DE102020214445B3 - MEMS ACTUATOR AND METHOD OF CONTROLLING A MEMS ACTUATOR - Google Patents

Abstract

An embodiment of the present disclosure provides a MEMS actuator having at least one actuator cell. The actuator cell has a first connector and a second connector. A mechanical connection between the first connection piece and the second connection piece has at least one connector unit. The connector unit has a first beam and a second beam connected in series with the first beam to provide a meandering shape. At least the first beam includes an array of a plurality of actuator elements configured to change a flexure of the first beam when actuated.

Description

technical field

Embodiments of the present disclosure relate to MEMS actuators. Further exemplary embodiments relate to methods for controlling a MEMS actuator.

Some embodiments of the present disclosure relate to expanding and contracting flexure actuator configurations for single and multi-dimensional motion and force generation.

Exemplary embodiments relate to microsystems or microelectromechanical systems (MEMS). Embodiments include flexures based on electrostatic actuation, piezoelectric actuation, thermal actuation, electromagnetic actuation, or a combination thereof as the active element. In detail, some exemplary embodiments relate to cells with nanoscopic electrostatic drive (NED, Nanoscopic Electrostatic Drive) as the active element, as described in [1]. Embodiments include arrays of flexure cells in series and/or in parallel that can be used to create expanding configurations, contracting configurations, and/or combinations thereof. Embodiments of the present disclosure may include expanding and contracting configurations designed to be in synchronization with one another or designed to be intentionally non-synchronous for the required movements and monitoring.

Exemplary embodiments relate to actuator configurations that can be used for applications such as micro-positioning of objects (planar and/or non-planar), active elements of micro-speakers, micro-pumps, micro-valves, micro-grippers, micro-optical benches, micro-system arrays, etc.

Background of the Invention

Various types of actuators are known in the prior art, including, for example, a nanoscopic electrostatic actuator [1]. Other known actuators include thermal and piezoelectric bender elements. Furthermore, thermal actuators [2, 3, 4] and piezoelectric actuators [5, 6] have been used to design expanding and contracting arrays of MEMS actuators, providing for planar or non-planar positioning.

For example show US 2007/0 103 029 A1 and WO 2005/001863 A1 Systems based on electrothermal actuation of stacked electrodes in a contracting configuration. The systems shown rely on residual stress technology in the stacked electrodes to create the necessary space for movement when released. WO 00/67268 A1 Figure 12 shows another example of a system based on electrothermal actuation of electrodes in a contracting and expanding configuration. US7420318B1 and US 2008/0 061 916 A1 show systems based on piezoelectric actuation of electrodes to create and expand a configuration. Also show US 2010/0 033 788 A1 , US 2011/0 292 490 A1 , US 2019/0 039 881 A1 and US 2020/0 096 761 A1 Systems based on electrothermal actuation of stacked electrodes for contracting non-planar configurations that rely on residual stress engineering in the stacked electrodes to provide the necessary space for movement upon release. Furthermore, the DE 10 2017 206 766 A1 a MEMS transducer for interacting with a volume flow, which has an element that is deformable in at least one movement plane of a plurality of substrate planes. In the US 2013/0 301 103 A1 piezoelectric actuators are shown to move a mirror about the X-axis and the Y-axis, respectively, arranged in the plane of the mirror.

Summary of the Invention

Despite the existing solutions, it is desirable to create a concept for a MEMS actuator that provides an improved trade-off between accurate positioning, large positioning range, energy-efficient actuation, and design flexibility to enable linear and/or rotary motion, for example.

An embodiment of the present disclosure provides a MEMS actuator having at least one actuator cell. The actuator cell has a first connector and a second connector. A mechanical connection between the first connection piece and the second connection piece has at least one connector unit. The connector unit has a first beam and a second beam connected in series with the first beam to provide a meander shape. At least the first beam includes an array of a plurality of actuator elements configured to change a deflection of the first beam when actuated.

Due to the meandering shape provided by the first and second beams, changing the flexure of the first beam allows a force to be applied between the first connector and the second connector in a direction that is at least partially parallel to an axial direction of the actuator cell along which the first and the second connector may be arranged. For example, the force may provide for linear movement of the second link relative to the first link or for a change in relative orientation between the first and second links. An increase in an average deflection of the first beam and/or the second beam can provide an expansion force between the first and second connection unit, while a decrease in an average deflection of the first beam and/or the second beam can provide a contraction force between the first and the second connection unit can provide. The series arrangement of actuator elements of the first bar allows a flexible design of the connector unit. For example, the actuator elements can be arranged to provide linear movement, angular movement, rotational movement and/or multi-directional movements, wherein different types of movements and/or movements in different directions can be performed independently or simultaneously. Furthermore, the series arrangement of actuator elements makes it possible to design the first beam in such a way that a load in the first beam is reduced or even avoided, regardless of whether one or more or all actuator elements of the first beam are actuated or not. In other words, the series arrangement of the actuator elements can provide a stress-free movement or a low-stress movement. Avoiding loading in the first direction increases the MEMS actuator's usable force, range of motion, and energy efficiency of the MEMS actuator. Due to the low stress in the first beam, the MEMS actuator can provide high motion frequency or high motion resolution. For example, due to low stress, examples may cause an actuator cell to expand or contract from a few nanometers to hundreds of microns, specifically over 10 microns.

The array of actuator elements also enables the first beam to be configured in an expanding configuration, that is, the actuator elements can be configured to provide an increase in a distance between the first link and the second link when actuated. Further, the array of actuator elements may allow for the formation of a contracting configuration, that is, the actuator elements are configured to provide a reduction in a distance between the first link and the second link when actuated. Furthermore, the possibility of designing an expanding and a contracting configuration together with a high design flexibility for the series arrangement of actuator elements in the first beam makes it possible to design a MEMS actuator in which an interplay between an expanding configuration and a contracting one Configuration causes a particularly low load or even no load at all. In other words, the disclosed concept allows for the design of expanding configurations and contracting configurations such that movements of the expanding configurations and the contracting configurations are synchronized upon actuation. In other words, in addition to allowing individual and/or collective control of the expanding and contracting configuration areas due to the design principle and drive mechanism, the concept also simplifies establishing synchronization between the expanding and contracting configurations.

Furthermore, the series arrangement of actuator elements allows an arrangement of contracting configurations without necessarily relying on the residual stress technique.

According to an embodiment, the connector unit is a first connector unit and the mechanical connection comprises a second connector unit. For example, the second connector unit may include a first beam and a second beam connected in series with the first beam to provide a meander shape. For example, the first beam of the second connector assembly includes a series arrangement of a plurality of actuator elements configured to change a flexure of the first or second connector assembly when actuated. In other words, in examples, the second connector unit may have features equivalent to those of the first connector unit. In other examples, the second connector unit may be inactive, or may have actuator elements arranged differently compared to the description of the first connector unit. The second connector unit is arranged symmetrically to the first connector unit with respect to the first and second connectors. Thus, a symmetrical actuation of the actuator elements of the first actuator unit and the second actuator unit example wise result in linear movement of the second link with respect to the first link along an axial direction of the actuator cell. For example, asymmetrical actuation may result in a change in orientation between the first and second connectors. Having a second connector unit ensures increased power of the MEMS actuator and increased stability. Having a first connector unit and a second connector unit increases flexibility in implementing different types of movement, such as rotary and linear movements. Increased stability of the actuator cell can increase the movement accuracy of the actuator cell.

Another embodiment according to the present disclosure provides a MEMS actuator. The MEMS actuator includes at least a first actuator cell and a second actuator cell each having a first connector and a second connector. A mechanical connection between the first connection piece and the second connection piece has at least one connector unit. The connector unit has at least one bar, the bar having a series arrangement of a plurality of actuator elements. The actuator elements of the first actuator cell are configured to reduce bending of the beam of the first actuator cell when actuated. The actuator elements of the second actuator cell are configured to increase the deflection of the beam of the second actuator cell when actuated. Functionalities and advantages described for the above exemplary embodiments can optionally also be applied to this exemplary embodiment, depending on their suitability. Since the MEMS actuator has the first actuator cell with a contracting configuration and the second actuator cell with an expanding configuration, it can provide an interaction between expanding and contracting configurations.

The following exemplary embodiments can relate to any MEMS actuators described above.

According to one embodiment, the actuator cells of the first connector unit can be addressed independently of actuator elements of the second connector unit. Thus, for example, depending on an individual actuation of the first and the second connector unit, a linear movement or a change in orientation, ie a rotation, of the first connection piece in relation to the second connection piece can be carried out.

According to one embodiment, the array of actuator elements of the first connector unit and an array of actuator elements of the second connector unit are configured to provide movement of the first and/or the second connector. The movement includes axial movement of the second link with respect to the first link along an axial direction, off-axis movement of the first and/or second link in a direction different from the axial direction, and/or planar rotation of the first and /or the second connector with respect to a MEMS substrate.

The axial direction may be a direction along which the first and second connectors are arranged at least for a predetermined operating state, such as an unactuated state or a fully operated state, of the first and second connector units. For example, off-axis movement may include a change in orientation between the first link and the second link.

According to exemplary embodiments, the first bar and the second bar are arranged in such a way that when the actuator elements are actuated, a position and/or an alignment of the second connecting piece is moved in relation to the first connecting piece. For example, the position is moved along an axial direction, such as a planar direction.

According to embodiments, a first end of the first beam is connected to a first end of the second beam. For example, the first ends may be connected directly or indirectly, such as via a connector. The second end of the first beam is connected to one of the first and second connectors and the second end of the second beam is connected to the other of the first and second connectors. The first ends of the first beam and the second beam are positioned outside of a connecting line between the first and second connectors to implement a meander shape.

According to embodiments, the first beam and the second beam are arranged such that an actuation of the actuator elements or the MEMS results in a change in a distance between the respective second ends of the first beam and the second beam. For example, the first bar and the second bar are substantially perpendicular to a line connecting the first and second links pieces arranged. For example, the row arrangement of the actuator elements is arranged along a direction between the first and the second end of the first beam.

According to embodiments, the first and second connectors of the first and second beams are arranged planarly with respect to a MEMS substrate. The first ends of the first and second beams are moveable in at least one or more planar directions. For example, the first ends are movable in a direction parallel to the line of connection between the first and second links.

Because the first ends are moveable, the first and second beams can contribute to movement of the first link relative to the second link. A greater distance covered can thus be achieved.

According to example embodiments, the first beam is configured such that at least a portion of the first beam is bent in a first bending direction when in an unactuated state and the portion of the first beam is bent in a second bending direction that is opposite to the first bending direction when in a predetermined actuated state. Thus, the first beam can provide symmetrical or asymmetrical movement about a straight position that the first beam may have when in a further operative condition. For example, such a movement can be advantageous for a pump or for generating sound.

According to embodiments, the first and second connectors of the first and second beams are arranged planarly with respect to a MEMS substrate. Actuation of the actuator elements of the first beam results in a change in planar bending of the first beam. Due to the planar bending, a planar position of the second link is moved relative to the first link, thereby making it possible to implement linear and/or rotational movements in the plane of the substrate.

According to exemplary embodiments, the series arrangement of the actuator elements has at least a first area of actuator elements and a second area of actuator elements. The first portion is configured to bend in a first bending direction. The second portion is configured to bend in a second bending direction that is opposite to the first direction. For example, a bending direction can relate to a curvature of the respective beam. For example, the array of actuator elements may have an S-like shape in an actuated state or an unactuated state. Having the first and second regions with different bending directions allows movement of the first link with respect to the second link while resisting mechanical stress at a connection point between the first link and the first beam and a connection point between the second link and the second beam and possibly also avoided at a connection point between the first and second beams. Avoiding stress improves the longevity of the actuator cell and increases energy efficiency for operating the actuator cell. For example, the S-like shape can provide a specific linear movement.

According to exemplary embodiments, the second bar has at least a first area of actuator elements and a second area of actuator elements. The first area of actuator elements of the second beam is arranged opposite to the first area of actuator elements of the first beam. The second area of actuator elements of the second bar is arranged opposite to the second area of actuator elements of the first bar. A bending direction for which the actuator elements of the first area of the second beam are configured is opposite to the bending direction for which the actuator elements of the first area of the first beam are configured. A bending direction for which the actuator elements of the second area of the second beam are configured is opposite to the bending direction for which the actuator elements of the second area of the first beam are configured. In other words, both the first beam and the second beam may have an S-like shape in an actuated state and/or an unactuated state. Thus, a greater distance traveled can be achieved while keeping mechanical stress low.

According to exemplary embodiments, the actuator elements of the first bar have a first actuator element and a second actuator element. The second actuator element can be addressed independently of the first actuator element. Independent actuation of the different actuator elements of a beam enables flexible control of the movement of the first link with respect to the second link. For example, rotation of an orientation of the first link with respect to the second link may be performed without moving a position of the first link, for example and the second connector can be realized.

According to exemplary embodiments, at least the first bar has a parallel arrangement of a plurality of row arrangements of actuator elements. Optionally, the second bar can also have a parallel arrangement of a plurality of series arrangements of actuator elements. A parallel arrangement of a plurality of row arrangements of actuator elements can increase the force generated by the actuator cell and/or can increase the stability of the actuator cell.

According to exemplary embodiments, each of the actuator elements has a first surface and a second surface, which is arranged opposite to the first surface. A first end of the first surface is located opposite a first end of the second surface. A second end of the first surface is opposite a second end of the second surface. The actuator element is configured to change an amount of a distance between the first and second ends of the first surface relative to an amount of a distance between the first end and the second end of the second surface such that a change in deflection of the actuator element is achieved can. Within the row arrangement of actuator elements, the actuator elements are arranged such that the first ends of the first and the second surface of one of the actuator elements are arranged opposite to the first or the second ends of the first and the second surface of the subsequent actuator element of the one actuator element. For example, means placed face-to-face adjacent to one another or with a spacer between them. Due to the series arrangement, the change in the bending of the first beam (or the second beam) can thus result from the individual changes in the bending of the individual actuator elements. Thus, the configuration of the individual actuator elements of the series arrangement enables a flexible configuration of the actuation properties of the actuator cell. In detail, a bending behavior of the first bar and/or the second bar can be designed depending on an application of the actuator cell. Furthermore, having individual actuator elements allows inactive elements to be inserted between one or more of the actuator elements, further increasing the design flexibility for the actuator cell.

According to exemplary embodiments, the actuator element has electrostatic actuators, thermal actuators, for example thermoelectric actuators, and/or piezoelectric actuators. Compared to thermal or piezoelectric actuators, electrostatic actuators such as NEDs have the advantage of lower power consumption, larger displacement range, higher response frequency, CMOS compatibility, at least in the exemplary case of the NED, smaller area consumption for a given target displacement and/ or do not force hysteresis. Since the material of electrostatic actuator elements can optionally be made of single-crystal material, they can ensure a longer service life, at least in the exemplary case, for example due to the lack of creep strain.

According to embodiments, the actuator cell is a first actuator cell and the MEMS actuator also has a second actuator cell. For example, the features described in relation to the actuator cell also apply to the second actuator cell, but the first actuator cell and the second actuator cell can be implemented differently. The actuator elements of the first actuator cell are configured, upon actuation, to decrease the flex of the first beam of the first actuator cell, for example to decrease the distance between the first and second connectors. Actuator elements of the second actuator cell are configured to, upon actuation, increase the flexure of the first beam of the second actuator cell, for example to increase the distance between the first and second connectors of the second actuator cell. In other words, the first actuator cell may have a contracting configuration and the second actuator cell may have an expanding configuration. Interaction between an expanding actuator cell and the contracting actuator cell can enable a force to be uniformly distributed to an object to be moved, so that a movement can be performed very smoothly. In other examples, an interplay between an expanding configuration and a contracting configuration can be used to create rotational motion. Because the first actuator cell can expand upon actuation and the second actuator cell can contract upon actuation, a common control signal for the first actuator cell and the second actuator cell can be used for arrangements where a contracting and an expanding configuration is to be implemented .

According to embodiments, a length of a path along the first bar of the first actuator cell in an actuated state of the first actuator cell is substantially equal to a length of a path along the first bar of the second actuator cell in an actuated state of the second actuator cell. In other words, a path equals itself along the first beam (and optionally also along the second beam) of the first and the second actuator cell in the respective bent states of the first and the second actuator cell. Designing the first beam (and optionally also the second beam) in this way enables synchronized movement of the first actuator cell and the second actuator cell, i.e. synchronized movement of a contracting configuration and an expanding configuration. The synchronized movement can make it possible, for example, to apply the same control signal to the actuator elements of the first actuator cell and the second actuator cell without a control signal provided to one of the first and second actuator cells being adjusted with respect to a control signal provided to the other of the first and the second actuator cell is provided.

According to exemplary embodiments, the actuator elements of the first actuator cell are the same as the actuator elements of the second actuator cell. This means that the actuator elements of the first actuator cell are of the same type and have the same dimensions as the actuator elements of the second actuator cell. Identical actuator cells ensure that the first and the second actuator cell respond in the same way to a common control signal, so that a simple synchronization of a movement of the first actuator cell and the second actuator cell can be implemented.

According to exemplary embodiments, the actuator elements of the first and second actuator cells are configured to actuate in response to a control signal, for example a voltage or a current. The MEMS actuator is configured to provide the actuator elements of the first actuator cell with the same control signal as the actuator elements of the second actuator cell. Providing the first and the second actuator cell with the same control signal ensures a simple implementation and enables a synchronous movement of the first and the second actuator cell. Furthermore, mechanical stress in the assembly including the first and second actuator cells can be avoided even in the case of noise in the control signal.

According to embodiments, the MEMS actuator also has a moveable structure, for example a stage. A first boundary of the moveable structure is connected to the second connector of the first actuator cell at a first connection point. A second boundary of the moveable structure, opposite the first boundary, is connected to the second connector of the second actuator cell. An axial direction of the first actuator cell along which the first and second connectors are arranged is antiparallel to an axial direction along which the first and second connectors of the second actuator cell are arranged. Thus, by expanding the first actuator cell and contracting the second actuator cell, the movable structure can be moved along the axial direction of the first and second actuator cells. Advantageously, these exemplary embodiments are combined with the feature that the first actuator cells and the second actuator cells are contracting and expanding configurations, respectively.

According to exemplary embodiments, the first actuator cell is part of a first actuator unit. The second actuator cell is part of a second actuator unit. Each of the first and second actuator units has a row of actuator cells arranged along an axial direction of the actuator unit, for example in a planar direction. The first connector of the first actuator cell of the row of actuator cells is connected to a base of the MEMS actuator. The second connector of one of two subsequent actuator cells is connected to the first connector of the other of the two subsequent actuator cells. Thus, for example, actuations of one or more actuator elements of one or more of the actuator cells result in an accumulated movement of a position and/or an orientation of the second connection piece of the last actuator cell relative to the base piece. Arranging multiple actuator cells in series makes it possible to provide a large travel distance while keeping the dimensions of the MEMS actuator small and providing high mechanical stability of the MEMS actuator.

According to embodiments, the MEMS actuator has at least one actuator unit that has a row of actuator cells that are arranged along an axial direction of the actuator unit. The first connector of the first actuator cell of the row of actuator cells is connected to a base of the MEMS actuator. The second connector of one of two subsequent actuator cells is connected to a first connector of the other of the two subsequent actuator cells.

According to exemplary embodiments, a first actuator cell in the row of actuator cells can be addressed independently of a second actuator cell in the row of actuator cells. For example, a first actuator cell can provide linear movement along an axial direction of the actuator unit and a second actuator cell can provide rotational movement or a change in orientation between the second connector of the last actuator cell and the base. Independent responsiveness of the individual actuator cells in the series of actuator cells makes it possible for a plurality to realize different types of movements with the actuator unit.

According to exemplary embodiments, the first actuator cell of the actuator unit is configured to provide movement of its second link with respect to its first link along a connecting line between its first and second links in response to a predetermined actuation. A second actuator cell of the actuator unit is configured to provide a change in orientation between its second connector and its first connector in response to a predetermined actuation.

According to embodiments, the MEMS actuator has a pivoted structure that is connected to the second connector of the last actuator cell of the at least one actuator unit at a point remote from a center of rotation of the pivoted structure. Thus, a contraction or an expansion of the actuator unit along its axial direction can be translated into a rotation of the rotatably mounted structure.

According to embodiments, the MEMS actuator further includes a stage mounted to be moveable in a first direction and in a second direction of a plane of the MEMS actuator. The MEMS actuator includes at least first and second actuator units each configured to change a distance between the first connector of a first actuator cell and the second connector of a last actuator cell along an axial direction of the respective actuator unit when actuated. The first and the second actuator unit are arranged such that actuation of the first actuator unit results in a change in position of the step along the first direction and actuation of the second actuator unit results in a change in position of the step along the second direction. The first direction and the second direction are different from each other. For example, the first direction is perpendicular to the second direction. The stage can thus be moved in two different directions in the plane of the MEMS actuator.

According to embodiments, the MEMS actuator also has a functional element, for example a probe micro-positioner, a tip or a micro-gripper. The at least one actuator unit is part of a series arrangement of a plurality of actuator units, which also has a second actuator unit. This means that the base piece of one of the actuator units is connected, for example, to a second connecting piece of a previous actuator cell of one actuator unit. The series arrangement of actuator units is connected to the functional element. The axial direction of the first actuator unit differs from the axial direction of the second actuator unit. Thus, actuation of the first actuator element results, for example, in a change in position and/or orientation of the functional element in a first direction, and actuation of the second actuator element results in change in position and/or orientation of the functional element in a second direction , which differs from the first direction. The functional element can thus be precisely positioned by actuating one or more of the actuator units of the row arrangement of actuator units.

Further embodiments of the disclosure provide a method for controlling the MEMS actuator described above. The method includes providing a control signal to the actuator elements.

character list

• 1 ein Beispiel eines MEMS-Aktors veranschaulicht,
• 2 ein Beispiel einer Aktorzelle veranschaulicht,
• 3a ein Beispiel eines MEMS-Aktors in einem ersten Betätigungszustand veranschaulicht,
• 3b den MEMS-Aktor aus 3a in einem zweiten Betätigungszustand veranschaulicht,
• 4 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 5 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 6 ein Beispiel einer winkligen Bewegung einer Aktoreinheit veranschaulicht,
• 7 ein weiteres Beispiel einer Aktoreinheit veranschaulicht,
• 8 ein weiteres Beispiel einer Aktoreinheit veranschaulicht,
• 9 ein weiteres Beispiel einer Aktoreinheit veranschaulicht,
• 10 ein weiteres Beispiel einer Aktoreinheit veranschaulicht,
• 11 ein Beispiel von Aktorelementen und Reihenanordnungen derselben veranschaulicht,
• 12 weitere Beispiele von Reihenanordnungen von Aktorelementen veranschaulicht,
• 13 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 14 Beispiele elektrostatischer Aktorelemente veranschaulicht,
• 15 Beispiele elektrothermischer und piezoelektrischer Aktorelemente veranschaulicht,
• 16 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 17 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 18 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 19 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 20 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 21 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 22 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 23a ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 23b ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 24 ein Beispiel einer Parallelanordnung von Aktorelementen veranschaulicht,
• 25 ein weiteres Beispiel eines MEMS-Aktors veranschaulicht,
• 26 ein Beispiel eines Verfahrens zum Betreiben eines MEMS-Aktors veranschaulicht.

In the following, exemplary embodiments of the present disclosure are described in detail with reference to the drawings, in which:

• 1 an example of a MEMS actuator illustrates,
• 2 an example of an actuator cell illustrates,
• 3a illustrates an example of a MEMS actuator in a first actuation state,
• 3b the MEMS actuator 3a illustrated in a second operating state,
• 4 illustrates another example of a MEMS actuator,
• 5 illustrates another example of a MEMS actuator,
• 6 illustrates an example of an angular movement of an actuator unit,
• 7 illustrates another example of an actuator unit,
• 8th illustrates another example of an actuator unit,
• 9 illustrates another example of an actuator unit,
• 10 illustrates another example of an actuator unit,
• 11 illustrates an example of actuator elements and series arrangements thereof,
• 12 illustrates further examples of row arrangements of actuator elements,
• 13 illustrates another example of a MEMS actuator,
• 14 Examples of electrostatic actuator elements illustrated,
• 15 Examples of electrothermal and piezoelectric actuator elements illustrated,
• 16 illustrates another example of a MEMS actuator,
• 17 illustrates another example of a MEMS actuator,
• 18 illustrates another example of a MEMS actuator,
• 19 illustrates another example of a MEMS actuator,
• 20 illustrates another example of a MEMS actuator,
• 21 illustrates another example of a MEMS actuator,
• 22 illustrates another example of a MEMS actuator,
• 23a illustrates another example of a MEMS actuator,
• 23b illustrates another example of a MEMS actuator,
• 24 illustrates an example of a parallel arrangement of actuator elements,
• 25 illustrates another example of a MEMS actuator,
• 26 1 illustrates an example of a method for operating a MEMS actuator.

Detailed Description of Illustrative Embodiments

In the following, example embodiments are discussed in detail, but it should be noted that the example embodiments provide numerous applicable concepts that can be used with a wide variety of MEMS actuators. The specific embodiments discussed are merely illustrative of specific ways to implement and use the present concept and do not limit the scope of the embodiments. In the following description, numerous details are set forth in order to provide a more thorough explanation of example embodiments of the disclosure. However, it will be apparent to those skilled in the art that other embodiments may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form rather than in detail in order to avoid obscuring examples described herein. In addition, features of the different embodiments described herein may be combined with each other unless specifically stated otherwise.

In the following description of exemplary embodiments, the same or similar elements or elements with the same functionality are denoted by the same reference numerals and are denoted by the same name, and repeated description of elements denoted by the same reference numerals or denoted by the same name becomes commonplace boisterous. Thus, descriptions provided for elements with the same or similar reference numerals or with the same name are interchangeable in the different embodiments and can be applied to one another.

1 12 illustrates a MEMS actuator 100 according to an embodiment. The MEMS actuator 100 has an actuator cell 110 . The actuator cell 110 has a first connection piece 111 and a second connection piece 112 . The first connector 111 and the second connector 112 are mechanically connected via a connector unit 121 . The connector unit 121 has a first beam 131 and a second beam 132 . The first bar 131 has a series arrangement 141 of a plurality of actuator elements 140 . The actuator elements 140 are configured to change a flexure of the first beam 131 when actuated.

That is, each of the actuator elements 140 is configured, for example, to change the bending of the first beam 131 at a position at which the respective actuator element is located in the first beam 131 upon actuation of the respective actuator element. An overall bending of the first beam 131 can thus result from bending contributions from the individual actuator elements 140 of the first beam 131 . Consequently, the bending of the first beam 131 may be uniform or may vary along the array of actuator elements 140 according to a distribution of the actuator elements 140 along the array 141 and/or individual bending states of the actuator elements 140 . Further, a direction of change in bending of the individual actuator elements 140 may be uniform, or may be individual to the actuator elements 140, or may be specific to one or more groups of actuator elements of the plurality of actuator elements 140.

For example, the first connector 111, the second connector 112, and the connector unit 121 may be arranged in a plane, referred to as the xy plane for descriptive purposes, as in FIG 1 is specified. Actuation of one of the actuator elements 140 can result in a change in the bending of the beam 132 in the xy plane. In other words, a curvature of the first beam 132 can change at the position of one actuator element in the xy plane when one actuator element is actuated. Subsequent actuator elements of the series arrangement of actuator elements 140 can be arranged adjacent to one another or can be spaced apart from one another. For example, spacers, for example in relation to 11 are described, be arranged between individual actuator elements of the plurality of actuator elements 140 .

For example, the first beam 131 and the second beam 132 are arranged such that actuation of the actuator elements results in a force between the second end 135 of the first beam 131 and the second end 136 of the second beam. Because the second end 135 is connected to the first link 111 and the second end 136 is connected to the second link 112, in examples, the force may result in a decrease or an increase in a distance between the first link and the second link that means a contraction or an expansion of the actuator cell 110. In other examples, for example when the mechanical connection between the first and the second connection piece comprises a further connection, for example a second connector unit, the force can result in a rotation, for example, that is a change in orientation between the first and second connectors 111, 112 (see 2 ).

Thus, in examples, the first beam 131 and the second beam 132 are arranged such that actuation of the actuator elements results in a change in a distance between the respective second ends of the first beam 131 and the second beam 132 .

In 1 For example, the first connector 111 and the second connector 112 are arranged along the x-direction. The first beam 131 and the second beam 132 are arranged substantially along the y-direction perpendicular to the x-direction, at least for a predetermined actuation state, although the directions of the first beam 131 and the second beam 132 may change upon actuation. Since the first beam 131 and the second beam 132 at least partially provide a connection between the first connector 111 and the second connector 112, and the first beam 131 and the second beam 132 can be arranged substantially along the y-direction, the first bar 131 and the second bar 132 for a meander shape. In other words, the first beam 131 and the second beam 132 may be mainly arranged outside of a connecting line between the first link 111 and the second link 112 .

For example, a first end 133 of the first beam 131 is connected to a first end 134 of the second beam 132 . Furthermore, a second end 135 of the first beam 131 can be connected to a first connector 111 . A second end 136 of the second beam 132 may be connected to the second connector 112 . The first ends 133, 134 of the first and second beams 131, 132 are positioned outside of a connecting line between the first link 111 and the second link 112 so that the first beam 131 and the second beam 132 provide a meander shape. The first ends 133 and 134 can be connected directly, or can be connected via a connector.

The second beam 132 can optionally have a series arrangement 142 of a plurality of actuator elements 140 . The second array 142 is configured to change a flexure of the second beam 132 upon actuation. The series arrangement 142 can have properties as described in relation to the actuator elements 140 . In examples, the second bar 132 is configured to be symmetrical to the first bar 131 with respect to a plane perpendicular to the x-direction. For example, actuator elements of the second beam 132 may be configured to provide an opposite change in flexure of the second beam 132 compared to oppositely disposed actuator elements 140 of the first beam 131 .

2 11 illustrates another embodiment of the actuator cell 110, according to this embodiment the actuator cell 110 further includes a second connector unit 222. FIG. The second connector unit 222, like the first connector unit 121, establishes a mechanical connection between the first connector 111 and the second connector 112.

In examples, the second connector unit 222 is inactive. For example, the second connector unit 222 can be a spring. In other examples, the second connector unit 222 is implemented similarly to the first connector unit 121 . example As the second connector unit 222 is arranged in the xy plane. The second connector unit 222 may include a first beam 231 and a second beam 232 . The first and second beams 231, 232 can provide a meander shape. The first beam 231 and the second beam 232 may include respective arrays of pluralities of actuator elements as described with respect to the first connector unit 121 . In some examples, the second connector unit 222 may be configured to be symmetrical to the first connector unit 121 with respect to the line of connection between the first connector 111 and the second connector 112 . It should be noted that the following description focuses on the first beam 131 of the first connector unit 121 for simplicity, as in relation to FIG 1 and 2 is described. However, the description of the first bar 131 can optionally also be applied to the second bar 132 as well as the first and the second bar 231, 232 of the second connector unit 222, wherein directions and bending directions can be optionally adjusted according to these symmetries.

Continuing the description of 1 a change in bending of the first beam 131 may result in a change in relative position between the first link 111 and the second link 112 . The change in relative position can be a linear movement, for example along the x-direction, which can be referred to as rectilinear movement. In particular, if the second bar 132 is symmetrical to the first bar 131 with respect to a plane perpendicular to the x-axis, e.g. B. a plane through a connection between the first beam 131 and the second beam 132 at the first ends 133, 134, and the first beam 131 and the second beam 132 are actuated symmetrically with respect to this plane, a relative movement between the first Connector 111 and the second connector 112 to be linear along the x-axis.

For example, if the first beam 131 and the second beam 132 are actuated asymmetrically, or if the first beam 131 and the second beam 132 are asymmetrical to each other, a relative orientation between the first link and the second link 111, 112 may change.

In relation to 2 For example, a change in relative orientation between the first connector 111 and the second connector 112 can be achieved by operating the first connector unit 121 asymmetrically with respect to the second connector unit 222.

Relative movement between the first link 111 and the second link 112 along the x-axis may be referred to as on-axis movement, while other movements may be referred to as off-axis movement. For example, a change in relative orientation between the first link 111 and the second link 112 can be referred to as planar rotation provided that the movements of the first link 111 and the second link 111 are in the x-y plane.

For example, actuator elements 140 of the second connector unit 222 can be addressed independently of the actuator elements of the first connector unit 121 . Thus, axial movement, off-axis movement and/or planar rotation can be realized by different actuation states of the first connector unit 121 and the second connector unit 222 .

Thus, the array 141 of actuator elements of the first connector unit and an array of actuator elements of the second connector unit are configured to provide movement of the first link 111 and/or the second link 112 . The movement may be axial movement of the second link with respect to the first link along an axial direction, e.g. B. the x-direction along which the first and second links are arranged at least for a predetermined operating state of the first and second connector units, an off-axis movement of the first and/or the second link in a direction different from the axial direction differs, and/or have a planar rotation of the first and/or the second connector with respect to a MEMS substrate.

Continuing the description of 1 the MEMS actuator can optionally have or be implemented on a substrate, which is also referred to as a MEMS substrate.

For example, the first connector 111 may be fixed to the MEMS substrate, while the second connector 112 is connected to a structure that is moveable with respect to the MEMS substrate. For example, the first and second beams 131, 132 and in particular the first ends 133, 134 of the first beam 131 and the second beam 132 can be moveable with respect to the MEMS substrate. For example, the first ends 133, 134 can be movable in at least one direction, for example in the x-direction, so that a linear relative movement tion between the first connecting piece 111 and the second connecting piece 112 can be realized.

For example, the first and second connectors 111, 112 and the first and second beams 131, 132 are arranged planarly with respect to the MEMS substrate, and the first ends 133, 134 of the first and second beams are at least in a planar direction movable, e.g. in a direction parallel to the connecting line between the first and second connectors 111, 112. For example, actuation of the actuator elements of the first beam 131 results in a change in planar bending of the first beam 131.

Changing the actuation of the actuator elements of the first beam 131 and optionally the second beam 132 such that a distance between the second end 135 of the first beam 131 and the second end 136 of the second beam 132 increases may be referred to as an expansion of the first connector unit 121 will. Accordingly, changing the actuation of the actuator elements of the first beam 131 and optionally the second beam 132 such that the distance between the second ends 135, 136 decreases may be referred to as contraction.

3a illustrates a MEMS actuator 300 according to an embodiment. For example, the MEMS actuator 300 corresponds to the MEMS actuator 100. The MEMS actuator 300 has an actuator unit 302, which includes a series arrangement of a plurality of actuator cells 110a, 110b, 110c. Each of the actuator cells 110a-c may, for example, correspond to the actuator cell 110 shown with respect to FIG 1 is described. The first connecting piece 111a of the first actuator cell 110a is connected to a base piece 309 . The second connector 112a of the first actuator cell 110 is connected to a first connector 111b of the second actuator cell 110b. The second connector 112b of the second actuator cell 110b is connected to the first connector 111c of the actuator cell 110c. In other words, the actuator cells 110a-c are arranged in series. That is, relative movement of the second connector 112c of the last actuator cell 110c of the array of actuator cells relative to the first connector 111a of the first actuator cell 110a of the array of actuator cells results from accumulated movements of the individual actuator cells 110a to 110c. The second connector 112c of a last actuator cell of the actuator unit 302 may be referred to as the second connector of the actuator unit. The number of three actuator cells is exemplary. Other series arrangements of actuator cells can have a larger or smaller number of actuator cells. The following description of the actuator cell 110c is to be regarded as an example of the actuator cells 110a-c. Furthermore, features described below in relation to the actuator cell 110a can also be present in the actuator cell 110 1 and 2 to be implemented.

The first bar 131 and the second bar 132 of the first connector unit 121 of the actuator cell 110c have a first area 351 of actuator elements and a second area 352 of actuator elements. The first portion 351 is configured to change a bend of the first portion 351 of the first beam 131 in a first bend direction. The second portion 352 is configured to change a flexure of the second portion 352 of the first beam 131 in a second direction when actuated. The first direction is opposite to the second direction.

For example, the first direction is a negative bending direction and the second direction is a positive bending direction. In other words, the first portion 351 can be configured for negative deflection and the second portion 352 can be configured for positive deflection.

The second beam 132 of the first connector unit 121 can have a first area 353 and a second area 354 of actuator elements. The first area 353 of the second bar 132 is arranged opposite to the first area 351 of the first bar 131 . The second area 354 of the second bar 132 is arranged opposite to the second area 352 of the first bar 131 . The first portion 353 is configured to change its bend in the second bend direction. The second portion 354 is configured to change its bend to the first bend direction when actuated.

For example, the first area 351 of the first bar 131 and the second area 354 of the second bar 132 have actuator elements 343 . The actuator elements 343 are configured to change the bending of the respective beams in the first bending direction. The second area 352 of the first beam 131 and the first area 353 of the second beam 132 have actuator elements 344 configured to change a bending of the respective beams in the second bending direction.

For example, an actuation state of the MEMS actuator 300, as in 3a is shown to be an unactuated state. 3b FIG. 1 illustrates the MEMS actuator 300. FIG 3a in an operating state that differs from that in 3a shown actuation state is different. For example, the actuation state of the MEMS actuator 300, the in 3b shown can be an actuated operating state.

For example, actuator elements 343, 344 may increase deflection when actuated. Thus, upon actuation, the actuator cells 110 can expand along the x-direction, which can be considered, for example, as a direction perpendicular to the arrangement of the actuators. Based on the expansion of the actuator cells 110, a translation of the last link 112 of the last actuator cell 110c along the x-direction can be achieved.

In the 3a and 3b Actuator cells 110a-c shown may optionally include edge connectors 360 for providing the serial arrangement of the first and second beams of each of the connector units 121, 222. Due to the arrangement of the actuator elements 343, 344 in areas with opposite bending directions, which deform and expand, for example, in opposite and complementary ways, the expansion of the actuator cells 110a-c can be without clamping or without mechanical stress, for example at the edge connectors 360 and/or the first and second connectors 111a-c, 112a-c. A mechanical connection between the first connecting piece 111 of an actuator cell and the second connecting piece 112 of a subsequent actuator cell can be referred to as a central connector of the actuator unit 302 .

In other words, the first beam 131 and the second beam 132 include, for example, complementary sections of positive and negative flexure beams that are attached end-to-end with an edge connector 360 . Actuator cells can also be referred to as units. Actuator elements can also be referred to as bending elements.

To avoid stress at the connection points between the first portions 351, 353 and the second portions 352, 354 of the first and second beams 131, 132 and at the edge connectors 360 and at the first and second connectors 111, 112, the first Portions 351, 353 and second portions 352 and 354 may be configured according to the following scheme: The following considerations are based on values for the curvature and length of the first and second portions of the first beam and the second beam of the first connector unit and the second connector unit . The curvature is denoted by Cx, with the length of the region being denoted by Lx, with x denoting the index of the region, as is the case for actuator cell 110c in FIG 3b is specified.

For example, for an S-bend without a discontinuity and slope at the S-joint for a curvature transition between positive and negative bend regions, the first and second beams of the first connector unit and the second connector unit may at least approximately satisfy the following equations: $$\begin{array}{l}\mathrm{<figure-callout\; id="1"\; label="C"\; filenames="DE102020214445B3\_0005.png,DE102020214445B3\_0006.png"\; state="\{\{state\}\}">C</figure-callout>}1\ast \mathrm{<figure-callout\; id="1"\; label="L"\; filenames="DE102020214445B3\_0005.png,DE102020214445B3\_0006.png"\; state="\{\{state\}\}">L</figure-callout>}1=-C2\ast L2;C5\ast L5=-C6\ast L6\hfill \\ C3\ast L3=-C4\ast L4;C7\ast L7=-C\mathrm{8th}\ast L\mathrm{8th}\hfill \end{array}$$

In some embodiments, the following equations can be applied to provide linear motion: $$\begin{array}{l}\left(\mathrm{<figure-callout\; id="1"\; label="C"\; filenames="DE102020214445B3\_0005.png,DE102020214445B3\_0006.png"\; state="\{\{state\}\}">C</figure-callout>}1\ast L1\right)+\left(-C2\ast L2\right)\text{=}\left(C5\ast L5\right)+\left(-C6\ast L6\right)\hfill \\ \left(C3\ast L3\right)+\left(-C4\ast L4\right)=\left(C7\ast L7\right)+\left(-C\mathrm{8th}\ast L\mathrm{8th}\right)\hfill \end{array}$$

In some embodiments, the following equations may apply: $$\begin{array}{c}\mathrm{<figure-callout\; id="1"\; label="C"\; filenames="DE102020214445B3\_0005.png,DE102020214445B3\_0006.png"\; state="\{\{state\}\}">C</figure-callout>}1--C2=C3=-C4=C5=-C6=C7=-C\mathrm{<figure-callout\; id="1"\; label="8th\; L"\; filenames="DE102020214445B3\_0005.png,DE102020214445B3\_0006.png"\; state="\{\{state\}\}">8th</figure-callout>}& \\ L1=L2=L3=L4=L5=L6=L7=L\mathrm{8th}\end{array}$$

For example, the values of Cx (curvature of region x) and Lx (length of region x) can be changed as required until they satisfy one or more of the above sets of equations (although this is not necessarily always the case). The change in terms of Cx and Lx can optionally be used to modulate the volume covered by the expanding unit configurations (see 4 ). This is particularly useful when designing micropump or microspeaker systems where the volume of fluid displaced is critical.

For example, by changing the values of Cx and Lx, a volume covered by the expanding actuator cell can be adjusted to tune the MEMS actuator to a specific application. This can be useful, for example, when designing micropump or microspeaker systems where displaced fluid volume is critical.

4 12 illustrates another embodiment of the MEMS actuator 300. The left panel illustrates the MEMS actuator 300 in a first actuation state, which may correspond to an unactuated state, for example. The right field in 4 12 illustrates an example of the MEMS actuator 300 in a second actuation state, such as an actuated actuation state. Compared to the example of in 3a and 3b MEMS actuator 300 shown is in 4 a relative length of the first area 351, 353 of the first and second beams 131, 132 with respect to the second regions 352, 354 of the first and second beams 131, 132 are reduced. As in the right box 4 As illustrated, the reduced length of the first portions 351, 353 relative to the second portions 352, 354 may result in increased displacement upon actuation. Consequently, the difference in volume required by the array of actuator cells is greater in the first actuation state and the second actuation state as compared to those in FIG 3a and 3b configurations shown.

For example, a shift or change in distance between the first connector and the second connector of a single actuator cell 110 may be directly proportional to the square of the length of the first beam 131 and the second beam 132, or may be proportional to the curvature of the first and second beams be in the expanded state. Thus, by connecting a plurality of actuator cells in series, an achievable total displacement or total expansion can be increased. With a series connection of actuator units, the displacement or expansion of each of the actuator cells 110 accumulates while a deliverable force of the actuator cells remains the same. Thus, a desired maximum target displacement value can be achieved, for example, by configuring the combination of length and curvature of the first and second beams and the number of actuator cells 110 used in series. Since the actuator cells 110 allow the length and the curvature of the individual regions of the first and second beams to be configured based on an appropriate choice of the arrangement of the actuator elements, the MEMS actuators 110, 300 allow one of the MEMS actuator minimize the footprint required while efficiently achieving the maximum targeted displacement. For example, typical values for a maximum displacement or extension of an actuator unit having a row arrangement of actuator cells can be up to 10 mm. However, higher values can also be achieved. For example, a typical maximum displacement or expansion of a single actuator cell is up to 1 mm.

In other words, in examples, the array 141 has an S-connection with different length and curvature configurations (C1*L1=C2*L2). This allows to optimize the volume displaced by expanding or contracting configurations, which can be useful for pump or sonic generation.

5 illustrates a MEMS actuator 500 according to an embodiment. The MEMS actuator 500 is an alternative implementation of the MEMS actuator 300. In the MEMS actuator 500, the first area 351 and the second area 345 of the first beam 131 and the second beam 132 has actuator elements 543, e.g. B. instead of the actuator elements 343 of the MEMS actuator 300. Similarly, the second region 352 and the first region 353 of the first beam 131 and the second beam 132 actuator elements 544, for example instead of the actuator elements 344. The actuator elements 543, 544 are to configured to decrease the deflection of the respective beam when actuated. Consequently, the left panel illustrates in 5 For example, an idle state of the MEMS actuator 500 while the right panel in 5 an actuated state of the MEMS actuator 500 illustrates. In other words, the MEMS actuator 500 may have a contracting configuration. Thus, upon actuation, the MEMS actuator 500 contracts such that a distance between the first connector 111a and the second connector 112c decreases upon activation.

In other words, the MEMS actuator 500 may contrast with example configurations of the MEMS actuator 300 that are configured to expand upon actuation. Thus, in relation to 3a , 3b and 4 For example, the concept described for the MEMS actuator 300 can optionally be applied to the MEMS actuator 500 in a reverse manner.

In other words, the examples in 3a, b , 5 actuator unit 302 shown can be configured to expand and contract, and can have flexure cells in an S-configuration with stacking in units that can be optimized in terms of displacement, force, chip area, frequency of movement. In examples, actuation of the areas and/or bars may be individually controlled (for linear, rotational, and/or route-following movements).

Additionally, some embodiments may include both contracting and expanding configurations. For example, connections between contracting and expanding configurations can be implemented through direct mechanical connections, spring system-based mechanical connections (for soft deformable connections in pulling actions), or the use of grappling hook-like structures to create a possible pull in a contraction. For example, an actuator unit that contracts when actuated, such as the 5 actuator cell shown may be referred to as a pre-angled (PA) unit.

In some embodiments, an actuator cell in a contracting configuration may be configured to further flex the first and second beams to a position where the first and second beams are perpendicular to the x-axis. That is, a distance between the first and second connectors 111, 112 can be even shorter, for example, as in the right panel in FIG 5 is shown in an actuated state of the MEMS actuator 500 . For such a configuration, it may be advantageous if the edge connectors 360 have a particularly large dimension in the x-direction, so that more room for contraction is provided. Such a configuration can be particularly useful for applications requiring displacement of a large volume of fluid around an intermediate straight position (e.g. micropumps, microspeakers, etc.), particularly when combined with an in 4 shown in reverse fashion for contracting configurations. Contracting configurations can also be very suitable for applications that have a larger die area fill in an actuated position (e.g. compared to the expanding configurations) while ensuring the required large freedom of movement. Contracting configurations may also be useful for fabrication processes (e.g., Bosch deep reactive ion etching) that are sensitive to large open areas or chips with a low fill factor during fabrication, ie, in an actuated position.

In other words can 5 illustrate an example of a configuration of bending actuators in the example case of a contracting configuration to achieve translation in the direction perpendicular to the position of the central connector. This may be in contrast to the concept of expanding configuration (in 3a , 3b example case shown). The flexure beams 131, 132 (e.g. NED beams) formed by a series of basic flexure cells (e.g. NED flexure cells, piezoelectric flexure cells, thermal flexure cells, etc.) may be located in regions 351, 352, 353 , 354 may be arranged to deform and contract in opposite and complementary manners to provide pinch-free movement in the direction of movement when actuated (see right panel in 13 ). The actuation cells 110a-c may have complementary portions of positive and negative pre-angled flexure beams attached end-to-end with the edge connectors, as with reference to FIG 11 is described, and are referred to as a "pre-angled (PA) unit" (as in left page from 13 is shown). For a pre-angled bending S-beam (to have straight line contracting motion) with no discontinuity in a curvature transition from positive to negative bending regions (to avoid stress generation at the transition point and expenditure of excess energy), the equation sets (1), (2 ) result in an example case.

As in 3a , 3b and 5 is shown and in the following by 3b is described, the first bar 131 and/or the second bar 132 can have a parallel arrangement of a plurality of series arrangements 141 of actuator elements. For example, in 3b the first bar 131 and the second bar 132 each have a number of three row arrangements 141 of actuator elements, which are arranged parallel to one another. For example, the parallel arrays 141 of the first beam 131 may be connected to each other at the first end 133 of the first beam 131 and/or at the second end 135 . Optionally, the beam can also have further connections between the parallel arrangement 141 of actuator elements between the first end 133 and the second end 135 . For example, a parallel arrangement of a plurality of row elements 141 of actuator elements can be particularly advantageous in the S configuration, which is 3a until 5 is shown because with such an S-configuration, a length of a path along each of the arrays 141 between the first end 133 and the second end 135 may remain constant during movement of the beam. A mechanical load on the first end and the second end can thus be avoided.

For example, a total force that can be provided by the actuator cell 110 can be proportional to a moment generated in the actuator elements 140 and can also be proportional to the number of parallel arrays of actuator elements in a bar or a bar area. Thus, a parallel arrangement of row arrangements of actuator elements in an actuator cell area or bar enables a higher force to be provided, which can be achieved by the actuator cell 110 .

According to exemplary embodiments, the actuator elements of the first beam 131 have a first actuator element and a second actuator element which can be addressed independently of the first actuator element. Alternatively or additionally, the actuator elements 140 of the first connector unit 121 are independent of the actuator elements of the second connector the unit 222 addressable. Alternatively or additionally, a first actuator cell in the row of actuator cells can be addressed independently of a second actuator cell in the row of actuator cells.

In exemplary embodiments, an electrical connection to the actuator elements 140 of the actuator cells 110 of the actuator unit 302 is established via the first and the second connecting piece 111, 112, via the first and the second beam 131, 132 and via a connection between the first and the second beam, for example the edge connector 360, is provided. For example, the actuator elements 140 of the first connector units 121 of the actuator cells 110 of the actuator unit 302 can be connected in series, so that the first connector units 121 are actuated simultaneously. Likewise, the actuator elements 140 of the second connector units 222 of the actuator unit 302 can be electrically connected in series, so that the second connector units 222 are actuated simultaneously. In other examples, all actuator elements 140 of actuator unit 302 are connected to the same control signal input such that all actuator elements 140 of actuator unit 302 are actuated simultaneously.

In further examples, each of the actuator cells 110a-c is individually electrically connected. Optionally, within each of the actuator cells 110a-c, the first connector unit 121 and the second connector unit 222 are individually electrically connected. Optionally, one or more of the portions of the beams of actuator cells 110a-c are individually electrically connected. Individual actuator elements are optionally electrically connected individually.

In other words, the electrical connections to the row arrangements 141 of the actuator elements, i.e. the bending beams, which are arranged in series and/or in parallel, can be provided within an actuator cell 110 via the central edge connectors, such as in FIG 3a , 3b , 4 , 5 is shown. In a series of actuator cells 110, each of the actuator cells 110 can be individually provided with electrical connections, for example through the use of dedicated electrical connections that pass through the center and edge connectors. Although these central connections may require more chip area in some examples, electrical connection via the central connectors may provide higher electrical reliability. Alternatively, certain areas, or all areas, of the actuator cells 110 can be electrically connected in series, which can ensure a particularly low required chip barrier. In some examples, the right and left halves of the actuator cells, ie, the series connected first connector assembly 121 and second connector assembly 222, may have individual electrical connections. This enables half of the units to be operated independently at a time, which can provide greater electrical reliability. For example, in the event of an electrical short on one side, the other actuatable side can continue to provide the targeted deflection, but with a reduced deliverable force. An individual electrical connection with the first connector unit 121 and the second connector unit 222 provides angular movement. For example, the beams, such as the unactuated halves, can be designed to act as passive springs in their unactuated or partially actuated state.

wobei θ_{unit_n} die winklige Rotation der n-ten Aktoreinheit beschreibt. 6 12 illustrates an angular movement generated by the actuator unit 302 according to an embodiment. According to the 6 In the examples shown, the first and second beams of actuator assembly 302 are configured to act as passive springs in at least one of an unactuated state, a partially actuated state, and an actuated state. The middle field in 6 shows a first operating state of the actuator unit 302. The first connector units of the actuator unit 302 are referred to as the first section 621 of the actuator unit 302. FIG. The second connector units 222 of the actuator unit 302 are referred to as the second section 622 of the actuator unit 302 . The left field in 6 shows a second operating state of the actuator unit 302. In the second operating state, the actuator elements of the second section 622 are actuated so that they ensure that the second section 622 expands. Because the beams are configured to act as passive springs, the first section 621 will expand, but to a lesser extent than the second section 622. Therefore, actuation of the second section 622 results in a rotational movement, with each of the Actuator cells 110a-c provide a rotation angle 681, 682, 683. A total rotation angle, which describes a change in orientation between the first connection piece 111a and the last second connection piece 112c, can correspond to a sum of the individual contributions 681, 682, 683 of the actuator cells 110a-c, e.g. B. according to the following equation: $${\theta }_{tOtal}={\theta }_{\mathrm{and}nit\_1}+{\theta }_{\mathrm{and}nit\_2}+\cdots +{\theta }_{\mathrm{and}nit\_n},$$

where θ _{unit_n describes} the angular rotation of the nth actuator unit.

The right field in 6 shows a third actuation state of the actuator unit 302, with the first section 621 being actuated. In this case, each of the actuator cells 110a-c provides a contribution 681', 682', 683' to an overall change in orientation between the first first connection piece 111a and the last second connecting piece 112c.

Optionally, the unactuated half acting as a passive spring, e.g. B. Section 621 in the left panel in 6 or the section 622 in the right panel in 6 , can also be partially actuated (ie at a lower voltage) to adjust the planar rotation angle (by deforming more in the direction of movement) at a given actuation voltage (applied to the normally actuated side). This makes it possible to finely control the cleaned up rotation angle. In contrast, one half (e.g., section 621 or 622) of the unit can be configured to flex upon actuation and move in the opposite direction to the direction of movement (e.g., produce rearward motion instead of forward motion), to greatly increase the angle of rotation (compared to a passive case). This helps in creating a larger in-plane angle of rotation, but at the expense of a reduced adjusted deployable force in the direction of forward motion that would normally have been deployed in the example case (in 1 ). This loss can be compensated for by increasing the corrected force provided by the portion actuated in the forward direction, e.g. by increasing the number of cantilevers stacked in parallel in the forward bending direction, decreasing the actuation voltage, etc.

Although the example in 6 illustrated by means of an expanding configuration of the beams, rotational movement can likewise be implemented by means of a contracting configuration.

In examples, the individual contributions 681, 682, 683, 681', 682', 682', 683' provided by the individual actuator cells 110a-c are equivalent to the change in orientation.

As in 3a-6 As demonstrated, actuator unit 302 may be configured to allow planar rotation and linear movement. The angle of rotation can be controlled by the voltage applied to the first and second sections 621, 622, specifically the voltage applied to the deactivated or partially actuated unit halves, i.e. the first section 621 in the left panel and the second section 622 in the right field. Furthermore, the angle of rotation can be controlled by the distance covered. This can be particularly useful, for example, for applications where angular tilt corrections are required in planes during or after a specific distance move. Examples of such applications are Micro-Opto Electronical Micro Systems (MOEMS) based Fabry-Perot optical filters, MOEMS interferometers, etc., where parallelization of optical surfaces during actuation is required. For example, tilt corrections are required to compensate for errors arising from manufacturing, assembly, vibration, and so on.

As an alternative to the in 6 shown example, in which all actuator cells 110a-c are configured to perform a rotational movement, in other examples a set of actuator cells of the actuator cells 110a-c or a single actuator cell can be implemented to perform a rotational movement, with the other actuator cells doing so may be configured to perform linear motion, such as linear motion only.

7 11 illustrates another example of the actuator unit 302. In this embodiment, the actuator cell 110c is configured to perform a rotational movement when actuated, with the actuator cells 110a, 110b being configured to perform a linear movement when actuated. For example, the middle panel in 7 an actuated state of the actuator unit 302. The left panel shows a first actuation state of the actuator unit 302, in which the actuator cells 110a and 110b are actuated to perform a linear movement along the x-direction. The first connector unit 121 of the actuator cells 110c is unactuated or less actuated than the second connector unit 222 of the actuator cells 110c. The second connector assembly 222 of the actuator cells 110c is actuated to provide rotational movement. The right field in 7 Figure 12 shows a second operating state of the actuator unit 302, wherein the operating states of the first connector unit 121 and the second connector unit 222 are reversed compared to the left panel to provide rotational movement in the opposite direction.

It should be noted that electrical connections of the actuator unit 302 may be configured such that the actuator unit 302 performs both types of movements related to 6 , 7 and below 8th are described, allows.

For example, the in 7 The configuration shown may be advantageous for controlling an angle created by individual actuator cells or a set of actuator cells, thereby allowing better control over the location and magnitude of the rotation created. at for example, the rotational movement of actuator cell 110c may provide for tilt correction required after moving a target along a linear path, for example, through actuation of actuator cells 110a and 110b.

8th 12 illustrates another example of the actuator unit 302 according to an embodiment. According to this embodiment, the first connector unit 121 of the actuator cell 110c is asymmetrical with respect to the second connector unit 222 of the actuator cell 110c. For example, a curvature Cx and/or a length Lx of one or more portions of the beams of the first connector unit 121 is asymmetrical with respect to an oppositely arranged portion of the beams of the second connector unit 222 of the actuator cell 110c. Thus, upon actuation of the actuator cell 110c, for example by using an identical control signal for the first connector unit 121 and the second connector unit 222, expansion (or in alternative implementations contraction) may be asymmetric to permit rotational movement of the second link 112c with respect to to provide the first connector 111c. For example, the first connector unit 121 has a different maximum deflection compared to the second connector unit 222 . This implementation has the advantage that a dedicated separate electrical connection to the areas of the actuator cells 110c or to the first connector unit 121 and the second connector unit 222 of the actuator cell 110c may not be required to generate angular movement/rotation.

In some embodiments, changing the curvature and length of portions of the beams can be configured to provide a specific stiffness of the first connector unit 121 and/or the second connector unit 222, for example in an unactuated state, to better match linear and / or to allow rotational movement.

In general, rotational movement can be achieved by configuring the first connector unit 121 and the second connector unit 222 such that the first connector unit expands or contracts to a different extent compared to the second connector unit 222 upon actuation.

9 12 illustrates another example of the actuator unit 302 according to an embodiment. According to this embodiment, in the actuator cell 110c, a length of the first and second beams of the first connector unit 121 differs from a length of the first and second beams of the second connector unit 222. The left panel in FIG 9 shows a first actuation state of the actuator unit 302, while the right panel shows a second actuation state. As shown in the right panel, in the second operating state in which the beams are expanded, the first connector unit 121 and the second connector unit 222 of the actuator cell 110c provide a different distance between the first and second connectors 111c and 112c. This difference results in a rotation 863' of the first link 112c with respect to the second link 111c.

In other words, the second connector unit 222 can provide a different forward movement compared to the first connector unit 121 .

As described with respect to the previous figures, example embodiments may provide for angular movement, tilt and/or rotation configurations (planar and/or extra-planar), based on expanding configurations, contracting configurations or combinations thereof (with/without the possibility of a linear movement).

10 illustrates an alternative implementation of the actuator unit 302 according to an embodiment. This embodiment allows implementation of the first beam 131 and the second beam 132 of the actuator cells 110 without an S-configuration in an expanded state of the first beam 131 and the second beam 132. In this example, the first beam 131 via a flexible connector 1013 with connected to the second beam 132. Furthermore, the second beam 131 is connected to the second connecting piece 112 via a flexible connector 1015 . The flexible connectors 1013 and 1015 make it possible to avoid stress during actuation of the actuator cell 110, or to reduce mechanical stress, although the first beam 131 and the second beam 132 may have only one area of actuator elements, the actuator elements in this a region configured to bend in a uniform direction.

11 12 illustrates actuator elements and arrays of actuator elements according to exemplary embodiments. A first type of actuator element 1171 has a first surface 1172 which is arranged opposite a second surface 1176 of the actuator element 1171 . A first end 1173 of the first surface 1172 is located opposite a first end 1177 of the second surface 1176 . A second end 1174 of the first surface 1172 is opposite a second end 1178 of the two th surface 1176 arranged. For example, the first ends 1173, 1177 and the second ends 1174, 1178 give up opposite ends of the respective surfaces 1172, 1176 along a direction along which a plurality of the actuator elements 1171 are arranged in a row array of actuator elements, for example the y-direction referred to in the previous figures. The actuator element 1171 is in a first actuation state, for example a non-actuated state. An illustration of the actuator element 1171, which is provided with the reference number 1171', represents an actuated, or in comparison to the actuator element 1171 more actuated, actuation state of the actuator element 1171. During an actuation, a distance between the first end 1173 and the first surface 1172 increases and the second end 1174 of the first surface 1172 relative to a distance between the first end 1177 of the second surface 1176 and the second end 1178 of the second surface 1176. That is, the distance between the first end 1173 and the second end 1174 increases and/or the distance between the first end 1177 and the second end 1178 decreases. Thus, actuator element 1171 is configured to increase deflection when actuated. A change in a volume of the actuator element 1171 upon actuation can be described by a deformation triangle 1168. An alignment of a secondary surface of the actuator element 1171, wherein the secondary surface connects the first surface 1172 to the second surface 1176, can change by an angle 1169, for example, upon actuation.

For example, within a range of actuator elements, z. B. the areas 343, 344, 543, 544 from 3a, b , 5 , or arranged within the row arrangement 141, 142 of actuator elements, the actuator elements such that the first ends 1173, 1177 of the first and second surface 1172, 1176 of one of the actuator elements opposite, z. B. adjacent or with a spacer element in between, to the first ends 1173, 1177 of the first and second surfaces 1172, 1176 or opposite to the second ends 1174, 1178 of the first and second surfaces 1172, 1176 of the subsequent actuator element of the one actuator element are.

According to embodiments as in 11 As illustrated, a second type of actuator cell 1191 is based on the first type of actuator element 1171 but has a modified thickness in the y-direction. For example, the actuator element 1191 has a structure which, in a first actuation state of the actuator element 1191, e.g. B. an unactuated state, a structure of the first type of actuator element 1171 combined with structural elements 1179, 1179 'corresponds. The structural elements 1179, 1179′ can have the same material as the actuator element 1171, so that in the case of the actuator element 1191 the structural elements 1179, 1179′ cannot be identified in examples. In these examples, the combination of the actuator element 1171 with the structural elements 1179, 1179' can be understood to describe a volume or an external shape of the actuator element 1191 in comparison to the actuator element 1171. In other examples, the structural elements 1179, 1179′ can consist of a different material, for example the structural elements 1179, 1179′ can have an inactive material that does not change its shape significantly when the actuator element 1191 is actuated. In these examples, the structural elements 1179, 1179' can be referred to as spacers. In some examples, the structural elements may include an electrically insulating material.

Thus, according to embodiments, the first beam 131 and/or the second beam 132 has one or more inactive elements 1179, 1179', 1199, which are, for example, substantially rigid, i. that is, which do not significantly flex upon actuation of either of the actuator elements of the first beam 131 and/or the second beam 132. For example, one of the inactive elements is arranged between two adjacent actuator elements of the series arrangement of actuator elements.

The structural element 1179 is positioned between a first end 1193 of a first surface 1192 of the actuator element 1191 and a first end 1197 of a second surface 1196 of the actuator element 1191 . The first surface 1192 is located opposite the second surface 1196 . The structural element 1179 ′ is positioned between the second end 1194 and the second end 1198 . An illustration of actuator element 1191 denoted by reference numeral 1191' represents a second actuation state of actuator element 1171, e.g. B. an actuated state with a stronger actuation than the first actuation state. When the actuator element 1191' is actuated, the structure of the structural elements 1179, 1179' ensures that a distance between the first end 1193 and the second end 1194 is at least essentially the same size as the distance between the first end 1173 and the second end 1174 of the first surface 1172 of the actuator element 1171 in the unactuated state. Likewise, for the actuated actuator element 1191', a distance between the first end 1197 and the second end 1198 of the second surface 1196 is at least substantially equal to a distance between the first end 1177 and the second end 1178 of the second surface 1176 of the unactuated actuator element 1171. Since the distance between the first end 1193 and the second end 1194 is greater than the distance between the first end 1197 and the second end 1198 due to the structural elements 1179, 1179' in the first operating state compared to the second operating state, a Row arrangement 1146 of a plurality of actuator elements 1191 bent in the first operating state. Upon actuation of the first actuation state of the array 1146 of actuator elements 1191, flexing of the array 1146 decreases. Thus, in the second actuated condition of array 1146, ie, represented by array 1146', the array may be straight.

A third type of actuator element 1181 has a form that can be described as a combination of actuator element 1171 and structural elements 1199 , which can be construed as similar to structural element 1179 . A first structural element 1199 is arranged between a first end 1183 of a first surface 1182 and a first end 1187 of a second surface 1186 of the actuator element 1181 . A second structural element 1199 is arranged between a second end 1184 of the first surface 1182 and a second end 1199 of the second surface 1186 . First end 1183 is located opposite first end 1187 . The second end 1184 is located opposite the second end 1188 . For example, the structural elements 1199 extend a dimension of the first and second surfaces 1182, 1186 by an equal length along the y-direction. For example, the structural elements 1199 can extend the distance between the first end 1183 and the second end 1184 and between the first end 1187 and the second end 1188 compared to the actuator element 1171 by the same amount as the structural elements 1179, 1179' extend the distance between the first end 1197 and the second end 1198 of the actuator element 1191 extend. Thus, in a second actuation state (eg, an actuated state) of actuator element 1181, illustrated as actuator element 1181', the distance between first end 1183 and second end 1184 may equal the distance between first end 1197 and second end 1198 of the second surface 1196 of the actuator element 1191 same. Likewise, with the actuated actuator element 1181 ′, the distance between the first end 1187 and the second end 1188 of the second surface 1186 can equal the distance between the first end 1193 and the second end 1194 of the first surface 1192 of the actuator element 1191 . Therefore, in an actuated state of an array 1147' of actuator elements 1181, a length along a path along the actuated flexed array 1147' is at least substantially equal to a length along a path along the array 1146 in the unactuated flexed state, provided that a number of actuated Elements 1191 of the series arrangement 1146 equal to a number of actuator elements 1181 of the series arrangement 1147'. In other words, in a flexed state of array 1146, which in the case of array 1146 is an unactuated state, the length of the path of array 1146 equals the length of the path of array 1147' in a flexed state, which in the case of array 1147' resembles an actuated state.

Because the length of the path along array 1146 is equal to the length of the path along array 1147', simultaneous actuation of array 1146 and array 1147' allows movement wherein an actuator cell based on one or more of arrays 1146 moves upon actuation contracts by the same amount that an actuator cell designed on the basis of one or more of the arrays 1147 expands upon actuation. The array 1146 may also be referred to as a pre-angled configuration or pre-angled beam. Accordingly, actuator element 1191 may be referred to as a pre-bent (PA) actuator element or pre-bent flex cell. For example, the pre-angled configuration contracts upon actuation. The array 1147 can be viewed as a normally angled configuration or bar. The normally angled assembly 1147 can expand upon actuation. Accordingly, actuator element 1181 may be referred to as a normally angled (NA) actuator element or flex cell. For example, the pre-angled configuration 1146 reduces its deflection, e.g. B. deforms into a straight position.

In other words, with the disclosed concept, the actual structural material triangle can be added to an unactuated flexure cell in an inverted position that resembles the deformation triangle of the flexure cell at a specific actuation voltage and load point. Consequently, when an equal voltage and load point is applied to the cell, a straight positioned flex cell can be achieved. By placing the pre-angled actuator elements 1191 adjacent to each other in a series logic 1146, the pre-angled beam of any length can be formed that will flex to a straight position when actuated.

For example, a synchronous movement of a contracting configuration from the regarding 11 described concept can be derived. In other words shows 11 schematically, a method of forming a pre-angled flexure beam 1146 and a normal angled flexure beam 1147 from a selected flexure cell whose deflections are complementary to each other and can be synchronized with respect to an applied actuation voltage. This synchronization is achieved based on the design principle of making the overall length of the two types of beams almost the same (L), with the curvature (C) already being the same as they are formed from the same bending cell (or at a specified offset for materials with anisotropic modulus of elasticity). This can result in actuation synchronized peak deflections (or at a fixed offset for materials with anisotropic Young's modulus) for both beam types that are complementary to each other since peak deflection is equal to α(C*L ² ).

12 FIG. 12 illustrates several actuation states of different row arrangements of pre-angled actuator elements according to exemplary embodiments. As in 12(a) 1, a first example of an array 1246a of pre-angled actuator elements 1191 has a first bending direction in a first actuation state shown in the left panel. In a second state of operation, the array 1246a is straight. In a third actuated state, shown in the right panel, the array 1246a has a second bending direction that is opposite to the first bending direction. For example, beam 1246a is configured to generate positive and negative deflection about a center position for a targeted voltage and load point. As in 12(b) 1, a second example of an array 1246b of pre-angled actuator elements 1191 has an S-like shape in a first actuation state shown in the left panel. In the first operating state, a first portion 1251b of the array 1246b is bent in the first direction, which is opposite to a second direction in which a second portion 1252b of the array 1246b is bent. In the second actuation state, shown in the middle panel, the array 1246b is straight. In a third operating state, shown in the right panel, the third portion 1251b is bent in the second direction while the second portion 1252b is bent in the first direction. For example, the pre-angled cantilever S configuration 1246b is configured to produce highly linear positive and negative deflections about a center position for a targeted voltage and load point. As in 12(c) 1, a third example of an array 1246c of pre-bent actuator elements 1191 comprises an array of portions 1251c, 1252c, 1253c, 1254c bent in alternating bending directions in a first actuation state shown in the left panel. That is, a first portion 1251c and a third portion 1253c are bent in a first bending direction opposite to a second bending direction in which a second portion 1252c and a fourth portion 1254c are bent. In a second actuation state, shown in the middle panel, the array 1246c is straight. In a third operating state, shown in the right panel, the first and third portions 1251c, 1253c are bent in the second bending direction and the second and fourth portions 1252c, 1254c are bent in the second bending direction. For example illustrated in 12c the left panel illustrates an unactuated state, the middle panel illustrates a partially actuated state, and the right panel illustrates an actuation state with a higher actuation than that of the middle panel. For example, the right panel illustrates a fully actuated state. For example, beam 1246c is implemented as a pre-angled bending beam with multiple S-configurations to produce highly linear positive and negative deflections about a center position for a targeted voltage and load point.

In 3a , 3b Actuator elements 343, 344 can, for example, optionally correspond to actuator elements 1181. For example, in 5 Actuator elements 543, 544 optionally correspond to actuator elements 1191.

According to examples, such as in relation to 12 , at least a portion of the first beam 131 is bent in a first bending direction when in an unactuated state, and wherein the portion of the first beam is bent in a second bending direction, which is opposite to the first bending direction, when in a predetermined operating state.

For example, the deflection of the beam 131 in the predetermined actuated state is symmetric to the unactuated state with respect to a straight position of the beam and the predetermined actuated state is a maximum actuated state.

In other words, the pre-angled beams can be configured to flex beyond the straight position. For this purpose, for example, the deformation triangle, ie the structural elements 1179, 1179' ent be adapted accordingly. Thus, exemplary embodiments include beams that can be actuated about a mid-level position based on an applied voltage, which is required for some applications.

The actuator elements may be arranged in a pre-angled array, for example in regions configured to flex in a complementary manner in an S-configuration. Thus, linear translation can be achieved at a free end of the beam while moving to or beyond a straight position, as shown for the case of array 1246b. It should be noted that the arrays 1246a-c may be configured to deflect more in one direction than the other. That is, a maximum deflection can be asymmetrical with respect to the straight position. This can be achieved by the choice of the structure elements 1179, 1179' and the applied voltage in a load point.

In examples, structural materials with anisotropic elasticity (such as crystalline silicon) can be used for the beams or for the MEMS actuator. In this case, the pre-angle created via the strain triangle can change the average Young's modulus value of the individual flexural cell due to the angle and the position at which it is placed in the pre-bent beam. This change in Young's modulus can result in a difference in the curvature of the flexure cells for the different positions in the same pre-bent beam if the same cell geometry is used for all flexure cells (actuator elements) at a given actuation voltage. If this change is not negligible/acceptable for the required performance, it can be compensated by changing the moment value of the second area of the bending cell, which corresponds to its angle and position, (by changing the geometry of the bending cell depending on its position and angle, e.g. cell thickness etc.), by changing the applied voltage to get the required deflection for the specific load point for the entire pre-angled beam, etc. Another solution is to create multiple S-configuration pairs in the pre-angled beam sections, as in 12(c) is shown. The advantage of such a configuration is that the individual S-configurations are not angled due to their position in the pre-bent beam, thus a negligible/acceptable change in the Young's modulus value of the flexural cells can be achieved. This simplifies design and actuation control without being limited to displacement of the pre-angled beam tip, since any number of S-configurations can be cascaded together to achieve targeted displacement in an unactuated state (which is a greater range for a pre-angled beam to contract) without changing the flex cell angle outside of an S-configuration due to their position. The length of the individual S-configuration (based on a number of cells in it), the curvature of each region in the individual S-configuration, etc. can be optimized in relation to the chip area to provide a required displacement and force value for the entire pre-angled beam. This concept of multiple S configurations in a single beam can also be applied to normal angled beams, allowing greater design freedom to obtain required displacement and force values in an optimal die area for the entire normal angled beam. The advantage of this contracting beam design method is that it provides a large degree of design freedom, optimal chip area utilization, high fill factor, etc. to achieve a targeted force, displacement, actuation frequency, motion resolution, etc. In addition, it is not necessary to rely on a precise residual stress technique (similar to that used in [2], [3] for non-planar applications) to create pre-distortion for contraction, which is known to be more difficult to achieve in MEMS devices to design and control, and is highly sensitive to manufacturing process errors (thus reproducibility of identical prestressed bends during the manufacturing process is difficult) and also very sensitive to environmental conditions such as temperature, thus reducing the reliability of device performance during operation.

