DE10296353D2 - Method and device for X-ray spectroscopy - Google Patents

Method and device for X-ray spectroscopy

Info

Publication number
DE10296353D2
DE10296353D2 DE10296353T DE10296353T DE10296353D2 DE 10296353 D2 DE10296353 D2 DE 10296353D2 DE 10296353 T DE10296353 T DE 10296353T DE 10296353 T DE10296353 T DE 10296353T DE 10296353 D2 DE10296353 D2 DE 10296353D2
Authority
DE
Germany
Prior art keywords
ray spectroscopy
spectroscopy
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10296353T
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEILITZSCH FRANZ VON
Original Assignee
FEILITZSCH FRANZ VON
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEILITZSCH FRANZ VON filed Critical FEILITZSCH FRANZ VON
Priority to DE10296353T priority Critical patent/DE10296353D2/en
Application granted granted Critical
Publication of DE10296353D2 publication Critical patent/DE10296353D2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F25B9/145Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25Tubes for localised analysis using electron or ion beams
    • H01J2237/2505Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2555Microprobes, i.e. particle-induced X-ray spectrometry
    • H01J2237/2561Microprobes, i.e. particle-induced X-ray spectrometry electron

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE10296353T 2001-12-29 2002-12-30 Method and device for X-ray spectroscopy Expired - Fee Related DE10296353D2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10296353T DE10296353D2 (en) 2001-12-29 2002-12-30 Method and device for X-ray spectroscopy

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10164428A DE10164428A1 (en) 2001-12-29 2001-12-29 X-ray spectroscopy device, incorporates SQUID and allows continuous high resolution measurement of energy of X-ray quanta emitted from electron beam activated sample
PCT/DE2002/004756 WO2003062862A2 (en) 2001-12-29 2002-12-30 Phase transition thermometer for use in microcalorimeter for detecting x-rays
DE10296353T DE10296353D2 (en) 2001-12-29 2002-12-30 Method and device for X-ray spectroscopy

Publications (1)

Publication Number Publication Date
DE10296353D2 true DE10296353D2 (en) 2004-11-04

Family

ID=7711118

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10164428A Withdrawn DE10164428A1 (en) 2001-12-29 2001-12-29 X-ray spectroscopy device, incorporates SQUID and allows continuous high resolution measurement of energy of X-ray quanta emitted from electron beam activated sample
DE10296353T Expired - Fee Related DE10296353D2 (en) 2001-12-29 2002-12-30 Method and device for X-ray spectroscopy

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10164428A Withdrawn DE10164428A1 (en) 2001-12-29 2001-12-29 X-ray spectroscopy device, incorporates SQUID and allows continuous high resolution measurement of energy of X-ray quanta emitted from electron beam activated sample

Country Status (3)

Country Link
AU (1) AU2002363845A1 (en)
DE (2) DE10164428A1 (en)
WO (1) WO2003062862A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10317888B3 (en) 2003-04-17 2004-12-16 Vericold Technologies Gmbh Cryogenic detector device
DE202004018469U1 (en) * 2004-11-29 2006-04-13 Vericold Technologies Gmbh Low-temperature cryostat

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5641961A (en) * 1995-12-28 1997-06-24 Stanford University Application of electrothermal feedback for high resolution cryogenic particle detection using a transition edge sensor
US5880468A (en) * 1996-08-26 1999-03-09 The United States Of America As Represented By The Secretary Of Commerce Superconducting transition-edge sensor
US5880467A (en) * 1997-03-05 1999-03-09 The United States Of America As Represented By The Secretary Of Commerce Microcalorimeter x-ray detectors with x-ray lens
JP2002518853A (en) * 1998-06-17 2002-06-25 イシス イノベイション リミテッド Superconducting tunnel junction device

Also Published As

Publication number Publication date
DE10164428A1 (en) 2003-07-17
WO2003062862A3 (en) 2004-01-15
AU2002363845A1 (en) 2003-09-02
WO2003062862A2 (en) 2003-07-31

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee