DE1213538C2 - - Google Patents
Info
- Publication number
- DE1213538C2 DE1213538C2 DE1962ST019532 DEST019532A DE1213538C2 DE 1213538 C2 DE1213538 C2 DE 1213538C2 DE 1962ST019532 DE1962ST019532 DE 1962ST019532 DE ST019532 A DEST019532 A DE ST019532A DE 1213538 C2 DE1213538 C2 DE 1213538C2
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEST19532A DE1213538B (de) | 1962-07-27 | 1962-07-27 | Verfahren zum Feststellen der Reinheit von kristallinen Halbleiteroberflaechen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEST19532A DE1213538B (de) | 1962-07-27 | 1962-07-27 | Verfahren zum Feststellen der Reinheit von kristallinen Halbleiteroberflaechen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1213538B DE1213538B (de) | 1966-03-31 |
| DE1213538C2 true DE1213538C2 (cs) | 1966-10-13 |
Family
ID=7458239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEST19532A Granted DE1213538B (de) | 1962-07-27 | 1962-07-27 | Verfahren zum Feststellen der Reinheit von kristallinen Halbleiteroberflaechen |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE1213538B (cs) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2837471A (en) * | 1955-12-30 | 1958-06-03 | Bell Telephone Labor Inc | Method of locating pn junctions in semiconductive bodies |
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1962
- 1962-07-27 DE DEST19532A patent/DE1213538B/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE1213538B (de) | 1966-03-31 |