DE10227691A1 - Light conducting glass component consisting of photo structured glass, used e.g. in a spring element for measuring small forces, is microstructured and has a low refractive index on its surface - Google Patents
Light conducting glass component consisting of photo structured glass, used e.g. in a spring element for measuring small forces, is microstructured and has a low refractive index on its surface Download PDFInfo
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- DE10227691A1 DE10227691A1 DE2002127691 DE10227691A DE10227691A1 DE 10227691 A1 DE10227691 A1 DE 10227691A1 DE 2002127691 DE2002127691 DE 2002127691 DE 10227691 A DE10227691 A DE 10227691A DE 10227691 A1 DE10227691 A1 DE 10227691A1
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- light
- glass component
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- ion exchange
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Links
- 239000011521 glass Substances 0.000 title claims abstract description 69
- 238000000034 method Methods 0.000 claims abstract description 28
- 238000005342 ion exchange Methods 0.000 claims abstract description 23
- 230000008569 process Effects 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 150000003839 salts Chemical class 0.000 claims abstract description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims description 3
- 229910001416 lithium ion Inorganic materials 0.000 claims description 3
- 238000005496 tempering Methods 0.000 claims description 3
- 229910001415 sodium ion Inorganic materials 0.000 claims description 2
- 150000001768 cations Chemical class 0.000 claims 2
- 159000000000 sodium salts Chemical class 0.000 claims 1
- 230000009467 reduction Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 description 2
- 229910052912 lithium silicate Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/002—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/04—Compositions for glass with special properties for photosensitive glass
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
Anwendungsgebiet der Erfindungfield of use the invention
Die Erfindung betrifft lichtleitende Glasbauteile und ein Verfahren zu deren Herstellung gemäss den Patentansprüchen. Die erfindungsgemässen Glasbauteile finden beispielsweise Anwendung in der Messtechnik (Federelemente aus Glas für die Messung sehr kleiner Kräfte), bei Greifersystemen (Greiferelemente aus Glas) und in der Nachrichtentechnik/Optik (Lichtverteilerstrukturen, Y-Verzweiger etc.).The invention relates to light-guiding Glass components and a method for their production according to the claims. The glass components according to the invention are used, for example, in measurement technology (spring elements made of glass for the measurement of very small forces), in gripper systems (gripper elements made of glass) and in communications technology / optics (Light distribution structures, Y-branches, etc.).
Stand der TechnikState of the art
Der Fotostrukturierungsprozess für Gläser bestimmter Zusammensetzungsbereiche aus dem Grundglassystem SiO2-Al2O3-Li2O ist seit längerem bekannt (z.B. Hülsenberg, D.; Bruntsch, R.: Glasses and glassceramics for application in micromechanics. Journal of Non-Crystalline Solids 129 (1991) S. 199–205). In diesem Prozess werden in den Bearbeitungsschritten Belichten, Tempern und Ätzen in typischenweise 1 mm dicken Glasscheiben durchgehende Strukturen hergestellt. Das Belichten erfolgt unter Nutzung einer Maske. Das Spektrum der Belichtungsquelle enthält den Sensitivitätsbereich des Glases (z.B. 300 bis 320 nm). Beim Tempern kristallisiert in den belichteten Glasbereichen ein Teil des Glases zu der Kristallphase Lithiummetasilikat, dabei entsteht Restglasphase einer anderen chemischen Zusammensetzung als das Ausgangsglas. Beim Ätzen wird die Kristallphase Lithiummetasilikat durch Flusssäure gelöst und die dazwischen befindliche Restglasphase fällt heraus oder wird teilweise gelöst (z.B. Harnisch, A.; Feindt, K.; Ehrhardt, A.; Baumgart, H.; Hülsenberg, D.; Kallenbach, E.: Microstructurable glasses, structuring technologies, special joining techniques and applications for microactuators. 6th International Conference on New Actuators, Bremen 17.–19. 06. 1998).The photo-structuring process for glasses of certain composition areas from the basic glass system SiO 2 -Al 2 O 3 -Li 2 O has long been known (e.g. Hülsenberg, D .; Bruntsch, R .: Glasses and glassceramics for application in micromechanics. Journal of Non-Crystalline Solids 129 (1991) pp. 199-205). In this process, exposure, annealing and etching in typical 1 mm thick glass panes are used to produce continuous structures. The exposure takes place using a mask. The spectrum of the exposure source contains the sensitivity range of the glass (eg 300 to 320 nm). During tempering, part of the glass crystallizes into the lithium metasilicate crystal phase in the exposed glass areas, resulting in residual glass phase of a different chemical composition than the starting glass. During the etching, the crystal phase lithium metasilicate is dissolved by hydrofluoric acid and the residual glass phase in between falls out or is partially dissolved (e.g. Harnisch, A .; Feindt, K .; Ehrhardt, A .; Baumgart, H .; Hülsenberg, D .; Kallenbach, E .: Microstructurable glasses, structuring technologies, special joining techniques and applications for microactuators 6 th International Conference on New Actuators, Bremen 17th-19th 06th 1998)...
