DE102022204141A1 - CONTROL SYSTEM, CONTROL PROCEDURE AND PROGRAM - Google Patents

Abstract

A technique is provided in which, in an apparatus having a plurality of moving parts, the speed at the trajectory end point of the moving part is the target speed, and the plurality of moving parts are moved synchronously. Control system of a device with several moving parts that can move, characterized by:
a trajectory calculation means that calculates a trajectory for each of the plurality of moving parts,
a moving time calculation means that calculates, for each of the plurality of moving parts, a moving time at which a target final speed can be realized,
a common moving time determination means that determines a single common moving time at which each of the plurality of moving parts can realize the target final speed based on the plurality of moving times calculated for each of the plurality of moving parts, and
a control command means that causes the apparatus to perform control including speed control in which each of the plurality of moving parts moves from the one point to the end point on each of the detected moving trajectories with the common moving time.

Description

CROSS REFERENCE TO RELATED APPLICATION

This application is based on Japanese Patent Application No. 2021-085177 filed with the Japan Patent Office on May 20, 2021, the entire contents of which are incorporated herein by reference.

TECHNICAL AREA

The present invention relates to the control of a device with several moving parts that can move at least two-dimensionally.

BACKGROUND TECHNOLOGY

Conventionally, devices in which a plurality of moving parts (hereinafter also referred to as axle groups) are coordinated to perform works have often been used. There are various types and uses of such devices, e.g. B. X-ray inspection apparatuses in which X-ray images of an object to be inspected, e.g.

In such X-ray inspection devices, X-rays are radiated from an X-ray source onto the inspection site of the object to be inspected and the transmitted X-rays are recorded by an X-ray camera. Then several X-ray images are taken, changing the relative position between the X-ray source, the object to be examined and the X-ray camera. Here, at least one of the X-ray source, the object to be inspected and the X-ray camera is made to swing, thereby changing their relative position, and when a swing movement is completed and the inspection point is finished, it is moved to the imaging position for imaging the next inspection point made and another pivoting movement takes place. Here it was common that the moving parts such. B. the X-ray source, at the transition time between the forward and the pivoting movement, ie before and after the pivoting movement, stopped and then the next forward and pivoting movement is started again.

Such a stopping operation itself causes an increase in the total inspection time, and when panning and moving from a standstill, the X-ray source and X-ray camera are susceptible to vibration due to changes in acceleration and the image quality is reduced, so that there is an idle time in which no inspection images can be taken until the vibration subsides, further increasing the test time.

Therefore, it is conceivable to shorten the test time by eliminating the stopping time before and after the slewing motion and connecting the slewing and locomotion with a continuous speed (acceleration, jerk). However, since the X-ray source and the X-ray camera must be oppositely positioned with respect to the object to be inspected, the movement time of the two must be equal in order to eliminate the stop time and to match the timing of the beginning of the panning movement of the X-ray source and the X-ray camera.

In order to fix the moving time between two points and to connect the two smoothly so that the acceleration is not discontinuous, it is conceivable to move the moving part by means of a trajectory using a quintic interpolation, such as e.g. as disclosed in Tsuneo Yoshikawa, Fundamentals of Robot Control, CORONA Publishing Co., Ltd., 1988, pp. 132-133. However, the movement paths of the X-ray source and the X-ray camera do not necessarily coincide, and if the movement path of either one is short, a movement path generated to adjust the movement time may expand more than necessary and exceed the movable range of the device.

In this regard describes JP 2012-83982 A a technique for preventing the generation of a trajectory that deviates from the control vector by finding the trajectory between two points with a Bezier curve defined by the control vector. It also describes real-time movement speed calculation and control, which realizes the target speed and target acceleration of the moving object at the end point of movement in each control cycle. To the in JP 2012-83982 A With the technique described, it is possible to smoothly connect the start and end points by simply specifying the start and end point vectors, without the trajectory overshooting between the two, and without the velocity (acceleration) being discontinuous at the end point of the motion.

SUMMARY OF THE INVENTION

In the JP 2012-83982 A The technique described relates to a device with a single axis group, however, as already mentioned, in X-ray inspection devices several axis groups (the X-ray source and the X-ray camera) must be operated synchronously. That is, the moving time of the moving section of each axis group must be the same, but the appropriate moving time for realizing the target speed at the end point of the moving section is different for each axis group, making synchronous control difficult. This problem could be solved with the in JP 2012-83982 A described technique cannot be solved.

The present invention has been made in view of the above problem, and the object of the present invention is to provide a technique which, in an apparatus having a plurality of moving parts, generates an appropriate trajectory for each moving part and realizes control in which the speed at Trajectory end point of each moving part is the target speed, and the plurality of moving parts are moved synchronously.

The present invention to achieve the above object adopts the following structure: Control system of an apparatus with multiple moving parts, characterized by;
a trajectory calculation means that calculates, for each of the plurality of movable parts, a determined trajectory that is a path connecting a start point and an end point for the movement of the movable part and is determined using a polynomial,
a moving time calculating means which calculates, for each of the plurality of moving parts, a moving time which is a time required for moving from a point to the end point on the detected moving trajectory and at which a final target speed which is a predetermined speed , which is to keep the moving part at the end point, can be realized
a common moving time determination means that determines a single common moving time at which each of the plurality of moving parts can realize the final target speed at the end point, based on the plurality of moving times calculated for each of the plurality of moving parts, and
a control command means that causes the apparatus to perform control including speed control in which each of the plurality of moving parts moves from the one point to the end point on each of the detected moving trajectories with the common moving time.

This makes it possible to create an appropriate trajectory for each movable part in an apparatus having multiple moving parts, and to control such that the speed at the trajectory end point of each moving part is the target speed and the multiple moving parts move synchronously.

The common moving time determination means may further determine the longest of the plural moving times calculated for each of the plural moving parts as a common moving time. This makes it possible to set a common moving time where all moving parts can move smoothly and where each moving part can move most efficiently as a whole device.

The moving time calculation means may further calculate a remaining path moving time required to reach the end point from the current position of each of the plurality of movable parts in each predetermined control cycle in the movement control of the movable parts.
the common moving time determining means may determine and update a single common remaining orbit moving time in each predetermined control cycle based on the remaining orbit moving time calculated for each of the plurality of movable parts in each predetermined control cycle, and
the control command means may cause the apparatus to perform control in which each of the plurality of moving parts moves from each of the current position to the end point with the latest remaining path common moving time updated in each control cycle.

With this design, the synchronous control of multiple moving parts in real time is possible. Therefore, the movement of the moving parts can be controlled without calculating the movement time in advance. Even if for some reason it becomes impossible for the moving parts to complete the movement within the calculated moving time, it is possible to correct the moving time in real time and continue the synchronous control of the multiple moving parts.

The moving time calculation means may further calculate the remaining trajectory moving time using the current speed of the moving part, the final target speed and the remaining trajectory length of the moving part from the current position to the end point of the detected moving trajectory. The remaining track length can be B. measured with a sensor or calculated using an elementary function, etc. are determined.

The control system further includes an acceleration calculation means that calculates a target acceleration or a target jerk for reaching the end point of the determined moving trajectory in each control cycle and for each of the plurality of moving parts, so that the target final speed can be realized in the common moving time remaining trajectory , and the control command means may cause the apparatus to perform motion control for each of the plurality of moving parts that satisfies the target acceleration or jerk calculated in each control cycle.

In addition, the means for calculating the acceleration can be used on the assumption that the target acceleration is accRefNonLimited, the target final velocity refVelEnd, the actual velocity is actVel, the common remaining trajectory moving time tLeft, and the velocity Vnec required to reach the end point of the detected trajectory reach so that the target final speed can be realized in the common movement time of the remaining path, calculate the target acceleration using the following equation: accRefNonLimited = (2 x Vnec - refVelEnd - actVel)/tLeft.

The means for calculating the acceleration can further be calculated using a predetermined acceleration correction factor α and assuming that the target acceleration is accRefNonLimited, the target final velocity refVelEnd, the actual velocity is actVel, the common remaining path moving time tLeft, and the velocity Vnec required In order to reach the end point of the determined trajectory so that the target final speed can be realized in the common movement time of the remaining trajectory, calculate the target acceleration using the following equation: accRefNonLimited = (Vnec - actVel + α × (Vnec - refVelEnd))/tLeft.

The common moving time is updated by the remaining trajectory moving time calculated in each control cycle, which may result in an increase in acceleration at the end point of the calculated moving trajectory. In this case, using the acceleration correction factor α described above, an acceleration greater than the acceleration required to realize the target final speed is calculated, and the speed of the moving part is increased in advance, which can prevent the acceleration from occurring at the end point of the detected trajectory is discontinuous (acceleration changes suddenly).

Further, when the calculated target acceleration or jerk exceeds a predetermined limit value, the acceleration calculating means may output the limit value as a target acceleration or jerk. With such a configuration, the acceleration and the jerk can be restrained so as not to exceed the predetermined limit value set based on the load on the device, etc.

The common movement time of the remaining path can also be determined as an integer multiple of the control cycle. When the calculated moving time is not an integral multiple of the control cycle, there are problems that the acceleration at the trajectory connection point (starting and ending point of the detected moving trajectory) is discontinuous and the noise occurs at the trajectory connection point, so this configuration is preferable.

The moving time calculation means may calculate a total trajectory moving time, which is the moving time from the start point to the end point of the detected moving trajectory, for each of the plurality of moving parts before the moving parts are controlled, and the common moving time determining means may based on of the multiple total path travel times calculated for each of the multiple moving parts, a single common motion determine the running time of the entire track. Thereby, the movement control can be performed smoothly after the movement time of the moving part is calculated in advance.

In addition, assuming that at least an initial target speed which is a predetermined speed that the moving part is to maintain at the starting point, and the final target speed are input information, the moving time calculation means may calculate a time in which the acceleration is to be accelerated from the initial target speed to is constant to reach the target final speed when the moving part moves from the starting point to the end point of the determined trajectory as the movement time. This allows the moving part to transition from the trajectory end point to the next motion more smoothly because the acceleration from the start point to the end point of the trajectory is constant and continuous.

The moving time calculation means may further, assuming that the initial target speed, the final target speed, and a limit acceleration that is a limit value of the acceleration until the moving part reaches the final target speed from the target initial speed are input information, by searching the moving time with an acceleration , which does not exceed the limit acceleration, calculate the movement time.

Assuming that the limiting acceleration is a target acceleration limit refAcc from the target initial speed until the target final speed of the moving part is reached, the target final speed is refVelEnd, the target initial speed is refVelStart and the remaining path length to the end point on the determined trajectory is resLen, the limit target acceleration can be the following equation can be determined: refAcc = (refVelEnd ² - refVelStart ² )/(2 × resLen).

The polynomial can exhibit a Bezier curve or Clothoid curve. As a result, the trajectory in which each moving part does not deviate from a predetermined range of movement can be easily designed.

The apparatus may be an X-ray inspection apparatus provided with an X-ray source that generates X-rays irradiated on an inspection object, an X-ray camera that takes X-ray images by the X-rays irradiated on the inspection object from the X-ray source, and a holding part that holds the inspection object is,
wherein the plurality of moving parts includes at least two or more of the x-ray source, the x-ray camera, and the holding part. The present invention is suitable for such devices.

• einen Schritt zur Berechnung einer Bewegungsbahn, der für jedes der mehreren beweglichen Teile eine ermittelte Bewegungsbahn berechnet, die ein Weg ist, der einen Startpunkt und einen Endpunkt für die Bewegung des beweglichen Teils verbindet und unter Verwendung eines Polynoms ermittelt wird,
• einen Schritt zur Berechnung einer Bewegungszeit, der für jedes der mehreren beweglichen Teile eine Bewegungszeit berechnet, die eine Zeit ist, die für die Bewegung von einem Punkt zum Endpunkt auf der ermittelten Bewegungsbahn erforderlich ist, und bei der eine Sollendgeschwindigkeit, die eine vorbestimmte Geschwindigkeit ist, die das bewegliche Teil am Endpunkt beibehalten soll, realisiert werden kann,
• einen Schritt zur Bestimmung einer gemeinsamen Bewegungszeit, der auf der Basis der mehreren Bewegungszeiten, die für jedes der mehreren beweglichen Teile berechnet werden, eine einzige gemeinsame Bewegungszeit bestimmt, bei der jedes der mehreren beweglichen Teile die Sollendgeschwindigkeit am Endpunkt realisieren kann, und
• einen Steuerbefehlsschritt, der das Gerät zur Durchführung einer Steuerung einschließlich einer Geschwindigkeitssteuerung veranlasst, bei der sich jedes der mehreren beweglichen Teile von dem einen Punkt zum Endpunkt auf jeder der ermittelten Bewegungsbahn mit der gemeinsamen Bewegungszeit bewegt.

The invention can also be construed as a method of controlling a device with several moving parts, characterized by:

• a moving trajectory calculation step that calculates, for each of the plurality of moving parts, an estimated moving trajectory that is a path connecting a start point and an end point for movement of the moving part and is determined using a polynomial,
• a moving time calculating step that calculates, for each of the plurality of moving parts, a moving time that is a time required for moving from a point to the end point on the detected moving trajectory and a final target speed that is a predetermined speed , which is to keep the moving part at the end point, can be realized
• a common moving time determination step of determining a single common moving time at which each of the plurality of moving parts can realize the target final speed at the end point, based on the plurality of moving times calculated for each of the plurality of moving parts, and
• a control command step that causes the apparatus to perform control including speed control in which each of the plurality of moving parts moves from the one point to the end point on each of the detected moving trajectories with the common moving time.

The present invention can also be construed as a program that causes a computer to perform each of the above steps, or a computer-readable storage medium in which such a program is not temporarily stored.

The above respective formations and processings can be combined with each other to form the present invention unless there is a technical contradiction.

According to the present invention, it is possible to provide a technique that generates an appropriate trajectory for each movable part in an apparatus with multiple movable parts and realizes control in which the speed at the trajectory end point of each movable part is the target speed, and the multiple movable Parts are moved synchronously.

character list

• 1 eine Ansicht für den Überblick eines Röntgenprüfgeräts im Ausführungsbeispiel der vorliegenden Erfindung;
• 2A eine Ansicht für die Beziehung zwischen einer Schwenk- und Fortbewegung einer Röntgenquelle oder einer Röntgenkamera in herkömmlichem Beispiel; 2B eine Ansicht für die Beziehung zwischen einer Schwenk- und Fortbewegung einer Röntgenquelle oder einer Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 3 eine Ansicht für ein Beispiel einer Bahn der Schwenk- und Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 4 eine Ansicht zur Veranschaulichung der Bewegungsbahn bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 5 eine Ansicht zur Veranschaulichung einer Verarbeitung zur Berechnung der Bewegungszeit bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 6 eine Ansicht zur Veranschaulichung einer Verarbeitung zur Berechnung der Bewegungszeit bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 7A eine Ansicht für ein Beispiel der Bewegungsbahn bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung; 7B ein Diagramm für Beispiel der Beziehung zwischen Geschwindigkeit und Bewegungszeit bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 8A eine Ansicht für ein Beispiel der Bewegungsbahn bei der Fortbewegung der Röntgenquelle 10 im Ausführungsbeispiel der vorliegenden Erfindung; 8B ein Diagramm für die Beziehung zwischen Geschwindigkeit und Bewegungszeit bei der Fortbewegung der Röntgenquelle 10 im Ausführungsbeispiel der vorliegenden Erfindung; 8C eine Ansicht für ein Beispiel der Bewegungsbahn bei der Fortbewegung der Röntgenkamera 20 im Ausführungsbeispiel der vorliegenden Erfindung; 8D ein Diagramm für die Beziehung zwischen Geschwindigkeit und Bewegungszeit bei der Fortbewegung der Röntgenkamera 20 im Ausführungsbeispiel der vorliegenden Erfindung;
• 9A eine Ansicht für ein Beispiel der Bewegungsbahn bei der Fortbewegung der Röntgenquelle 10 im Ausführungsbeispiel der vorliegenden Erfindung; 9B ein Diagramm für die Beziehung zwischen Geschwindigkeit und Bewegungszeit bei der Fortbewegung der Röntgenquelle 10 im Ausführungsbeispiel der vorliegenden Erfindung;
• 10 eine Ansicht zur Veranschaulichung einer Verarbeitung zur Berechnung einer Bewegungszeit restlicher Bahn bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 11 eine Ansicht zur Veranschaulichung einer Verarbeitung zur Berechnung einer Bewegungszeit restlicher Bahn bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 12A eine Ansicht zur Veranschaulichung einer Verarbeitung zur Berechnung einer Bewegungszeit restlicher Bahn bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung; 12B eine Ansicht zur Veranschaulichung einer Verarbeitung zur Berechnung einer Bewegungszeit restlicher Bahn bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung;
• 13 ein Blockdiagramm, das den Ablauf einer Informationsverarbeitung zur Berechnung einer aktuellen Position bei der Fortbewegung der Röntgenquelle oder der Röntgenkamera im Ausführungsbeispiel der vorliegenden Erfindung zeigt;
• 14 ein Flussdiagramm, das den Ablauf einer Verarbeitung zu einer synchronen Bewegung der Röntgenquelle 10 und der Röntgenkamera 20 im Ausführungsbeispiel der vorliegenden Erfindung zeigt.

It shows:

• 1 Fig. 14 is an outline view of an X-ray inspection apparatus in the embodiment of the present invention;
• 2A Fig. 12 is a view for the relationship between panning and moving of an X-ray source or an X-ray camera in a conventional example; 2 B Fig. 12 is a view for the relationship between panning and traveling of an X-ray source or an X-ray camera in the embodiment of the present invention;
• 3 12 is a view showing an example of a trajectory of panning and traveling of the X-ray source or the X-ray camera in the embodiment of the present invention;
• 4 Fig. 12 is a view showing the trajectory of movement of the X-ray source or the X-ray camera in the embodiment of the present invention;
• 5 Fig. 14 is a view showing processing for calculating the moving time when the X-ray source or the X-ray camera moves in the embodiment of the present invention;
• 6 Fig. 14 is a view showing processing for calculating the moving time when the X-ray source or the X-ray camera moves in the embodiment of the present invention;
• 7A Fig. 12 is a view showing an example of the trajectory of moving the X-ray source or the X-ray camera in the embodiment of the present invention; 7B Fig. 12 is a diagram showing an example of the relationship between speed and moving time in moving the X-ray source or the X-ray camera in the embodiment of the present invention;
• 8A Fig. 12 is a view showing an example of the trajectory of moving the X-ray source 10 in the embodiment of the present invention; 8B Fig. 12 is a graph showing the relationship between speed and moving time when the X-ray source 10 moves in the embodiment of the present invention; 8C Fig. 12 is a view showing an example of the trajectory when the X-ray camera 20 moves in the embodiment of the present invention; 8D Fig. 12 is a graph showing the relationship between speed and moving time when the X-ray camera 20 moves in the embodiment of the present invention;
• 9A Fig. 12 is a view showing an example of the trajectory of moving the X-ray source 10 in the embodiment of the present invention; 9B Fig. 12 is a graph showing the relationship between speed and moving time when the X-ray source 10 moves in the embodiment of the present invention;
• 10 Fig. 14 is a view showing processing for calculating a remaining path moving time when the X-ray source or the X-ray camera moves in the embodiment of the present invention;
• 11 Fig. 14 is a view showing processing for calculating a remaining path moving time when the X-ray source or the X-ray camera moves in the embodiment of the present invention;
• 12A Fig. 14 is a view showing processing for calculating a remaining path moving time when the X-ray source or the X-ray camera moves in the embodiment of the present invention; 12B Fig. 14 is a view showing processing for calculating a remaining path moving time when the X-ray source or the X-ray camera moves in the embodiment of the present invention;
• 13 12 is a block diagram showing the flow of information processing for calculating a current position when the X-ray source or the X-ray camera is advanced in the embodiment of the present invention;
• 14 FIG. 14 is a flow chart showing the flow of processing for synchronous movement of the X-ray source 10 and the X-ray camera 20 in the embodiment of the present invention.

EMBODIMENTS OF THE INVENTION

<Application example>

In the following, an overview of an application example of the present invention is explained with some drawings. The invention can be applied to an X-ray inspection device 1 in accordance with 1 be applied. In the X-ray inspection apparatus 1, X-rays are radiated from an X-ray source 10 to an object S to be inspected, and an X-ray image of the transmitted amount is picked up by an X-ray camera 20. FIG.

The X-ray source 10 and the X-ray camera 20 swing on the swing circles 121 and 122, respectively, and X-ray images of the object S to be inspected are taken at a plurality of positions on the path. Thereafter, both the X-ray source 10 and the X-ray camera 20 advance to the next panning circle to inspect other test points, and the X-ray images are taken with further panning on the panning circles. The X-ray source 10 and the X-ray camera 20 can also be referred to below as “moving parts” or “axis groups”.

When the X-ray source 10 and the X-ray camera 20 change from a pivoting movement to a locomotion, conventionally, as in 2A 1, a stopping portion is provided where the X-ray source 10 and the X-ray camera 20 stop once. In this regard, acceleration and deceleration motions on the pan circle have been added before and after the pan motion. In the present application example, as in 2 B 1, the stopping portion in the transition from pivoting to traveling of the X-ray source 10 and the X-ray camera 20 is eliminated. This eliminates an additional stop state and an additional pivoting movement, and the X-ray source 10 and the X-ray camera 20 can move faster from one pivoting circle to the next.

In this application example, as in 3 shown, as a trajectory of locomotion in moving from an nth pan circle Cn to an n+1st pan circle Cn+1 generates a trajectory which includes the nth pan circle Cn and the n+1st pan circle Cn+1 smoothly connects a pan end point and a pan start point, and uses the trajectory on which movement is possible when traveling. This allows the x-ray source 10 and x-ray camera 20 to move faster and without excessive acceleration or shock.

It is necessary that the above moving trajectory smoothly connecting the panning end point and the panning start point is within the range of speed, acceleration and moving range of the X-ray source 10 and the X-ray camera 20 not exceeding the allowable limits.

In order to obtain a movement path that does not exceed the permissible limits of the movement range, in the present application example, as in 4 1, the trajectory is constructed using a curve (cubic Bezier curve) obtained by specifying four points, in addition to the start point P1 and end point P4 of the trajectory, control points P2 and P3, which define the control vector. According to the 4 trajectory generation shown, the control vector can be adjusted intuitively, so that the trajectory does not deviate from the permissible limits (position limits) of the movement range of the x-ray source 10 and the x-ray camera 20 . This makes it possible to obtain a curved trajectory which does not deviate from the control vector set in accordance with the allowable limits of the movement range and which smoothly connects the panning end point and the panning start point.

Incidentally, although the trajectories for each of the X-ray source 10 and the X-ray camera 20 can be obtained as described above, the appropriate moving time for satisfying the allowable values of velocity and acceleration at the trajectory end point may be different between the X-ray source 10 and the X-ray camera 20. To the stopping section at the transition from the On the other hand, to eliminate panning motion in the locomotion, it is necessary to synchronize the timing of reaching each of the X-ray source 10 and the X-ray camera 20 to the trajectory end point (that is, starting point of the next panning circle).