Thus, according to examples, the row arrangement 141 comprises a plurality of first areas 1251c, 1253c and a plurality of second areas 1252c, 1254c, the first areas and the second areas being arranged alternately in the row arrangement. Each of the first portions is configured to change a bend of the first portion to a first bend direction when actuated. Each of the second portions is configured to change a bend of the second portion to a second bend direction when actuated. The first bending direction is opposite to the second bending direction. Optionally, the first and second portions are flexed in an unactuated state. These examples allow compensation for anisotropic elasticity, e.g. B. by multiple S-configurations in a single bar, making the design simplistic is folded and an optimization of a contraction area is made possible.

13 13 illustrates a MEMS actuator 1300 according to an embodiment. The left panel illustrates a first actuation state, such as an unactuated state, and the right panel illustrates a second actuation state, such as an actuated or fully actuated state. The MEMS actuator 1300 has a moveable stage 1361 . Furthermore, the MEMS actuator 1300 has a first actuator unit 302a which can be an example of the actuator unit 302 . Actuator unit 302a includes actuator cells 1310a that may represent examples of actuator cell 110 . Actuator cells 1310a are configured to contract upon actuation (e.g., along the x-direction, as shown in FIG 13 is shown). To realize contraction upon actuation, the first beam 1331a and the second beam 1332a of each of the actuator cells 1310a have arrays of pre-angled actuator elements, for example arrays of pre-angled actuator elements 1191 arranged according to the array 1146 concept. For example, the first beam 1331a and the second beam 1332a have arrays 1246b that are S-shaped in the actuated state. The MEMS actuator 1300 further includes a second actuator unit 302b including actuator cells 1310b, which may represent examples of the actuator cell 110. FIG. Actuator cells 1310b are configured to expand (e.g., along the x-direction) when actuated. An axial direction of the actuator unit 1302b, along which the actuator unit 1302a expands, is antiparallel to an axial direction of the actuator unit 1302a, along which the actuator unit 1302a contracts (i.e. a direction from the first connecting pieces to the second connecting pieces of the actuator cells of the respective actuator units is antiparallel) . Thus, upon actuation, the second link 112a of the actuator unit 1302a can move in the same direction and by the same amount as the second link 112b of the actuator unit 1302b. Each of the actuator cells 1310b includes a first beam 1331b and a second beam 1332b, which may represent examples of the first beam 131 and the second beam 132, respectively. For example, the first bar 1331b and the second bar 1332b each have row arrangements of actuator elements according to the concept of the row arrangement 1147 of actuator elements 1181 . For example, the first beam 1331b and the second beam 1332b are configured to have an S-like shape in a bent state, for example in a second operating state. The first bars 1331a, 1331b and the second bars 1332a, 1332b may represent examples of the first bar 131 and the second bar 132, respectively. Actuator cells 1310a and 1310b are matched to provide synchronized movement upon actuation of actuator units 302a and 302b. This means that upon actuation, a contraction of the actuator unit 302a corresponds at least essentially to an expansion of the actuator cell 302b. The second link 112a of the actuator unit 302a is connected to a first boundary surface of the movable structure 1361 . The second connection piece 112b of the actuator unit 302b is connected to a second boundary surface of the movable structure 1361 which is arranged opposite to the first boundary surface of the movable structure 1361 .

For example, a length of a path along the first beam 1331a of the first actuator cell 1310a in an unactuated state of the first actuator cell, e.g. B. a left field in 13 , substantially a length of a path along the first beam 1331b of the second actuator cell 1310b in an actuated state of the second actuator cell, e.g. B. the right field in 13 . Thus, upon actuation, the first actuator cells 1310a can contract synchronously with an expansion of the second actuator cells 1310b.

For example, the actuator elements of the first actuator cell 1310a are the same as the actuator elements of the second actuator cell 1310b, which enables a simple synchronous implementation.

For example, a control signal is applied to the first and the second actuator unit 302a, 302b, for example a voltage level or a current. The actuator elements of the first and second actuator cells can be actuated in response to the control signal, e.g. B. as in relation to 14 , 15 is explained. Due to the synchronous behavior of the actuator units 302a, 302b when actuated, the first and the second actuator unit 302a, 302b can be supplied with the same control signal, as a result of which a synchronous movement is still made possible.

In other words, the first actuator cell 1310a (or first actuator unit 302a) and the second actuator cell 1310b (or first actuator unit 302b) are configured for inherently synchronized movement upon actuation.

Although the concept of synchronous movement of expanding and contracting actuator cells in 13 shown by means of actuator units 302a,b comprising a series arrangement of actuator cells (which in examples may comprise a single actuator cell 1310a, 1310b), the concept is also applicable to a pair of single actuator cells, parallel arrays of actuator cells or a combination of parallel and series arrangements of actuator cells.

Accordingly, in examples, actor cell 1310a is a first actor cell and actor cell 1310b is a second actor cell. The actuator elements of the first actuator cell 1310a are configured to decrease the deflection of the first beam 1331a of the first actuator cell 1310a when actuated, and actuator elements of the second actuator cell 1310b are configured to increase the deflection of the first beam 1331b of the second actuator cell when actuated .

In other words, the MEMS actuator 1300 may represent an example case of synchronized expanding and contracting configurations linked via a load stage 1361 to provide linear translation of the stage in the direction of expansion and contraction of the NA (302a) and Get PA-(302b) units. The NA and PA units are formed using synchronized pre-angled and normal angled sections of bending beams (e.g. formed as in 11 is shown). Due to the design-based synchronization of beam regions and the same number of NA and PA units, the amount of expansion is equal to the amount of contraction in the direction of motion for the same actuation voltage (or given a given offset between voltages applied to the NA and PA units are applied for materials with anisotropic modulus of elasticity). The advantages of such a configuration are that it has greatly enhanced off-planar stiffness (compared to a system that has either only an expanding configuration or only a contracting configuration), hence a higher frequency of movement and lower off-planar sag (thus no supporting structures are required underneath and non-contact actuation is possible, which can be carried out without any kind of stiction problems). Thus, the adjusted deliverable force can effectively be doubled (in the example case) due to synchronization (since pulling force and pushing force act in synchronization on the load stage), high chip area fill factor, low sag, etc. In addition, the synchronization obtained based on the design greatly simplifies the drive control required for actuation.

Besides using synchronized beam styles and the same number of NA and PA units, synchronization between expanding and contracting configurations can also be achieved by using a combination of different numbers of NA and PA units, with different NA and PA unit lengths PA unit ranges, etc., to achieve the same amount of contraction or expansion movement upon actuation, either at the same voltage or at a given voltage offset applied to the NA and PA units.

All of the concepts mentioned herein for expanding and/or contracting configurations can be applied to the combination of expanding and contracting configurations (whether synchronized or not). For example, in case of higher loads, when the extended off-planar stiffness is not sufficient due to the associated expanding and contracting configuration, supporting sliding surfaces can also be used under the steps (similar to in 17 , 18 is shown).

In general, MEMS actuators according to exemplary embodiments have actuator cells 110 arranged in series, as described in relation to actuator units 302, or arranged in parallel (e.g. 18 ). Exemplary embodiments include series arrangements of parallel arrangements of actuator cells 302, and/or parallel arrangements of series arrangements of actuator cells 302.

For example, the total force that can be provided is also directly proportional to a number of units or actuator cells used in parallel (while the maximum displacement remains the same). A target force value can be obtained from the combination of the length of flexures, the moment generated in flexures, the number of flexures stacked in parallel in a unit, and the number of parallel units. For NED-based flexures, a typical maximum deliverable force range is around 0 to 10 mN (typical maximum deliverable force value is around 1 mN) and typical motion frequency range is around 0 to 100 kHz.

A targeted Force and a displacement configuration can be achieved in an optimal chip area depending on the requirement. The flexures (e.g. NED cells) thus enable analog control based on the applied drive voltage, where a displacement resolution in the nanometer range can be achieved while maintaining a range of motion in millimeters.

Different exemplary implementations of the actuator elements 140, 343, 344, 543, 544, 1171 are described below, the electrostatic actuators, thermal actuators, z. B. thermoelectric actuators, and / or piezoelectric actuators.

14 12 illustrates different types of electrostatic actuator elements according to exemplary embodiments. In the 14 The actuator elements shown are examples of the actuator elements 140, 343, 344, 543, 544, 1171. Field A in 14 shows an example of a first type of actuator element 1440 according to an embodiment. The left panel illustrates actuator element 1440 in a first actuation state, such as an unactuated actuation state. The right panel illustrates actuator element 1440 in a second actuation state, such as an actuated actuation state. A first electrode 1441, e.g. a top electrode, is separated from a second electrode 1443, e.g. a bottom electrode, with an electrostatic gap 1442. The first electrode 1441 is connected to the second electrode 1443 via insulating regions 1444 such that the first electrode 1441 is electrically isolated from the second electrode 1443 . Two mechanical connections across the insulating regions 1444 between the first electrode 1441 and the second electrode 1443 are positioned at opposite ends of the first electrode 1441 . For example, the opposite ends, at which the mechanical connections to the second electrode are provided, are arranged along the y-direction. When a voltage is applied between the first electrode 1441 and the second electrode 1443, the first electrode 1441 and the second electrode 1443 attract each other. At least one of the electrodes is bent along a direction between the two mechanical connections between the two electrodes such that the attraction between the two electrodes translates into a force along the y-direction. Consequently, upon application of the voltage between the two electrodes, the actuator element 1440 can expand at the position of the mechanical connection between the first and second electrodes. Consequently, a distance between a first end 1473 and a second end 1474 of a first surface 1472 increases relative to a distance between a first end 1477 and a second end 1478 of a second surface 1476, which is arranged opposite to the first surface 1472, upon application of a Voltage between the two electrodes increases, i.e. when actuated. Thus, actuation results in a deformation triangle 1468 that may correspond to deformation triangle 1168 . Examples of actuator element 1440 are NED flexure cells in a unimorph configuration with an electrostatic gap.

Panel B shows a second type of electrostatic actuator element 1450 according to an example. Compared to the electrostatic actuator element 1440, the actuator element 1450 has an additional third electrode 1455, which is arranged between the first electrode 1441 and the second electrode 1443. The third electrode 1455 is separated from the first electrode 1441 by a first electrostatic gap 1452 and by insulating regions 1444 . Furthermore, the third electrode 1455 is separated from the second electrode 1443 by a second electrostatic gap 1454 and by further insulating regions 1444 . The function of the electrostatic actuator element 1450 is similar to the function of the actuator element 1440. A third electrode can increase the force of the actuator element 1450. Examples of the actuator element 1450 are NED flexure cells in a unimorph configuration with two electrostatic gaps.

Panel C shows a third type of actuator element 1460 according to an example. The left panel shows a first actuation state, the middle panel shows a second actuation state, and the right panel shows a third actuation state. Compared to actuator element 1450, actuator element 1460 is symmetrical with respect to third electrode 1455. For example, actuator element 1460 is configured to apply a voltage either between the first and third electrodes or between the second and third electrodes individually. For example, applying a voltage between the first electrode 1441 and the third electrode 1452 may provide actuation according to the actuation condition shown in the center panel, while applying between the second electrode 1443 and the third electrode 1455 may provide actuation according to the panel shown actuation state can provide. For example, the second operation state and the third operation state are operations in opposite directions. Thus, the actuator element 1460 can provide either bending in a first bending direction or bending in a second bending direction, where the first bending direction is opposite to the second bending direction, depending on whether a voltage is between the first electrode and the third electrode or between the second electrode and the third electrode is applied. Examples of actuator element 1446 are NED flexure cells in a bimorph configuration with two electrostatic gaps, which may provide better flexure control compared to unimorph configurations.

15 15 illustrates different types of actuator elements 1540, 1550, 1560 according to embodiments. The actuator elements 1540, 1550, 1560 can be examples of the actuator elements 140, 343, 344, 543, 544, 1171. field A in 15 15 shows a first type of actuator element 1540. The actuator element 1540 can be an example of an electrothermal actuator element or an electrothermal bending cell. The left field illustrates a first actuation state of the actuator element 1540, for example an unactuated actuation state. The actuator element 1540 has a first electrode 1541, a second electrode 1543 and an insulating layer 1542 which is arranged between the first electrode 1541 and the second electrode 1543 in order to thermally and electrically insulate the first electrode 1541 from the second electrode 1543. The middle panel illustrates a second actuation state of the actuator element 1540, for example an actuated state in which the first electrode is actuated. In the second operating state, the first electrode 1541 is electrically heated, for example, so that the first electrode 1541 thermally expands. In the second actuation state, the second electrode 1543 is cold, and may be cooled to contract, for example. Due to the expansion of the first electrode 1541 and/or the contraction of the second electrode 1543, the actuator element 1540 bends in a first direction. The right panel shows a third actuation state, for example an actuated state in which the actuator element 1540 flexes in a second flex direction that differs from the first flex direction. In the third actuation state, the first electrode 1541 is cold and/or the second electrode 1543 is hot to provide contraction and/or expansion. A deformation of the actuator element 1540 upon actuation provides a deformation triangle 1568, which with respect to 11 described deformation triangle 1168 can correspond.

Panel B illustrates an example of a piezoelectric actuator element or piezoelectric bending cell according to an embodiment. The left panel shows a first actuation state, for example a non-actuated state. The actuator element 1550 has a first electrode 1551 and a second electrode 1553 . The first electrode 1551 has a piezoelectrically active layer. The second electrode 1553 has a passive conductive layer. The first electrode 1551 is insulated from the second electrode 1553 by an insulating layer 1552 which electrically insulates the first electrode 1551 from the second electrode 1553 . The right panel in panel B illustrates a second actuation state of the piezoelectric actuator element 1550, for example an actuated state. When actuated, the piezoelectric actuator element 1550 deforms. The deformation can be described by the deformation triangle 1568. field C in 15 15 illustrates another example of a piezoelectric actuator 1560. The left panel illustrates a first actuation state, such as an actuated state. In comparison to the actuator element 1550, the actuator element 1560 has a third electrode 1555. The second electrode 1553 is arranged between the first electrode 1551 and the third electrode 1555 . The second electrode 1553 is insulated from the third electrode 1555 by an insulating layer 1554 that provides electrical insulation of the second electrode 1553 from the third electrode 1555 . The middle panel illustrates a second actuation state, which is an actuated state in which the first electrode 1551 is actuated to cause the actuator element 1560 to bend in a first bending direction. The right panel illustrates a third actuation state of the actuator element 1560 in which the third electrode 1555 is actuated to cause the actuator element 1560 to bend in a second bending direction that is opposite to the first bending direction.

The actuator elements 1440, 1450, 1460, 1540, 1550, 1560 may be examples of the actuator element 1171, and thus may provide a basis for the pre-angled array 1146 and/or the normal angled array 1147. A geometric change in the actuator elements upon actuation can be represented by the deformation triangle 1168, 1468, 1568.

