DE10321962B4 - Method and apparatus for simulating a yaw rate and using simulated yaw rates for initial calibration of yaw rate sensors or for in-service recalibration of yaw rate sensors - Google Patents

Abstract

Apparatus for simulating a yaw rate acting on a yaw rate sensor, the yaw rate sensor comprising oscillation means (100), primary excitation means (106) for driving the oscillation means (100) to a primary movement (102), secondary detection means (108) for outputting an output signal, which depends on a secondary movement (104) of the oscillating device and on a rate of rotation of the rotation rate sensor about a sensitive axis thereof, having the following features:
a device (24) for providing a value of a first compensation signal (12a) and a value of a second compensation signal (12b), wherein the values of the first and second compensation signals are selected such that a deflection of the oscillation device due to a first acceleration in the direction of Primary motion is compensated for, and that a deflection of the vibrator is compensated for due to a second acceleration in the direction of the secondary movement (104), and for providing frequency response information (22) of the vibrator (100) due to excitation by the primary exciter (106); and
a device (20) for generating and applying a simulation signal (109) to ...

Description

The The present invention relates to yaw rate sensors, and more particularly on the calibration of rotation rate sensors. Micromechanical Coriolis force gyroscopes own diverse Application fields, of which, for example, the position determination of an automobile or an airplane. Generally own such sensors have a movable mechanical structure, which too a periodic oscillation is excited. These periodic, excitation generated vibration is also called the primary vibration designated. learns the sensor rotates about an axis perpendicular to the primary vibration or primary movement, so leads the movement of the primary vibration to a Coriolis force proportional to the measurand, i. H. the angular velocity, is. The Coriolis force becomes one second, to the primary vibration orthogonal oscillation excited. This second, to the primary vibration Orthogonal vibration is also called secondary vibration or secondary motion designated. The secondary vibration, which is also referred to as a detection vibration, can by various Measurement method are recorded, with the detected size as a measure of the the yaw rate sensor acting yaw rate is used. To the primary vibration Among other things, thermal, piezoelectric, electrostatic and inductive methods used in the Technics are known. To the detection of the secondary vibration are piezoelectric, piezoresistive or capacitive principles of the technique.

Angular rate sensors can be carried out in a variety of ways. All rotation rate sensors but have in common that they comprise a vibrating device, by a primary excitation device in the primary movement is displaceable and that they have a secondary detection device, the one secondary movement can measure due to an acting on the rotation rate sensor yaw rate. When not decoupled Sensors leads one and the same vibrating mass both the primary movement as well as the secondary movement out. This oscillating device is then designed such that she includes a mass movable in both the x-direction and the y-direction suspended becomes. Without restriction In general, it is assumed that the x direction is the direction of the primary motion or the primary vibration is, and that the y-direction is the direction of the secondary movement or the secondary vibration is, and that the yaw rate on the vibrating device in z-direction acts.

The WO 98/15799 discloses rotation rate sensors with decoupled movements the vibrating device. The oscillating device is in a primary oscillator and a secondary oscillator divided up. The primary oscillator leads one Oscillation in the primary direction through and so is the secondary oscillator coupled that the primary vibration transferred to the secondary oscillator becomes. The primary oscillator However, it is suspended on a substrate such that it only in the primary direction can move, but not in the secondary direction. This leads to a on the primary oscillator acting Coriolis force due to a rate of turn not to that the primary oscillator in the secondary direction is deflected because this degree of freedom of movement due to his suspension for the primary oscillator Does not exist. In contrast, the secondary oscillator is suspended in such a way that he himself in both primary direction as well as in the secondary direction can move. The secondary movement leads to, that is the secondary oscillator in the secondary direction be moved, this secondary movement by the secondary detection device is detectable. Preferably, the secondary detection device is included designed so that it does not capture the primary movement that the secondary oscillator yes only because of that, to be "sensitive" to the Coriolis force. The connection between the primary vibrators and the secondary oscillator Furthermore, in order to achieve an even better coupling, it is designed such that that while the primary vibration from the primary oscillator transferred to the secondary oscillator but that is the secondary vibration not on the primary vibrator transferred back becomes.

Such a rotation rate sensor, as known from WO 98/15799, is known in 5 shown. The rotation rate sensor 500 has a primary oscillator 506 on top of a primary oscillator suspension 504 consisting of four anchorages 504a and four spring bars 504b is attached to a base body (not shown). In order to excite, ie, vibrate, the primary oscillator, it comprises one electrode group on two opposite sides 508 leading to a fixed electrode group 510 , ie to an electrode group connected to the main body 510 , is arranged to form a so-called Comb-Drive to the primary oscillator 506 capacitively stimulate. The primary oscillator suspension 504 is designed to be a vibration of the primary vibrator 506 in the x direction, while a movement of the primary vibrator 506 effectively avoided in the other two directions. The spring bars 504 Therefore, they have a rectangular cross section, wherein the narrow side of the cross section along the x-direction is selected, while the long side of the cross section along the z-direction. Again, it should be noted that in addition to the cross-sectional geometry of the cantilever, the aniso Trope rigidity of the primary and secondary oscillator suspension can also be achieved by arranging a plurality of spring beams with the same cross-sectional geometries at corresponding places.

A secondary oscillator 514 is about secondary oscillator suspensions 512 with the primary oscillator 506 connected as it is in 5 is shown. The secondary oscillator 514 has secondary oscillator electrode groups arranged parallel to the x-axis 550 placed in fixed secondary vibrator sensing electrode groups 552 arranged comb-like intermeshing to a capacitive detection of the movement of the secondary oscillator 514 in the y direction.

Will the rotation rate sensor 500 with an angular velocity Ω _y about the symmetry axis of the secondary oscillator 514 or rotated parallel to this axis of symmetry, ie to an axis parallel to the y-axis, so acts on the secondary oscillator 514 a Coriolis force, which leads to a substantial translational movement of the secondary oscillator in the z-direction. The translatory movement of the secondary oscillator 514 in the z-direction can be detected by a detection electrode 516 that under the secondary oscillator 514 is arranged to be detected capacitively.

Will the rotation rate sensor 500 with an angular velocity Ω _z about an axis perpendicular to the center of the secondary oscillator 514 is parallel to the z axis or is generally rotated to an axis parallel to the z axis, a Coriolis force acts on the secondary vibrator, causing it to move in the y direction. This movement in the y direction of the secondary oscillator 514 represents a translational oscillation, since the primary oscillator also performs a translatory oscillation. The detection of the movement of the secondary oscillator 514 in the y-direction takes place capacitively through the secondary oscillator electrode group 550 and by the fixed sense electrode groups 552 instead of. The spring bars 512 comprise a substantially square cross-sectional configuration, since they allow deflection in both the z-direction and the y-direction, such that biaxial detection can occur. A relative movement of the secondary oscillator 514 and the primary vibrator 506 is due to the arrangement of the spring bars 512 prevents which all run parallel to the x-axis. If the in 5 Rotational speed sensor shown to be designed as a single-axis sensor with a secondary movement in the xy direction, the spring beam cross-sections are designed rectangular.

The primary oscillator suspension ensures that the primary oscillator 504 is not movable by the Coriolis force in the y- or z-direction, since a movement of the primary oscillator in the z-direction by the cross-sectional configuration of the cantilever 504b is made impossible, in addition to the arrangement of the spring bar 504b parallel to the y-axis prevents movement in the y-direction of the primary oscillator. Furthermore, the anchorages have 504a a corresponding stiffness, so that they also allow no deflection in the y-direction.

WO 98/15799 further discloses a plurality of other yaw rate sensors having different types of primary and secondary vibrations based on the primary vibration being decoupled from the secondary vibration. While in 5 Rotation rate sensor shown in both the primary direction and in the secondary direction performs a linear vibration, other gyroscopes are described, namely those that perform a rotational movement in the primary direction and also perform a rotational movement in the secondary direction. Alternative rotation rate sensors are also available that z. B. the primary movement is rotational, but the secondary movement is linear and vice versa.

Of the price for Micromechanical rotation rate sensors is essentially by the costs for the production of the silicon chip, the assembly and connection technology and testing and calibrating the sensors. For larger quantities The costs are distributed approximately evenly. Of the Silicon chip as well as the assembly and connection technology amount together two thirds while the time-consuming testing and calibration of the rotation rate sensors up to to one third of the total costs. The reason for the very high cost of the test and the calibrations is the fact that completely constructed yaw rate sensors usually individually tested on a turntable for functionality and have to be calibrated. Particularly cost-intensive are measurements over the entire temperature range, in which the rotation rate sensor should work. Especially for automotive Applications, this temperature range is considerable, it will be of minus degrees extend to high degrees of plus to allow for the entire temperature range, in which a motor vehicle works, for a z. B. Navigation of Vehicle available to be.

In the context of the constantly increasing technical requirements, in particular the reliability as well as the performance parameters, micromechanical rotation rate sensors are to meet specifications with very high demands, which until now have been fulfilled exclusively by fiber-optic gyroscopes ner price range of several thousand euros are attributable. Examples of high-specification applications include most aerospace military and aerospace applications.

Next the time-consuming individual calibration of the rotation rate sensors on a turntable that generates a rotation rate for the rotation rate sensor, and possibly in a laboratory, it is also required the functionality of the sensor to monitor during operation. Especially with micromechanical rotation rate sensors exist strong temperature influences, and in particular when the vibrating device in terms of on the primary movement operated in resonance to a sensor with high sensitivity to achieve what only possible is when the resonance cant due the primary side Resonance is exploited. A recalibration due to the temperature variations Therefore, the sensor in normal operation took place in that the Temperature of the sensor was measured and due to the laboratory recorded temperature specifications a readjustment took place Has. Alternative and additional are also primary-sided Amplitude and phase controls known, in that the primary amplitude and primary frequency the primary excitation signal always changed like that be that on the one hand, the rotation rate sensor always in the primary side Resonance is operated and that on the other hand, the amplitude of the primary oscillation is constant or at least one downstream evaluation is known.

Problematic is in these measures, that they especially with regard to the laboratory recorded Temperature variations can only approximate a real case, since Second order variations, such as mechanical aging strongly stressed structure is not taken into account. For this Reason is known, plausibility checks of the output signal by the readout electronics generating a test signal, the above electrostatic forces the yaw rate sensor corresponding to the Coriolis force force imprints, which in turn provides an output signal. The test output signal is compared with a determined initial output signal and If there is too much deviation, an error message will be issued. This self-test can also have a functionality of the sensor by applying a defined voltage to a designated Pin include.

in the The prior art therefore uses the initial calibration a turntable for generating a real rate of rotation or more Rotation rate instead, with a recalibration during operation only on the basis of temperature variations determined in the laboratory. Furthermore, the output signal of the sensor can be checked for plausibility, in case of too big Deviation to signal a malfunction of the sensor to the Remove sensor, bring it into the laboratory and recalibrate, or immediately replaced by a new (freshly calibrated) sensor.

adversely At this proceeding is the fact that on the one hand, like it accomplished calibration has been very time-consuming and thus cost-intensive is needed because a turntable is to calibrate the sensor, and further because the overall temperature response must be recorded at least approximately to get good recalibration of the sensor during operation.