Therefore, in the present application example, the X-ray source 10 and the X-ray camera 20 each calculate an appropriate moving time that does not deviate from the speed and acceleration limit ranges, and the moving time of the moving part with the longer calculated moving time is adopted as the common moving time. That is, the X-ray source 10 and the X-ray camera 20 control the movable part with the shorter calculated movement time (i.e. the part that reaches the end point of the trajectory earlier) in such a way that it actually reaches the end point of the trajectory path in the same movement time as the other moved component. Concretely, the speed control is performed such that the speed is reduced during the locomotion to match the moving time up to the trajectory end point with that of the other movable member while the target speed at the trajectory end point can be realized. In the present application example, the rated speed of the servomotor is used as the limit speed, but in cases where the rated speed is allowed to be temporarily exceeded, the shorter moving time can be used as the common moving time, or a moving time determined in relation to the instantaneous maximum speed can be used as the common moving time will.

The flow of processing described above will now be explained with reference to 14 explained. 14 FIG. 14 is a flowchart showing the flow of processing for the synchronous movement of the X-ray source 10 and the X-ray camera 20 performed in the X-ray inspection apparatus 1. FIG. As in 14 shown, a trajectory defined by a polynomial is first calculated in the X-ray inspection device 1 for each of the X-ray source 10 and the X-ray camera 20 (S101). Then, for each of the X-ray source 10 and the X-ray camera 20, an appropriate moving time that does not deviate from the speed and acceleration limits is calculated (S102), and the moving time of the moving parts having the longer calculated moving time is determined as the common moving time. (S103). The movement of the X-ray source 10 and the X-ray camera 20 is then controlled such that the X-ray source 10 and the X-ray camera 20 move along the movement trajectory thus calculated with a common movement time (S104).

According to the present application example described above, in the X-ray inspection apparatus having a plurality of moving parts including the X-ray source 10 and the X-ray camera 20, an appropriate moving trajectory that does not deviate from the allowable limit of the moving range can be generated for each moving part. It is also possible to realize control of the movement of each moving part so that the speed at the trajectory end point of each moving part corresponds to a predetermined target speed (which does not deviate from the allowable limits), synchronizing the timing at which the plurality of moving parts reach the trajectory end point.

As shown in the application example, the present invention can be applied to an X-ray inspection apparatus 1 in which the object S to be inspected is fixed and the X-ray source 10 and the X-ray camera 20 are pivotally moved above and below it, but the present invention can also be applied to an X-ray inspection apparatus can be applied in which the X-ray source 10 is fixed and the X-ray camera 20 and the object S to be examined are pivotally moved.

<Embodiment 1>

In the following, the embodiments of the present invention are explained in more detail by way of example with reference to the respective drawings (including the drawings already explained in the above application example). However, the specific configurations given in this embodiment are not intended to limit the scope of the invention to these alone unless otherwise specified.

The X-ray inspection apparatus 1 according to Embodiment 1 of the present invention relates to e.g. B. A device for assessing the quality of the soldering condition of electronic components that are soldered on a printed circuit board or the bump of a ball grid array (BGA). Specifically, the X-ray source and the object to be inspected are moved relative to each other, and X-ray images are taken several times to obtain the internal state of the site to be inspected, generate a sectional image at a suitable position, and use the sectional image to check the quality.

<Device Training>

1 12 shows an arrangement of the X-ray source 10, a holding part 40 holding the object S to be inspected, and the X-ray camera 20 in the X-ray inspection apparatus 1 according to Embodiment 1 of the present invention. In the X-ray inspection apparatus 1, X-ray images are taken at a plurality of pickup positions for each inspection position of the object S to be inspected, which is conveyed by a conveyor roller (not shown) and held by the holding part 40, and three-dimensional data is obtained. Specifically, X-rays are radiated from the X-ray source 10 to the object S to be inspected, and X-ray images are taken by the X-ray camera 20 with the transmitted light. Both the X-ray source 10 and the X-ray camera 20 can be moved by means of supports (not shown). The X-ray source 10 and the X-ray camera 20 move on the swing circles 121, 122, respectively, by means of these supports, and the images are picked up at a plurality of positions on the swing circles.

Each part of the X-ray inspection apparatus 1 is controlled by a control signal from a controller 100. FIG. The X-ray inspection apparatus 1 is provided as the controller 100 with an XY stage controller 101 for the camera, a camera controller 102 and an XY stage controller 107 for the X-ray source. In addition, the X-ray inspection device 1 is provided with a height measurement 103 , a control 104 for the position of the test object, an X-ray source control 105 and an image pickup height control 106 . In addition, the X-ray inspection apparatus 1 is provided with a calculation part 111, a main storage part 112, an auxiliary storage part 113, an input 114 and an output 115.

The camera XY stage controller 101 sends a control signal to drive the camera XY stage (not shown) to move the X-ray camera 20 in the horizontal direction. The camera controller 102 sends a control signal for taking X-ray images by the X-ray camera 20. The height measurement 103 receives the signal from a displacement transducer 30 and measures the height of the inspected point of the object S to be inspected. The inspection object position controller 104 sends a control signal to the conveyor roller and the holding part 40 of the object to be inspected S to control the horizontal position and the vertical position of the object to be inspected S to the optimum position for shooting.

The X-ray source controller 105 sends a signal to adjust the start and end of X-ray emission from the X-ray source 10 and the X-ray intensity. The imaging height controller 106 sends a signal to control the height of the x-ray source 10 and the x-ray camera 20. The x-ray source XY stage controller 107 sends a signal to drive the x-ray source XY stage (not shown) and the x-ray source 10 move in horizontal direction. The signals sent from the XY stage controller 101 for the camera, the camera controller 102, the inspection object position controller 104, the X-ray source controller 105, the imaging height controller 106, and the XY stage controller 107 for the X-ray source is determined based on the calculation results of the calculation part 111 and the information stored in the main storage part 112 and auxiliary storage part 113 .

The computing part 111 also includes functional modules, a trajectory calculation unit 111a, a movement time calculation unit 111b, a common movement time determination unit 111c, and an acceleration calculation unit 111d, as described below. Transmission of information such as setup information and test results to and from the user is also via input 114 and output 115.

The X-ray camera 20 is a two-dimensional X-ray detector that detects the X-ray radiation emitted by the X-ray source 10 and passing through the object S to be examined. An I.I. tube (Image Intensifier) or an FPD (Flat Panel Detector) can be used as the X-ray camera 20 . Although only one X-ray camera 20 is used here, several X-ray cameras can be used.

The displacement transducer 30 measures the distance to the object S to be inspected at a plurality of positions of the object S to be inspected. Therefore, the displacement transducer 30 can measure the curvature or inclination of the object S to be inspected. In the manufacturing process of the object S to be inspected, there may be warping and tilting, the amount of which differs depending on each piece. Therefore, the curvature and inclination of each object S to be inspected are measured to adjust the height position of the holding member 40 and perform appropriate X-ray photography.

With the above configuration, the X-ray inspection apparatus 1 can control the position of the X-ray source 10 and the X-ray camera 20 so that the base plate can be photographed from various directions. In the present embodiment, three-dimensional data of the inspected site of the object S to be inspected is generated based on the results of such imaging from different directions and using a three-dimensional data generating method called CT (computed tomography).

As the computing part 111, a general-purpose computing unit called a CPU (Central Processing Unit) can be used. As the main storage part 112, a memory such as RAM can be used. As the auxiliary storage part 113, a ROM or an HDD can be used. Input 114 is any device that allows the user to input instructions to computational portion 111, such as a keyboard, button, switch, mouse, etc. Output 115 is any device that provides the user with the computational portion's output 111 in the form of images, sounds, etc., such as a display or a speaker. That is, using a general computer system, these functions can be realized. By reading and executing a program stored in the auxiliary storage part 113 by the computing part 111, movement control of the X-ray source 10 and the X-ray camera 20 is performed by each functional module of the trajectory calculation unit 111a, the movement time calculation unit 111b, the common movement time determination unit 111c, and the acceleration calculation unit 111d . The computing part 111 in the present embodiment can be operated in parallel and can include multiple CPUs or include multiple parallel operation functions in a single CPU.

Here the X-ray source 10 and the X-ray camera 20 move, as in 1 1, on the basis of the control signal from the X-ray source XY stage controller 107 and the camera XY stage controller 101 on the pan circles 121, 122, respectively, and at a plurality of positions on the path, the X-ray images are taken . A 3D image of the relevant test point can then be created for each test point on the object S to be tested by the pivoting movement on the pivot circles 121, 122. Since there are multiple inspection points, the X-ray source 10 and the X-ray camera 20 perform a single 360° panning motion (also called the n-th panning motion) when inspecting the object S to be inspected to take X-ray images of the inspection point in question, and then take to one position at which the next point to be checked can be picked up. The next 360° swivel movement (also called the n+1th swivel movement) is then started from the position.

(Calculation of the trajectory)

2 12 shows the trajectory of the movable part in the case where the X-ray source 10 or the X-ray camera 20 as the movable part makes the n-th swing, the advance, and the n+1-th swing. According to the state of the art, as in 2A shown, an accelerating movement is made before the nth pivoting movement, the nth pivoting movement is performed at a constant speed, and after the completion of the nth pivoting movement (360°), a decelerating movement is made and the moving part stops momentarily. Thereafter, the locomotion is carried out along a predetermined path. Because during the pivoting movement of the movable part, a fast circular movement at a constant speed is required in order to take high-quality X-ray images at high speed.

Also, after the end of the advancement and after the moving part stops, an acceleration movement is performed again, the moving part is accelerated to a predetermined speed before reaching the swivel start point of the swivel movement, and then the n+1th swivel movement (360°) is started. In other words, after the image pickup is finished in the n-th swing, the moving part stops momentarily after a deceleration braking distance, advances with the acceleration and deceleration for the n+1-th swing, and stops after the movement. This is followed by acceleration along the pivoting path, so that the n+1-th recording can be carried out. Thus, in the conventional control, the moving part has to stop and the pivoting movement for acceleration and deceleration before and after stopping is necessary, so there is the inconvenience that the checking time is long.

In the present embodiment, on the other hand, as in 2 B 1, during the progression from the n-th swing to the n+1-th swing, the stopping portion is eliminated, and the swing for acceleration and deceleration before and after stopping is not performed in addition to the swing for taking X-ray images. In addition, will for the trajectory of travel uses a curve smoothly connecting the swing circle of the n-th swing and the swing circle of the n+1-th swing at the swing end point and the swing start point. In the present exemplary embodiment, the path calculation unit 111a derives such a movement path as a polynomial using a mathematical method. Concretely, the Bezier curve, which requires the starting point, the ending point, and two control points (both points are determined as three-dimensional coordinates) as input information, is calculated as a trajectory of travel of the moving part. The movement path of the movable part calculated in this way is also referred to below as the determined movement path.

4 FIG. 12 is a view showing the estimated movement trajectory calculated by the trajectory calculation unit 111a. In 4 is the starting point P1 z. B. the end point of the n-th pivoting movement of the movable part and the end point P4 is the starting point of the n+1-th pivoting movement. Then, to give a control vector between the starting point P1 and the ending point P4, the control points P2, P3 are set. That is, control vector 1 is given as a line segment connecting start point P1 and control point P2, and control vector 2 is given as a line segment connecting control point P3 and end point P4. Since the detected movement trajectory is determined as a curve which does not deviate from these control vectors 1 and 2, the user can obtain a curve which does not deviate from the limit areas in terms of movement in terms of the space of the X-ray examination apparatus 1 or in terms of the movable range of each XY stage deviates, intuitive and easy to construct.

(Calculation of movement time)

The trajectory that smoothly connects the slew circle of the nth swing and the slew circle of the n+1th swing may be a trajectory in which the linear velocity of the movable part is continuous at the swing end point and/or the swing start point. Alternatively, a trajectory is desired in which the linear velocity and acceleration of the moving part are continuous at the slew end point and/or at the slew start point. Ideally, if the acceleration is continuous, the acceleration is zero.

The moving time calculation unit 111b is for calculating an optimum moving time (entire trajectory moving time) Te in moving from the starting point to the ending point on the above determined moving trajectory for each of the X-ray source 10 and the X-ray camera 20 satisfying the conditions of speed and acceleration. Various methods can be used to calculate the movement time.

For example, the speed (initial target speed) that the moving part should maintain at the starting point of the determined trajectory and the speed (final target speed) that the moving part should maintain at the end point of the determined trajectory are used as input information, and the time that required to connect between the two with constant acceleration can be taken as the travel time Te. In 5 . Fig. 12 is a view showing the relationship between the speed, acceleration and running time of the moving part in such a case.

In addition, e.g. B. Under the condition of the maximum acceleration limit Amax, for each moving part (or moving axis included in the moving part), the moving time at which the difference between the maximum acceleration limit Amax and the maximum acceleration generated by giving a provisional moving time Movement trajectory is zero can be determined by simulation operations as movement time Te. Concretely, the moving time Te is searched by simulation using the target initial speed, the target final speed, and the provisional moving time as input information. Since the trajectory length from the start point to the end point of the detected trajectory is fixed, the acceleration corresponding to the time and the position can be detected based on the above input information. 6 12 shows the simulation of the position, velocity, acceleration and jerk of the moving part when the preliminary moving time (Te) is set to 0.74s.

The maximum acceleration limitation Amax can also be referred to as a target acceleration refAcc when the movement time Te of the moving part is minimized. The target acceleration can be calculated by the following equation, assuming that the target acceleration is refAcc, the final target speed is refVelEnd, the target initial speed is refVelStart, and the remaining path length to the end point of the detected moving path is resLen: $$\text{refAcc}=\left({\text{<figure-callout id="2" label="refVelEnd" filenames="DE102022204141A1\_0006.png,DE102022204141A1\_0010.png" state="{{state}}">refVelEnd</figure-callout>}}^2-{\text{refVelStart}}^2\right)/\left(\text{2}\times \text{resLen}\right)$$

The setpoint acceleration here corresponds to the limit setpoint acceleration.

It is also possible to equate the target initial speed and the target final speed for each moving part and, assuming a target acceleration of 0 m/s^2 (ie at a constant speed), to determine the movement time for the movement on the determined movement path. 7 shows an example of a simulation with a target initial and target speed of 0.7 m/s and a target acceleration of 0 m/s^2. 7A Fig. 12 shows a view of the trajectory of the detected trajectory connecting the nth swivel circle to the n+1 swivel circle of the moving part, and 7B Fig. 12 is a graph showing the relationship between the speed and the moving time on the detected moving trajectory of the moving part.

The movement time calculation unit 111b calculates the movement time Ten for each of the X-ray source 10 and the X-ray camera 20 in this way. 8th shows the relationship between the movement time calculated in this way for the X-ray source 10 and the X-ray camera 20 and the movement path determined. 8A Fig. 12 shows a view for the trajectory of the detected trajectory connecting the nth sweep circle to the n+1 sweep circle of the X-ray source 10, and 8B a diagram for the relationship between the speed and the movement time Te1 on the determined movement path of the X-ray source 10. 8C Fig. 12 is a view for the trajectory of the detected trajectory connecting the nth pan circle to the n+1 pan circle of the X-ray camera 20, and 8D a diagram for the relationship between the speed and the movement time Te2 on the determined movement path of the X-ray camera 20.

