DE1185295C2 - - Google Patents

Info

Publication number
DE1185295C2
DE1185295C2 DE1962S0078008 DES0078008A DE1185295C2 DE 1185295 C2 DE1185295 C2 DE 1185295C2 DE 1962S0078008 DE1962S0078008 DE 1962S0078008 DE S0078008 A DES0078008 A DE S0078008A DE 1185295 C2 DE1185295 C2 DE 1185295C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1962S0078008
Other languages
German (de)
Other versions
DE1185295B (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DES78008A priority Critical patent/DE1185295B/de
Publication of DE1185295B publication Critical patent/DE1185295B/de
Application granted granted Critical
Publication of DE1185295C2 publication Critical patent/DE1185295C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
DES78008A 1962-02-13 1962-02-13 Verfahren zum Behandeln von zur Fertigung von Halbleiterbauelementen dienenden Bauteilen in einer Fluessigkeit Granted DE1185295B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DES78008A DE1185295B (de) 1962-02-13 1962-02-13 Verfahren zum Behandeln von zur Fertigung von Halbleiterbauelementen dienenden Bauteilen in einer Fluessigkeit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES78008A DE1185295B (de) 1962-02-13 1962-02-13 Verfahren zum Behandeln von zur Fertigung von Halbleiterbauelementen dienenden Bauteilen in einer Fluessigkeit

Publications (2)

Publication Number Publication Date
DE1185295B DE1185295B (de) 1965-01-14
DE1185295C2 true DE1185295C2 (ref) 1965-09-02

Family

ID=7507171

Family Applications (1)

Application Number Title Priority Date Filing Date
DES78008A Granted DE1185295B (de) 1962-02-13 1962-02-13 Verfahren zum Behandeln von zur Fertigung von Halbleiterbauelementen dienenden Bauteilen in einer Fluessigkeit

Country Status (1)

Country Link
DE (1) DE1185295B (ref)

Also Published As

Publication number Publication date
DE1185295B (de) 1965-01-14

Similar Documents

Publication Publication Date Title
BE616548R (ref)
AU269855A (ref)
AU480751A (ref)
BE380301A (ref)
BE489310A (ref)
BE538252A (ref)
BE538831A (ref)
BE541929A (ref)
BE553896A (ref)
BE559145A (ref)
BE586180A (ref)
BE592434A (ref)
BE599783A (ref)
BE604335A (ref)
BE608197A (ref)
BE609543A (ref)
BE612190A (ref)
BE612311A (ref)
BE612464A (ref)
BE612847A (ref)
BE612926A (ref)
BE613108A (ref)
BE613190A (ref)
BE613298A (ref)
BE613319A (ref)