Farther disadvantageous is the fact that when the plausibility check indicates that the sensor no longer delivers plausible output signals, a complete removal of the sensor combined with a recalibration or a complete one Replacement needed can be, especially in automotive applications or too for applications in the air and air Space travel is little tolerable or not possible.

The DE 199 39 998 A1 discloses a bias generation apparatus for a rotation rate sensor. By evaluating a yaw rate signal and a quadrature signal, control signals are generated using an adaptive quadrature compensation signal, which are converted by means of a bias generation arrangement into biases which are applied to electrodes of the yaw rate sensor. As a result, the sensor structure is tilted so that the quadrature signal occurring at the output is minimized.

The DE 696 15 468 T2 discloses an apparatus for measuring angular velocity with a piezoelectric transducer which rotates at angular velocity. Further, the transducer is excited at a certain frequency in a first direction. In addition, an angular velocity measurement signal is generated in response to a second vibration of the transducer. Further, a third vibration of the transducer is generated at the predetermined frequency in the second direction and with a phase opposite to a parasitic component of the second vibration. Finally, the amplitude of the oscillation is adjusted to the amplitude of the parasitic component of the second oscillation.

The DE 198 35 578 A1 discloses an apparatus for determining a rate of rotation, are compensated in the differences in the transmission behavior of piezoelectric elements in a damping stage and piezoelectric elements of an oscillator stage by the signal provided for exciting the attenuation stage signal is changed accordingly.

The DE 199 10 415 A1 discloses a method and apparatus for tuning a first oscillator to a second oscillator, wherein first the response of the first oscillator is determined to then perform tuning of the first oscillator with respect to the second oscillator.

The DE 198 45 185 A1 discloses a resonant structure sensor and apparatus and method for self-testing such a sensor. A test signal component is generated by a second periodic oscillation of a resonant structure superimposed on a first oscillation. The test signal component, which is superimposed on a useful signal component, is compared with a predefined value or with a test signal supplied to the sensor in order to achieve a self-test of the sensor.

The U.S. Patent No. 6,205,838 B1 discloses an apparatus for determining a rotational speed at the output signals of a rotation rate sensor be evaluated by means of a digital circuit. This is the transfer function from an electronically generated excitation voltage to the output of the Accelerators identified or it becomes a transfer function from the electronically generated test voltage at the input to the accelerating elements generated to its output to systematic errors of the rotation rate sensor to be considered in digital sensor signal processing.

The WO 98/15799 discloses rotation rate sensors with decoupled orthogonal Primary- and secondary vibrations.

The The object of the present invention is to provide a more efficient and more fault tolerant concept for calibrating gyroscopes to accomplish.

These The object is achieved by a device for simulating a rate of rotation according to claim 1, a method for simulating a yaw rate according to claim 5, a device for calibrating a rotation rate sensor according to claim 6, a method for calibrating a rotation rate sensor according to claim 9, a device for recalibrating a Rotation rate sensor according to claim 10 or a method for recalibration a rotation rate sensor according to claim 22 solved.

Of the The present invention is based on the finding that both the initial calibration of a rotation rate sensor as well as the in-operation recalibration a rotation rate sensor can be decidedly simplified when no known rate of rotation on the sensor (eg through a turntable) exercised but when the vibrating device in secondary motion is stimulated so that simulates a precisely quantized rotation rate becomes. Simulating a precisely quantized yaw rate by a drive signal to a secondary excitation device, the preferably with the secondary detection device is identical, allows on the one hand, an initial calibration of the rotation rate sensor under Use of two different simulated yaw rates completely without Use a turntable.

Farther allows it is the simulation of an exactly quantified rate of turn that one In-operation recalibration of the rotation rate sensor can take place, without the rotation rate sensor must be removed, and without that for the rotation rate sensor, for example, must be required that the vehicle in which the yaw rate sensor is located in a defined situation.

Farther allows it simulates the invention a precisely quantified rate of turn that on the record a temperature transition in the laboratory can be dispensed with, if one primary side Regulation is provided. Then, based on a due the primary side Regulation changed Drive frequency or drive amplitude to be simulated exactly nachgesteuert be quantified rotation rate, to the effect that at the rate of rotation to be simulated by deflection of the oscillating device in the secondary direction the results of the primary-side Control can be used even under changing temperature conditions to simulate a correct and defined quantified rate of turn and based on this, perform a calibration of the rotation rate sensor to be able to.

To simulate a precisely quantized rate of rotation of the rotation rate sensor is the rotation rate sensor According to the invention characterized in that a first acceleration is exerted on the oscillating device in the direction of the primary movement, and then by a compensation signal for compensating the deflection due to the first acceleration is determined. Thus, the sensitivity of the prime mover, ie the ratio of the force acting on the primary drive force, which is equal to the product of the mass of the prime mover and the first acceleration, determined to be applied to the primary drive for compensation purposes electrical signal.

Corresponding is for the secondary detection device or the required secondary drive proceeded, the secondary drive will typically be identical to the secondary detection device, this being particularly the case in the electrostatic case of a comb drive as a secondary detection device will be like this. Here, in turn, the secondary drive with a second Acceleration deflected in the direction of the secondary movement, where this deflection then by applying a signal to the secondary drive is compensated, wherein the compensation signal thus obtained in turn serves to increase the sensitivity of the secondary drive to investigate. The sensitivity of the secondary drive is again relationship the force on the secondary drive acts and the product of the mass of the secondary oscillator and the second Acceleration, whereby the to be applied to the secondary drive electrical Signal taken into account to compensate for the generated deflection becomes.

Further the gyroscope sensor is calibrated so that the frequency response of the secondary vibrator determine what happens without using a turntable, that a drive signal with different frequencies is applied and the movement of the secondary oscillator due to the drive signal preferably in magnitude and phase is recorded. From the resonance curve is then easily the resonant frequency of the vibrating device in secondary motion and preferably also the quality or damping detectable, which already satisfy as frequency response information.

at the preferred embodiment the oscillating device is outside in the secondary direction the resonance operated, so that in this case no frequency response information on the Oscillating device in the secondary movement direction needed become. If the oscillating device in the secondary movement direction, however, also operated in resonance or very close to the resonance, so is preferably also the frequency response of the secondary device recorded.

On the basis of the compensation signals, the frequency response information and the numerical value of the rate of rotation to be simulated is then an according to the invention the secondary drive device to be applied amplitude signal determined, the still of the amplitude the excitation signal and the frequency of the excitation signal depends, and that when it comes to the secondary drive device is applied, to a deflection of the vibrating device in the secondary direction leads, which is exactly the same as when no signal to the secondary detector would be created if, however, instead of the simulated yaw rate a true yaw rate with exactly the same quantity would be available.

One Advantage of the present invention is that the initial Calibration of a rotation rate sensor no turntable is required. Another advantage of the present invention is that due to the possible In-service recalibration no complete temperature changes must be recorded in advance in the laboratory.

One Another advantage of the present invention is that the sensor can be recalibrated during operation, so that no more plausibility check is necessary, and that particular aging situations individually Can be taken into account, which causes a sensor only then must be exchanged, when he is mechanically destroyed is, but not if he just lost the calibration.

Therefore, according to the invention on the one hand the effort for the final tests of built-up rotation rate sensors by the independent first or initial calibration reduced without using a turntable. On the other hand, the realization of a preferably permanent independent Control during the sensor operation and by a separate Reka librierung also while of the sensor operation, the performance of the rotation rate sensors, in particular the drift of the sensor parameters scale factor and zero point, improved.

In the total cost of rotation rate sensors, the comparatively high costs for the time-consuming testing and calibration are reduced according to the invention. In particular, the very costly testing of the sensors over the entire temperature range becomes obsolete in connection with the recalibration according to the invention, which builds on the simulation of a precisely quantized rotation rate. Furthermore, the steadily stei ing requirements for reliability and performance parameters by minimizing the largest errors in sensor stability or sensor accuracy caused by drifting of the scale factor and zero point.

at a preferred embodiment In the present invention, the rotational rate sensor under consideration is one Rotation rate sensor with orthogonal decoupled oscillations, ie with a primary vibration, that of the secondary vibration is orthogonally decoupled, such that the vibrating means a primary oscillator and one from the primary transducer separated and connected by a special coupling secondary oscillator includes. Furthermore, it is preferred to excite the primary oscillator linearly and a linear secondary movement to obtain, so that the characterization of the rotation rate sensor and in particular the primary excitation device and the secondary detection device can take place with linear accelerations. In particular, will it then prefers, as a linear acceleration both to the deflection of the prime mover as well as secondary education to use the gravitational acceleration that exists everywhere, and whose Value is in particular almost constant. This must be used to characterize the Rotation rate sensor does not even generate an acceleration, but it can be anywhere existing gravitational acceleration exploited as a well-known reference become. This is achieved in that the rotation rate sensor such arranged in the gravitational field that in a first step the gravitational acceleration a deflection of the vibrating device in primary movement causes, and that in a second calibration step of the rotation rate sensor so concerning of the gravitational field is arranged that the gravitational acceleration a deflection of the oscillating device in the direction of the secondary movement causes. It is particularly advantageous that no accelerations must be generated. Only the control of the orientation of the rotation rate sensor in Gravitational field so for example using a simple Spirit level device or a pendulum etc. is required to be able to determine a sufficiently accurate compensation signal.

preferred embodiments The present invention will be described below with reference to FIG the accompanying drawings explained in detail. Show it:

1 a block diagram of the inventive device for characterizing a rotation rate sensor;

2 a device for simulating a rate of rotation in an in 2 also shown rotation rate sensor;

3 a device for initially calibrating a rotation rate sensor;

4 a device for in-operation recalibration of a rotation rate sensor;

5 a plan view of a known rotation rate sensor with orthogonal decoupled vibration modes in the primary and secondary directions;

6 a voltage / rotation rate diagram for explaining the in-service recalibration;

7 a voltage / rotation rate diagram for explaining the calibration of the zero point in the operation of the rotation rate sensor; and

8th a detailed representation of a drive or readout electronics according to a preferred embodiment of the present invention.

Subsequently, reference will be made to 2 generally shown a rotation rate sensor, which is first characterized according to the invention, and then to simulate a rotation rate, the z. B. can be used for initial calibration of the sensor or for in-service recalibration of the sensor. The rotation rate sensor generally comprises a swinging device 100 which, depending on the embodiment, a single oscillatory mass or, as it is based on 5 may comprise a primary oscillator and a secondary oscillator or any number of primary and secondary oscillators. General is the vibrating device 100 hung, on the one hand a primary movement 102 For example, to be able to perform in the x-direction, and to a secondary movement 104 z. B. to execute in the y direction. The primary movement 102 is by a primary excitation device 106 achieved, which is generally designed to be an input signal 107 with an amplitude Ux 107a and a frequency ω 107b in a move tion of the vibrating device 100 in the primary direction 102 implement.