As in 8th shown, simulation results were obtained that the X-ray source 10 moves on the determined trajectory with a movement time Te1 of 0.644 s, assuming that the target initial speed and the target final speed are 1.4 m/s and the target acceleration is 0 m/s^2 . On the other hand, assuming that the target initial speed and the target final speed are 0.7 m/s and the target acceleration is 0 m/s^2, simulation results were obtained that the X-ray camera 20 moves on the determined moving trajectory with a moving time Te2 of 1.066 s.

(Calculation of the common movement time)

The calculated movement times of the X-ray source 10 and the X-ray camera 20 are different, but the point in time at which the X-ray source 10 and the X-ray camera 20 each reach the end point of their movement path (i.e. the starting point of the next swivel circle) must be synchronized. Therefore, a single common moving time Tec applied to both the X-ray source 10 and the X-ray camera 20 is determined by the common moving time determination unit 111c. Concretely, the longer of the moving time Te1 of the X-ray source 10 and the moving time Te2 of the X-ray camera 20, here the moving time Te2 of the X-ray camera 20 taking 1.066 s, is determined as the common moving time (common moving time of the entire web) Tec.

(movement control command)

Then, the controller 100 (XY stage controller 101 for the camera, XY stage controller 107 for the X-ray source) controls the movement of the X-ray source 10 and the X-ray camera 20 in such a way that the X-ray source 10 and the X-ray camera 20 move with a common movement time Tec from the starting point to the end point of the determined trajectory. Here, when the X-ray source 10 moves at an acceleration of 0 m/s^2, the moving time Te1 is reduced from 0.644 s to 1.066 s, so that the speed is reduced during moving on the detected moving trajectory.

9 shows the relationship between the movement time or the speed and the determined movement path of the X-ray source 10 during the movement with a common movement time Tec of 1.066 s. 9A Fig. 12 is a view for the trajectory of the detected moving trajectory connecting the n-th sweep circle and the n+1-th sweep circle of the X-ray source 10, and 9B 12 is a graph showing the relationship between the moving speed and the moving time of the X-ray source 10 on the detected moving trajectory. As in 9 shown, are the target initial speed and the Desired final speed of the x-ray source 10 is 1.4 m/s, and in order to fulfill this condition, the x-ray source 10 must move at a reduced speed along the determined path of movement.

(Correction while performing motion control)

As described above, it is possible to calculate the moving speed and the moving time of each movable member in advance by simulation and control them based thereon. However, when actual motion control requires a moving part to perform an unexpected movement, e.g. B. to avoid an obstacle, the inconvenience arises that all moving parts cannot be synchronized.

Therefore, the moving time calculation unit 111b performs, for each movable part, processing for calculating the remaining trajectory moving time required to reach the end point of the detected moving trajectory, with respect to the current position of the movable part on the detected moving trajectory, in every predetermined control cycle. so that the target speed can be achieved. The common moving time determination unit 111c then performs processings for determining the longest remaining orbit moving time from the remaining orbit moving times calculated in each control cycle for each movable part as the common remaining orbit moving time and updating the common moving time and that in the previous control cycle in each control cycle determined common movement time of the remaining path. Then the controller 100 (XY stage controller 101 for the camera, XY stage controller 107 for the X-ray source) performs motion control of the X-ray source 10 and the X-ray source 10 and the X-ray camera 20 through. In this way, the common moving time can be updated in real time, and even if there is a situation where the end point of the detected moving trajectory cannot be reached in the originally specified moving time, the motion control can be made so that each moving part is synchronized and the target final speed can be realized.

Searching for a movement time at which all moving parts satisfy the maximum acceleration constraint takes a long time, and it is not realistic to continue calculating the movement time while such a search is performed in real time. However, in order to achieve real-time synchronization, the travel time of the remaining path from the current point in time should be the same for all moving parts, even if the travel time Te is not fixed. Therefore, the moving time calculation unit 111b calculates the time required to connect between the current speed and the target final speed of each moving part at a constant acceleration as the remaining path moving time. Here, the acceleration calculation unit 111d calculates the target acceleration (above constant acceleration) for reaching the end point of the detected moving trajectory for each of the plurality of moving parts, so that the target final speed can be realized in the common remaining trajectory moving time.

10 Fig. 12 is a view showing the relationship between the speed of the moving parts and the travel time when the remaining path travel time is calculated in this way. As in 10 shown, the target acceleration refAcc is calculated using the current velocity actVel of the moving part, the target final velocity refVelEnd, and the remaining trajectory length resLen to reach the end point of the determined trajectory by the following equation: $$\text{refAcc}=\left({\text{<figure-callout id="2" label="refVelEnd" filenames="DE102022204141A1\_0006.png,DE102022204141A1\_0010.png" state="{{state}}">refVelEnd</figure-callout>}}^2-\text{actVel2}\right)/\left(\text{2*resLen}\right)$$

That is, the remaining path travel time is calculated using the current speed of the moving part, the final target speed, and the remaining path length to reach the end point of the detected moving path.

(Suppression of the final path acceleration)

There is a risk that when the movement time is dynamically changed, the acceleration at the end point on the determined movement path will become too great to meet the target final speed, and the acceleration will be discontinuous with the acceleration (0 m/s^2) in the next swing movement . Since this is from the point of view of the device load and the quality of the captured images which is undesirable, the acceleration at the end point of the motion path must be suppressed when changing the motion time of the remaining path.

Therefore, when calculating the target acceleration, the acceleration calculation unit 111d performs a calculation using a predetermined correction factor, and calculates a target acceleration that increases the speed of the moving part in advance so that the acceleration can be gradually reduced near the end point of the detected trajectory. Specifically, assuming that the target acceleration accRefNonLimited, the target final velocity refVelEnd, the current velocity of the moving part actVel, the common movement time of the remaining path tLeft, the velocity Vnec required to reach the end point of the determined movement path, the target acceleration can be that the target final speed can be realized in the common movement time of the remaining path, and the correction factor is α, can be calculated using the following equation: $$\text{accRefNonLimited}=\left(\text{Vnec}-\text{actVel}+\mathrm{a}\times \left(\text{Vnec}-\text{refVelEnd}\right)\right)/\text{tLeft}$$

The required speed Vnec can be calculated by the following equation: $$\text{Vnec}=2\times \text{resLen}/\text{tLeft}-\text{actVel}$$

11 Fig. 12 shows a view for explaining the calculation of the target speed when the above correction factor α is set to "3". 12A Fig. 13 is a view showing the speed change of the moving part when the correction factor α is set to “1”, and 12B Fig. 13 is a view showing the speed change of the moving part when the correction factor α is set to “3”.

As in 12 shown, the reduced speed starts to increase with a correction factor of 1 (if no correction is made when calculating the target acceleration) in the second half of the movement time, and it can be seen that the acceleration cannot be reduced even near the trajectory end point to reach the target speed. On the other hand, when the correction factor is set to 3, the reduced speed starts to increase from the first half of the movement time, and it can be seen that the acceleration can be smoothly reduced near the trajectory end point.

(Calculation of the current position of the moving part)

As mentioned above, in order to calculate the remaining trajectory moving time, the position information of the moving part (on the detected moving trajectory) is required in each control cycle. In the following, the processing for determining such a position of the moving part in each control cycle will be explained using 13 explained. 13 Fig. 12 is a block diagram showing the flow of information processing for calculating the current position of the moving part.

As in 13 1, the remaining path length resLen, the remaining movement time tLeft, the target final velocity refVelEnd, the actual velocity actVel, and the acceleration correction factor α are first used as inputs in the command acceleration calculation module 301 to calculate the command (target) acceleration before constraint . In the command acceleration upper and lower limit module 302, it is then judged whether the command acceleration before the constraint does not deviate from the predetermined upper and lower limits. When the command acceleration before the restriction does not deviate from the upper and lower limits, the command acceleration before the restriction is determined as the command acceleration accRef. On the other hand, when the command acceleration before restriction deviates from the upper and lower limits, the deviated limit value is determined as the command acceleration.

