DE10213088B4 - Optical element, process for its preparation and determination of its optical properties - Google Patents

Optical element, process for its preparation and determination of its optical properties Download PDF

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Publication number
DE10213088B4
DE10213088B4 DE2002113088 DE10213088A DE10213088B4 DE 10213088 B4 DE10213088 B4 DE 10213088B4 DE 2002113088 DE2002113088 DE 2002113088 DE 10213088 A DE10213088 A DE 10213088A DE 10213088 B4 DE10213088 B4 DE 10213088B4
Authority
DE
Germany
Prior art keywords
determination
preparation
optical
optical element
optical properties
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE2002113088
Other languages
German (de)
Other versions
DE10213088A1 (en
Inventor
Joerg Heber
Norbert Kaiser
Christian Muehlig
Wolfgang Triebel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Leibniz Institut fuer Photonische Technologien eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Institut fuer Physikalische Hochtechnologie eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV, Institut fuer Physikalische Hochtechnologie eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE2002113088 priority Critical patent/DE10213088B4/en
Priority to AU2003223861A priority patent/AU2003223861A1/en
Priority to PCT/DE2003/000810 priority patent/WO2003079062A1/en
Publication of DE10213088A1 publication Critical patent/DE10213088A1/en
Application granted granted Critical
Publication of DE10213088B4 publication Critical patent/DE10213088B4/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/283—Interference filters designed for the ultraviolet

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Luminescent Compositions (AREA)
DE2002113088 2002-03-18 2002-03-18 Optical element, process for its preparation and determination of its optical properties Expired - Fee Related DE10213088B4 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE2002113088 DE10213088B4 (en) 2002-03-18 2002-03-18 Optical element, process for its preparation and determination of its optical properties
AU2003223861A AU2003223861A1 (en) 2002-03-18 2003-03-07 Optical element, method for the production thereof and for determining its optical properties
PCT/DE2003/000810 WO2003079062A1 (en) 2002-03-18 2003-03-07 Optical element, method for the production thereof and for determining its optical properties

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002113088 DE10213088B4 (en) 2002-03-18 2002-03-18 Optical element, process for its preparation and determination of its optical properties

Publications (2)

Publication Number Publication Date
DE10213088A1 DE10213088A1 (en) 2003-11-06
DE10213088B4 true DE10213088B4 (en) 2005-03-10

Family

ID=27815902

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002113088 Expired - Fee Related DE10213088B4 (en) 2002-03-18 2002-03-18 Optical element, process for its preparation and determination of its optical properties

Country Status (3)

Country Link
AU (1) AU2003223861A1 (en)
DE (1) DE10213088B4 (en)
WO (1) WO2003079062A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007025600A1 (en) * 2007-05-31 2008-12-11 Schott Ag Interference filter and method for its production

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442045A1 (en) * 1994-11-25 1996-05-30 Fraunhofer Ges Forschung Interference filter for ultraviolet, visible and near infrared light
US6162495A (en) * 1997-09-29 2000-12-19 Cymer, Inc. Protective overcoat for replicated diffraction gratings
DE10025214A1 (en) * 2000-05-22 2001-12-06 Zeiss Carl Littrow grid and uses of a Littrow grid

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038681B2 (en) * 1978-09-27 1985-09-02 キヤノン株式会社 Ultraviolet multilayer film
JPS5751146A (en) * 1980-09-09 1982-03-25 Nippon Telegr & Teleph Corp <Ntt> Preparation of raw material for fluoride optical fiber
GB2204861A (en) * 1987-04-24 1988-11-23 Central Glass Co Ltd Preparation of inorganic metal compounds of ultrahigh purity
JPH01115897A (en) * 1987-10-30 1989-05-09 Nippon Mining Co Ltd Production of magnesium fluoride single crystal
JPH06240446A (en) * 1993-02-18 1994-08-30 Canon Inc Production of multilayer optical thin film
WO2001023914A1 (en) * 1999-09-30 2001-04-05 Nikon Corporation Optical device with multilayer thin film and aligner with the device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442045A1 (en) * 1994-11-25 1996-05-30 Fraunhofer Ges Forschung Interference filter for ultraviolet, visible and near infrared light
US6162495A (en) * 1997-09-29 2000-12-19 Cymer, Inc. Protective overcoat for replicated diffraction gratings
DE10025214A1 (en) * 2000-05-22 2001-12-06 Zeiss Carl Littrow grid and uses of a Littrow grid

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Cerac Technical Publication (2000), S.1-3 & JP 8 178 849 A mit Abstract *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007025600A1 (en) * 2007-05-31 2008-12-11 Schott Ag Interference filter and method for its production
DE102007025600B4 (en) * 2007-05-31 2009-05-28 Schott Ag Interference filter and method for its production

Also Published As

Publication number Publication date
AU2003223861A1 (en) 2003-09-29
WO2003079062A8 (en) 2003-12-11
DE10213088A1 (en) 2003-11-06
WO2003079062A1 (en) 2003-09-25

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8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANG, DE

Owner name: INSTITUT FUER PHOTONISCHE TECHNOLOGIEN E.V., 0, DE

R082 Change of representative

Representative=s name: PFENNING MEINIG & PARTNER GBR, DE

R081 Change of applicant/patentee

Owner name: LEIBNIZ-INSTITUT FUER PHOTONISCHE TECHNOLOGIEN, DE

Free format text: FORMER OWNER: FRAUNHOFER-GESELLSCHAFT ZUR FOER, INSTITUT FUER PHOTONISCHE TECHNO, , DE

Effective date: 20140904

Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANG, DE

Free format text: FORMER OWNER: FRAUNHOFER-GESELLSCHAFT ZUR FOER, INSTITUT FUER PHOTONISCHE TECHNO, , DE

Effective date: 20140904

Owner name: LEIBNIZ-INSTITUT FUER PHOTONISCHE TECHNOLOGIEN, DE

Free format text: FORMER OWNERS: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80686 MUENCHEN, DE; INSTITUT FUER PHOTONISCHE TECHNOLOGIEN E.V., 07745 JENA, DE

Effective date: 20140904

Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANG, DE

Free format text: FORMER OWNERS: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80686 MUENCHEN, DE; INSTITUT FUER PHOTONISCHE TECHNOLOGIEN E.V., 07745 JENA, DE

Effective date: 20140904

R082 Change of representative

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Effective date: 20140904

Representative=s name: PFENNING, MEINIG & PARTNER MBB PATENTANWAELTE, DE

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R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee