DE102022122437A1 - System and method for leak testing of thin-film elements - Google Patents

Abstract

The invention relates to a system (10) for leak testing of thin-film elements (100), with at least two support units (11) that can be stacked on top of each other for holding at least one thin-film element (100), which form a test stack (12) when stacked, the first support unit (11a) have at least one first receiving area (13) and the second carrier unit (11b) have at least one second receiving area (14) for the thin-film element (100); - at least one feed device (15) which is in a measuring position (MS) of the test stack ( 12) is fluidly connectable or fluidly connected to the first receiving region (13) of the first carrier unit (11a) in order to apply a test medium, in particular a gas and/or a liquid, to the thin-film element (100); and - at least one measuring device (16), which in the measuring position (MS) of the test stack (12) is fluidly connected or fluidly connectable at least to the second receiving area (14) of the second carrier unit (11b) and is adapted to detect a leakage portion of the test medium .

Description

The invention relates to a system and a method for leak testing of thin-film elements.

As part of the production of thin-film elements, it is necessary to check the thin-film elements for leaks. Such thin-film elements are, for example, membrane-electrode assemblies of fuel cells or bipolar plates. Short cycle times are essential for the series production of such thin-film elements, although cycle times of several seconds for leak testing can only be achieved with the currently available testing devices. In practice, several testing devices are therefore operated in parallel in order to test a correspondingly high number of thin-film elements. Purchasing and operating multiple test devices in parallel results in high costs. In addition, there is a high space requirement due to the provision of several test stations in production.

The invention is therefore based on the object of specifying a system for leak testing of thin-film elements which, thanks to an improved structural design, is compact and cost-effective and enables reduced cycle times. Furthermore, the invention is based on the object of specifying a method for leak testing of thin-film elements.

According to the invention, this object is achieved with regard to the system by the subject matter of claim 1. With regard to the method, the above-mentioned task is solved by the subject matter of claim 16.

• - wenigstens zwei aufeinander stapelbare Trägereinheiten zur Aufnahme wenigstens eines Dünnschichtelements, die im gestapelten Zustand einen Prüfstapel bilden, wobei die erste Trägereinheit wenigstens einen ersten Aufnahmebereich und die zweite Trägereinheit wenigstens einen zweiten Aufnahmebereich für das Dünnschichtelement aufweisen;
• - wenigstens eine Zuführeinrichtung, die in einer Messstellung des Prüfstapels mit dem ersten Aufnahmebereich der ersten Trägereinheit fluidverbindbar oder fluidverbunden ist, um das Dünnschichtelement mit einem Prüfmedium, insbesondere einem Gas und/oder einer Flüssigkeit, zu beaufschlagen; und
• - wenigstens eine Messeinrichtung, die in der Messstellung des Prüfstapels zumindest mit dem zweiten Aufnahmebereich der zweiten Trägereinheit fluidverbunden oder fluidverbindbar ist und dazu angepasst ist, einen Leckageanteil des Prüfmediums zu erfassen.

Specifically, the task is solved by a system for leak testing of thin-film elements, the system comprising the following:

• - at least two carrier units that can be stacked on top of each other for receiving at least one thin-film element, which form a test stack in the stacked state, the first carrier unit having at least a first receiving area and the second carrier unit having at least a second receiving area for the thin-film element;
• - at least one feed device which, in a measuring position of the test stack, can be fluidly connected or is fluidly connected to the first receiving region of the first carrier unit in order to apply a test medium, in particular a gas and/or a liquid, to the thin-film element; and
• - at least one measuring device, which in the measuring position of the test stack is fluidly connected or fluidly connectable at least to the second receiving area of the second carrier unit and is adapted to detect a leakage portion of the test medium.

The invention has the advantage that in the measuring position, on the one hand, the feed device can be fluidly connected to the first receiving area of the first carrier unit and, on the other hand, the measuring device can be fluidly connected to the second receiving area of the second carrier unit. The connection process can be carried out in parallel, which saves time. The feed device and/or the measuring device can be fluidly connected or are fluidly connected directly or indirectly to the respectively assigned receiving area in the measuring position.

Furthermore, the test stack advantageously forms a compact design for transporting and for leak testing of the at least one thin-film element. The thin-film element can therefore be positioned easily and quickly at the measuring position or removed from it using the test stack. In addition, stacking more than two carrier units makes it possible to accommodate a large number of thin-film elements. The carrier units can in particular each have at least the first receiving area and the second receiving area, which are arranged on opposite sides of the carrier units. The carrier units are particularly preferably identical.

The system according to the invention preferably has at least one feed device per carrier unit for applying a test medium to a thin-film element. The feed device is preferably fluidly connectable or fluidly connected to the first receiving area of the first carrier unit in the measuring position. In addition, the system according to the invention preferably has at least one measuring device per carrier unit for detecting a leakage component. The measuring device is preferably fluidly connectable or fluidly connected to the second receiving area of the second carrier unit in the measuring position.

The formation of a test stack therefore has the advantage that, depending on the number of carrier units stacked, a large number of thin-film elements can be transported and checked for leaks. This has the particular advantage that the cycle times for leak testing of the thin-film elements are significantly reduced. In particular, cycle times of less than one second can be achieved.

The system according to the invention thus makes it possible to eliminate the need for several test devices that have to be operated in parallel in order to carry out a correspondingly high number of leak tests in a short time. This reduces space requirements and costs.

The two carrier units each have a receiving area in which a thin-film element is inserted during use. The two receiving areas of the carrier units preferably include a recess into which the thin-film element can be inserted. Only when the two carrier units are stacked on top of each other is the thin-film element accommodated in the two receiving areas of the two opposite carrier units. If the test stack is in the measuring position of the system, the thin-film element is tested for leaks.

As part of the application, a method for leak testing of thin-film elements is disclosed and claimed, in which at least two of the carrier units are stacked on top of each other to accommodate at least one thin-film element to form a test stack. The first carrier unit has at least the first receiving area and the second carrier unit has at least the second receiving area for the thin-film element. The feed device is then fluidly connected to the first receiving area of the first carrier unit in the measuring position of the test stack. The feed device then applies the test medium, in particular a gas and/or a liquid, to the thin-film element. Furthermore, in the measuring position of the test stack, the measuring device is fluidly connected to the second receiving area of the second carrier unit and detects a leakage portion of the test medium. The connection of the feed device and the measuring device preferably takes place simultaneously. The method is particularly preferably carried out using the system according to the invention.

Air or a tracer gas is preferably used to record the leakage proportion of the test medium. The tracer gas, air or a gas mixture with tracer gas is preferably introduced under pressure into the first receiving area of the first carrier unit, so that the thin-film element is/is exposed to the test medium on a first side. Due to a resulting pressure gradient between the two receiving areas, the test medium penetrates through the smallest openings in the thin-film element and exits on the other, i.e. opposite side into the second receiving space of the second carrier unit. This creates an increase in the pressure or the tracer gas concentration (leakage component), which is detected by the measuring device. The resulting pressure drop from the first receiving space of the first carrier unit to the second receiving space of the second carrier unit is essential for detecting the leakage proportion of the test medium. It is possible that the pressure gradient between the two recording areas can alternatively be generated by an applied vacuum.

The first receiving area preferably comprises at least a first pressure chamber with which the feed device is/is fluidly connected in the measuring position. The second receiving area preferably has at least one second pressure chamber with which the measuring device is/is fluidly connected in the measuring position.

Advantageous embodiments of the invention are mentioned in the subclaims.

In a preferred embodiment, the carrier units each have at least one integrated channel which is connected to the receiving area in order to supply the test medium to the thin-film element and/or to remove the leakage portion of the test medium from the thin-film element. The carrier units preferably each comprise at least one receiving block, in particular a carrier plate, in which the channel is integrated. Particularly preferably, the carrier units each have two integrated channels, with a first channel being connected to the first receiving area and a second channel being connected to the second receiving area of the respective carrier unit. The advantage of this embodiment is that the carrier units have a compact structure.

In a further preferred embodiment, the carrier units each have at least one connection for connecting the feed device and/or measuring device, which is fluidly connected to the receiving area of the carrier unit. Such a connection enables the feeding and/or measuring device to be connected quickly and easily to the assigned receiving area.

Preferably, the carrier units each comprise at least one first connection for the feed device and/or at least one second connection for the measuring device. Through the connection, the feed device or the measuring device is preferably fluidly connected or fluidly connected to the receiving area in the measuring position via the integrated channel.

The at least one connection is preferably aligned in the transverse direction or in the vertical direction of the stacked carrier units. In other words, the connection to the carrier unit be arranged laterally, ie on a side wall of the carrier unit. Alternatively, the connection can be arranged at the top or bottom of the carrier unit in the vertical direction of the test stack. These embodiments enable the feeding and measuring device to be brought in and away quickly.

During the testing process, the test stack is standing, i.e. aligned vertically, with the support units forming the individual layers of the stack. As part of the registration, the terms “top”, “bottom”, “top” and “bottom” refer to the vertical direction, in particular of the test stack.

The carrier units preferably each have at least one sealing area which, when stacked, seals the carrier units against one another in a fluid-tight manner. This is necessary to prevent unwanted leakage of the test medium during the leak test. The sealing area preferably extends around the respective receiving area of the carrier unit.

In order to connect the two support units to one another in a form-fitting manner for stacking, the support units have at least one form-fitting element, in particular an extension, and/or at least one receptacle corresponding to the form-fitting element. Particularly preferably, the form-fitting elements enable a detachable connection of the two carrier units. Preferably, the carrier units are stacked on top of each other to form the test stack. The advantage here is that the carrier units can be stacked and unstacked in a simple manner and are therefore held securely on one another. This also contributes to reducing cycle times.