Die Herstellung von Lichtleitern durch Ionenaustauschprozesse zwischen Glas und Salzschmelze ist ebenfalls seit längerem bekannt (z.B. Chartier, u.a.: Fast fabrication method for thick and highly multimode optical waveguides. electronic letters 8th december 1977, vol. 13, Nr. 25, S. 763 – 764). Sie basiert allerdings auf einer Brechzahlerhöhung in den ionenausgetauschten Glasbereichen. Dabei werden kompakte Glasstücke verwendet (z.B. L.B. Glebov u.a.: Formation of Planar waveguides based on silicate glasses by the low-temperature Ligl + ↔ Kmelt +ion exchange. Glass physics and chemistry, vol. 17, Nr. 3, 1991, pp. 255–260) und durch Maskierungstechniken lediglich ausgewählte Glasoberflächenbereiche ionenausgetauscht.The production of light guides by ion exchange processes between glass and molten salt has also been known for some time (e.g. Chartier, among others: Fast fabrication method for thick and highly multimode optical waveguides. Electronic letters 8 th december 1977, vol. 13, No. 25, p. 763 - 764). However, it is based on an increase in the refractive index in the ion-exchanged glass areas. Compact glass pieces are used (e.g. LB Glebov et al .: Formation of Planar waveguides based on silicate glasses by the low-temperature Li gl + ↔ K melt + ion exchange. Glass physics and chemistry, vol. 17, No. 3, 1991, pp. 255-260) and ion exchange only selected glass surface areas by masking techniques.
Kritik am Stand der TechnikCriticism of the stand of the technique
Ein kombiniertes Verfahren, bestehend aus Herstellung von Glasbauteilen durch den Fotostrukturierungsprozess (strukturierte Glasbauteile) und anschliessender Brechzahlreduzierung durch Ionenaustausch in den oberflächennahen Bereichen der Glasbauteile ist bisher nicht bekannt.A combined process consisting of from the production of glass components through the photo structuring process (structured glass components) and subsequent reduction in refractive index through ion exchange in the near-surface areas of the glass components is not yet known.
Bisherige Lichtleiter enthaltende Glasscheiben sind daher nicht mit komplexer Geometrie herstellbar. Es sind aus demselben Grund auch keine zusätzlichen Funktionen (z.B. dünn strukturiertes Glas als Federelement) in Lichtleiter enthaltende Glasscheiben integrierbar.Previous light guides containing Glass panes can therefore not be produced with complex geometry. For the same reason, there are no additional functions (e.g. thinly structured glass as a spring element) can be integrated into glass panes containing light guides.
Ionenaustauschprozesse zur Herstellung von lichtleitenden Kanälen in Glasscheiben benötigen eine Maskierung der Glasbauteile vor dem Ionenaustausch und das Ablösen der Maskierung danach.Ion exchange processes for the production of light-guiding channels in glass panes a masking of the glass components before the ion exchange and that supersede the masking afterwards.
Der Erfindung liegt die Aufgabe zugrunde, in strukturierte Glasbauteile oberflächennah lichtreflektierende Volumenbereiche einzubringen. Damit wird es möglich, Licht innerhalb der Glasteile zu leiten. Die Verwendung des Fotostrukturierungsprozesses zur Herstellung von Glasbauteilen für den nachfolgenden Ionenaustausch erlaubt die Herstellung von Lichtleitern mit weitgehend variierbarer Geometrie.The invention is based on the object in structured glass components near the surface reflecting light To bring volume areas. This will make it possible to light within the To lead glass parts. The use of the photo structuring process for the production of glass components for the subsequent ion exchange allows the production of light guides with largely variable Geometry.
Lösungsolution
Gemäss der Erfindung wird diese Aufgabe durch die kennzeichnenden Merkmale des ersten Patentanspruchs gelöst.According to the invention, this is Task by the characterizing features of the first claim solved.
Erreichte VorteileAchieved advantages
Durch die Variation der Maskengeometrie im Fotostrukturierungsprozess sind beliebig viele Lichtleiterbauteilgeometrien herstellbar. Krümmungsradien und Dickenabmessungen der Lichtleitergeometrien sind von der erreichbaren Brechzahlreduzierung Δn abhängig. Die Brechzahlreduzierung Δn kann über die Prozessparameter beeinflusst werden.By varying the mask geometry Any number of fiber optic component geometries are in the photo structuring process produced. radii of curvature and thickness dimensions of the light guide geometries are of the achievable Refractive index reduction Δn dependent. The refractive index reduction Δn can about the process parameters are influenced.
In den Untersuchungen zur Erfindung wurde gezeigt, dass die Prozessparameter sinnvoll in fixe und variable eingeteilt werden können. Die variablen Prozessparameter können dabei auf die Temperatur und Zeit des Ionenaustausches reduziert werden. Das erlaubt eine leichte Steuerung des Ionenaustausches und gewährleistet die Reproduzierbarkeit der Ergebnisse.In the studies on the invention was shown that the process parameters make sense in fixed and variable can be classified. The variable process parameters can reduced to the temperature and time of the ion exchange become. This allows easy control of the ion exchange and guaranteed the reproducibility of the results.
Infolge des Ionenaustausches ergibt sich im Glasbauteil ausgehend von der Glasoberfläche ein Profil der chemischen Zusammensetzung. Die Natriumionenkonzentration ist zur Oberfläche hin erhöht und die Lithiumionenkonzentration zur Oberfläche hin reduziert. Die Form der Profile entspricht der von Fehlerfunktionen bzw. konjugierter Fehlerfunktionen und ist durch Polynome 6. Ordnung annäherbar. In geringem Maße nehmen im Glas vorhandene Kalium-ionen am Austausch teil. An der Glasoberfläche werden Brechzahlreduzierungen bis zu Δn = 0,014 erreicht. Die Tiefe der Brechzahlprofile ist kleiner als 250 μm, vorzugsweise jedoch 20 bis 150 μm.As a result of the ion exchange, a profile of the chemical composition results from the glass surface in the glass component. The sodium ion concentration is increased towards the surface and the lithium ion concentration is reduced towards the surface. The shape of the profiles corresponds to that of Error functions or conjugate error functions and is approximable by 6th order polynomials. Potassium ions present in the glass participate to a small extent in the exchange. Refractive index reductions of up to Δn = 0.014 are achieved on the glass surface. The depth of the refractive index profiles is less than 250 μm, but preferably 20 to 150 μm.
Wesentliche Merkmale der Erfindung sind, dass
- – die lichtleitenden Glasbauteile mikrostrukturiert sind und an ihrer Oberfläche eine geringere Brechzahl aufweisen,
- – eine Maskierung der Bauteile während des Ionenaustausches nicht nötig ist,
- – die lichtleitenden Glasbauteile verschiedene geometrische Strukturen und/oder verschiedene Ionenaustauschtiefen aufweisen können,
- – in den lichtleitenden Glasbauteilen die Funktion des Lichtleitens und/oder weitere Funktionen vereint sind,
- – das Verfahren zur Herstellung eines lichtleitenden Glasbauteiles dadurch gekennzeichnet ist, dass das Bauteil in einem ersten Verfahrensschritt mikrostrukturiert wird und in einem zweiten Verfahrensschritt ein Ionenaustausch zwischen einer Salzschmelze und dem Glasbauteil stattfindet.
- The light-conducting glass components are microstructured and have a lower refractive index on their surface,
- It is not necessary to mask the components during the ion exchange,
- The light-conducting glass components can have different geometric structures and / or different ion exchange depths,
- The function of the light guide and / or further functions are combined in the light-conducting glass components,
- - The method for producing a light-conducting glass component is characterized in that the component is microstructured in a first process step and an ion exchange takes place between a molten salt and the glass component in a second process step.
