8 28./ If8 0 ,. , ..-, ....

«» 4- on

fixed / standing, to which auoh the changes in the ion concentration belong"

The invention is therefore based on the object Eliminate boundaries and dee uniformity Film application and the application speeds to increase, the production in a certain way more non-uniform Enable film layers and the to improve heating and cleaning of the objects

To achieve this object, the invention proposes at least one two independently maintained ion plasmas in a sputtering device, so that these mix or whirl out and form an agglomerated mass of ions for sputtering an object. Depending on the arrangement the anode-cathode pairs between which the discharges take place, it is possible to control the breadth and intensity of the resulting amount of Bowie's ions Increase uniformity and its distribution · If the discharge paths are, for example, substantially have parallel axes and are neither directed in opposite directions nor arranged to cross an ion stream with a width that is about double is as wide as a single ion stream; with opposite

00 9828 / U80 _{BAD 0BIG1NAL}

If directed currents are set, there is a considerable improvement in the uniformity of the ion distribution ses ^ea over a single ion current; and with intersecting currents an ion mass arises with a density which is about twice as great as in the palle of a single ion stream therefore _t because they are generated with the help of isolated electrical circuits

The ion intensity resulting from intersecting discharges and from superimposed or failing discharges is generally doubled in relation to the plasma latency of a single anode-cathode pair * because the circles assigned to the single currents are independent of each other and because of this the ion content of the plasma is added. compensating act _Λ niiisu comes that the enlargement of the

BAD ORSGLNAU 009828/1480

effective plasma surface by lying parallel, equal or counter-directed discharges make it possible *, that carriers and objects are arranged in the plasma can be that the advantages of the resulting " larger range of uniform ion intensities can be exploited, so that either the area uniform Kilmaufss or the Uniformity increased over a limited area srird. Boers end of opposite discharge »= · gen are the changes in ion intensity effectively balanced along the axes of the ionic plasmas, so that there is increased uniformity of the air pressure results in «If selective original uniformity if desired, the cathode-anode pairs can be aligned in this way and the potentials varied in this way that the object is close to the desired Bs-shot intensity exposed and the carrier can be coated accordingly in a variety of ways.

The proposal of several independent discharge routes or plasmas can be used with particular advantage for a modular atomization device that a larger number of 2 stun chambers, their Longitudinal axes are preferably arranged horizontally The individual atomizing chimneys can be connected to one another

00 9 8 2-8 / U 8 0 _λβ , «, κιαι

BATH ORIGINAL

be connected to form an airtight atomization system in which the horizontal axes lieeii in one line. Each dusting chamber has a main section, at the bottom of which fittings are attached to connect several chambers with one another or with other components. As a result, they can be connected in tandem so that any desired number of sputtering operations can be carried out. The chambers can then be dismantled again and connected in the same or a different arrangement so that different operations can be carried out. The passage in the direction of the longitudinal axes of the atomization chambers is kept free by aligning the surfaces of the object and / or of the carrier as parallel as possible to the longitudinal axes. This non-blocked and in-line arrangement of the individual chambers allows the objects and / or the carriers to be easily transported from one station to the next with the aid of conveyor belts ο "the like" along the longitudinal axes _T provided the atomization system runs automatically Preferably = wise T-shaped, in which case a junction _t to which a vacuum pump can be connected _t approximately in the middle of the ends of the

00982 87U80 _B AD ORIGINAL

Hauptabeehnittes del * Esiaaer is aneohloasen. A I'-shaped lfemmer therefore allows in a simple way the arrangement of a 3? Uiape close to the place * at the? / Das / Sarntaulion takes place. Di © i ^ ^ erscliiedoneUf KUηCTiSiGm.wirkenden Xoasn Plasmoiif the sum Zoratäuhen of the object are to be ersougt of at least two anode Xfathod2n. ~ Pa8.ran that are of each Z-erstö tiTjuiigoksramer anßQovänQt within doo Ileupt «l> oreichos, each / modo, iot its cathode connected to diametrically oinandor gegenübs3 * © a lying sides represents Zerstäuljungfilcasi "mor _t arranged so that the axis of the ion discharge, they ersev.3en ₅ transversely sm? LängeacIisG of roiches the Eamner runs".

Bgi the J? Ällon _t at Danen the Pläohen of the objects are flat, os has been found that a Magnot "field of uniform intensity in BDenen ,, which extend parallel to the surface dea Ohjekrues, control of lonenstrcniGS ej ^ nöglicht, resulting in a .?.? special Gleichfövnißkeit of Zerstäubenß folctt, to ErzöiigTing © inon ßoXc; ia.-uasßctfeldeß ⁱ srd © yes oin or more magnetometers, heißr>: Lölsv © hite in ΊΡοχίώ f3xmlen οη _t Trerwendat _t the elongated j about elliptic before Que - ^ sohnittö have _t The Quersohnlttßerrjtreclwjig the! suitable with reference to the length of the object and the l'onenßflomeß is *

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sufficiently large so that the magnet sucked in by the current aa at the end of the coil crossed
ICom ^ oxi.snussu have a TernaehXäaaiGDaren effect on the re8ultiere21.de magnetic field, which the ion current
exposed is · Obwonl an elongated M9.saet in cross-section _; "aeiopiaisvireise oine coil ^ with advantage" at
^ eilo? » Type of dusting device hunting, including = · Iish τοπ slockeaföPHiig trained use fin ~ döii kami ₅ iat he especially vox-toilhaf-S; in connection with an imiQgefarbxe eisten lianmier according to Ö © 3? Invention, ΐ7 · δ: ΙΧ · daboi d: io Eicattms der QuersohnitiJSTerlangeiimg deö Llagno'ben sarLl »the longitudinal axis of the Sersijäutmng
• tliicii & -S ^, Des? iiasnet therefore hardly requires any more hem than the atomizer chamber itself »

These and other advantageous features of the invention some of them emerged from the description below Auofführungabeiapielej which is shown in the drawings are «It ae

Fig »IA is a plan view of a

göX'stäubuBgsksmmer- star use with several imaßhäagigen Aaodsa = »Katnc> a © n · = Pair s

-Mgο IB one .Söitenansiclit & © r Kaanaer according to

009828/1480

~ ιο ·

3? Ifjc 2Λ in Achaean representation a

On it looks at the arrangement avreier

Couples in the spray

according to FIG. 1;

Kig, 2B a schematic side view; the ^ disorder gexiäß .7: 1 g _o 2Aj

5'Ag, 3Aj 3B _S 3G tmcl - ¹ D different sehomatinch shown Eohaltimgs- υηα / «north» iiangssiösliGhlieJ.ton von Anodan »BJathoden-.paarsn zvx Yer-vrendting in a Zere'r GSQ ^ according to Fig ^ 1; and

read «, 4 sins SG-itenansicht; a "uollständis © a xuirl closed 2-man »gsanlage under Yerwsxiaung mehrsrerc iDöi with * Zwisciiengliödex-n

The 2f «x6rmig-3 Sarstäu ^ exercise feaiaer in" the S ¹ Ig * IA tmcl 13 has a main horisontarboiueieh 10 so ¥ / y. A perpendicular to the Terlaufssde junction 11 "which about-in the middle Ε-between the" two Üäidsn of the main area 10 is connected to this _o Derhoriaontale main area 10 has whether its one end is a splash 12 _? with a plate 15 and is at the other end Another plate 15 is closed on both plates. 13ϊIi? seal the main framefc. 10 from _o At the free end of the Abswsigimg 11 is a llanseh 16 before seen at a Fakaiimpumpe not shown, is ansciiließbar "33ia i ^ ^ Odea Eathoden- ^ stems ₉ eraetigon the Xonenstrcm, are innerhalfb of

009 828 / U8 0

talon Haujifb ireiohss IO such, ßass Sq (Lq anode diametrically opposite ilirar augeorcnietcin cathode in the ho 10 flanged;. Burelifiüijrangen.22 ^ 24 Zwai 'nind the EatliodenanscalüBSG 17 and 23 so that siß ionenstrSye isiu lioriEf »Ji" ualen Acnsen die /.iicden-ICa-Ghoden.-'iSyaiTeaö köBneii -abor aucii so before «turns- Y _t O.?dea _t flow eat Yoxi: il: aleii Aclisön odor alJöX ¹ iii / ichssn ve-rlättfej}, which in; 'rdes "any- = gen. V / inlrel cegeauber der fiosMsoatalen -verdrelri; are wrapped around the main area 10 as well as the eatliodan «-""connections 17 and 23 ± bü ßine Ilülilsoliiaiige 16" / Aai upper bath of the main area 10 is a flap 19 yorge 3sliöii _$ which has an entrance »u the« Eeffliiner formed the objects Vüirl / odex · Trager köruien dalier bsinpielavieise through the geöCfnota Slappe 19 in the dsr-! TaröiaoS ¹ 1? EXei5vi {f &'be _o In the gesckiosae «new state the Eieppe 19 forms an airtight seal opposite e - SQ ₅ which is 10 barrestifrij on the main area * ta aor-Klapp® 19 iet a

009828/1480 BADORiGiNAi,

1615-97

Glass window 21 is provided through which the " Zeratäübß *" process within the E-formigon chamber can be observed.

Before the beginning of the Zerai'DUbungsTorgangeu vilrcl the 2 Hixga EajRnies? J dio is completely airtight, evacuated until a pressure of IO ^y torr and then a ioiaiaable gas _t me K ₀ B ₀ argon to a pressure of about 10 ^J oorz? geüüllto Daa ionisableG gas enters the T-shaped Eaimnai? dtircti a line 58 "from an iPankj, not shown, the © inströraonde Gaenienge can rait a valve 25 to be regulated o

In the 3? 2Λ and 2B are the approximate l-ages of the elements required for atomizing. Scheinatiscli shown. Within the horizontal He.upfbereiches 10 lies Gine /iiiodGii-Eatkodeii-Ano:edD.uns _t , which consists of a / mod «33 on one side and a ₉ the cathode Mldendon Hsinfaden 34 on the opposite side of the dlaustral «- Within a.j? _P series circuit consisting of a battery 39 and a variable resistor MQ is _t is the Aßoöe 23 pocitiv opposite the filament 35 geßpanntö pre-Dei 'Haizfaden 55 Ton is a Vföclisolßtroiaquell'e heated sowoit 57 _s de £

00 98 28 / U8G- '

BATH ORIGINAL

Electrons are emitted which are attracted by the anode 33 , the collision of these electrons with the gas particles in the misshapen chamber leads to the generation of a positive ionic current between the filament 35%. the anode 33 along an axis 60 ″. Another anode-cathode system is arranged in the Iao3? Zontal area 10. and bn from a Aaod © 3 ^ as well as a diametrically opposite su diasGx ¹ ansQO3 dnei;? s, the cathode forming Hsisfaden 35 da2 GESL;? EHTE The anode 34 and the shark afaden 36 lie in a getrennten- S83 ienkreiß _s of außes? ^ dea a battery 41 soT / is a variable resistor 42 i5mf8J5t _e Mr di © heating of the thread 35 serves a ^ schselatromqueilo 38. As a result, a current is positive on an axis 26? Ions between anode 34 and hot filament 36 are generated "The" two axes 50 and 26 are sufficiently close together * so that the two IpnenstpSm © of the two anodes = * cathode systems generally see ">

is-eö see / only about one from © iaei »Tiöl number of arrangement possibilities several ¹¹ Modea · =

% -steae ₉ the 'advantageous in d © p! D «»' föjsnigei3i eiaöp and®3? en ZeratäubitBgekeEiEier imt © ^ will be able «" The

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and their properties are explained in detail in conjunction with FIGS. 5A-3B "In the semantic representation according to FIGS. 3? In practice, it is advantageous to pull out the heating filaments over the curvature of the cathodenal leads or housing 17.25 so that they do not lie in a direct line of sight with their anodes. This reduces undesired removal of the filaments so that these approach a longer lifespan «

An object 27, whose material is atomized and grounded _5, is attached in the main surface 10 in an orphan (not shown) that is exposed to one side of the ionic current and sits on the anode 3 through the series connection of a battery 29 and a variable resistor 28 negative. pre-tensioned · Instead of a single object, a large number of iron objects can also be provided, which are also pre-tensioned onto an anode ». Unless it is the material of the object to an electric light guide, it is advantageous as a bias for the object 27 to a high frequency voltage

On the other side of the icmenstsomes and diametrically

00 98 28 / U8 0 _BAD

TB 15197

geßvJiül'OT? dew Οο;] οΙ: ν Sy lic ^ i? e: ü- κι ?, b3schichtendea?