The rotation rate sensor further comprises a secondary device 108 which, depending on the embodiment, may be subdivided into a secondary detection device 108a and a secondary excitation device 108b which, however, can also be based on the same physical elements. Thus, it is typically sufficient to arrange a single electrode structure on the secondary side, by means of which both a secondary movement is measured and a secondary movement can be excited. In this case, the elements would 108a and 108b in a single institution 108 merge. The same is true for the primary excitation device 106 which may also be divided into an actual exciter and a primary-side detector. However, it can also be z. B. a common Comb-Drive, so an arrangement with interdigitated electrodes are used to both the vibrating device 100 in the primary direction 102 stimulate as well as the movement of the vibrating device 100 in primary movement direction 102 capture.

The secondary detection device 108 is configured to output a signal V, which is proportional to an applied rotation rate Ω in a normal rotation rate sensor. The secondary excitation device 108b is analogous to the primary excitation device with regard to the mechanical design 106 trained to receive a secondary excitation signal 109 , which again has a secondary excitation amplitude Uy 109a and a secondary excitation frequency ω 109b comprises, in a secondary movement y of the vibrating device 100 implement. The element 106 in 2 would the electrodes 508 . 510 in 5 match while the item 108 in 2 on the one hand the electrodes 550 . 552 or the electrodes 514 . 516 from 5 would correspond.

The in 2 Yaw rate sensor shown comprises means 20 for generating the secondary excitation signal 109 , ie the secondary excitation amplitude U _y 109a and the secondary excitation frequency ω 109b (= Drive frequency ω _drive ), the device 20 is designed to be used as input to generate the secondary excitation signal 109 simulates the rate of rotation Ω _{si simulated} 21 , Frequency response information of the primary excitation device 22 and compensation signals 23 to obtain. While _simulating to be simulated rotation rate Ω 21 is input from the outside, the frequency response information 22 and the compensation signals 23 from a facility 24 to provide this information. The device 24 can either on-line the information 22 . 23 deliver as discussed later 1 is pictured. Alternatively, the device 24 for providing also be designed as a memory to the frequency response information 22 and the compensation signals 23 if necessary read from a memory at some point, namely as the rotation rate sensor 100 . 106 . 108 leaving the factory has been described. The device 24 for providing may further be configured to provide only an input function such that an operator of the yaw rate sensor senses that it is during characterization of the yaw rate sensor, as will be described later 1 is presented, frequency response information determined 22 and compensation signals 23 to obtain.

It should be noted at this point that the signal V received from the secondary detection device 108 is output, in the case where an outer yaw rate Ω 101 is applied, proportional to the applied, ie measured yaw rate Ω is _measured . If there is no yaw rate, but only a yaw rate by the secondary excitation signal ¹⁰⁹ simulated, so "measures" the secondary detection device 108 This simulated rotation rate Ω _simulated and outputs a signal V out which is proportional to the simulated _simulated rotation rate Ω.

To illustrate the present invention, the characterization principle is explained in general, before then on 1 will be discussed in detail. The "simulating" a rate of rotation based on the inertial mass, so the vibrating device or the secondary oscillator of the vibrating device with orthogonal decoupled vibration modes to impress a force F _E corresponding to the Coriolis force, ie inculcate a force that is proportional to the primary movement and a secondary movement and thus an output signal V generated which has the same value as when no force would be imprinted on the inertial mass in the direction of the secondary movement, but would act an external rate of rotation, the value of which is equal to the simulated rotation rate Ω is _simulated.

The physical principle of the force F _E to be impressed is arbitrary. However, reference will now be made to the specific decoupled yaw rate sensor of FIG 5 or to the general rotation rate sensor of 2 a force impression by means of an electrostatic field by applying an AC voltage to the detection electrodes of the secondary oscillator shown. Based on the known magnitudes of the impressed force, the Coriolis force is reproduced according to the invention, and according to the invention a rate of rotation is simulated or simulated.

The The present invention is advantageous in that a rate of rotation can be simulated without geometry data of the rotation rate sensor, there all geometry dependencies the rotation rate sensor due to the compensation signals and the frequency response in measurable Signals or calculable quantities are "transformed." This concerns in particular locally on the wafer or the chip varying geometry parameters such as the so-called trench broadening, the variation the height the silicon layer and the variation of the distance between substrate and sensor structure. These sizes have direct influence on the performance parameters of the individual sensors or sensor chips. According to the invention is for Optimization of the accuracy of the simulated yaw rate of the chip or sensor-specific Replica of the defined and exactly quantized rate of turn independent of carried out the technological process tolerances, so that on the one hand a independent initial calibration by force impression and on the other hand a In-operation recalibration also by force impression, ie is obtained by simulating a rate of rotation.

To replicate the rate of rotation independent of technological tolerances, preferably an electrostatic force (the "output" of the block 108b in 2 ) is used to generate the simulated or pseudo-rotation rate. Furthermore, it is preferred to use the acceleration of gravity as a reference, as well as to use a special digital evaluation for the individual characterization of the motion modes in a preferred embodiment.

Generally, with the velocity ν impressed on the primary oscillator and the rotational rate Ω for the Coriolis force F _C acting on the inertial mass m _s (mass of the secondary oscillator), the following relationship applies: F → C = -2m s · Ν → × Ω or F C = -2m s · Ν · Ω

The above equation applies to mutually perpendicular axes of motion. The impressed velocity ν ent is the time derivative of the sinusoidal drive or primary movement of the sensor and can be represented by the amplitude x ₀ and the phase φ _{p of} the primary vibration and the drive frequency ω by the following equation: ν (t) = x. (t) = -x 0 · Ω · sin (ωt - φ p )

In the above equation, the amplitude x _{0 of} the primary vibration is represented as follows, where ω _{p is} the driving frequency:

The phase φ _{p of} the primary vibration is as follows:

In the above equations, F _{CD0 stands} for the amplitude of the sinusoidal driving force on the primary oscillator. m _p indicates the mass of the primary oscillator, while β _{p represents} the attenuation of the primary motion.

According to the invention, the frequency-dependent amplitude and phase characteristic are determined precisely for the primary oscillation and, if required, for the secondary oscillation, from which further frequency response parameters characterizing the sensor, such as the attenuation or quality, and in particular also the For this purpose, a control device, for example within a digital signal processor, is provided in order to drive through different excitation frequencies and to the primary excitation device 106 to detect the reaction of the primary vibrator to the corresponding stimulus. Thus, it is preferred to impress a primary oscillation having a specific amplitude and a specific primary frequency at a first point in time and to measure the primary movement on the basis of the impressed signal. At a different time, a primary oscillation having the predetermined amplitude and a different frequency is then impressed, and in turn the deflection of the primary oscillator due to this excitation is measured. If this procedure is repeated for several frequencies, with one drive frequency before the resonance of the primary vibrator and another frequency after the resonance of the primary schwinger, there are several drive frequency / response value pairs which, when recorded in ascending order with the frequency, indicate the resonance curve or resonance peaking curve of the primary oscillator. From the resonance peaking curve, the resonance frequency of the primary vibrator can be derived by any measures. The resonant frequency of the primary oscillator is the excitation frequency at which a maximum reaction of the primary oscillator occurs due to the predetermined impressed amplitude. The quality can be derived from the 3 dB bandwidth of the resonance peak curve. The same applies to the damping which, as is known in the art, is coupled with the quality.

Analogous can for the secondary oscillator be proceeded, although the resonant overshoot curve of the secondary oscillator needed becomes. Typically, however, it is preferred to have yaw rate sensors operate with decoupled vibration modes such that the resonance frequency of the secondary oscillator in the secondary movement direction from the resonant frequency of the primary oscillator in the primary direction of motion differentiates. In this case, the frequency response of the secondary oscillator not required, since the secondary oscillator in secondary movement direction outside the resonance is operated and thus no resonance peak occurs. Will also be the primary vibrator not resonated, so are the frequency response information such that it indicates that the primary vibrator is outside the resonance is operated. Due to the significantly increased sensitivity However, it is preferred to operate the primary oscillator in resonance and in particular the point of maximum amplitude, that is the frequency nachzuführung the excitation oscillation with a phase control such that even with changed temperature conditions the primary oscillator always in resonance or in a defined bandwidth around the resonance is operated around.

Either for the primary oscillator as well as for the secondary oscillator be the information about amplitude and phase of the primary or secondary vibrator preferably by means of an I / Q demodulation in the digital signal processor realized. Based on the metrological determinations of the amplitude and phase of the oscillators can then the other required Parameters such as resonance frequency, quality and attenuation are extracted.

It should be noted that the inclusion of the so-called frequency responses, ie the detection of the frequency information for each sensor is done individually, thus chip and sensor specific and thus is independent of the technological process tolerances. This is the case, since the technological process tolerances in the frequency response of the primary oscillator reflected in a sense and are contained in the information about resonant frequency, quality or attenuation, ie in the frequency response information. Taking into account the resonance parameters, the Coriolis force is represented as follows:

The above equation contains in the denominator the resonance information with regard to the resonant frequency of the primary oscillator ω _p as well as the attenuation of the primary oscillator β _p . The above equation, however, still contains geometry-dependent quantities in the form of the masses mp and m _s (mass of the primary oscillator m _p and mass of the secondary oscillator m _s ) and the amplitude F _{CD0 of} the driving force of the primary oscillator.

The amplitude of the driving force F _CD0 is calculated according to the following equation with the amplitude of the drive _signal , ie 107a in 2 related: F CD0 = K x · U 2 x

The constant K _x represents the geometry of the comb drive, for example, when electrostatic excitation in the form of a comb drive is used. The constant K _x thus takes into account the acting homogeneous as well as inhomogeneous electric fields of the comb drive. Thus, in known K _x, the real driving force can be determined and adjusted. It should be noted that a similar constant K _{x can, of} course, be defined for any other excitations, for example piezoelectric, inductive etc. excitations, which generally indicate a relationship between the drive force F _CD0 and the excitation _{signal amplitude} U _x . In such a case, the signal U _x in this equation does not always have to be square, but may also occur linear or cubic, etc. It should also be noted that, although the term "voltage" is used below, the drive signal does not necessarily have to be a voltage, but that the drive signal is also a current or other applicable quantity that is represented by an amplitude 107a and a frequency 107b in 2 is representable.