Weitere Ausgestaltung der ErfindungFurther configuration the invention
Vorteilhafte Ausgestaltungen der Erfindung sind in den Ansprüchen 2 bis 11 angegeben.Advantageous embodiments of the Invention are in the claims 2 to 11 specified.
Beschreibung von Ausführungsbeispielendescription of embodiments
Die Erfindung wird nachstehend an Hand der schematischen Zeichnung von Ausführungsbeispielen näher erläutert.The invention is set out below Hand of the schematic drawing of exemplary embodiments explained in more detail.
Die Herstellung von strukturierten
Glashalbzeugen erfolgt durch den Fotostrukturierungsprozess (Belichtung,
Tempern und Ätzen).
In einem auf diese Weise hergestellten Ausgangsglassteg
Aufstellung der Bezugszeichenlist the reference number
Claims (11)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2002127691 DE10227691A1 (en) | 2002-07-30 | 2002-07-30 | Light conducting glass component consisting of photo structured glass, used e.g. in a spring element for measuring small forces, is microstructured and has a low refractive index on its surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2002127691 DE10227691A1 (en) | 2002-07-30 | 2002-07-30 | Light conducting glass component consisting of photo structured glass, used e.g. in a spring element for measuring small forces, is microstructured and has a low refractive index on its surface |
Publications (1)
Publication Number | Publication Date |
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DE10227691A1 true DE10227691A1 (en) | 2004-02-19 |
Family
ID=30468960
Family Applications (1)
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DE2002127691 Withdrawn DE10227691A1 (en) | 2002-07-30 | 2002-07-30 | Light conducting glass component consisting of photo structured glass, used e.g. in a spring element for measuring small forces, is microstructured and has a low refractive index on its surface |
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DE (1) | DE10227691A1 (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0431281A1 (en) * | 1989-11-06 | 1991-06-12 | Corning Incorporated | Optical device containing a photonucleable glass, and method of making it |
DE4203368A1 (en) * | 1992-02-06 | 1993-08-12 | Bodenseewerk Geraetetech | Integrated optical wave guide - comprises glass substrate with intermediate zone surrounding integrated zone |
DE4314301C1 (en) * | 1993-04-30 | 1994-05-05 | Imm Inst Mikrotech | Surface scanning sensor - has a sensor point of a photo-structurable glass |
DE19846751A1 (en) * | 1997-10-12 | 1999-06-02 | Poly Optik Gmbh | Glass relief structuring system using fine linear scanner to irradiate photo-structurable glass |
DE19920000A1 (en) * | 1998-05-06 | 1999-12-02 | Univ Ilmenau Tech | Deep structuring process for glass |
WO2000035822A1 (en) * | 1998-12-14 | 2000-06-22 | Forschungszentrum Jülich GmbH | Increasing the radiation sensitivity of a glass fibre |
-
2002
- 2002-07-30 DE DE2002127691 patent/DE10227691A1/en not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0431281A1 (en) * | 1989-11-06 | 1991-06-12 | Corning Incorporated | Optical device containing a photonucleable glass, and method of making it |
US5062877A (en) * | 1989-11-06 | 1991-11-05 | Corning Incorporated | Method for making an optical device |
DE4203368A1 (en) * | 1992-02-06 | 1993-08-12 | Bodenseewerk Geraetetech | Integrated optical wave guide - comprises glass substrate with intermediate zone surrounding integrated zone |
DE4314301C1 (en) * | 1993-04-30 | 1994-05-05 | Imm Inst Mikrotech | Surface scanning sensor - has a sensor point of a photo-structurable glass |
DE19846751A1 (en) * | 1997-10-12 | 1999-06-02 | Poly Optik Gmbh | Glass relief structuring system using fine linear scanner to irradiate photo-structurable glass |
DE19920000A1 (en) * | 1998-05-06 | 1999-12-02 | Univ Ilmenau Tech | Deep structuring process for glass |
WO2000035822A1 (en) * | 1998-12-14 | 2000-06-22 | Forschungszentrum Jülich GmbH | Increasing the radiation sensitivity of a glass fibre |
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