0! Räj:; ar-50ο ΛνΑ'ΐΛ'-ΐιν'ν dtej; ^^ r ^ inrinrg ^ pDV dan clones srun C ^ je ^ i; Tf- naso £ en. no .fißft dieK .itäu.bt v / ird vüid diirin-uf Follow Λθι> Trliger 30 b In clsr / üioröiimis ninä Ifcgnctc -51 "an-1 56 the länsücii © coils ätoji anf ^ nälxo ^ c

TJu liiibeii and von! 'Ai-törion 52 _T 57 with tension -b are. DiLo LfrägiiGta ^ l and 56 are -öitametsiäl on π i opposite side of the liOici mental Bsreichos 10 aiigeojioiiet and so go3ehalt; et; that their magnetic fields the ^ ". ÖicLs Iciclrinrng haban and parallo3ß. To the ilchssn 60. rXaui'eäc I) Ie larger Ach π s de 3 cross section of the liagne-feeB Ji and parfillel to Acli3e 61 the l3 "peichss Iu the S The!,! agneten 31 and $ 6 have the ... ^ corner _? generate a magnetic field which runs parallel to the axis 60 of the ionic current and whose intensity is uniformly distributed over planes that run parallel to the plane of the surface of the object 27 Plimeii Gbjektflachen imd Tz'ar · ger surfaces a selrc uniform distribution takes place,

Goose alige-uein said v; s: cö.mi the length (dimension

BATH ORIGINAL

0 09828 / U 80: ';

parallel sur Aohe * 61) and the height (dimension to the axis 60) dee Whether ^ Jektee 27, the carrier 30 and the range gleiehfönaigen parallel an ion current approximately equal; large * Bie Qfterschnittsdehnung geaaeht which the magnets 31 and 56 forming coil has the Zweok , the end sections 52 and 53 cter coil cross-sections far from that area of the ion flow asu within which: (pond shape is to be maintained. The magnetic field resulting in this area of the ion flow, in which the components observed from end areas 52 and 53 are negligible are small, therefore, consists of άβτ sum of eeitenberelchen of the m3glichst parallel 54- "n * 55 sub-fields generated · This resultant magnetic field has run an almost completely uniform intensity in planes parallel sur surface of the object 27," For a given width of object and carrier is the uniformity of the atomization ^ by an extension of the coil transverse soni ttee enlarged «With the given coil dimensions, a reduction in the size of the object and support means an increase in the uniformity of the smoke.

Instead of the coils 31 and 56, any other magnet be used that have an elongated cross-section

00 9 8 28/1480

liat. For example, a permanent bar magnet or a coil with a circular cross-section and a ferromagnetic !! KöEtt with an elongated cross-section, also on vineyards

joss 2PU? Erse-asuiig des loneastromas in dar T-foisnigen ^ imniea? envisaged anode-cathodeji system lcana ^^ confess from an odex 'raetu? eren, anode-cathode pair, and together serve for one or more 01? 5eki? ea · in all cases anode and jci * = »Gaordaste Eatho.de £ tn 3 opposite sides of the horiaontalsn area 10;

3ii jig · 3A is shown the electrical circuit for two such Anodea-cathode pairs, the Yersinfachung the Üoeröieht the Bezugsaeicheii unchanged AU3 Figures, were taken 2A and 2B, Ms anodes 33 and 34 located on one side deö region 10, while the cathodes 35 and 36 in a row with the associated anodes 4-3 and 44, however, on diametrically opposite sides of the region 10 liegenu also in this case was the filament 35 of vaxSL 3β WechselstroiacLuelleÄ 37 and 38 nit supplied current. Between the filaments 35 uaö. 36 as well as the anodes: 33 ^L and 3 * each left a battery 39 »4-1 unäila more variable

00982 8 / 1Ä80 BADOe ₁ G ₁ NAL

Resistance 4-0.42 so that the anodes are positive to each other the augeoräne th Katliodea pre-tensioned and · The The strength of the current flowing between each anode-cathode pair can be determined with; Set using the respective variable resistance. In this arrangement, the two anode-ea-cathode pairs generate s & ei side by side in the same sighting and not streams of ions that are independent of each other that they are more independent through the electrons of two Circles, namely the anode 33 "the cathode 35" the Battery 39 and the variable resistor 40 on the one hand and the anode Jft, the cathode ^ 6, the battery 41 and the variable resistor 42 on the other hand generate * !; be. These anode-cathode pairs are like this arranged with respect to each other that the contiguous Edges of the ion atoms are somewhat irenai— see and as a result a single accumulated Generating ion mass · The "advantage of this arrangement consists in the fact that without increasing ^ the anode voltage or a reduction in the ion density, an ion deficiency that is about twice as wide as one produced by a single anode-cathode pair ion current,

In Figo 3B are ssrai Anodea ^ Batiioden ^ pairs geselgi ;, the

00 98 28 / H8 0; .- ,.