In a preferred embodiment of the present invention, the geometry dependent constant K _x is determined using the gravitational acceleration as a reference. This is achieved by tilting the rotation rate sensor during its characterization in such a way that the simple gravitational acceleration acts on the primary oscillator, ie the entire moving mass. At the in 2 In the embodiment shown in which a primary movement in the x-direction is applied, the rotation rate sensor is therefore tilted so that the primary movement direction 102 is parallel to the gravitational field of the earth. Thus, the gravitational force of the earth, so the force that results from the product of the mass of the primary oscillator and the acceleration of gravity, a deflection of the vibrating device in the primary direction result. This static deflection is detected (V _1xg ) or compensated or regulated by applying an equivalent to the simple acceleration of gravity, electrical voltage U _x1g . Thus, a DC voltage U _{x is} coupled to the primary excitation device, wherein the value of this DC voltage is set so that the deflection of the oscillating device in the primary movement direction x is again set substantially to zero. The value of the compensation voltage to be read when the deflection due to gravity is set to 0 is equal to the first compensation _signal U _x1g . From the equivalence of the driving force at an applied voltage of U _{x1 g} and the weight on the primary oscillator, the constant K _x sensor or chip specific can be represented as follows:

In the above equation, g represents the gravitational acceleration which has a value of 9.81 N / m ² . If the above equation is used in the equation for the Coriolis force, the following relationship results:

In the above equation, only the mass of the secondary oscillator m _{s is} present, which still has a geometry dependency, that is to say a variable which can not be readily determined by measurement or evaluation.

Corresponding to the real driving force, the real electrostatic force F _E , ie the force to be impressed on the secondary oscillator detection electrodes for generating the secondary oscillation without the presence of a yaw rate, can generally be represented as a function of the drive voltage U _y and a chip or sensor-specific constant K _y become. The force F _E to be impressed is as follows: F e = F E0 · Sin (ω · t - φ p ))

The amplitude F _{E0 of} the above equation is given using the sensor-specific constant K _{y as} follows: F E0 = K y · U 2 y

Analogously to K _x , K _{y represents} the geometry of the detection electrodes and takes into account both acting homogeneous and inhomogeneous electric fields. According to the described procedure for determining K _x , the determination of K _{y is carried out as} follows:

In this case, U _{y1g is} the voltage equivalent to the simple earth acceleration of the inertial mass of the secondary oscillator in the direction of the secondary vibration. U _y1g is again determined by tilting the rotation rate sensor, but the rotation rate sensor is now tilted orthogonal to the previous tilting direction, namely so that the secondary movement direction 104 out 2 is parallel to the gravitational force, so that the secondary oscillator or the vibrating device 100 is generally deflected in the direction of the secondary movement. The second compensation _signal U _x1g is now again the value of that of the secondary _{excitation device} 108b applied DC voltage, which is necessary to the deflection of the vibrating device 100 in secondary movement direction 104 due to the gravitational acceleration to compensate, so on 0 "bring back".

From the equivalence of the Coriolis force and the force to be impressed, taking into account the equations for the constant K _y , the following relationship results for a rate of rotation Ω to be simulated:

Further, when the primary oscillator is operated in resonance, which is typically preferred, the above equation simplifies to the following equation:

The two preceding equations now provide the numerical relationship between a rotational rate Ω to be impressed or simulated and the amplitude of the excitation signal U _x ( 107a in 2 ) and the amplitude of the secondary excitation signal U _y ( 109a from 2 ), so that now at a to be simulated rotation rate Ω and at a known excitation signal amplitude U _x and at a known excitation frequency ω readily the amplitude of the secondary excitation device 108b signal to be injected 109a can be calculated. Alternatively, of course, a certain amplitude 109a in the secondary excitation device 108b are fed, then an amplitude 107a in the primary excitation device 106 be adjusted fed signal such that a certain rotation rate Ω is simulated. If Ω and U _{x are} given, then U _{y is} calculated as it is in a block 16 in 1 Equation is shown.

The concept according to the invention for characterizing a yaw-rate sensor with a vibrating device will be described below 100 , a primary excitation device 106 for driving the vibrating device to a primary movement 102 , a secondary detection device 108 for outputting an output signal V, which depends on a secondary movement of the oscillating device due to a rotation rate of the rotation rate sensor about a sensitive axis.

More specifically, the apparatus for characterizing a yaw rate sensor as shown in FIG 1 is shown, a device 10 for exerting a first acceleration on the oscillating device 100 in the direction of the primary movement and a second acceleration on the oscillating device in the direction of the secondary movement. The inventive device of 1 also includes a device 12 for compensating the deflections in the primary and secondary directions, as has been described above, by a first compensation signal U _{x1 g} 12a and a second compensation _signal U _y1g 12b to deliver. The characterizing apparatus according to the invention further comprises a device 14 for providing frequency response information for the primary movement, wherein the frequency response information preferably the resonance frequency ω _p , the attenuation β _p and the quality Q _{p of} the oscillating device 100 in primary movement direction 102 include.

The through the in 1 The device shown information about the frequency response in 2 also with 22 and the two compensation signals for characterizing the sensitivities of the primary excitation device and the secondary acquisition device 12a . 12b allow it, according to the in the block 16 to simulate any numerical yaw rate shown by a signal 109 that according to the block 16 is determined to the secondary excitation device 108b preferably identical to the secondary detection device 108b is, is created. Will such a secondary excitation signal 109 with a secondary excitation amplitude 109a and a secondary excitation frequency 109b to the secondary detection device 108 applied to the rotation rate sensor, the secondary oscillator performs a movement that is identical to the movement that it would perform if no secondary excitation signal would be impressed, but the rotation rate sensor, the yaw rate Ω 101 whose value would be equal to that in the block 16 from 1 assumed value is Ω. Of course, the secondary detection device 108a from 2 output a corresponding output signal V, which is equal to the simulated rotation rate Ω _{s imuli ert} , or would be _measured equal to a measured rotation rate Ω, if instead of the simulated rotation rate, the corresponding measured rate of rotation would actually exist.

In order to excite the secondary detection device in the direction of the secondary movement, therefore, a rate of rotation acting on the sensor can be simulated, wherein an amplitude of the secondary excitation signal 109 for stimulating the oscillation of the oscillating device of a primary excitation amplitude U _x , a primary excitation frequency ω, the first compensation signal, the second compensation signal, the frequency response information and the simulated rotation rate Ω _simulated depends.

In contrast to the embodiment described above, wherein the means for applying a first and a second acceleration (means 10 in 1 ) is designed to tilt the rotation rate sensor only in accordance with the acceleration, can, if appropriate devices are available, deviating from the acceleration of gravity linear accelerations are applied, which is particularly advantageous if the acceleration due to gravity is insufficient and z. B. greater accelerations are needed, or if the acceleration due to gravity is too strong and smaller accelerations are needed.

Is the vibrating device 100 displaceable in a rotational primary movement, so is the device 10 designed to exert an acceleration to no linear acceleration, but a rotational acceleration in the primary direction of movement or in the direction of secondary movement of the vibrating device 100 exercise, when the vibrating device simultaneously performs a rotational secondary movement. A rotational acceleration can z. B. be achieved by applying a defined torsional force to the primary or secondary oscillator by suitable manipulators, then a compensation signal is again calculable for the compensation.

It It should also be noted that the on the primary oscillator and the secondary oscillator exerted Accelerations do not necessarily have to be identical. are they are identical, so cut short they are different from the expression for the yaw rate Ω out. If they are not identical, they remain in the expression for Ω. In this case, if the accelerations are not identical, it is advantageous to know the individual values. the equation for Ω is however also calculable, if only the ratio of the two accelerations is known, since the two "reference accelerations" only in their relationship to each other in the equation.

According to the invention, a rate of rotation is thus imprinted or simulated or in other words simulated. This eliminates technological process tolerances or the influence on the chip-specific sensor geometry and thus on the sensor parameters. The simulated yaw rate is, as can be seen in the above equation, represented as a function of parameters which are either "measured" (resonant frequency ω _p ), "calculated" (goodness or damping) or "adjusted" (drive frequency ω, voltages U _x and U _y ) or "regulated" (voltages U _x1g and U _y1g ). By applying voltages U _{y of} different magnitude to the detection electrodes of the secondary oscillator, rotation rates that depend on the voltage amounts can now be simulated or imprinted in a defined manner.

Subsequently, reference will be made to 3 on the initial calibration of yaw rate sensors using impressed yaw rates. It should already be noted that the initial calibration according to the invention can be carried out more cost-effectively, since no turntable is needed more. Even if a turntable in a laboratory already exists, the calibration is still simplified according to the invention, since the placement of the rotation rate sensors on the turntable and the measurement of the rotation rate sensors on the turntable does not have to be performed.

To calibrate the rotation rate sensors, two variables are typically determined, namely the proportionality factor between the rotation rate Ω to be measured and the output signal V, which is also referred to as the scale factor SF (the scale factor converts the rotation rate into a voltage-equivalent variable), and the so-called zero point NP ₀ which is to be adjusted to a specified value in certain embodiments. The relationship between the output signal V, the scale factor SF ₀ and the zero point NP ₀ is given as follows: V = SF 0 · Ω + NP 0

The linear relationship between the output voltage V or, in general, the output signal V and the applied rate of rotation Ω or the impressed or "simulated" rate of rotation Ω is inherently linear due to the definition equation for the Coriolis force set out above: A zero point NP ₀ , ie an output signal If no rotation rate is applied to the sensor, it is required for certain applications, for example, consider the case where the output signal V is out of external conditions 0 V and 5 V. Furthermore, for this case, for example, it is desired that the yaw rate sensor should measure yaw rates which should assume values between -Ω _max and + Ω _{ma x} . In such a case, a rotation rate of 0, ie Ω = 0, would correspond to a value of the output signal V of 2.5V. This zero shift is artificially generated, so that, as stated depending on external conditions, a signal processing block receiving the output signal V knows that an output voltage of 0 V corresponds to the value -Ω _max , which corresponds to an output signal of 2.5 V, a rotation rate of 0 , and that an output signal of +5 V corresponds to a rotation rate of + Ω _max . If the zero shift were not carried out, the output signal would be between -2.5 and +2.5 V. If this signal is considered suitable for a subsequent signal processing block which processes the output signal between -2.5 V and +2.5 V, no zero shift must be performed. A zero shift is only required if the downstream signal processing block can not work with negative voltages, for example, or should not work for certain reasons.

Before discussing the present invention, an initial calibration with a turntable will first be described. To calibrate the scale factor SF ₀ using a calibrated turntable, the rotation rate sensor is operated at at least two different rotation rates Ω ₁ and Ω ₂ , whereby usually the rotation rates defining the measurement range are used. With the associated, resulting output signals V ₁ and V ₂ , the non-adjusted scale factor SF ₀ ^* results from the following equation:

die nach Auflösung nach dem Skalenfaktor den Multiplikator k_SF liefert. Die Berechnung von k_SF sowie die Multiplikation der Ausgangssignale mit k_SF erfolgt im digitalen Signalprozessor, auf den später noch Bezug nehmend auf 8 eingegangen wird. Aufgrund der Differenzbildung zweier Signale gemäß dem vorstehenden Prozedere ist die Kenntnis des Nullpunkts zur Kalibrierung des Skalenfaktors nicht notwendig, wobei eine vernachlässigbare Drift zwischen den Messungen vorausgesetzt wird.The comparison of the determined scale factor SF ₀ ^* to the specified value SF ₀ is effected by multiplication (or division) of the output signals with a suitable multiplier, which of course can also be smaller than 0 and thus acts as a divisor, which consists of the ratio of setpoint Scale factor SF ₀ to actual scale factor SF ₀ ^{* is} determined. The result is the following equation

which delivers the multiplier k _SF after resolution according to the scale factor. The calculation of k _SF as well as the multiplication of the output signals with k _SF takes place in the digital signal processor, to which reference is made later on 8th will be received. Due to the difference of two signals according to the above procedure, the knowledge of the zero point for the calibration of the scale factor is not necessary, whereby a negligible drift between the measurements is assumed.

The calibration of the zero point NP ₀ is carried out by measuring the output signal V ₀ without the presence of a rotation rate. The result is the non-adjusted zero point NP ₀ ^* , which is defined as follows: NP 0 = V (Ω = 0) = V 0

The comparison of the determined zero point NP ₀ ^* to the specified value NP ₀ is achieved by adding (or subtracting) the output signal V ₀ with a suitable constant k _NP , which is the difference between the desired zero point NP ₀ ^* and the actual zero point NP ₀ is determined. The result is the adjusted zero point NP ₀ from the following equation: NP 0 * = V 0 + k NP

From the above equation, the zero point constant k _NP immediately results by solving the above equation for k _NP . The calculation of k _NP as well as the addition of the output signal with k _NP is done as well as the scale factor calibration in the digital signal processor, as exemplified in 8th is shown. Due to the fact that the calibration of the zero point is performed without the presence of a rotation rate, it is not necessary to know a defined rotation rate during the initial calibration of the zero point.

For the above-described initial calibration using a turntable for generating the rotation rates Ω ₁ and Ω ₂ , as has been stated, a turntable is required. The initial calibration must therefore take place under laboratory conditions, essentially at defined and preferably constant environmental conditions.

Subsequently, reference will be made to 3 on the initial calibration according to the invention received without the use of a turntable. An apparatus for initial calibration comprises a device 30 for simulating a first and a second rate of rotation, wherein the device 30 is formed to the secondary excitation signals 109 for the two shoot guess using the in block 16 from 1 Calculate the relationships shown. In detail, the device 30 configured to generate a first secondary _{excitation signal amplitude} U _y1 for simulating the first rotational rate Ω ₁ and the secondary _{excitation device} 108b from 2 supply. The device 30 for simulating is further _configured to generate a second secondary _{excitation signal amplitude} U _y2 using the relationships of 1 , Block 16 to calculate and the secondary excitation device 108b from 2 supply. In the 3 The device shown also comprises a device 32 for measuring the output signals V ₁ , V ₂ at the output of the rotation rate sensor, wherein V ₁ is measured when the first rotation rate Ω _{1 is} generated by supplying the first secondary _excitation signal U _y1 , and V _{2 is} measured when the second rotation rate Ω _2nd by supplying the secondary _{excitation signal} U _y2 to the secondary _{excitation means} 108b is simulated.

In the 3 The apparatus for initial calibration shown further comprises a device 34 for calculating k _SF according to the one in block 34 shown definition equation for k _SF . The device 34 gets as input values from the facility 32 for measuring the output signals V ₁ , V ₂ . The device 34 also obtains the values of the simulated yaw rate Ω ₁ , Ω ₂ and the desired scale factor SF ₀ , which is typically also dictated by external conditions. Thus, the scale factor results from the fact that normally a rotation rate range to be measured is mapped to a defined output voltage range. The desired scale factor therefore corresponds to the Qutienten from V _max - V _min divided by Ω _max - Ω _min .

The device 34 On the output side, it supplies the calibration factor k _SF , which is then used to unambiguously convert an output signal V generated by the rotation rate sensor into a rotation rate, in accordance with the method described in US Pat 3 shown below equation. In the in 3 Ω is the applied or simulated yaw rate, V is the output of the sensor, NP _{0 is} the nominal zero point of the sensor, k _{NP is} the zero correction value, SF _{0 is} the target scale factor and k _{SS is} the calibration factor in the initial calibration according to 3 has been calculated.

The calculation of the zero point correction value k _NP is analogous to the calibration of the zero point using a turntable. The zero point correction value k _NP , as has been stated, can be determined without applying a rotation rate.

It should be noted that it is basically irrelevant which nature is the output signal V, as long as the output signal V is proportional to the rotation rate Ω, such that the relationship between V and Ω by the above-mentioned straight-line equation with the scale factor as slope and the zero point can be represented as a zero shift. Thus, the signal V may actually be a DC voltage determined after a long signal processing, as at the output of the in 8th shown digital signal processor is obtained. V can also be a signal z. B. reproduces the amplitude of the translation of the secondary oscillator. Alternatively, V can of course also represent the variable capacity of the comb drive, for example for the secondary detection device etc. However, it is preferred to have as V an already processed DC voltage which is over a scale factor equal to the product of the desired scale factor and the calibration factor and a zero offset equal to the sum of the desired zero offset and the zero offset correction value, related to the measured or simulated yaw rate.

Subsequently, reference will be made to 4 another preferred application of the simulated yaw rate to obtain an in-service recalibration, ie an in-service determination of a calibration factor k _SF and, if desired, the zero point correction value k _NP . Thus, a permanent control of scale factor and zero point or an independent recalibration of zero point and scale factor can be obtained during sensor operation. The concept for recalibration, ie for the determination and comparison of the sensor parameters scale factor and zero point during sensor operation, is described below with reference to FIG 4 shown.

In order not to influence the sensor operation during the recalibration, it is preferable to frequency-selectively stimulate the primary oscillator with two drive frequencies ω ₁ and ω ₂ , so that the simultaneous measurement of two output signals at the same rotation rate is feasible. The primary oscillation of the first drive frequency (ω ₁ ) delivers upon rotation of the sensor about its sensitive axis the observed or to be recalibrated output signal V ₁ , wherein the index "1" in this case the relationship to the drive frequency ω ₁ (im Opposite to ω ₂ ), and where the index "2" indicates the observation drive frequency.

An output signal V ₂ therefore represents the contribution in the output signal on the basis of the second drive frequency ω _2. The respective drive frequencies are preferably chosen so that the first drive frequency is equal to the resonance frequency of the primary oscillator or the oscillating device in primary motion, that is to say ω ₁ = ω _p . The second drive frequency is preferably chosen so that it is not too far away from the first drive frequency, but that it is not too close to the first drive frequency that it is reasonably well frequency-selectively processable with respect to the first drive frequency. Thus, it is preferable to select the second drive frequency with respect to the first drive frequency to be less than 0.95 times the first drive frequency or greater than 1.05 times the first drive frequency. Further, the second drive frequency is selected to be greater than 0.5 times the first drive frequency and less than 2 times the first drive frequency, such that the observation frequency is sufficiently remote from the drive frequency to provide components due to the two To be able to selectively process frequencies in the output signal, but the observation frequency should not be too far away from the drive frequency, so that they still fulfills their observation function. This is the case when there is a sufficiently good correlation of the ratios in the drive frequency and the conditions at the observation frequency.

This is how it is in 4 is shown, a device 40 designed to generate a primary signal, the control of the primary drive device 106 from 2 is used, wherein the primary control signal or primary signal has a first drive component at the drive frequency ω ₁ and a second drive component at the observer frequency ω ₂ . The amplitudes of the drive signal for the drive frequency and the observer frequency are in principle arbitrary, but can also be equated.

The inventive device for recalibrating a preset scale factor of a rotation rate sensor further comprises means for frequency-selective detection to determine an output signal component V ₁ , which goes back to the drive frequency ω ₁ , and to detect an output signal component V ₂ , which goes back to the observer frequency ω ₂ , This facility is in 4 generally with 42 designated. In the 4 Recalibrating device shown further comprises a device 44 for simulating a rate of rotation Ω _E with respect to the observer frequency ω ₂ . Furthermore, a flow control device 46 as well as a facility 48 to calculate a current calibration factor k _SF . The device 44 for simulating a rate of rotation Ω _E with respect to the observer frequency ω ₂ is also preferably with a primary-side phase and amplitude control device 49 coupled to account for simulating the rotation rate Ω _E at the observer frequency ω ₂ temperature variations, which at least indirectly by the primary-side phase and amplitude control device 49 be detected, as will be described later.

The realization of the sensor operation with two different primary control frequencies and the detection of the resulting output signals takes place, as will be explained later, using the in 8th shown digital evaluation on the in the DE 10059775 A1 described evaluation concept for processing analog output signals from capacitive sensors based, as will be explained in more detail below.

The recalibration or recalibration concept according to the invention is divided into two parts similar to the initial calibration. First, the current scale factor or the calibration factor k _SF on which the current scale factor is based is determined and adapted as part of a first measurement cycle. Subsequently, in a second measuring cycle (with adjusted scale factor), the determination and adjustment of the zero point takes place. It is again assumed here that no further drift or change of the sensor parameters occurs between the two measuring cycles. This assumption is usually readily met, since the particularly problematic temperature changes or changes due to the aging of the sensors take place rather slowly, while the measurement cycles are relatively quickly successive executable.

Assuming for the relationship between the respective output signals, scale factors and zero points in the presence of a rotation rate Ω ^* the relationship described above, the output signal V ₁ can generally be represented as follows: V 1 = SF 1 · Ω * + NP 1

The following applies analogously to the observer signal V ₂ : V 2 = SF 2 · Ω * + NP 2

In this case, SF ₁ and SF _{2 represent} the scale factors associated with the primary oscillations associated with the different drive frequencies. NP ₁ and NP ₂ represent the corresponding zero points. The scale factor SF ₁ and the zero point NP ₁ are known or fixed according to an initial calibration provided. They correspond to the values SF ₀ and NP ₀ described above. The knowledge of SF ₂ and NP ₂ according to an initial calibration, however, is not required for the recalibration concept described below.

If a temperature and environmental change of the scale factors and zero points is assumed during operation of the sensors, the output signals V ₁ '' and V ₂ '' result with identical rotation rate Ω ^{* as} follows: V '' 1 = SF ' 1 · Ω * + NP ' 1 V '' 2 = SF ' 2 · Ω * + NP ' 2 SF ₁ 'and SF ₂ ' represent the respective "current" scale factors. Analogously, NP ₁ 'and NP ₂ ' represent the corresponding "current" zero points. The index "'" in each case illustrates a respective sensor parameter changed by external influences.

The aim now is to match the current changed scale factor SF ₁ 'to the value of the initial calibration SF ₁ or to the setpoint scaling factor using a calibration factor k _SF to be calculated. On the other hand, the adjustment of SF ₂ 'to a value corresponding to an initial calibration due to the fact that the output signal V ₂ ''associated with the frequency ω _{2 is} only used as the "observer signal" is not required, however, SF ₂ ' is preferably determined to determine SF ₁ '.