Several possible applications of the actuator unit 302 described above are described below.

For example, to create an out-of-planar angular motion, e.g. B. Design-based sagging of the associated stage (due to the load weight on it, the weight of the system itself, different off-planar stiffnesses of the PA and NA sides, etc.) can be employed. The sag can be designed symmetrically or asymmetrically about the load stage based on different off-planar stiffnesses of the expanding and contracting units on each side of the stage, number of units used, etc., to create, for example, pendulum motion of the load stage upon actuation . The system can also be designed to create out-of-planar motion by applying a torque by a load step (with or without step sag) via the application of different voltages to NA and PA units (at different offset, different frequency, etc.). .) is generated to show a non-synchronized movement of expanding and contracting configurations.

16 16 illustrates examples of MEMS actuators 1600, 1601 according to example embodiments. The one in the upper field in 16 The MEMS actuator 1600 illustrated has an actuator unit 302 whose second connecting piece 112 is connected to a rotatably mounted structure 1604 . The rotatably mounted structure 1604 is connected to a rigid or fixed part 1605 of the MEMS actuator 1600 via a flexible connection 1606, for example a spring. The left panel shows a first actuation state of the MEMS actuator 1600, for example an unactuated state. The right panel shows a second actuation state, for example an actuated state of the MEMS actuator 1600. Since the rotatably mounted structure 1604 is connected to the rigid part 1605 via a flexible connection 1606, an expansion of the actuator unit 302 has a rotation of the rotatably mounted structure 1604 as a result. The bottom box off 16 16 illustrates a MEMS actuator 1601 according to an embodiment. In comparison to the MEMS actuator 1600, the MEMS actuator 1601 has two actuator units 302. The second connecting pieces 112 of the actuator units 302 are connected to opposite ends of the rotatably mounted structures 1604 . When actuated, the rotatably mounted structure 1604 thus rotates about a center of rotation 1607 of the rotatably mounted structure 1604.

In other words, the MEMS actuator 1600, 1601 can represent examples of MEMS actuators that use a combination of actuator units 302 and/or support structures 1606 extending in parallel to generate a torque and thus a rotational movement.

17 17 illustrates a MEMS actuator 1700 for performing linear motion according to one embodiment. The left panel shows a first operating state, the right panel shows a second operating state. The MEMS actuator 1700 has a stage 1704 connected to the second connector of an actuator unit 302 . The actuator unit 302 is configured to expand and/or contract along the X-direction. The MEMS actuator 1700 has sidewalls 1702 along the X-direction, the sidewalls 1702 having sliding surfaces 1703 . Support structures 1708 are connected to this step 1704 and/or to the first and/or second connector connecting the actuator cells of the actuator unit 302 . The support structure 1708 is configured to slide along the sliding surfaces 1703 when the step 1704 is in motion due to actuation of the actuator unit 302 .

18 illustrates another example of the MEMS actuator 1700. According to FIG 18 shown example, instead of a series arrangement of actuator cells as provided by the actuator unit 302, actuator cells are arranged in parallel to move one of the support structures 1708. In this example, the MEMS actuator 1700 has a series arrangement of actuator cells 110 arranged in parallel. One of the support structures 1708 is arranged between each of consecutive parallel arrangements of the actuator cells 110 . Such an arrangement can provide high mechanical stability. For example, is 18 an example of multiple expanding configurations in a honeycomb design with a load stage and sliding structures.

17 and 18 can illustrate examples where translational motion can be constrained to be highly linear and planar through the use of support structures that allow sliding-based motion in one direction while constraining motion in the other directions. This can be accomplished by using skids and support structures (e.g., skid surfaces, sidewalls, load steps, etc.). The use of multiple expansion configurations in parallel can be used, for example, in a honeycomb design (with or without sliders) to increase the total force that can be provided, off-planar and/or planar stiffness, higher frequency of motion, and so on. The support frame structures (see 8th ) can consist of passive elements and/or active elements (to provide locking in a certain position after displacement, e.g. with the help of contacting the side walls when they are actuated, locking into the grooves in side walls when actuated, etc. ). Planar rotation (based on previously described schemes) may also be enabled through the use of active support frame structures and/or adjustment of sidewalls to create the space required for rotational movement. The support frame structures can be sandwiched with a top cover to provide full off-planar locking for them (if the system can be flipped over). The sliding surfaces can be covered with low friction and anti-stick coatings (e.g. FDTS coating) to avoid high friction forces and stiction. Alternatively, the systems can also be implemented using a hybrid array of support structures that are processed separately so that they have no stiction and low friction between contact surfaces.

Alternatively, the system can be allowed to translate freely in multiple directions to achieve a specified degree of movement in out-of-planar and planar directions, torque movements, etc. based on the angle employed by design, actuation scheme, loading, or a combination thereof can be.

19 19 illustrates a MEMS actuator 1900 according to an embodiment in different actuation states. The MEMS actuator 1900 has a functional element 1901, for example a probe micropositioner or a probe tip. The MEMS actuator 1900 has a series arrangement of a plurality of actuator units 302, which have a first actuator unit 302a and a second actuator unit 302b. The first actuator unit 302a is configured to contract and/or expand along a first axial direction, for example the x-direction. The second actuator unit 302b is configured to expand and/or contract along a second direction, for example the y-direction. The first direction is different from the second direction.

20 11 illustrates an alternative implementation of the MEMS actuator 1900 according to one embodiment. In this exemplary embodiment, the functional element 1901 is a micro gripper. Furthermore, this embodiment includes a third actuator unit 302c configured to expand and/or contract in a third axial direction, which is different from the first and second axial directions.

19 Figure 12 illustrates an example of an expanding configuration with active individual actuation control in the ±x and ±y directions for probe micropositioning. 20 Figure 11 illustrates an example of expanding configurations with active individual actuation control for trajectory motion for a microgripper. These can be examples of cases where translation at a specific angle or path is required. For example, the units can be controlled individually or in areas positioned at an angle to form the required angle/trajectory based on the angles and positions that can be set using the shape (L-shape, T -shape, C-shape, arc shape, etc.) and dimensions (specifically length and width) of the meeting central connectors is varied.

As in 19 and 20 As illustrated in an exemplary manner, example embodiments provide for different trajectories (circular paths, differently shaped paths, etc.) based on expanding configurations, contracting configurations, or combinations of the two.

21 illustrates a MEMS actuator 2100 according to an embodiment. The MEMS actuator 2100 has a first parallel arrangement 2101 for actuator units 302 arranged to expand and/or contract along the X-direction. The parallel assembly 2101 is connected to a first load stage frame 2103 which is arranged to move along the X-direction upon actuation of the first parallel assembly 2101 . A second parallel arrangement 2102 of actuator units 302 is connected to the first load step frame 2103 . The parallel assembly 2102 is connected to the load stage frame 2103 to move together with the load stage frame 2103 along the X-direction upon actuation of the first parallel assembly 2101 . The second parallel arrangement 2102 is configured to expand and/or contract along a second direction, for example the Y-direction. A second load stage frame 2104 is connected to the second parallel assembly 2102 to move along the Y-direction upon actuation of the parallel assembly 2102 . The second load stage frame 2104 serves to move along the X direction with the first load stage frame 2103 upon actuation of the first parallel arrangement 2101 .

22 illustrates an alternative example of the MEMS actuator 2100 that additionally includes sliding surfaces 2105 to facilitate smooth movement of the first load stage 2103 and the second load stage 2104. Thus, the second load stage 2104 is moveable in the x and y directions with respect to a MEMS substrate. The sliding surfaces provide a reduced contact area (design based and/or manufacturing based).

The use of highly conformal anti-stiction and low-friction coatings (e.g. FDTS over ALD) as well as a hybrid design with coatings can be employed.

Accordingly, some embodiments include a stage 2104 mounted to be moveable in a first direction (x) and in a second direction (y) of a plane of the MEMS actuator 2100 . The MEMS actuator 2100 has at least first and second actuator units 302, each configured to, when actuated, a distance between the first connector (2111) of a first actuator cell and the second connector (2112) of the last actuator cell along a To change the axial direction of the corresponding actuator unit. The first and second actuator units are arranged such that actuation of the first actuator unit results in a change in position of the step 2104 along the first direction and actuation of the second actuator unit results in a change in position of the step 2104 along the second direction.

For example, expanding configurations can be used to produce highly rectilinear 2-dimensional XY motion based on different arrangements (with or without support structures), as in 21 , 22 is shown. The electrical connections to the inner expanding configurations may, for example, be via the outer step expanding configuration (in the configurations in 21 , 22 used), via dedicated soft springs, wireless power transmission, etc. The same systems, for example based on selective actuation of actuator areas, can be used to perform planar rotation (or off-planar rotation, e.g. sagging based on unit load and/or position) as well as along the highly rectilinear XY - create movement.

23a 12 illustrates another example of the MEMS actuator 2100 according to an embodiment. According to this exemplary embodiment, the MEMS actuator 2100 has a third parallel arrangement 2107 of actuator units 2302a. Furthermore, the first parallel arrangement 2101 is a parallel arrangement of actuator units 3202b. Actuator units 2302a are configured to expand when actuated, whereas actuator units 2302b are configured to contract when actuated. The first parallel arrangement 2101 and the third parallel arrangement 2107 are configured to contract and/or expand along the X-direction. Furthermore, the MEMS actuator 2100 has a fourth parallel arrangement of actuator elements 2108 configured to expand and/or contract along the Y-direction. The fourth parallel arrangement 2108 has one or more actuator units 2302a, while the second parallel arrangement 2102 has one or more actuator units 2302b. Parallel assembly 2102 and parallel assembly 2108 are configured to move second load stage 2104 along the Y-direction relative to first load stage 2103 . The parallel assemblies 2101, 2107 are configured to move the second load stage 2104 along the X-direction with respect to a rigid part of the MEMS actuator. Optionally, the MEMS actuator 2100 includes capacitive displacement sensing mechanisms 2107 to measure a position of the first load level 2103 and the second load level 2104 . Electrical connection springs 2109 provide an electrical connection to the second load stage 2104, for example for actuating the assembly 2102, 2108. The MEMS actuator 2100 can optionally have stop structures 2165, which can be configured to move the first load stage 2103 over a predetermined position to prevent. As in 23a is shown, the parallel arrangements of actuator units 2101, 2102, 2107, 2108 can each have a single actuator unit or, alternatively, a plurality of actuator units, as in FIG 22 is shown.

In other words, examples have capacitive sensing based on dedicated structures (associated with a stage) with mechanical stops to ensure there is no contact.

23b shows a more detailed illustration of the example of the in 23a MEMS actuator 2100 shown. For example, MEMS actuator 2100 may include guides 2367 (or sidewalls) to guide movement of the first load stage and/or the second load stage. For example, the bars of the actuator units 2302a, 2302b can have areas that each have a parallel arrangement of actuator units 2301.

24 2401 illustrates a parallel arrangement 2401 of actuator elements 140 according to an exemplary embodiment which can be implemented in the actuator units 2302a, 2302b as an example of the area 2301.

In other words, synchronized expanding and contracting configurations can be used based on different configurations (with or without support structures), such as e.g. Am 23a , 23b is shown to generate 2D motion as well. The electrical connections to the inner expanding configurations can be, for example, via the outer step expanding configuration, via dedicated soft springs (which are used in the configurations in 23a can be used), wireless power transmission, etc. can be provided. The same systems, e.g. based on selective actuation of unit areas, can be used to also planar rotation (or off-planar rotation, e.g. sagging based on unit load and/or position) along with the in high Grade to generate rectilinear XY motion. In an exemplary case, a capacitive position sensing mechanism based on dedicated structures such as e.g. B. comb fingers (as in 16 shown), which are directly linked to the load level (inside and/or outside), for reliable control imple be mentioned. Such dedicated sensing structures can easily be designed to have a linear change in capacitance with change in position. Also, based on a design of sensing structures and their position in the system, a differential capacitance sensing mechanism can be fabricated that can be used to more reliably determine not only linear translation, but also rotation angle, tilt, etc. This simplifies the control system circuitry crucial, which also improves the reliability of the detection system enormously.

The support structures such as sliding surfaces below and/or above (with the help of a top cover to lock an entire load stage between two surfaces), mechanical stops (to block undesired translation in one direction after a certain distance when translation into a other direction takes place), position locking mechanisms, etc., can optionally always be used or removed depending on the requirement (e.g. high-load structures). A typical example when such dedicated structures may be required is when a large system with an area equal to or larger than the 2D micropositioning system itself, e.g. B. a CCD image sensor chip to be moved using the micropositioning system. For example, the sensor chip can be placed and glued onto the load stage at a certain height using a fine placer while the entire micropositioning system remains hidden underneath, saving a tremendous amount of planar chip area. In those cases where large loads must be carried and translated by the micropositioning system, the support structures can limit the unwanted in-planar and out-of-planar movements, both during positioning and position maintenance. The sliding surfaces can be coated with low friction and non-stick coatings (e.g. FDTS coating) to avoid high friction forces and stiction. Alternatively, these systems can be implemented using a hybrid build of support structures that are processed separately so that they have no stiction and lower friction between contact surfaces.

Thus, as described in relation to the previous figures, angular/rotational movement (planar and/or extra-planar) of a stage can be accommodated by using concepts explained herein for expanding configurations (some in 6-9 and 16 until 20 cases shown) are provided which are applicable to contracting configurations in a complementary manner. For example, the described MEMS actuators can be implemented using contracting actuator cells and/or expanding actuator cells. For example, if a left side is extended by NA units (similar to in 4 shown), then to produce the same angular movement on both sides of the load step, the left side of the linked PA units must contract by the same amount and in the same way. Additionally, positions of NA and PA units may be misaligned (e.g., instead of being centered, they may be mounted at opposite corners of the load stage) to torque and rotate motion via a difference in contraction levels - and extension movements and the corresponding levels of force applied to the stage (can be achieved, for example, by applying different actuation voltages to NA and PA units/regions, different numbers of NA and PA units, different length of unit regions , different number of stacked bars in each unit, etc.).

25 illustrates a MEMS actuator 2500 according to an embodiment. The MEMS actuator 2500 has a first actuator cell 2510a and a second actuator cell 2510b. The first actuator cell 2510a has a first connector 2511a and a second connector 2512a. A mechanical connection between the first connector 2511a and the second connector 2512a comprises a connector unit 2521a. The connector unit 2521a has a beam 2531a, which has a series arrangement 2541a of a plurality of actuator elements 2540a. The actuator elements 2540a of the first actuator cell 2510a are configured, upon actuation, to decrease a flexure of the beam 2531a of the first actuator cell 2510a, for example to decrease a distance between the first and second links 2511a, 2512a. The second actuator cell 2510b has a first connector 2511b and a second connector 2512b. A mechanical connection between the first connector 2511b and the second connector 2512b comprises a connector unit 2521b comprising a beam 2531b. The bar 2531b has a series arrangement 2541b of a plurality of actuator elements 2540b. The actuator elements 2540b of the second actuator cell 2510b are configured to, upon actuation, increase a flexure of the beam 2531b of the second actuator cell 2510b, for example to increase a distance between the first link 2511b and the second link 2512b. For example, the first Actuator cell 2510a configured to contract when actuated. For example, the second actuator cell 2510b is configured to expand upon actuation.