BATH ORIGINAL

1645197

Kit of an Aasaolma identic ch vri © die Anardoung geaäß

YES © esci & alteii exfcd * Ίϊί © wÄusiiA & ö! »It says; daÖ dna oine Anodea-Katliodan-Paar um 180- vGi $ £ ehis . Ala Brgabnia if © gea die Jtoodie 33 tm & the cathode 36 on one side the Eoreiolies 10 next to each other, so that the cathode 55 and the anode 5 * and disBetral opposite ait reference to Uiode 33 and Eathod © 36 on the other side of the area 10 arranged aind. In this version aforia, di © that of Hg · 1 and 2 in the T-shaped chamber ontepricnt, produce the nobenainanöeriesenden Ληο - den-Eerehoden ~ FaRre oppositely directed, however non-circling ionic currents that are independent of clay veins

If a single anode-Kätheden pair is used, the ion density in the vicinity of the cathode is greater than in the area of the anode. The same applies to the arrangement according to Pig. 3A • If the anodes * cathode Faare However, according to B are located opposed to such Fig.?, That the aneinandergrensenden Kauten of the two streams to jsu Onea certain degree veisißoiien _t results in a larger to "sasiBsnballung ions having a 33reite, the double- so big is mo the width one? Xonenstromes c between

0098 28/1 A8Ö

a single anode ~ cathode ~ pair, ζ .Bo as in the Arrangement according to Pig. 3JU To change the ratio of the two currents of the anode-eatnode "become pairs the variable resistors 40,42 are used, with which a very exact adjustment of the uniformity who eats streams of ions possible. The improved uniformity this arrangement is the result of a trade-off between the higher density in the area of the two cathodes and the lower density in the area of the adjacent anode «

In the embodiment according to Big. 30, the two anode-cathode pairs are connected so that the anode 33 is positively biased with respect to the cathode 36 and lies in a circle with it, while the anode 34 is positively biased with respect to the cathode 35 lying in its circle. In this execution, the two Anoäen ~ cathode Faare "shape generate two independent XonenstrSme that forms each · cross in. Area of the intersection of the two streams? cal a cloud with a density that is roughly doubled. The same result can be obtained by this; achieve that two anode-cathode "O pairs" are arranged in a different way in such a way that their ions "cross each other". For example, one pair could

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BATH ORIGINAL

in the same plane but old at an angle Be arranged with respect to the other pairs. So could for example a mode in the so-called 12 TJnr position and its associated cathode in the 6 Unr position while the other anode is in the 3 ear «and its cathode is in the 9 o'clock position.

With the arrangement of the anode-cathode pairs according to FIG. 3 , the properties of the arrangements according to the EIg. 3D and 30 combined "The anode 33 is divided into two electrically interconnected cables" anodes 33a and 33b, which are arranged on both sides of and closely adjacent to the filament 36. Correspondingly, the anode 34 is divided into two electrically interconnected! Cable anodes 34a and 54b on both sides of and serves adjacent; The anode 33 and the anode 34 can each alternatively be designed as a single unit through which a hole passes. In this case, the hot filament 36 would be arranged in the hole of the anode 33 and the heating filament 35 in the hole of the anode 34. In this way, the independent ion currents are superimposed on one another over their entire length. In this way, an extensive grouping of electronics becomes larger

0 0 9828/1480

Uniformity and a view that is roughly doubled in relation to a single anode-cathode pair «

In the embodiments of the Big, JA "3D, it is of particular importance that the anodes are electrically isolated from each other as is also shown« Deh · that each anode-cathode pair must have its own Spannungequelle, ssu produce independent ion currents "If the embodiments governed according to Figs. 3A - 3D also particularly advantageous in connection with der.T-shaped sputtering chamber according to Pig. 1 and 2, because the anodes and cathodes can be arranged next to one another along the longitudinal axis of the main area, these exemplary embodiments can also be used advantageously in other atomizing devices, for example the bell-shaped devices. In addition, more than two anode-cathode pairs can be used in arrangements which correspond to the exemplary embodiments according to FIGS. 3A-3D.

In Figo 4- a complete atomization system is shown, which consists of several stations for cleaning and coating of (carriers as well as for an automatic

009828 / 1A80

Operation is set up. There are two B-shaped ones Chambers 43 and 44 with the aid of a spacer 45 tied together. The one bath of a wing-shaped entrance

46 is connected to the double-ended chamber 43, while the other bath of the entrance is closed by a plate 63 closed free end of the output with a plate 64 iet ₀ the vertical sections of the input 46 and the output 47 an airtight line 48 are interconnected by means of · the conduit designed 48 1st so that a conveyor belt 49 or other Sin · »direction ofcne Difficulties transporting carriers and / or objects see below and from the T-fSraigen chambers 45 and 44 «

Well-known catfish can be found at the entrance 46 devices be provided that place the carrier on the conveyor belt and align; accordingly can at the exit

47 Devices for removing the coated, _or processed carrier, should be provided. "A vacuum pump 50 is connected to the branch of the T-shaped chamber 43", which evacuates the airtight system · According to the illustration in Mg · 4 is the

009828/1 LBQ

Junction d © z »3V £ -shaped chamber 44 closed,
However, an external vacuum pump can be connected at this point, if this is necessary for emergency purposes.
is kept manoeuvrable · Each T-shaped chamber can accommodate a single anode / cathode or, with particular advantage, a multiple anode / cathode pair arrangement in accordance with Mg · JA-3D.

Claims (10)

1815137 JL η a ] sr ϋc it ar lc 2Ht plasma working "sputtering device for removing material from an object that is fastened in an evacuable chamber" with the help of ions of an ion current that hit the surface of the object, characterized by at least two electrically independent circles from each of which contains a cathode-anode pair (35 »35; 5 ^£ ί · _ί 3β), each of which in the chamber (10) generates electrically independent ion currents which together form an accumulation of ions bombarding the object (27). 2. Device according spoke 1, characterized in that the cathode-anode pairs with such reference are arranged on top of each other so that they are essential generate ion streams running in parallel " 3 «Gate direction according to claim 2, characterized in that the cathode-jtaode pairs with reference to ·» are arranged to each other that the generated by them 009828/1480 streams of coronates in the same direction exu 4 · «device according to claim 2, characterized in that that the cathode-AaocLen pairs so with reference to " are arranged to one another »that those produced by them Ion currents have opposite direction " 5 · Yorriclitung according to one of the claims 1 - * *, characterized in that the cathode-anode pairs are arranged with respect to one another that aich cross the ion currents generated by them 6 β device according to one of claims 1 - 5t characterized in that the Eathoden-anode pairs _s are so arranged with respect to each other that the Ionenstrose produced by them substantially coincide * 7 · Device according to one of claims 1 - 6 _t characterized by a magnet which is in the. Area in which ion currents generate a magnetic field which has a uniform direction and intensity in planes which run parallel to the surface of the object C2?). 8 «device according to claim. 7 »characterized, 0 0 9828/1 /, 8 0 BAD ORiG.NAL that the magnet (31,56) has an elongated cross section has, the greater extent of which is essentially parallel to the surface of the object. 9> Door direction according to claim 8, characterized in that the magnet is a second magnetic coil (56) having an elongated cross-section in a direction substantially parallel to the surface of the object and its magnetic field with the Magnetic field of the first coil (Jl) runs in the same direction. 10. Device according to one of claims 1-9, characterized in that the evacuable chamber has a T-shaped cross-section and with its horizontal Main area (10) is the cathode-anode system takes « 11 * Device according to claim 10, characterized in that that the two baths of the main area ClO) and the free end of the ^ approach (11) flange exhibit. 12 «Device according to claim 10 or H ₉ characterized by one, the interior of the Φ-föraigea chamber 0 0 9 8 2 8/1480 closing Klep.pe (19). 13ο device according to. Claim 12, characterized in that that a feneter (21) is provided in the flap (19) is. 0098 28/1 h 80