In the 4 Sequence control shown is now designed to at two different times i, j the device 40 and the device 42 to activate, wherein at the time i a randomly present yaw rate Ω _{i is} taken into account, and wherein at the time j, a randomly present yaw rate Ω _{j is} taken into account. The device 42 for frequency-selective detection then provides output _signals V _1i '', V _1j '', V _2i '' and V _2j '', these values then in the device 48 to calculate a current calibration factor. It should be noted that in 4 for reasons of clarity, the dashes ("''") have been left out, so the following relationship applies to the times i and j:

Knowledge of at least one yaw rate or knowledge of the difference between two yaw rates is required to determine the "current" scale factor SF _1. Therefore, at the time k in the presence of the unknown yaw rate Ω _k, frequency selective with the frequency ω ₂ of the sensor signal used for observation defined rate of rotation Ω _E through the device 44 imprinted, the device 44 is activated by the scheduler at time k, and wherein the device 42 for frequency-selective detection at the time k also by the sequence control 46 is activated to perform a measurement. The device 44 from 4 is designed to receive a secondary excitation signal 109 from 2 to generate, with the frequency 109b of the secondary excitation signal is ω ₂ , and wherein the amplitude of the secondary control signal, ie 109a in 2 , is chosen as it is in the block 16 from 1 is shown. In particular, for the parameter ω in the block 16 in 1 to use the observer frequency ω ₂ . Further, for Ω in the block 16 from 1 to use the known simulation rotation rate Ω _E.

As amplitude U _{x of} the drive signal, the amplitude of the drive signal at the observer frequency ω _{2 is} inserted, so that by the context in the block 16 in 1 that of the institution 44 for simulating the rate of rotation with respect to ω ₂ signal to be generated is obtainable.

As has been mentioned, the drive frequency ω _{1 is selected to be} identical to the resonance frequency ω _{p of} the primary oscillator or the oscillating device in the primary direction, so that with the assumption ω ₁ not equal to ω ₂ for the rotational rate Ω _E to be impressed, the resonance peaking curve, ie the frequency response information, of the Primary vibrator must be considered, since ω _{2 is} out of resonance. In conjunction with the following with reference to 8th Ausleseverfahren still explained, in particular with the frequency-selective (and phase-selective) demodulation of the superimposed movement of the secondary oscillator for the realization of the individual signals V ₁ and V ₂ or V '' / 1 and V '' / 2 is characterized by the frequency selective impressions of the defined simulation Rate of rotation Ω _E with the frequency ω _2, the actual sensor operation, ie the observed or to be recalibrated output signal (primary vibration with frequency ω ₁ ) not affected. For the time k, the following relationship applies:

The device 48 for calculating is thus also designed to obtain the output signals at time k and, as shown below, to charge each other in order to finally obtain the current calibration factor k _SF .

For this purpose, the following is in the 6 is plotted along the x-axis, the yaw rate Ω, while along the y-axis, the output signal V is plotted. In 6 are two straight lines 60 . 61 drawn, with the straight line 60 refers to the Ausgangssig-yaw rate characteristic of the rotation rate sensor at the drive frequency ω ₁ , while the straight line 61 refers to the output signal-yaw rate characteristic of the yaw rate sensor at the observer frequency ω ₂ . The intersections of the lines 60 and 61 with the y-axis in 6 , ie for Ω = 0, the current zero offsets NP ₁ 'and NP ₂ ' result directly. On the basis of in 6 shown straight lines 60 and 61 Furthermore, the scale factor of each straight line can be determined without further ado, ie the scale factor SF ₁ 'on the basis of the straight line 60 and the scale factor SF ₂ 'on the basis of the straight line 61 , where the scale factors each equal the slope, ie a delta-y to a delta-x of the equations.

The order of the straight lines Ω _i , Ω _j and Ω _k on the Ω axis is basically arbitrary. For better clarity, however, the in 6 selected sequence selected. By suitable difference formation of the signals at the times i, j and k, the zero points NP ₁ 'and NP ₂ ' can first be eliminated, so that the following relationship results:

folgt nach Einsetzen in die beiden letztgenannten Differenzgleichungen (mit dem Index „2") und nach einigen algebraischen Umformungen folgender Ausdruck:

From the latter two difference equations, ie those where the index k occurs, and in particular from the differences of the signals with the index "2", it can be seen that for known differences (Ω _k - Ω _i ) or (Ω _k - Ω _j ) the predictability of SF ₂ 'follows with the following equations

followed by insertion into the two last-mentioned difference equations (with the index "2") and after some algebraic transformations the following expression:

Equating the differences (Ω _j - Ω _i ) in the above equation for the difference j - i gives the relationship between SF ₁ 'and SF ₂ ' as follows:

This means that a closed expression can be given for the "current" scale factor SF _1. "The above equation is also directly derived from a geometric consideration of 6 evident, since the equations 60 and 61 are _{uniquely related} to each other by the V _1i , V _1j , V _2i and V _2j , since the aforementioned measured values V are both related to the two _{yaw rates} Ω _i and Ω _j .

In contrast to the adjustment of the scale factor during the initial calibration, not all direct voltage signals (output signals after the "second" demodulation stage, refer to FIG. ₁₎ are used to adjust the scale factor SF ₁ 'to the value SF ₁ 8th The adjustment of the scale factor SF ₁ 'to the initial or the specified value is performed by phase-selective multiplication of only the signal components with the index "1" which are dependent on the rotation rate Ω the second demodulation stage after the ADW and a bandpass with a suitable constant k _SF (resulting from the ratio of the desired scale factor to the actual scale factor) as set forth.

The multiplication with k _SF is phase-selective so that the signal components proportional to the zero point NP ₁ 'are not multiplied. Overall, this results in the adjusted scale factor SF ₁ under the condition of an amplification of the value "1" (corresponding to the evaluation electronics) of the second demodulation stage to:

The calibration factor k _SF can now be determined alternatively from one of the two preceding equations as an alternative, if one of the two equations above is resolved to k _SF . Recall that SF _{1 is} the target scale factor, referring to FIG 3 has already been referred to with regard to an initial calibration. It should be pointed out that the recalibration concept according to the invention determines the current scale factor SF ₁ 'without disturbing the actual sensor operation or influencing the actual sensor operation and can adapt or regulate substantially permanently to the specified or initial value, again and again a new current calibration factor k _{SF is} calculated at either regular or irregular intervals. As with the initial calibration, even when recalibrating the scale factor, the knowledge is the current zero point not mandatory. By correcting the scale factor, the resulting drift of the scale factor SF ₁ is already significantly improved after the correction, in particular because the variables required for the scale factor determination can either be measured directly or, as the rotation rate Ω _E , can be impressively defined.

According to the invention, the temperature dependence of the defined embossed rotation rate Ω _E can also be adjusted by adjusting the voltage U _Y applied to the impressing electrodes in connection with a phase and amplitude control of the primary vibrations 4 generally with 49 is designated, both for the primary movement with the drive frequency ω ₁ and for the primary movement with the drive frequency ω _{2 are} compensated.

U_x' stellt die zur Primärschwingung mit der Frequenz ω₂' geregelte Antriebsspannung dar. U_x und U_y repräsentieren die bei einer Differenztemperatur T₀ jeweils anzulegenden Spannungen, wobei es bevorzugt wird, als Referenztemperatur T₀ die Temperatur zu nehmen, die bei der initialen Kalibrierung vorhanden war.Here, the phase control of the drive oscillations enables the determination of the respective actual frequency ω _p '= ω ₁ ' and ω ₂ 'and the current damping β _p ' of the primary vibration. In each case, the index "'" clarifies the value of the corresponding parameter which has been changed, for example, due to a change in temperature or the environment. The voltage U' _y to be applied to the detection electrodes at the temperature T, the impressed rotation rate Ω _E being assumed to be constant, ie Ω _E = Ω ' _E , is given by the following expression:

U _x 'represents the ω to the primary vibration at the frequency _2' is controlled drive voltage. _X U and U _y representing ₀ in each case to voltages applied at a differential temperature T, where it is preferable to take as a reference temperature T _{0 is} the temperature at the initial calibration was present.

It should be noted that the primary-side phase and amplitude control 49 such that it provides a drive signal to the primary excitation device 106 supplies, and that at the same time the movement of the vibrating device in the primary direction, ie the primary movement 102 from 2 z. B. is monitored by the comb structures over which the primary excitation takes place. The actual value of the current primary movement is compared with a desired value, wherein in the case of a deviation, the frequency of the primary control signal and / or the amplitude of the primary control signal of a certain original value, without limiting the generality of the value at the reference temperature T ₀ are changed to an updated value, this updated value being symbolized by the "'" in the above equation, thus allowing directly the resonant frequency ω' _p and the amplitude U ' _x due to the primary-side phase and amplitude control 49 be read. To determine the changed observer frequency ω ₂ ', it is preferred, for simplicity, to apply either the same absolute change as the drive frequency ω _p , the same relative change, or a weighted absolute or relative change.

With respect to the modified due to temperature or environmental changes or aging changes damping β _p exist 'different possibilities for determining this value. A table access could be performed using the altered resonant frequency to determine attenuation changed to a changed resonant frequency based on previously determined resonant frequency-attenuation pairs. Only for highly accurate applications, it is preferred, for. For example, as part of an initial calibration for each individual sensor to record the frequency response at different temperature values to obtain a quasi a tailor-made resonance frequency attenuation table of correspondence.

With the determination and calibration of SF ₁ 'on SF ₁ using the device 48 from 4 determined calibration factor k _SF according to the invention the output signal with adjusted scale factor SF ₁ as well as non-balanced zero point NP ₁ 'generally represented by the following relationship: V ' 1 = SF 1 · Ω + NP ' 1

Based on this approach, at time 1 in a 1 embodiment of the present invention, a re-measurement is made by the device 42 from 4 taken at time 1 the randomly present yaw rate Ω _{1 is} taken into account, and at time 1 the output _signals V ' _1l and V _2l ''are measured and stored in the DSP. For time 1, the following applies:

To explain these measures is on 7 Referenced, with one to 6 identical coordinate system is shown, but now three straight lines 70 . 71 . 72 are drawn. Straight 72 provides the output signal yaw rate relationship for the observer frequency ω ₂ . Straight 71 provides the output yaw rate relationship with unmatched scale factor for the drive frequency ω ₁ while the straight line 70 shows the output signal yaw rate relationship for the case where the zero point NP ₁ 'is not balanced while the scale factor SF _{1 has} already been adjusted using SF ₁ ' and k _SF .

In order to determine the current zero point NP ₁ ', the measurement signals V _1i ''and V _2i ''at the time i (or at the time j) in addition to the above-described conditions at time 1 at the _yaw rate Ω _i (or at the yaw rate Ω _j ), again neglecting changes in the sensor parameters during the measurement cycle (i or j and l). Alternatively, two simultaneous signals V ₁ "and V ₂ " may also be used at any one time. By subtraction of the output signals with the index "2" in 7 the difference between the rotation rates Ω _l and Ω _i can be represented as follows:

From the difference of the output _signals V _1l 'and V _1i ''can be given by algebraic transformations for the rotation rate Ω _i a closed expression of measured or calculable quantities, which reads as follows:

By substituting the above equation into an equation at the time j or the time i, the following expression results for the zero point NP ₁ ':

With the following relationship SF 1 = k SF · SF 1 ' then results for the zero point NP ₁ 'one exclusively of the measurement signals and the calculated current calibration factor k _SF , by the device 48 from 4 as described above, dependent relationship for the current zero point NP ₁ ':

The comparison of the determined zero point NP ₁ 'to the initial or nominal zero point NP ₁ is carried out according to the comments on the initial calibration by adding or subtracting the current zero point NP ₁ ' or the Ausgangssig signals with the index "1" with the zero point -Calibration factor k _NP , which is again determined from the difference between the desired zero point NP ₁ and the actual zero point NP ₁ ', thus resulting in the following equation for the adjusted zero point NP ₁ :

The zero point _correction factor k _NP is again obtained by solving the above equation for k _NP using NP ₁ as the target zero point.

According to the invention, it is by the inventive in-operation recalibration concept, as shown in 4 is shown and explained in detail above, it is possible to adjust the current zero point NP ₁ 'substantially permanently to the specified value or to regulate without the sensor operation is disturbed or is affected. The drift of the zero point is thus significantly improved. By "subsequent" adjustment of the signal V _1j '' to V _1j '( _even 71 in 7 to straight 70 in 7 ) by a preferably phase-selective multiplication of the rotation rate dependent signal components of V _1j '' with k _SF , the second measurement cycle at time 1 can be omitted. This is immediately out 7 can be seen, since the current zero point NP ₁ 'is determined as the value to which the straight line 70 and 71 cut, taking the straights 70 and 71 on the one hand by V _1i '' at the time Ω _i and on the other hand a balanced value in which the new scale factor SF _{1 has been} taken into account, ie to a value which is in 7 With 73 is designated, are uniquely determined.

It should also be pointed out that the determination of the zero point can in principle be dispensed with if a detailed characterization of the behavior of the sensor parameters scale factor and zero point over the temperature has been carried out during the initial calibration. Based on the reference to 6 calculated current calibration factor k _SF can be determined, for example by lookup in a table corresponding to a corresponding calibration factor k _SF zero correction value k _NP . From the currently determined scale factor SF ₁ 'can thus be closed to the temperature and thus to the current zero point NP ₁ '. By this "table access method" can thus also be carried out an on-line recalibration.

Subsequently, reference will be made to 8th a signal processing concept, which according to a preferred embodiment of the present invention is preferred from signal / noise aspects. The signal processing concept is grouped around the MEMS structure, such as in 5 is shown and in 8th With 800 is designated. The MEMS structure includes means for applying drive signals 801 that the drive signal 107 in 2 correspond. Furthermore, the MEMS structure comprises 800 a secondary output 802 as well as, as in the DE 10059775 A1 is described, an entrance 803 for impressing an RF carrier, for example, 600 kHz on the secondary detection device and an input 804 for impressing a further RF carrier at preferably about 400 kHz on the primary excitation structure to the secondary detection device 802 on the one hand and on the primary detection device, not shown, to obtain a signal which is modulated on the HF carrier, for example, of 600 kHz or on the HF carrier of, for example, 400 kHz. At the exit 802 the secondary detection means, the Ausgangssig signal is first amplified 805 and high-pass filtered 806 in order to obtain only the modulated on the carrier of 600 kHz output signals. Then follow two A / D converters 807 generated by a signal generator 808 be triggered, the signal generator 808 in turn by a tact 809 is controlled. Now follow three signal processing trains that in 8th are designated primary (f2), primary (f1) and secondary. Each signal processing train comprises a bandpass filter 810 , two downstream demodulators 811 , two low passes 812 , two PI controllers 813 and a signal generator 814 , Also, in the primary signal processing branches, between the low pass in the upper branch and the PI controller in the upper branch as shown in FIG 8th shown is a comparator 815 arranged, which is an actual value from the low pass 812 with a desired value.

At the output of the signal generator 814 is each a D / A converter 816 intended. The primary processing branches or the D / A converters associated with the primary processing branches drive amplification stages 817 to be based on that 4 described in-operation recalibration method to generate primary control signal having on the one hand a drive signal component at f1 and on the other hand, an observer signal component at f2. The scheme based on the comparator 815 takes place, serves to perform the temperature compensation to hold the drive signal at the current resonant frequency ω _{p of} the MEMS structure, and nachzuführen the observer signal according to the tracking of the drive signal.

Further, referring to FIG 8th noted that the output signal of the PI controller in the secondary processing branch of an interface 818 is supplied, which outputs the output signal V, which is proportional to the rotation rate (block 819 ). Further, the signal generator 814 in the secondary branch used to the input 803 to head into the MEMS structure as it looks 8th is apparent. In the 8th Thus, the circuit shown allows two different frequencies and additional high-frequency carrier signals (in particular to the primary drive comb structures) to be fed to the drive, so that an amplitude-modulated signal at the output for signal-to-noise ratio improvement 802 results. The processing of this signal in the frequency domain provides the high-frequency carrier frequency with the corresponding sidebands of the primary resonant frequency and the reference frequency (observer frequency), this high-frequency spectrum through the high-pass 806 is determined. By subsampling by means of the analog-to-digital converters, the high-frequency carrier is thus as it were pushed into the zero point (ie to 0 Hz), so that in addition the information on the primary resonance frequency or on the reference oscillation is obtained. Thus, it becomes possible from the signal at the output 802 Due to the drive frequency and the observer frequency, the MEMS structure can read in and process the components "at the same time." If the signal-to-noise ratio is not so stringent, the separation may also be due to band-pass filtering at the output 802 take place already in the baseband, ie without impressing the high-frequency carrier signals, to separate the ω ₁ and ω ₂ related signal components.

It should also be noted that the signal generator 814 is adapted to the secondary detection device 108 from 2 , which can simultaneously serve as a secondary excitation device, memorize the signal by which a rate of rotation is simulated. The signal generator 814 would therefore be the device 20 from 2 for generating a secondary excitation signal 109 correspond, wherein the secondary excitation signal Sig 109 the signal is that the signal generator 814 in the secondary branch (with different polarities) to the digital / analogue converters 820 and 822 outputs. The signal generator 814 is thus designed to be in the block 16 from 1 to take account of the equation shown to generate corresponding secondary control signals from compensation signals, frequency response information and information about a numerically desired rotation rate, which then the secondary excitation or detection device 108 from 2 within the MEMS structure 800 can be fed.

The present invention is characterized by the following advantages:
The invention provides a simple method for the initial calibration of micromechanical rotation rate sensors without the use of a turntable and is compared to the calibration with turntables due to the significantly lower cost correspondingly less expensive.

Furthermore, in the preferred embodiment of the present invention due to recalibration, preferably in conjunction with the reference 8th During the operation of the sensor, the digital evaluation electronics shown represent the time-consuming and thus cost-intensive temperature measurements normally required during the initial calibration.

The inventive concept especially with regard to the in-service recalibration results in a significantly better drift behavior of the sensor parameters scale factor and zero point, so also improve the accuracy and so that the general efficiency the sensors is reached.

The inventive method especially with regard to recalibration allows the determination and the adjustment of the sensor parameters, scale factors and zero point while the sensor operation and in particular without affecting the sensor operation.

Further allows the inventive concept for recalibration the permanent checking of the functionality of the rotation rate sensors, which in particular in an increase the reliability due to the functional verification results.

Claims (22)

Device for simulating a rate of rotation, which acts on a rotation rate sensor, wherein the rotation rate sensor comprises a vibration device ( 100 ), a primary excitation device ( 106 ) for driving the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal from a secondary movement ( 104 ) of the oscillating device and is dependent on a rate of rotation of the rotation rate sensor about a sensitive axis of the same, having the following features: 24 ) for providing a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), wherein the values of the first and the second compensation signal are selected such that a deflection of the oscillating device due to a first acceleration is compensated in the direction of the primary movement, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) and to provide frequency response information ( 22 ) of the vibrating device ( 100 ) due to excitation by the primary excitation device ( 106 ); and a facility ( 20 ) for generating and applying a simulation signal ( 109 ) to the secondary detection device ( 108 ) to a secondary movement of the vibrating device ( 100 ), wherein a frequency of the simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation facility ( 106 ), and wherein an amplitude ( 109a ) of the simulation signal from the first compensation signal ( 12a ), of the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of the rate of rotation to be simulated, so that the oscillating device ( 100 ) a defined secondary movement is executable that a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the oscillating device ( 100 ), if the simulated yaw rate is the actual yaw rate ( 101 ) would be present. Apparatus according to claim 1, wherein the. Amplitude of the simulation signal is determined according to the following equation:

where U _{x1g is} the first compensation _signal , where U _{y1g is} the second compensation _signal , where ω is a frequency of the primary _{excitation signal} , where ω _{p is} a resonant frequency of the oscillator in the primary direction of motion, where β _{p is} an attenuation of the oscillator ( 100 ) in the primary direction of motion, where Ω is the rate of rotation to be simulated, and where U _{x is} an amplitude of the primary excitation signal. Apparatus according to claim 1, wherein the frequency of the primary excitation signal is equal to the resonant frequency of the oscillator in the primary direction of motion, the amplitude of the simulation signal being determined according to the following equation:

Device according to Claim 2, in which the device ( 24 ) for providing comprises: a device ( 10 ) for exerting a first acceleration on the oscillating device ( 100 ) in the direction of the primary movement ( 102 ) and a second acceleration on the vibrating device ( 100 ) in the direction of the secondary movement ( 104 ); a device for compensating a first deflection of the oscillating device ( 100 ) due to the first acceleration to the first compensation signal ( 12a ) and for compensating a second deflection of the oscillating device ( 100 ) due to the second acceleration to the second compensation signal ( 12b ) to obtain. A method for simulating a rate of rotation which acts on a rotation rate sensor, wherein the rotation rate sensor comprises a vibration device ( 100 ), a primary excitation device ( 106 ) for driving the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal from a secondary movement ( 104 ) of the oscillating device and is dependent on a rate of rotation of the rotation rate sensor about a sensitive axis thereof, comprising the following steps: providing ( 24 ) of a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), wherein the values of the first and the second compensation signal are selected such that a deflection of the oscillating device is compensated on the basis of a first acceleration, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) and to provide frequency response information ( 22 ) of the vibrating device ( 100 ) due to excitation by the primary excitation device ( 106 ); and generating ( 20 ) and applying a simulation signal ( 109 ) to the secondary detection device ( 108 ) to a secondary movement of the vibrating device ( 100 ), wherein a frequency of the simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation facility ( 106 ), and where an amplitude ( 109a ) of the simulation signal from the first compensation signal ( 12a ), of the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of the rate of rotation to be simulated, so that the oscillating device ( 100 ) a defined secondary movement is executable that a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the oscillating device ( 100 ), if the simulated yaw rate is the actual yaw rate ( 101 ) would be present. Device for calibrating a rotation rate sensor with a vibration device ( 100 ), a primary excitation device ( 106 ) for driving the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rate of rotation ( 101 ) of the rotation rate sensor is dependent on a sensitive axis thereof, having the following features: a device ( 24 ) for providing a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), wherein the values of the first and the second compensation signal are selected such that a deflection of the oscillating device due to a first acceleration in the direction of the primary movement is compensated, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) and for providing frequency response information of the vibrating device ( 100 ) due to excitation by the primary excitation device ( 106 ); a facility ( 20 ) for generating and applying a simulation signal ( 109 ) to the secondary detection device ( 108 ) to a secondary movement of the vibrating device ( 100 ), wherein a frequency of the simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation facility ( 106 ), and wherein an amplitude ( 109a ) of the simulation signal from the first compensation signal ( 12a ), of the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of a rate of rotation to be simulated depends so that by the vibrating device ( 100 ) a defined secondary movement is executable that a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the oscillating device ( 100 ), if the simulated yaw rate is the actual yaw rate ( 101 ) would be present; a device for measuring a first output signal (V ₁ ) as a result of the device ( 20 ) for generating and applying a simulation signal ( 109 ) applied first simulation _signal (U _y1 ) for simulating a first rotation rate (Ω ₁ ); a facility ( 32 ) for measuring a second output signal (V ₂ ) as a result of passing through the device ( 20 ) for generating and applying a simulation signal ( 109 ) second simulation _signal (U _y2 ) for simulating a second _yaw rate (Ω ₂ ) different from the first simulated yaw rate (Ω ₁ ); and a facility ( 34 ) for calculating calibration information that depends on a multiplier (k _SF ) for a target scaling factor due to the first output signal (V ₁ ) due to the second output signal (V ₂ ) due to the first simulated yaw rate (Ω ₁ ) the second simulated yaw rate (Ω ₂ ) and the target scale factor. The apparatus of claim 6, wherein the first rate of rotation defines a first limit of a specified yaw rate measurement range, and wherein the second yaw rate (Ω ₂ ) defines a second boundary of a specified yaw rate range. Apparatus according to claim 6 or 7, further comprising: means for calculating a zero point trim value (k _NP ) based on a measured output signal (NP ₀ ^* ) of said means for measuring ( 32 ) without concern of a simulation signal. Method for calibrating a rotation rate sensor with a vibration device ( 100 ), a primary excitation device ( 106 ) for driving the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rate of rotation ( 101 ) of the rotation rate sensor around a sensitive axis thereof, comprising the following steps: providing ( 24 ) of a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), wherein the values of the first and the second compensation signal are selected such that a deflection of the oscillating device is compensated on the basis of a first acceleration, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) and for providing frequency response information of the vibrating device ( 100 ) due to excitation by the primary excitation device ( 106 ); Generating a first simulation _signal (U _y1 ) and applying ( 20 ) of the first simulation signal ( 109 ) to the secondary detection device ( 108 ) to a secondary movement of the vibrating device ( 100 ), wherein a frequency of the first simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation facility ( 106 ), and wherein an amplitude ( 109a ) of the simulation signal from the first compensation signal ( 12a ), of the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of a first rate of rotation (Ω ₁ ) to be simulated, so that the oscillating device ( 100 ) a defined secondary movement is executable that a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the oscillating device ( 100 ) if the simulated first yaw rate (Ω ₁ ) is the actual yaw rate ( 101 ) would be present; Measuring a first output signal (V ₁ ) on the basis of the applied first simulation signal (U _y1 ); Generating and applying a second simulation _signal (U _y2 ) for simulating a second _yaw rate (Ω ₂ ) different from the first simulated yaw rate (Ω ₁ ); Measure up ( 32 ) of a second output signal (V ₂ ) based on the second simulation signal; and calculating ( 34 ) of calibration information that depends on a multiplier (k _SF ) for a target scaling factor due to the first output signal (V ₁ ), due to the second output signal (V ₂ ), due to the first simulated yaw rate (Ω ₁ ) due to the second one simulated yaw rate (Ω ₂ ) and based on the target scaling factor. Device for recalibrating a preset scale factor of a rotation rate sensor with a vibration device ( 100 ), a primary excitation device ( 106 ) for driving the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rate of rotation ( 101 ) of the rotation rate sensor is dependent on a sensitive axis thereof, having the following features: a primary device ( 40 ) for driving the prime mover with a primary control signal having a first drive component at a drive frequency (ω ₁ ) and a second drive component at an observer frequency (ω ₂ ); a facility ( 42 ) for frequency-selectively detecting the output signal to obtain a first output signal component (V ₁ ) based on the first drive component and a second output signal component (V ₂ ) based on the second drive component; An institution ( 44 ) for simulating a rate of rotation (Ω _E ) by exciting the oscillating device ( 100 ) in the direction of the secondary movement ( 104 ) with a secondary control signal adjusted to simulate the defined rate of turn (Ω _E ), the secondary control amplitude depending on the second drive component at the observer frequency (ω ₂ ); a flow control device ( 46 ) for reading the device ( 42 ) for frequency-selective detection at a first time (i), at a second time (j) and at a third time (k), wherein the sequence control device ( 46 ) is also effective in order to enable the 44 ) for simulating, so that it at the third time point (k) the secondary detection device ( 108 ) with the secondary control signal ( 109 ) drives; and a facility ( 48 ) for calculating calibration information that depends on a current calibration factor (k _SF ) using an output signal of the device ( 42 ) for frequency selective detection at the first time (i), at the second time (j) and at the third time (k) and using the defined rate of turn (Ω _E ), wherein the means for calculating is arranged to use the following equation work:

where V _1i "is the first output signal _component at time i, where V _2i " is the second output signal _component at time i, where V _1j "is the first output signal _component at time j, where V _2j " is the second output signal _component at time j where V _1k '' is the first output signal component at time k, where V _2k '' is the second output signal component at time k, where k _{SF is} the current calibration factor, where Ω _{E is} the rate of rotation simulated at time k, and where SF _{1 is} the default scale factor. Device according to claim 10, in which the device ( 48 ) for calculating to determine the current correction factor from a ratio between the preset scale factor and a calculated current scale factor, an output signal based on the first drive component using the current correction factor and the preset scale factor to obtain a recalibrated output signal. Device according to one of claims 10 or 11, in which the device ( 42 ) is adapted to simulate to apply a secondary control signal having a frequency equal to the observer frequency. Device according to one of claims 10 to 12, in which the device ( 44 ) is adapted to simulate an amplitude of the secondary control signal so that the amplitude ( 109a ) of the secondary excitation signal ( 109 ) for exciting the vibrating device ( 100 ) of a primary excitation amplitude ( 107a ) for exciting the primary excitation device ( 106 ), a primary excitation frequency ( 107b ), the first compensation signal ( 12a ), the second compensation signal ( 12b ), the frequency response information ( 22 ) and the speed of rotation to simulie depends, so that by exciting the vibrating device ( 102 ) in the direction of the secondary movement ( 104 ) a rate of rotation acting on the sensor can be simulated. Device according to one of claims 10 to 13, in which the Drive frequency equal to a resonant frequency of the vibrating device due to a primary movement is. Device according to one of Claims 10 to 14, in which the device ( 44 ) is designed to simulate the secondary control signal as a function of a control ( 49 ) of the primary control signal. Apparatus according to claim 15, wherein the rotation rate sensor further comprises a control device (15). 49 ) to perform an amplitude and / or phase control of the primary control signal. Apparatus according to claim 15 or 16, wherein an amplitude of the secondary control signal is defined as follows.

where U _y 'is an amplitude of the secondary control signal at a temperature (T), where ω _{p is} a primary resonant frequency of the vibrator at a reference temperature, where ω _{2 is} the observer frequency at the reference temperature, where β _{p is} a primary attenuation at the reference temperature, where U _{x is} a primary control amplitude at the reference temperature, where U _{y is} a secondary control amplitude at the reference temperature, where ω ' _{p is} a primary resonant frequency at the current temperature, where ω ₂ ' is an observer frequency at the current temperature, where β ' _{p is} a primary attenuation at the current temperature current temperature is. Apparatus according to any one of claims 10 to 17, further comprising: means for calculating a current zero point signal based on a first output signal at a first time and a second output signal at a different time and based on the current correction factor (k _SF ); and means for calculating a calibrated zero for the first output signal component based on a difference between the current zero point signal and a desired zero point signal. Apparatus according to claim 18, wherein the means for calculating is arranged to calculate the current zero point signal as follows:

where NP ₁ 'is the current zero point _signal , where V _1i "is the first output signal _component at time i, where V _2i " is the second output signal _component at time i, where V' _{1l is} the first output signal _component at time 1, where V '' _{2l is} the second output signal _component at time 1, where k _{SF is} the current calibration factor. Apparatus according to any one of claims 10 to 17, which comprises Feature: means for calculating a current one Zero-point signal based on a first output signal to a first time and one corrected with the scale factor first Output signal at the first time. Apparatus according to any one of claims 10 to 17, which comprises Feature: a device for providing a Characterization of sensor parameters Scale factor and zero point over the Temperature; and a device for recovering a current zero point signal based on the calculated current one Scale factor. Method for recalibrating a preset scale factor of a rotation rate sensor with a vibration device ( 100 ), a primary excitation device ( 106 ) for driving the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rate of rotation ( 101 ) of the rotation rate sensor around a sensitive axis thereof, with the following steps: driving ( 40 ) of the primary drive device with a primary control signal having a first drive component at egg ner drive frequency (ω ₁ ) and a second drive component at an observer frequency (ω ₂ ); Frequency-selective acquisition ( 42 ) of the output signal to obtain a first output signal component (V ₁ ) due to the first drive component and a second output signal component (V ₂ ) due to the second drive component; Simulate ( 44 ) a rate of rotation (Ω _E ) by exciting the oscillating device ( 100 ) in the direction of the secondary movement ( 104 ) with a secondary control signal adjusted to simulate the defined rate of turn (Ω _E ), the secondary control amplitude depending on the second drive component at the observer frequency (ω ₂ ); wherein the step of frequency-selective detection is performed at a first time (i), at a second time (j) and at a third time (k), and at the third time (k), the step of simulating is performed; and calculating ( 48 ) of calibration information that depends on a current calibration factor (k _SF ) using an output signal of the device ( 42 for frequency selective detection at the first time (i), at the second time (j) and at the third time (k) and using the defined rate of turn (Ω _E ), wherein the step of calculating comprises the steps of: calculating a current zero point signal based on a first output signal at a first time and a second output signal at another time and based on the current correction factor (k _SF ), wherein the current zero point signal is calculated as follows:

where NP ₁ 'is the current zero point _signal , where V _1i "is the first output signal _component at time i, where V _2i " is the second output signal _component at time i, where V' _{1l is} the first output signal _component at time 1, where V '' _{2l is} the second output signal _component at time 1, where k _{SF is} the current calibration _factor ; and calculating a calibrated zero point for the first output signal component based on a difference between the current zero point signal and a desired zero point signal.