Next, in the command velocity calculation module 303, the command acceleration accRef, the current velocity actVel, and the commanded control cycle Ts are used as inputs to calculate the pre-constraint command velocity velRefNonLimited. In the upper and lower speed limit module 304, a judgment is then made as to whether the command speed before the restriction does not deviate from the predetermined upper and lower limits. If the command speed before the restriction does not deviate from the upper and lower limits, the command speed before the restriction is determined as the command speed velRef. Deviates On the other hand, the command speed before the restriction deviates from the upper and lower limits, the deviated limit value is determined as the command speed.

Next, in the control cycle amount of movement calculation module 305, the target velocity velRef and the control cycle Ts are used as inputs to calculate the control cycle amount of movement (delta L). Then, in the Bezier curve parameter increment amount calculation module 306, the amount of movement in the control cycle and the Bezier curve parameter value R are used as inputs to calculate the Bezier curve parameter increment amount (delta R). The Bezier curve parameter value R is then calculated in the Bezier curve parameter value calculation module 307 .

Here, the Bezier curve parameter value R is 0≦R≦1, and assuming that the start point P1 of the determined trajectory is 0 and the end point P4 is 1, as in FIG 4 , the parameter value R increases according to the amount of movement of the moving part. If the amount of movement in the control cycle is known, the corresponding increment of the parameter value R can also be calculated.

Then the thus determined Bezier curve parameter value R and the coordinates (or control vectors) of the start point P1, the end point P4 and the control points P2 and P3 are used as inputs to calculate the position P of the movable part in each control cycle by the module 308 to calculate the Bezier curve.

With the X-ray inspection apparatus 1 shown in the above present embodiment, it is possible to intuitively design the moving trajectory of the moving parts that does not deviate from the moving range, and to realize synchronous control of a plurality of moving parts while protecting the speed of the connection point between the pivoting movement and the advance becomes. In addition, synchronous control of multiple moving parts can be performed in real time without a prior trajectory generation step. Therefore, the load on the device can be reduced and the test speed can be increased.

<Other>

The explanation of the above embodiment is only an exemplary explanation of the present invention, and the present invention is not limited to the above concrete forms. Various variants and combinations of the present invention are possible within the scope of the technical concept. In the present embodiment z. For example, the X-ray inspection apparatus 1 is formed so that it also serves as a control system, but a structure in which the information processing terminal serving as the control system and the apparatus to be controlled are separate units is also possible. A design is also possible in which the components of the control system are distributed over a number of terminals.

In the above embodiment, an equation was shown in which the acceleration calculation unit 111d calculates the target acceleration using a correction factor, but it is not essential to calculate the target acceleration using such an equation. For example, assuming that the target acceleration is accRefNonLimited, the final target velocity is refVelEnd, the actual velocity is actVel, the remaining path common moving time is tLeft, and the required velocity is Vnec, the target acceleration can be calculated by the following equation: $$\text{accRetNonLimited}=\left(2\times \text{Vnec}-\text{refVelEnd}-\text{actVel}\right)/\text{tLeft}$$

In each of the above examples, the case where the trajectory of movement of the movable part is a Bezier curve has been explained, but it can also be any other curved trajectory defined by polynomials, e.g. B. a clothoid curve. In each of the above examples, the common moving time was determined according to the longest moving time of moving times of each moving part, but the method of determining the common moving time is not limited to this. For example, the earliest move time can be assumed if it is within the allowable range of the device, or the average or median of multiple move times can be used as the common move time.

In the above embodiment, the moving time was calculated by simulation with respect to the starting point of the detected moving trajectory before starting the movement control of the device, but it is also possible that the simulation is not performed and the current position and speed of the moving part are different from the starting point of the determined trajectory is used as input information to calculate the movement time. That is, at the starting point of the detected trajectory, processing for calculating the moving time using the total length of the detected trajectory as the remaining trajectory length can be performed to perform the motion control.

In each of the above examples, the X-ray inspection apparatus was explained as an example, of course, the present invention can be applied to various other apparatuses, e.g. B. preferably on industrial robots and NC (numerical control) machine tools.

<Addendum 1>

• ein Mittel (111a) zur Berechnung einer Bewegungsbahn, das für jedes der mehreren beweglichen Teile eine ermittelte Bewegungsbahn berechnet, die ein Weg ist, der einen Startpunkt und einen Endpunkt für die Bewegung des beweglichen Teils verbindet und unter Verwendung eines Polynoms ermittelt wird,
• ein Mittel (111b) zur Berechnung einer Bewegungszeit, das für jedes der mehreren beweglichen Teile eine Bewegungszeit berechnet, die eine Zeit ist, die für die Bewegung von einem Punkt zum Endpunkt auf der ermittelten Bewegungsbahn erforderlich ist, und bei der eine Sollendgeschwindigkeit, die eine vorbestimmte Geschwindigkeit ist, die das bewegliche Teil am Endpunkt beibehalten soll, realisiert werden kann,
• ein Mittel (111c) zur Bestimmung einer gemeinsamen Bewegungszeit, das auf der Basis der mehreren Bewegungszeiten, die für jedes der mehreren beweglichen Teile berechnet werden, eine einzige gemeinsame Bewegungszeit bestimmt, bei der jedes der mehreren beweglichen Teile die Sollendgeschwindigkeit am Endpunkt realisieren kann, und
• ein Steuerbefehlsmittel (100), das das Gerät zur Durchführung einer Steuerung einschließlich einer Geschwindigkeitssteuerung veranlasst, bei der sich jedes der mehreren beweglichen Teile von dem einen Punkt zum Endpunkt auf jeder der ermittelten Bewegungsbahn mit der gemeinsamen Bewegungszeit bewegt.

Control system (1) of a device with several moving parts (10, 20), characterized by:

• a moving trajectory calculating means (111a) which calculates, for each of the plurality of moving parts, a detected moving trajectory which is a path connecting a starting point and an end point for moving the moving part and is detected using a polynomial,
• a moving time calculating means (111b) which calculates, for each of the plurality of moving parts, a moving time which is a time required for moving from a point to the end point on the detected moving trajectory and at which a final target speed, the one is a predetermined speed that the moving part should maintain at the end point can be realized,
• a common moving time determination means (111c) that determines a single common moving time at which each of the plurality of moving parts can realize the target final speed at the end point, based on the plurality of moving times calculated for each of the plurality of moving parts, and
• control command means (100) for causing the apparatus to perform control including speed control in which each of the plurality of movable parts moves from the one point to the end point on each of the detected moving trajectories with the common moving time.

<Addendum 2>

• einen Schritt (S101) zur Berechnung einer Bewegungsbahn, der für jedes der mehreren beweglichen Teile eine ermittelte Bewegungsbahn berechnet, die ein Weg ist, der einen Startpunkt und einen Endpunkt für die Bewegung des beweglichen Teils verbindet und unter Verwendung eines Polynoms ermittelt wird,
• einen Schritt (S102) zur Berechnung einer Bewegungszeit, der für jedes der mehreren beweglichen Teile eine Bewegungszeit berechnet, die eine Zeit ist, die für die Bewegung von einem Punkt zum Endpunkt auf der ermittelten Bewegungsbahn erforderlich ist, und bei der eine Sollendgeschwindigkeit, die eine vorbestimmte Geschwindigkeit ist, die das bewegliche Teil am Endpunkt beibehalten soll, realisiert werden kann,
• einen Schritt (S103) zur Bestimmung einer gemeinsamen Bewegungszeit, der auf der Basis der mehreren Bewegungszeiten, die für jedes der mehreren beweglichen Teile berechnet werden, eine einzige gemeinsame Bewegungszeit bestimmt, bei der jedes der mehreren beweglichen Teile die Sollendgeschwindigkeit am Endpunkt realisieren kann, und
• einen Steuerbefehlsschritt (S104), der das Gerät zur Durchführung einer Steuerung einschließlich einer Geschwindigkeitssteuerung veranlasst, bei der sich jedes der mehreren beweglichen Teile von dem einen Punkt zum Endpunkt auf jeder der ermittelten Bewegungsbahn mit der gemeinsamen Bewegungszeit bewegt.