Particularly preferably, the measuring device has at least one sensor, in particular a helium, hydrogen or nitrogen sensor, which is adapted to detect a volume flow and/or a pressure value and/or a gas concentration of the test medium. To date, the measuring devices in practice have often included a mass spectrometer, which is very expensive. However, tests have shown that, in addition to a mass spectrometer, sensors that detect helium, hydrogen or nitrogen, for example, are suitable for measuring the proportion of leakage. These are inexpensive, so that one such sensor is preferably provided for each recording area.

In order to connect the measuring device to the second carrier unit in the measuring position, the measuring device preferably has at least one adapter and at least one actuator. The actuator releasably connects the adapter for leakage measurement to the second receiving area of the second carrier unit. The adapter is guided to the carrier unit in the measuring position by the actuator and connected to it in such a way that the second receiving area and the measuring device are fluidly connected. The adapter enables a tight connection between the carrier unit and the measuring device. Preferably, a contact pressure of the adapter can be adjusted by the actuator. The adapter is preferably pressed onto the carrier unit and connected to the integrated channel. This embodiment provides an automatable coupling of the measuring device to the carrier unit, which enables the cycle time to be reduced.

In a preferred embodiment, the system has at least one pressing device which presses the test stack together in the measuring position in such a way that the carrier units are sealed against one another in a fluid-tight manner. In the measuring position, the pressing device preferably presses the sealing areas of the carrier units together in such a way that there is a fluid-tight connection between the carrier units in the receiving areas. For this purpose, the pressing device can comprise at least one drive with adjustable force and at least one linear axis with adjustable stroke in order to press a stamp onto the test stack from above. The stamp is preferably part of the pressing device and can have at least one seal and/or a die that seals the stack in the pressed state in a contact area of the stamp with the adjacent carrier unit. The pressing device is an easy-to-implement measure for sealing the test stack for leak testing.

In a further preferred embodiment, the system has at least one removal device which, in the measuring position of the test stack, can be fluidly connected or is fluidly connected to the second receiving region of the second carrier unit in order to remove the leakage portion of the test medium from the thin-film element. The removal device is preferably coupled to the measuring device for connecting to the second receiving area of the second carrier unit. In other words, the removal device together with the measuring device can be brought up to or away from the second carrier unit. It is advantageous here that the leakage component is removed from the second receiving area of the second carrier unit. This enables the leakage portion of the test medium to be combined, for example for reuse. Furthermore, the measurement of the leakage proportion can take place outside the carrier unit if the measuring device and the discharge device are adapted and coupled to this.

Preferably, the system comprises at least one first stacking device with at least one linear axis and at least one gripping unit arranged on the linear axis, which stacks the carrier units on top of one another at a stacking position to form the test stack. The linear axis preferably comprises at least one drive with an adjustable lifting force. The stacking position is in a transport direction of the carrier units or the test stack in front of the measuring position.

When stacking the carrier units, the gripping unit lifts one of the carrier units and places it on another carrier unit. The two stacked carrier units are then lifted by the gripping unit and placed on another carrier unit. The stacking process is repeated until a maximum number of stacked carrier units is reached to form a test stack. The carrier units pick up the thin-film elements before the stacking process.

Further preferably, the system comprises at least one second stacking device with at least one linear axis and at least one gripping unit arranged on the linear axis, which stacks the carrier units at a stacking position for separating the test stack. The linear axis preferably comprises at least one drive with an adjustable lifting force. The stacking position is in a transport direction of the carrier units or the test stack after the measuring position.

When stacking the carrier units, the gripping unit lifts the test stack up to the carrier unit that forms a bottom end of the test stack. This carrier unit is then transported out of the stacking position. The gripping unit then places the raised test stack down and lifts the test stack again except for the carrier unit, which now forms the lower end. This carrier unit is also transported from the stacking position. The stacking process is repeated until only the carrier unit is present that forms the top end of the test stack.

The stacking and destacking devices have a structurally simple structure, so that they can be integrated efficiently and cost-effectively into fully automatic operation. The stacking and destacking devices are preferably designed according to the principle of a portal stacking device. The stacking position and/or the unstacking position are preferably in a line with the measuring position for leak testing of the thin-film elements.

In order to convey the test stack into the measuring position and to further convey the test stack from the measuring position, the system has at least one transport device. The transport device is preferably a linear transport unit. Preferably, the transport device comprises at least one drive with adjustable force, which can move one or more carrier units and/or the test stack. The transport device preferably moves the carrier units with the received thin-film elements into the stacking position, then the test stack for leak testing of the thin-film elements into the measuring position, then the test stack into the stacking position and then the stacked carrier units with thin-film elements further.

The transport device preferably has at least one linear axis with an adjustable feed speed. In addition, the height of the linear axis can be adjusted in order to vary the distance between support units. The transport device is particularly preferably designed according to the operating principle of friction, so that the carrier units or the test stack are transported by means of friction. The transport device can be, for example, a friction conveyor. The advantage here is that the carrier units or the test stack can be quickly transported between the different positions without much effort.

The system can have at least one translator unit with at least one lifting and rotating mechanism for picking up and translating individual thin-film elements, the lifting and rotating mechanism interacting with the transport device. As a result, the thin-film elements can be quickly and easily transferred from a delivery unit to the transport device or from the transport device to a delivery unit. The system preferably comprises two of the translator units, with a first translator unit being arranged in the transport direction before the stacking position and a second translator unit after the destacking position.

The lifting and rotating mechanism of the first translator unit can simultaneously translate one or more thin-film elements from one or more delivery units to one or more carrier units. The lifting and rotating mechanism of the second translator unit can simultaneously translate one or more thin-film elements from one or more carrier units to one or more delivery units.

In one embodiment, the translator unit can have at least one gripping unit which is adapted to lift and insert one or more thin-film elements from a delivery unit, in particular a transport carrier unit to transfer one or more carrier units of the test system. For this purpose, the translator unit can have at least one linear axis and at least one actuator for lifting the gripping unit. The actuator must be equipped with an adjustable lifting force for the gripping unit. Additionally or alternatively, the linear axis can have an adjustable stroke, so that the distances between the thin-film elements to be lifted or raised can be varied. The linear axis can additionally be adapted to transfer the raised ones into the one carrier unit or the multiple carrier units. The advantage of this embodiment is that thin-film elements that are delivered stacked can be separated easily and quickly.

A further translator unit, which removes the tested thin-film elements from the carrier units and feeds them to a delivery unit, in particular transport carrier units, by means of at least one linear axis, an actuator and a gripping unit, can be provided in the system. This serves to stack the individual thin-film elements on top of each other for further transport.

The invention is explained in more detail below with further details with reference to the accompanying drawings. The embodiments shown represent examples of how the system according to the invention can be designed.

• 1 eine schematische Darstellung eines Systems zur Dichtheitsprüfung von Dünnschichtelementen nach einem bevorzugten erfindungsgemäßen Ausführungsbeispiel;
• 2 eine perspektivische Ansicht des Systems nach 1;
• 3 eine schematische Schnittdarstellung des Systems nach 1, wobei sich ein Prüfstapel in der Messstellung befindet;
• 4 eine perspektivische Schnittdarstellung einer Trägereinheit des Systems nach 1 mit aufgenommenem Dünnschichtelement;
• 5 eine perspektivische Draufsicht der Trägereinheit nach 4, ohne Dünnschichtelement;
• 6 eine perspektivische Unteransicht der Trägereinheit nach 4, ohne Dünnschichtelement; und
• 7 eine perspektivische Darstellung einer Trägereinheit des Systems nach 1, mit Anschlüssen oben und unten.

In these show

• 1 a schematic representation of a system for leak testing of thin-film elements according to a preferred exemplary embodiment of the invention;
• 2 a perspective view of the system 1 ;
• 3 a schematic sectional view of the system 1 , with a test stack in the measuring position;
• 4 a perspective sectional view of a carrier unit of the system 1 with included thin-film element;
• 5 a perspective top view of the carrier unit 4 , without thin film element;
• 6 a perspective bottom view of the carrier unit 4 , without thin film element; and
• 7 a perspective view of a carrier unit of the system 1 , with connections at the top and bottom.

In the following description, the same reference numbers are used for identical and equivalent parts.

1 and 2 show a system 10 for leak testing of thin-film elements 100. Such thin-film elements 100 can be, for example, membrane-electrode assemblies, so-called “MEAs” in fuel cells, or bipolar plates “BPPs”. Other thin film elements are possible.

1 shows a schematic representation of the system 10, where in 2 the system 10 is shown in a perspective view. The system 10 includes various devices 15, 16, 25, 26, 27, 31, 33, which are arranged so that a test line for leak testing of thin-film elements 100 is formed.

Specifically, the system 10 comprises a pressing device 25, two stacking devices 27, 31, two translation units 33 as well as a feed device 15, discharge device 26, a measuring device 16 and a transport device 32. The transport device 32 is, as in 1 and 2 can be seen, a linear conveyor, for conveying carrier units 11a, 11b for receiving the thin-film elements 100, which will be discussed in more detail later.

The devices 15, 16, 25, 26, 27, 31, 33 are arranged along the transport device 32. A first of the translator units 33a is arranged at a first longitudinal end 35 of the transport device 32. The first translator unit 33a cooperates with a delivery unit 36, which provides a large number of thin-film elements 100 for receiving. As in 1 shown, the delivery unit 36 can be a linear conveyor. It is possible that several supply units 36 are provided in order to supply a higher number of thin film elements 100 to the first translator unit 33a. The first translator unit 33a picks up the thin-film elements 100 provided and places each thin-film element 100 in a carrier unit 11.