The actuator cell 2510a, 2510b may optionally correspond to any of the actuator cell 110 configurations described above and the MEMS actuator 2500 may optionally correspond to any of the MEMS actuator 100 configurations. All regarding 1-24 Accordingly, the features, concepts and functionalities explained can optionally be combined in the MEMS actuator 2500 and/or the actuator cells 2510a, 2510b or can be implemented in the same.

26 illustrates an example 2600 according to one embodiment. The method 2600 has a step 2601 of supplying a control signal to actuator elements of one of the MEMS actuators described above.

Although some aspects have been described as features related to a device, it is clear that such a description can also be seen as a description of corresponding features of a method. Although some aspects have been described as features related to a method, it is clear that such a description can also be seen as a description of corresponding features related to the functionality of a device.

In the foregoing Detailed Description, it can be seen that various features are grouped into examples in order to streamline the disclosure. This disclosure method should not be construed to reflect any intention that the claimed examples require more features than are expressly recited in each claim. Rather, as reflected by the following claims, subject matter may lie in less than all features of a single disclosed example. Thus the following claims are hereby incorporated into the Detailed Description, where each claim may stand on its own as a separate example. While each claim may stand on its own as a separate example, it should be noted that while a dependent claim in the claims may refer to a specific combination with one or more other claims, other examples also include a combination of the dependent claim and the subject-matter of any other dependent claim or a combination of each feature with other dependent or independent claims. Such combinations are suggested herein unless it is indicated that a specific combination is not intended. Furthermore, it is intended to also include features of a claim in any other independent claim, even if that claim is not directly made dependent on the independent claim.

The embodiments described above are merely illustrative of the principles of the present disclosure. It is apparent that modifications and variations to the arrangements and details described herein will become apparent to those skilled in the art. It is therefore intended that the same be limited only by the scope of the present claims and not by the specific details presented through the description and explanation of the exemplary embodiments.

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Claims (36)

MEMS actuator (100, 300, 500, 1300, 1600, 1700, 1900, 2100) that has the following characteristics: at least one actuator cell (110), the actuator cell having a first connecting piece (111) and a second connecting piece (112), a first connector unit (121) and a second connector unit (222), each of which establishes a mechanical connection between the first connector and the second connector (112), said first connector unit comprising a first beam (131) and a second beam (132) connected in series with said first beam (131) to provide a meander shape, at least said first beam (131) having a series arrangement ( 141) a plurality of actuator elements (140, 343, 344, 543, 544, 1171, 1181, 1191, 1440, 1450, 1460, 1540, 1550, 1560) configured to cause bending of the first beam ( 131) to change, wherein the first and second connectors (111, 112) and the first and second beams (131, 132) are arranged planarly with respect to a MEMS substrate, and wherein actuation of the actuator elements of the first beam (131) involves a change in a results in planar bending of the first beam (131), wherein the actuator elements of the first connector unit (121) are addressable independently of actuator elements of the second connector unit (222). MEMS actuator according claim 1 wherein the second connector unit is arranged symmetrically to the first connector unit with respect to the first and second connectors (111, 112). MEMS actuator according claim 1 or 2, wherein the array (141) of actuator elements of the first connector unit (121) and an array (142) of actuator elements (140) of the second connector unit (222) are configured for movement of the first and/or the second connector ( 111, 112), the movement comprising: axial movement of the second link (112) with respect to the first link (111) along an axial direction (x), off-axis movement of the first and/or second link (111, 112) in a direction different from the axial direction, a planar rotation of the first and/or the second connector (111, 112) with respect to a MEMS substrate. MEMS actuator according to any one of the preceding claims, wherein the first beam (131) and the second beam (132) are arranged such that upon actuation of the actuator elements a position and / or an orientation of the second connector (112) with respect to the first Connector (111) is moved. The MEMS actuator of any preceding claim, wherein a first end of the first beam (131) is connected to a first end of the second beam (132), the second end of the first beam (131) being connected to one of the first and second connectors (111, 112) and the second end of the second beam (132) is connected to the other of the first and second links (111, 112), and the first ends of the first beam (131) and the second beam ( 132) are positioned outside of a connecting line between the first and second connectors (111, 112) to implement the meander shape. MEMS actuator according claim 5 , wherein the first beam (131) and the second beam (132) are arranged such that actuation of the actuator elements results in a change in a distance between the respective second ends of the first beam (131) and the second beam (132). MEMS actuator according claim 5 or claim 6 wherein the first ends of the first and second beams (131, 132) are movable in at least one or more planar directions. MEMS actuator according to one of the preceding claims, wherein at least a portion of the first beam (131) is bent in a first bending direction when it is in an unactuated state, and wherein the portion of the first beam (131) is bent in a second bending direction , which is opposite to the first bending direction when in a predetermined actuated state. MEMS actuator according to one of the preceding claims, wherein the series arrangement of actuator elements of the first beam (131) is a first series arrangement (141), and wherein the second beam (132) comprises a second series arrangement (142) of a plurality of actuator elements (140). configured to change a deflection of the second beam (132) when actuated. MEMS actuator according to any one of the preceding claims, wherein the array of actuator elements comprises at least a first region of actuator elements and a second region of actuator elements, wherein the first region is configured for bending in a first bending direction, and wherein the second region is configured for bending configured in a second bending direction is opposite to the first bending direction. MEMS actuator according claim 10 , wherein the second beam (132) has at least a first area of actuator elements, which is arranged opposite to the first area of actuator elements of the first beam (131), and a second area of actuator elements, which is opposite to the second area of actuator elements of the first beam (131), wherein a bending direction for which the actuator elements of the first area of the second beam (132) are configured is opposite to the bending direction for which the actuator elements of the first area of the first beam (131) are configured, and wherein a bending direction for which the actuator elements of the second region of the second beam (132) are configured is opposite to the bending direction for which the actuator elements of the second region of the first beam (131) are configured. MEMS actuator according to one of the preceding claims, wherein the actuator elements of the first beam (131) have a first actuator element and a second actuator element which is independently addressable from the first actuator element. MEMS actuator according to one of the preceding claims, wherein at least the first beam (131) comprises a parallel arrangement of a plurality of series arrangements of actuator elements. MEMS actuator according to one of the preceding claims, wherein each of the actuator elements (140, 343, 344, 543, 544, 1171, 1191) has a first surface (1172, 1192) and a second surface (1176, 1196) opposite to the arranged on the first surface (1172, 1192), a first end (1173, 1193) of the first surface (1172, 1192) being opposite a first end (1177, 1197) of the second surface (1176, 1196), a second end (1174, 1194) of the first surface (1172, 1192) located opposite a second end (1178, 1198) of the second surface (1176, 1196), and wherein the actuator element is configured to increase an amount of a distance between the first end and the second end of the first surface (1172, 1192) relative to an amount of a distance between the first end and the second end of the second surface (1176, 1196). change, and wherein within at least a portion of the array of actuator elements, the actuator elements are arranged such that the first ends of the first and second surfaces of one of the actuator elements are opposite to the first ends of the first and second surfaces or opposite to the second ends of the first and second Surface of the subsequent actuator element of an actuator element are arranged. MEMS actuator according to one of the preceding claims, wherein the first beam (131) and/or the second beam (132) comprises one or more inactive elements (1179, 1179', 1199). MEMS actuator according to one of the preceding claims, wherein the actuator elements have electrostatic actuators, thermal actuators and/or piezoelectric actuators. MEMS actuator according to one of the preceding claims, wherein the actuator cell is a first actuator cell (1310a), and wherein the MEMS actuator further comprises a second actuator cell (1310b), wherein the actuator elements of the first actuator cell (1310a) are configured to, upon actuation decrease deflection of the first beam (1331a) of the first actuator cell (1310a), and wherein the actuator elements of the second actuator cell (1310b) are configured to increase deflection of the first beam (1331b) of the second actuator cell (1310b) when actuated . MEMS actuator according Claim 17 wherein a length of a path along the first beam (131) of the first actuator cell in an unactuated state of the first actuator cell is substantially equal to a length of a path along the first beam (131) of the second actuator cell in an actuated state of the second actuator cell. MEMS actuator according Claim 17 or 18 , wherein the actuator elements of the first actuator cell are the same as the actuator elements of the second actuator cell. MEMS actuator according to one of claims 17 until 19 , wherein the actuator elements of the first and second actuator cells are configured to be actuated in response to a control signal, and wherein the MEMS actuator is configured to supply the actuator elements of the first actuator cell with the same control signal as the actuator elements of the second actuator cell. MEMS actuator according to one of claims 17 until 20 , further comprising a movable structure (1361), wherein a first boundary of the movable structure is connected to the second connector (112a) of the first actuator cell (1310a) at a first connection point, and wherein a second boundary of the movable structure (1361), opposite the first boundary with the second connector (112b) of the second actuator cell (1310b), wherein an axial direction of the first actuator cell, along which the first and second connecting pieces (111, 112) are arranged, is antiparallel to an axial direction, along which the first and second connecting pieces (111, 112) of the second actuator cell are arranged. MEMS actuator according to one of claims 17 until 21 , wherein the first actuator cell (1310a) is part of a first actuator unit (302a), and wherein the second actuator cell (1310b) is part of a second actuator unit (302b), and wherein each of the first and second actuator units (302, 302a, 302b) has a row of actuator cells arranged along an axial direction (x) of the actuator unit, wherein the first connection piece (111a, 1311a) of the first actuator cell of the row of actuator cells is connected to a base piece (309, 1309) of the MEMS actuator, wherein the second connector (112a) of one of two subsequent actuator cells (110a, 111b) is connected to the first connector (111b) of the other of the two subsequent actuator cells. MEMS actuator according to one of the preceding claims, which has at least one actuator unit (302) which has a row of actuator cells (110a-c) which are arranged along an axial direction of the actuator unit, the first connecting piece (111a) of the first actuator cell being the row of actuator cells is connected to a base piece (309) of the MEMS actuator, the second connector (112a) of one of two subsequent actuator cells (110a, 110b) being connected to the first connector (111b) of the other of the two subsequent actuator cells. MEMS actuator according Claim 23 , wherein a first actuator cell of the row of actuator cells can be addressed independently of a second actuator cell of the row of actuator cells. MEMS actuator according Claim 23 or 24 wherein a first actuator cell of the actuator unit is configured to provide movement of its second link relative to its first link (111) along a line of connection between its first and second links (112) in response to a predetermined actuation, and wherein a second actuator cell the actuator unit is configured to provide a change in orientation between its second link (112) and its first link (111) in response to a predetermined actuation. MEMS actuator according to one of claims 17 until 25 Further comprising a pivot structure connected to the second link (112) of the last actuator cell of the at least one actuator unit at a point spaced from a center of rotation of the pivot structure. MEMS actuator (2100) according to one of Claims 23 until 25 , further comprising a stage (2104) mounted to be movable in a first direction (x) and in a second direction (y) of a plane of the MEMS actuator, the MEMS actuator having at least first and second actuator units (302), each configured to change a distance between the first connector (2111) of a first actuator cell and the second connector (2112) of a last actuator cell along an axial direction of the respective actuator unit upon actuation, the first and second actuator unit are configured such that an actuation of the first actuator unit results in a change in position of the step (2104) along the first direction and an actuation of the second actuator unit results in a change in position of the step (2104) along the second direction. MEMS actuator according to one of Claims 23 until 25 , which also has a functional element, and wherein the at least one actuator unit is part of a series arrangement of a plurality of actuator units, which further has a second actuator unit, wherein the series arrangement of actuator units is connected to the functional element, the axial direction of the first actuator unit being different from the axial direction the second actuator unit is different. MEMS actuator (2500, 1300, 2100) that has the following features: at least one first actuator cell (2510a) and one second actuator cell (2510b), each having a first connector (2511a, 2511b) and a second connector (2512a, 2512b), wherein a mechanical connection between the first connector and the second connector comprises at least one connector unit (2521a, 2521b), wherein the connector unit has at least one bar (2531a, 2531b), wherein the bar has a series arrangement (2541a, 2541b) of a plurality of actuator elements (2540a, 2540b), wherein the actuator elements (2540a) of the first actuator cell are configured to decrease deflection of the beam (2531a) of the first actuator cell (2510a) when actuated, and wherein the actuator elements (2540b) of the second actuator cell (2510b) are configured to, when actuated to increase the bending of the beam (2531b) of the second actuator cell (2510b). MEMS actuator according claim 29 , wherein the beam (2531a, 2531b) is a first beam (131), and wherein the connector unit further comprises a second beam (132) connected in series with the first beam (131) to provide a meander shape, wherein the second beam (132) has a series arrangement of a plurality of actuator elements, wherein the actuator elements of the second beam (132) of the first actuator cell are configured to decrease the deflection of the second beam (132) of the first actuator cell, wherein the actuator elements of the second Beam (132) of the second actuator cell are configured to increase the deflection of the second beam of the second actuator cell when actuated. MEMS actuator according claim 29 or 30 , wherein a length of a path along beam of the first actuator cell in an unactuated state of the first actuator cell is substantially equal to a length of a path along the beam of the second actuator cell in an actuated state of the second actuator cell. MEMS actuator according to one of claims 29 until 31 , wherein the actuator elements of the first actuator cell are the same as the actuator elements of the second actuator cell. MEMS actuator according to one of claims 29 until 32 , wherein the actuator elements of the first and second actuator cells are configured to be actuated in response to a control signal, and wherein the MEMS actuator is configured to supply the actuator elements of the first actuator cell with the same control signal as the actuator elements of the second actuator cell. MEMS actuator according to one of claims 29 until 33 , further comprising a movable structure, wherein a first boundary of the movable structure is connected to the second connector (112) of the first actuator cell at the first connection point, and wherein a second boundary of the movable structure, opposite the first boundary, is connected to the second Connecting piece (112) of the second actuator cell is connected, wherein an axial direction of the first actuator cell, along which the first and the second connecting piece (111, 112) are arranged, is antiparallel to an axial direction, along which the first and the second connecting piece (111, 112) of the second actuator cell are arranged. MEMS actuator according to one of claims 29 until 34 , wherein the first actuator cell is part of a first actuator unit, and wherein the second actuator cell is part of a second actuator unit, and wherein each of the first and second actuator units has a row of actuator cells arranged along an axial direction of the actuator unit, the first connector (111) of the first actuator cell of the series of actuator cells is connected to a base piece of the MEMS actuator, the second connector (112) of one of two subsequent actuator cells being connected to the first connector (111) of the other of the two subsequent actuator cells. Method (2600) for controlling a MEMS actuator according to one of the preceding claims, which comprises supplying (2601) a control signal to the actuator elements.

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