DE112013002966T8 - Thermischer Durchflussmesser - Google Patents

Thermischer Durchflussmesser Download PDF

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Publication number
DE112013002966T8
DE112013002966T8 DE112013002966.9T DE112013002966T DE112013002966T8 DE 112013002966 T8 DE112013002966 T8 DE 112013002966T8 DE 112013002966 T DE112013002966 T DE 112013002966T DE 112013002966 T8 DE112013002966 T8 DE 112013002966T8
Authority
DE
Germany
Prior art keywords
flow meter
thermal flow
thermal
meter
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112013002966.9T
Other languages
English (en)
Other versions
DE112013002966T5 (de
Inventor
c/o Hitachi Automotive Systems Tokuyasu Noboru
c/o Hitachi Automotive Systems L Hanzawa Keiji
c/o Hitachi Ltd. Kono Tsutomu
c/o Hitachi Car Engineering Co. Tashiro Shinobu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Publication of DE112013002966T5 publication Critical patent/DE112013002966T5/de
Application granted granted Critical
Publication of DE112013002966T8 publication Critical patent/DE112013002966T8/de
Active legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02DCONTROLLING COMBUSTION ENGINES
    • F02D41/00Electrical control of supply of combustible mixture or its constituents
    • F02D41/02Circuit arrangements for generating control signals
    • F02D41/18Circuit arrangements for generating control signals by measuring intake air flow
    • F02D41/187Circuit arrangements for generating control signals by measuring intake air flow using a hot wire flow sensor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845Micromachined devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696Circuits therefor, e.g. constant-current flow meters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696Circuits therefor, e.g. constant-current flow meters
    • G01F1/698Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696Circuits therefor, e.g. constant-current flow meters
    • G01F1/698Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/006Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus characterised by the use of a particular material, e.g. anti-corrosive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02Compensating or correcting for variations in pressure, density or temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14Casings, e.g. of special material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18Supports or connecting means for meters
    • G01F15/185Connecting means, e.g. bypass conduits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Volume Flow (AREA)
DE112013002966.9T 2012-06-15 2013-05-31 Thermischer Durchflussmesser Active DE112013002966T8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-136379 2012-06-15
JP2012136379A JP5676527B2 (ja) 2012-06-15 2012-06-15 熱式流量計
PCT/JP2013/065131 WO2013187247A1 (ja) 2012-06-15 2013-05-31 熱式流量計

Publications (2)

Publication Number Publication Date
DE112013002966T5 DE112013002966T5 (de) 2015-03-12
DE112013002966T8 true DE112013002966T8 (de) 2015-05-07

Family

ID=49758076

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013002966.9T Active DE112013002966T8 (de) 2012-06-15 2013-05-31 Thermischer Durchflussmesser

Country Status (5)

Country Link
US (1) US9658091B2 (de)
JP (1) JP5676527B2 (de)
CN (1) CN104412074B (de)
DE (1) DE112013002966T8 (de)
WO (1) WO2013187247A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5645880B2 (ja) * 2012-06-15 2014-12-24 日立オートモティブシステムズ株式会社 熱式流量計
JP6198697B2 (ja) * 2014-08-14 2017-09-20 日立オートモティブシステムズ株式会社 熱式流量計
DE102015219501A1 (de) * 2015-10-08 2017-04-13 Robert Bosch Gmbh Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums
JP6475860B2 (ja) * 2015-10-28 2019-02-27 日立オートモティブシステムズ株式会社 流量計
DE102017206226A1 (de) * 2017-04-11 2018-10-11 Robert Bosch Gmbh Sensor zur Erfassung mindestens einer Eigenschaft eines fluiden Mediums
WO2020110742A1 (ja) * 2018-11-29 2020-06-04 日立オートモティブシステムズ株式会社 物理量測定装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3323745B2 (ja) * 1996-07-25 2002-09-09 株式会社日立製作所 物理量検出装置の特性調整手段および発熱抵抗式空気流量装置
JP3638750B2 (ja) 1997-03-25 2005-04-13 株式会社ルネサステクノロジ 半導体装置
WO2002095339A1 (fr) * 2001-05-24 2002-11-28 Hitachi, Ltd. Debitmetre a resistance chauffante
JP2003139593A (ja) * 2001-11-07 2003-05-14 Hitachi Ltd 車載電子機器および熱式流量計
JP3780243B2 (ja) * 2002-09-17 2006-05-31 株式会社日立製作所 流量検出装置および電子装置
JP4090395B2 (ja) 2003-06-30 2008-05-28 株式会社日立製作所 圧力検出装置
JP2009085855A (ja) * 2007-10-02 2009-04-23 Hitachi Ltd 流量測定装置及び内燃機関の制御システム
JP4549406B2 (ja) 2008-05-19 2010-09-22 三菱電機株式会社 電子部品搭載構造及び車載用センサー
JP4827961B2 (ja) * 2009-10-19 2011-11-30 三菱電機株式会社 流量測定装置
JP5208099B2 (ja) * 2009-12-11 2013-06-12 日立オートモティブシステムズ株式会社 流量センサとその製造方法、及び流量センサモジュール
JP5195819B2 (ja) * 2010-06-02 2013-05-15 株式会社デンソー 空気流量測定装置
JP5496027B2 (ja) * 2010-09-09 2014-05-21 日立オートモティブシステムズ株式会社 熱式空気流量計

Also Published As

Publication number Publication date
DE112013002966T5 (de) 2015-03-12
CN104412074B (zh) 2017-08-18
CN104412074A (zh) 2015-03-11
US9658091B2 (en) 2017-05-23
US20150122010A1 (en) 2015-05-07
JP2014001990A (ja) 2014-01-09
WO2013187247A1 (ja) 2013-12-19
JP5676527B2 (ja) 2015-02-25

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R081 Change of applicant/patentee

Owner name: HITACHI ASTEMO, LTD., HITACHINAKA-SHI, JP

Free format text: FORMER OWNER: HITACHI AUTOMOTIVE SYSTEMS, LTD., HITACHINAKA-SHI, IBARAKI, JP