In general, the system 10 comprises a plurality of carrier units 11 for receiving the thin-film elements 100. After the first translator unit 33a, the first stacking device 27 is provided for stacking the carrier units 11 one on top of the other. The first stacking device 27 is designed in such a way that it stacks the supplied carrier units 11 with the received thin-film elements 100 on top of one another and thus forms a test stack 12. The first stacking device 27 is located at a stacking position OFF the test line.

After the first stacking position 27 are the pressing device 25, the feed and discharge devices 15, 26 and the measuring device 16 are provided. These are located at a measuring position MS on the test line. The second stacking device 31 is then provided, which separates the test stack 12 again, with the second translator unit 33b being connected downstream and removing the tested thin-film elements 100 from the carrier units 11 and making them available for further transport or further processing.

The exact design of the translator units 33a, 33b, the stacking devices 27, 31 and the transport device 32 will be discussed in more detail later.

The carrier units 11 and the devices 15, 16, 25, 26 are described in more detail below. Like in the 4 to 7 As can be seen, the carrier units 11 are plate-shaped. In other words, the carrier units 11 each include a carrier plate. In the following description, the carrier units 11 are generally referred to as carrier plates 11. The carrier plates 11 are identical. The carrier plates 11 can be stacked on top of each other. As in 5 and 6 clearly visible, the carrier plates 11 have a first receiving area 13 and a second receiving area 14, which are arranged opposite one another. Specifically, the first receiving area 13 is arranged on an upper side 37 of the carrier plate 11 and the second receiving area 14 is arranged on an underside 38 of the carrier plate 11. The two receiving areas 13, 14 each have a recess 39 which forms a pressure chamber. The recess 39 of the first receiving area 13 is open to the outside, ie upwards. The recess 39 of the second receiving area 14 is also open to the outside, ie downwards. The recess 39 is designed in such a way that a thin-film element 100 can be at least partially accommodated.

Specifically, two adjacent carrier plates 11 with their recesses 39 form a common receptacle for one of the thin-film elements 100. In the stacked state, the recess 39 of the first receiving region 13 of a first carrier plate 11a is opposite the recess 39 of the second receiving region 14 of a second carrier plate 11b. The recesses 39 are designed in such a way that when a thin-film element 100 is inserted, a pressure space is formed behind the thin-film element 100. This pressure chamber 41 extends approximately over the entire surface of the recess 39, so that the thin-film element 100 can be completely pressurized with a test medium during a leak test.

As in 3 and 4 is shown, the carrier plates 11 each have two integrated channels 17. One of the channels 17 is assigned to one of the recesses 39. The channels 17 lead from the recesses 39 through a side wall 42a, 42b of the carrier plates 11 to the outside. Specifically, a first of the channels 17 leads from the recess 39 of the first receiving area 13 of the carrier plate 11 to the outside through a first side wall 42a. A second of the channels 17 leads from the recess 39 of the second receiving area 14 of the carrier plate 11 to the outside through a second side wall 42b. The side walls 42a, 42b are arranged opposite one another. The channels 17 thus run outwards from the recesses in opposite directions, in particular longitudinal directions.

In general, the integrated channels 17 serve to connect the feed and discharge device 15, 26 and the measuring device 16 in the measuring position MS with the pressure chambers 41. In 5 is a top view of one of the carrier plates 11 and in 6 a bottom view of the carrier plate 11 without the thin-film element 100 inserted is shown. 7 shows one of the carrier plates 11 with an inserted thin-film element 100, the carrier plate 11 having connections at the top and bottom.

According to the 1 to 3 it is shown that the carrier plates 11 are stacked on top of each other to form a test stack 12 for leak testing in the measuring position MS. In order to secure the carrier plates 11 in their position when stacked, they are releasably connected to one another in a form-fitting manner. Specifically, the carrier plates 11 each have several form-fitting elements 21 and several receptacles 23 corresponding to the form-fitting elements 21. The form-fitting elements 21 are extensions 22 which are designed to protrude from the top 37 of the carrier plates 11. The receptacles 23 are arranged on the underside 38 of the carrier plates 11 and form corresponding indentations with the extensions 22 of an adjacent carrier plate 11. This makes it possible to quickly and easily put the carrier plates 11 on top of each other to form a test stack 12.

As in 3 can be seen, a thin-film element 100 is arranged in the recesses 39 between the adjacent carrier plates 11. The support plates 11 lie against each other with their top and bottom sides 37, 38. Each of the carrier plates 11 has a sealing area 19 on the top and bottom 37, 38, which is provided around the recess 39. In the specific case, the top and bottom sides 37, 38 of the adjacent carrier plates 11 lie flat, so that there is a fluid-tight connection between adjacent carrier plates 11 during the leak measurement.

The test stack 12, which is in 3 is shown is in the measuring position MS, in which the leak test of the thin-film elements 100 is carried out. The pressing device 25 for pressing the test stack 12 together is arranged at this position on the test line. The pressing device 25 is constructed like a portal. The pressing device 25 comprises a stamp 43 which is vertically movable by means of a linear axis 44. Furthermore, the pressing device 25 includes an invisible die. In the measuring position MS, the stamp 43 is arranged above the test stack 12 and the die below the test stack 12. The stamp 43 and the die each have seals in order to seal the adjacent carrier plate 11 when the test stack 12 is pressed together. The pressing device 25 has a drive with adjustable force with which the stamp 43 presses the test stack 12 together. The linear axis 44 is configured with an adjustable stroke.

Furthermore, in 3 several measuring devices 16 are provided, which are arranged laterally one above the other in the measuring position MS. Furthermore, several feed devices 15 and several discharge devices 26 are also provided arranged laterally one above the other. The measuring devices 16 as well as feed and discharge devices 15, 26 are arranged vertically distributed in such a way that they correspond to connections 18 of the integrated channels 17 of the carrier plates 11 of the test stack 12.

In the system 10, at least one measuring device 16 is provided for each carrier plate 11. This means that one of the measuring devices 16 can be fluidly connected to one of the pressure chambers 41 of one of the carrier plates 11 in order to detect a leakage portion of a test medium during a leak measurement process. The measuring device 16 includes at least one sensor that is adapted to detect a leakage portion of a gas or gas mixture. For example, the gas or gas mixture, as in 1 shown to include hydrogen “ _Hz ”. In other words, the measuring device 16 can have a hydrogen-detecting sensor, in particular a hydrogen sensor.

Alternatively or additionally, the measuring device 16 can have a nitrogen-detecting sensor, in particular a nitrogen sensor. Particularly preferably, the measuring device 16 alternatively or additionally has a helium-detecting sensor, in particular a helium sensor. Additionally or alternatively, the measuring device can have a sensor that detects a change in pressure. In other words, the sensor can be a pressure sensor. Furthermore, the measuring device 16 can additionally or alternatively have a sensor for detecting a volume flow. In addition, the measuring device 16 can be adapted to moisten the thin-film elements 100.

According to 3 the measuring device 16 is each coupled to a discharge device 26, which can be fluidly connected to the pressure chamber 41 of the second receiving area 14 of the carrier plate 11. The discharge device 26 comprises a discharge line 45, in or on which the sensor of the measuring device 16 is arranged. In general, the discharge line 45 serves to discharge the leakage portion of the test medium through the integrated channel 17 from the pressure chamber 41 of the second receiving area 14 of the carrier plate 11.

The sensor and the discharge line 45 are coupled in such a way that they can be moved together in the direction of the test stack. For this purpose, the measuring device 16 has an actuator, not shown, through which at least the discharge line 45 can be brought to the connection 18 for connection to the integrated channel 17. The actuator is designed so that a contact force for pressing an adapter 24 of the discharge line 45 onto the connection 18 can be adjusted. The discharge device 26 thus has an adapter 24 which can be connected in a fluid-tight manner to the connection 18 of the integrated channel 17. The adapter 24 is arranged at an end of the discharge line 45 facing the test stack 12 in the measuring position MS.

According to 3 a feed device 15 is provided for each carrier plate 11, which can be fluidly connected to the pressure chamber 41 of the first receiving area 13 of the carrier plate 11. The feed device 15 comprises a feed line 46. In general, the feed line 46 serves to feed a test medium, for example a gas, gas mixture or a liquid, through the integrated channel 17 into the pressure chamber 41 of the first receiving area 13 of the carrier plate 11. This pressure chamber 41 is located directly behind the inserted thin-film element 100. The feed line 46 can be moved in the direction of the test stack. This can be done by means of an actuator, not shown, through which at least the supply line 46 can be brought to a connection 18 for connection to the integrated channel 17. The actuator is designed in such a way that a contact force for pressing an adapter 24 of the supply line 46 onto the connection 18 can be adjusted.

The feed device 15 thus has an adapter 24, which can be connected in a fluid-tight manner to the connection 18 of the integrated channel 17 and thus to the pressure chamber 41 of the first receiving area 13. The adapter 24 is on one of the test stacks 12 arranged in the measuring position MS at the end of the supply line 46.

It is possible that several measuring devices 16 are also provided on the side of the feed devices 15, which are coupled to the feed devices 15. The measuring devices 16 preferably correspond to those described above. The sensor of the measuring device 16 can be arranged in or on the supply line 46. In this variant, a further measuring device 16 is therefore provided for each carrier plate 11.

According to 3 the feed devices 16 with the feed lines 46 are arranged on a first longitudinal side 47 of the transport device 32 in the measuring position MS and are arranged on a second longitudinal side 48 of the transport device 32 opposite the first. The supply lines 46 and the discharge lines 47 can be fluidly connected at the same time to the respective connection 18 of the integrated channels 17 and thus to the corresponding pressure chambers 41 of the receiving areas 13, 14.

As in 1 and 2 can be seen, the transport device 32 extends over almost the entire test line. The transport device 32 represents an essential link in order to realize series testing of thin-film elements 100 with the shortest possible cycle time.

The transport device 32 is a linear transport unit. The transport device 32 has a drive (not shown) with adjustable force, which can move a plurality of carrier plates 11 and the test stack 12 in a linear transport direction v. The transport device 32 moves the carrier plates 11 with the received thin-film elements into the stacking position OFF, then the test stack 12 for leak testing of the thin-film elements 100 into the measuring position MS, then the test stack 12 into the stacking position ABS and then the stacked carrier plates 11 with the thin-film elements 100 further. The transport device 32 preferably comprises a linear axis with an adjustable feed speed. In addition, the height of the linear axis can be adjusted in order to vary the distance between carrier plates 11.

Furthermore, the system 10 has a first stacking device 27 with two linear axes 28 and two gripping units 29 arranged on the linear axes 28, which stack the carrier plates 11 on one another at the stacking position OFF to form the test stack 12. The linear axes 28 each include a drive with an adjustable lifting force. According to 3 In the stacking position OFF, a first linear axis 28 and a gripping unit 29 movable along the linear axis 28 are arranged on the first longitudinal side 47 of the transport device 32 and a second linear axis 28 and a gripping unit 29 movable along the linear axis 28 are arranged on the second longitudinal side 48 of the transport device 32 . As a result, the carrier plates 11 or the partially finished test stack 12 are lifted on both sides and placed safely.

When stacking the carrier plates 11, the gripping units 29 initially lift one of the carrier plates 11 and place it on another carrier plate 11. The two stacked carrier plates 11 are then lifted by the gripping units 29 and placed on another carrier plate 11. The stacking process is repeated until a maximum number of stacked carrier plates 11 is reached to form a test stack 12.

Furthermore, the system 10 has a second stacking device 31, which is identical to the first stacking device 27 and is only provided at the destacking position ABS instead of at the stacking position OFF.

When stacking the carrier plates 11, the gripping units 29 lift the test stack 12 up to the carrier plate 11, which forms a bottom end of the test stack 12. This carrier plate 11 is then transported away from the stacking position ABS by the transport device 32. The gripping units 29 then place the raised test stack 12 down and lift the test stack 12 again except for the carrier plate 11, which now forms the lower end. This carrier plate 11 is also transported away from the ABS stacking position. The stacking process is repeated until there is only one carrier plate 11 left.

The system 10 further has two translator units 33a, 33b, each with a lifting and rotating mechanism 34 for picking up and translating thin-film elements 100, the lifting and rotating mechanism 34 interacting with the transport device 32. The first translator unit 33a is arranged in the transport direction v before the stacking position OFF and the second translator unit 33b after the destacking position ABS.

The lifting and rotating mechanism 34 of the first translator unit 33a is adapted to simultaneously translate one or more thin-film elements 100 from one or more delivery units to one or more carrier plates 11. The lifting and rotating mechanism 34 of the second translator unit 33b is adapted to move one or more thin-film elements 100 at the same time or several carrier plates 11 to be translated onto one or more delivery units.

The method is described below with a focus on the leak testing of the thin-film elements 100 in the measuring position MS of the test stack 12.

First, a test stack 12, consisting of several carrier plates 11 stacked on top of one another with received thin-film elements 100, is provided by the first stacking device 27 and then moved into the measuring position MS by the transport device 32. The supply lines 46 are then connected in the measuring position MS via the adapters 24 to the connections 18 in such a way that a fluid-tight connection is formed between the supply lines 46 and the pressure chambers 41 of the first receiving areas 13.

The feed devices 15 then apply the test medium, which can be a gas, a gas mixture or a liquid, to the thin-film elements 100 via the feed lines 46 and the pressure chambers 41. In addition, in the measuring position MS, the discharge lines 45 are connected to the connections 18 via the adapters 24 in such a way that a fluid-tight connection is formed between the discharge lines 45 and the pressure chambers 41 of the second receiving areas 14. The test medium passing through the finest openings in the thin-film elements 100 is detected by the sensors of the measuring devices. This passing part of the test medium is referred to as the leakage portion. It is possible to apply the thin-film elements 100 to an overpressure or a negative pressure relative to the external environment. What is essential is the pressure drop that occurs between the pressure chamber 41 of the first and second receiving areas 13, 14 of the carrier plates 11.

Reference symbol list

10

system

11, 11a

first carrier unit

11, 11b

second carrier unit

12

Test batch

13

first recording area

14

second recording area

15

Feeding device

16

Measuring device

17

integrated channel

18

Connection

19

Sealing area of the carrier units

21

Positive locking element

22

appendage

23

Recording

24

adapter

25

Pressing device

26

discharge device

27

first stacking device

28

Linear axis

29

Gripping unit

31

second stacking device

32

Transport facility

33a

first translator unit

33b

second translator unit

34

Lifting and rotating mechanism

35

first longitudinal end

36

Supply unit

37

Top

38

bottom

39

recess

41

Pressure room

42a

first side wall

42b

second side wall

43

Rubber stamp

44

Linear axis of the pressing device

45

discharge line

46

Feed line

47

first long side of the transport device

48

second long side of the transport device

100

Thin film element

OUT OF

Stacking position

SECTION

Stacking position

MS

Measuring position

v

Transport direction

Claims (16)

System (10) for leak testing of thin-film elements (100), with - at least two supports that can be stacked on top of each other units (11) for holding at least one thin-film element (100), which in the stacked state form a test stack (12), the first carrier unit (11a) having at least one first receiving area (13) and the second carrier unit (11b) having at least one second receiving area (11) 14) for the thin film element (100); - at least one feed device (15), which in a measuring position (MS) of the test stack (12) can be fluidly connected or is fluidly connected to the first receiving area (13) of the first carrier unit (11a) in order to supply the thin-film element (100) with a test medium, in particular a gas and/or a liquid; and - at least one measuring device (16), which in the measuring position (MS) of the test stack (12) is fluidly connected or fluidly connectable at least to the second receiving area (14) of the second carrier unit (11b) and is adapted to detect a leakage portion of the test medium . System (10) after Claim 1 characterized in that the carrier units (11a, 11b) each have at least one integrated channel (17) which is connected to the receiving area (13, 14) in order to supply the test medium to the thin-film element (100) and/or the leakage portion of the test medium the thin-film element (100). System (10) after Claim 1 or 2 characterized in that the carrier units (11a, 11b) each have at least one connection (18) for connecting the feed device (15) and / or the measuring device (16), which is connected to the receiving area (13, 14) of the carrier unit (11a, 11b ) is fluidly connected. System (10) after Claim 3 characterized in that the at least one connection (18) is aligned in the transverse direction or in the vertical direction of the stacked carrier units (11a, 11b). System (10) according to one of the preceding claims, characterized in that the carrier units (11a, 11b) each have at least one sealing area (19) which, when stacked, seals the carrier units (11a, 11b) against one another in a fluid-tight manner. System (10) according to one of the preceding claims, characterized in that the carrier units (11a, 11b) have at least one positive locking element (21), in particular an extension (22), and/or at least one receptacle (23) corresponding to the positive locking element (21). in order to connect the two carrier units (11a, 11b) to one another in a form-fitting manner. System (10) according to one of the preceding claims, characterized in that the measuring device (16) has at least one sensor, in particular a helium, hydrogen or nitrogen sensor, which is adapted to measure a volume flow and / or a pressure value and / or a To record the gas concentration of the test medium. System (10) according to one of the preceding claims, characterized in that the measuring device (16) has at least one adapter (24) and at least one actuator, which connects the adapter (24) for leakage measurement to the second receiving area (14) of the second carrier unit (11b ) connects detachably. System (10) according to one of the preceding claims, characterized by at least one pressing device (25) which presses the test stack (12) together in the measuring position (MS) in such a way that the carrier units (11a, 11b) are sealed against one another in a fluid-tight manner. System (10) according to one of the preceding claims, characterized by at least one removal device (26), which is fluidly connectable or fluidly connected to the second receiving area (14) of the second carrier unit (11b) in the measuring position (MS) of the test stack (12). to remove the leakage portion of the test medium from the thin-film element (100). System (10) according to one of the preceding claims, characterized in that the removal device (26) is coupled to the measuring device (16) for connecting to the second receiving region (14) of the second carrier unit (11b). System (10) according to one of the preceding claims, characterized by at least one first stacking device (27) with at least one linear axis (28) and at least one gripping unit (29) arranged on the linear axis (28) which holds the carrier units (11a, 11b). stacked on top of each other in a stacking position (OFF) to form the test stack (12). System (10) according to one of the preceding claims, characterized by at least one second stacking device (31) with at least one linear axis (28) and at least one gripping unit (29) arranged on the linear axis (28) which holds the carrier units (11a, 11b). a stacking position (ABS) for separating the test stack (12). System (10) according to one of the preceding claims characterized by at least a transport device (32) which is adapted to move the test stack (12) to the measuring position (MS) and to move the test stack (12) away from the measuring position (MS). System (10) after Claim 14 characterized by , at least one translator unit (33a, 33b) with at least one lifting and rotating mechanism (34) for picking up and translating individual thin-film elements (100), the lifting and rotating mechanism (34) interacting with the transport device (32). Method for leak testing of thin-film elements (100), in which - at least two carrier units (11) for receiving at least one thin-film element (100) are stacked on top of each other to form a test stack (12), the first carrier unit (11a) having at least one first receiving area (13) and the second carrier unit (11b) having at least one second receiving area (14) for the thin film element (100); - at least one feed device (15) is fluidly connected to the first receiving area (13) of the first carrier unit (11a) in a measuring position (MS) of the test stack (12), and the feed device (15) supplies the thin-film element (100) with a test medium, in particular a Gas and/or a liquid; and - at least one measuring device (16) in the measuring position (MS) of the test stack (12) is fluidly connected to the second receiving area (14) of the second carrier unit (11b) and detects a leakage portion of the test medium.

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