Control method of a device with several moving parts, characterized by:

• a trajectory calculation step (S101) that calculates, for each of the plurality of moving parts, a detected trajectory that is a path connecting a start point and an end point for movement of the moving part and is detected using a polynomial,
• a moving time calculation step (S102) that calculates, for each of the plurality of moving parts, a moving time that is a time required for moving from a point to the end point on the detected moving trajectory, and at which a final target speed, the one is a predetermined speed that the moving part should maintain at the end point can be realized,
• a common moving time determination step (S103) of determining a single common moving time at which each of the plurality of moving parts can realize the target final speed at the end point, based on the plurality of moving times calculated for each of the plurality of moving parts, and
• a control instruction step (S104) for causing the apparatus to perform control including speed control in which each of the plurality of moving parts moves from the one point to the end point on each of the detected moving trajectories at the common moving time.

reference list

1:11

X-ray inspection device

10

x-ray source

20

x-ray camera

30

displacement transducer

40

holding part

100

steering

111

computing part

111a

trajectory calculation unit

121

Pan movement pan circle of X-ray source

122

Pan movement pan circle of X-ray camera

123

trajectory

S

object to be tested (base plate)

QUOTES INCLUDED IN DESCRIPTION

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Patent Literature Cited

• JP 2021085177 [0001]
• JP 2012083982 A [0008, 0009]

Claims (17)

A control system of an apparatus having a plurality of moving parts, characterized by : a trajectory calculation means which calculates, for each of the plurality of moving parts, a determined trajectory which is a path connecting a starting point and an ending point for the movement of the moving part and below is determined using a polynomial, a movement time calculation means which calculates, for each of the plurality of moving parts, a movement time which is a time required for movement from a point to the end point on the determined movement trajectory and at which a target final speed , which is a predetermined speed to be maintained by the moving part at the end point, a common moving time determination means that determines a single common moving time based on the plural moving times calculated for each of the plural moving parts definitely, at which allows each of the plurality of moving parts to realize the final target speed at the end point, and a control command means which causes the apparatus to perform control including speed control in which each of the plurality of moving parts moves from the one point to the end point on each of the detected trajectories with the shared movement time moved. tax system according to claim 1 , characterized in that the common moving time determining means determines the longest of the plurality of moving times calculated for each of the plurality of moving parts as a common moving time. tax system according to claim 1 or 2 , characterized in that the moving time calculating means calculates a remaining path moving time required to reach the end point from the current position of each of the plurality of movable parts in each predetermined control cycle in the movement control of the movable parts, the determining means the common moving time determines and updates a single common moving time on the basis of the remaining orbit moving time calculated for each of the plurality of movable parts in each predetermined control cycle, and the control command means causes the apparatus to perform control, wherein each of the plurality of moving parts moves from each of the current position to the end point with the latest common remaining path moving time updated in each control cycle. tax system according to claim 3 , characterized in that the moving time calculation means calculates the remaining path moving time using the current speed of the movable part, the final target speed and the remaining path length of the movable part from the current position to the end point of the detected moving path. tax system according to claim 3 or 4 , further characterized by means for calculating the acceleration, which calculates a target acceleration or a target jerk for reaching the end point of the determined movement path in each control cycle and for each of the plurality of moving parts, so that the target final speed can be realized in the common movement time remaining path, wherein the control command means causes the device to perform motion control for each of the plurality of moving parts that satisfies the target acceleration or the target jerk calculated in each control cycle. tax system according to claim 5 , characterized in that the means for calculating the acceleration is assuming that the target acceleration is accRefNonLimited, the target final velocity is refVelEnd, the current velocity of the moving part is actVel, the common remaining path movement time is tLeft, and the velocity Vnec required to to reach the end point of the determined movement path, so that the target final speed can be realized in the common movement time of the remaining path, the target acceleration is calculated using the following equation: accRefNonLimited = (2 × Vnec - refVelEnd-actVel)/tLeft. tax system according to claim 5 , characterized in that the means for calculating the acceleration using a predetermined acceleration correction factor α and assuming that the target acceleration accRefNonLimited, the target final velocity refVelEnd, the current speed of the moving part actVel, the common moving time of the remaining path tLeft, and the speed Vnec that is required to reach the end point of the determined moving trajectory, so that the target final speed can be realized in the common moving time of the remaining path, the target acceleration through calculates the following equation: accRefNonLimited = (Vnec - actVel + α × (Vnec - refVelEnd))/tLeft. Tax system according to one of Claims 5 until 7 , characterized in that when the calculated target acceleration or target jerk exceeds a predetermined limit value, the means for calculating the acceleration outputs the limit value as target acceleration or target jerk. Tax system according to one of claims 3 until 8th , characterized in that the common movement time of the remaining web is determined as an integer multiple of the control cycle. Tax system according to one of Claims 1 until 9 , characterized in that the moving time calculating means calculates a total trajectory moving time, which is the moving time from the starting point to the ending point of the detected moving trajectory, for each of the plurality of moving parts before the moving parts are controlled, and the moving parts determining means calculates the common moving time a single common whole trajectory travel time is determined based on the plurality of whole trajectory travel times calculated for each of the plurality of moving parts. tax system according to claim 10 , characterized in that the means for calculating the moving time, assuming that at least an initial target speed which is a predetermined speed which the moving part is to maintain at the starting point, and the final target speed are input information, a time in which the acceleration of the target initial speed is constant until the target final speed is reached, when the movable part moves from the starting point to the end point of the determined path of movement, is calculated as the movement time. tax system according to claim 11 , characterized in that the means for calculating the moving time, assuming that the initial target speed, the final target speed and a limit acceleration which is a limit value of the acceleration until the moving part reaches the final target speed from the initial target speed, are input information, by searching the moving time with an acceleration that does not exceed the limit acceleration, the movement time is calculated. tax system according to claim 12 , characterized in that on the assumption that the limit acceleration is a limit target acceleration refAcc from the target initial speed until the target final speed of the moving part is reached, the target final speed is refVelEnd, the target initial speed is refVelStart and the remaining path length up to the end point on the determined trajectory is resLen , the equation for determining the target acceleration limit is: refAcc = (refVelEnd ² -refVelStart ² )/(2 × resLen). Tax system according to one of Claims 1 until 13 , characterized in that the polynomial exhibits a Bezier curve or a clothoid curve. Tax system according to one of Claims 1 until 14 , characterized in that the apparatus is an X-ray inspection apparatus provided with an X-ray source that generates X-rays irradiated on an inspection object, an X-ray camera that takes X-ray images by the X-rays irradiated from the X-ray source on the inspection object, and a holding part that Holds test object, is provided, wherein the plurality of movable parts include at least two or more of the X-ray source, the X-ray camera and the holding part. A control method of an apparatus having a plurality of moving parts, characterized by : a trajectory calculation step that calculates, for each of the plural moving parts, a detected trajectory that is a path connecting a start point and an end point for movement of the moving part and below is determined using a polynomial, a moving time calculation step which calculates, for each of the plurality of moving parts, a moving time which is a time required for moving from a point to the end point on the determined moving trajectory and at which a target final speed , which is a predetermined speed to be maintained by the moving part at the end point, a step of determining a common moving time based on the plurality of moves moving times calculated for each of the plurality of moving parts, a single common moving time at which each of the plurality of moving parts can realize the final target speed at the end point, and a control command step that causes the apparatus to perform control including speed control at which each of the plurality of moving parts moves from the one point to the end point on each of the determined moving trajectories with the common moving time. Program that causes a computer to follow each procedure Claim 16 perform the step indicated.

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