DE102020204968A1 - METHOD AND DEVICE FOR REVIEWING REPORT CONTENTS OF SEVERAL REPORT DOCUMENTS - Google Patents

Abstract

A method is proposed for checking the report content of a plurality of report documents (206) that are generated in the course of a manufacturing step of a technical system, in particular a lithography system (100A, 100B). For each of the report documents (206), the method comprises: selecting (S1) a checking scheme (205) which hierarchically specifies properties to be checked in the report content of the report document (206) from a plurality of checking schemes; converting (S2) the report document (206 ) into an XML document (207) which reproduces at least part of the report content of the report document (206) in a structured manner as structured content; and comparing (S3) the structured content of the XML document (207) with the properties to be checked of the selected checking scheme (205).

Description

The present invention relates to checking report contents of a plurality of report documents that were generated in the course of a manufacturing step of a technical system, in particular a lithography system.

Microlithography is used to manufacture microstructured components such as integrated circuits. The microlithography process is carried out with a lithography system which has an illumination system and a projection system. The image of a mask (reticle) illuminated by means of the illumination system is projected by means of the projection system onto a substrate, for example a silicon wafer, coated with a light-sensitive layer (photoresist) and arranged in the image plane of the projection system, in order to create the mask structure on the light-sensitive coating of the substrate transferred to.

Driven by the striving for ever smaller structures in the production of integrated circuits, EUV lithography systems are currently being developed which use light with a wavelength in the range from 0.1 nm to 30 nm, in particular 13.5 nm. In such EUV lithography systems, because of the high absorption of most materials of light of this wavelength, reflective optics, that is to say mirrors, must be used instead of - as before - refractive optics, that is to say lenses.

The manufacture of some modules of the lithography system is very complex in order to achieve the desired resolution and image quality. Such complex modules include, for example, the objective (also referred to as a projection objective or as a projection system) of a lithography system, which comprises many interacting components and is adjusted in a laborious manner in a manufacturing process. In order to be able to identify and rectify problems early on in lens manufacture, tests can be carried out on the lens during the manufacturing process. The tests produce report documents in different formats for each lens, which are checked manually for each lens. In some cases, however, this verification is prone to error.

In this regard, reference is made to the documents EP 1 801 708 A2 and EP 1 837 779 A1 , the content of which, in particular their general definitions and terms, is hereby incorporated into this application.

Against this background, it is an object of the present invention to provide an improved checking of the report content of a report document.

• Auswählen eines Prüfschemas, das in dem Berichtinhalt des Berichtdokuments zu prüfende Eigenschaften hierarchisch angibt, aus einer Vielzahl von Prüfschemas;
• Umwandeln des Berichtdokuments in ein XML-Dokument, welches zumindest einen Teil des Berichtinhalts des Berichtdokuments als strukturierten Inhalt strukturiert wiedergibt; und
• Vergleichen des strukturierten Inhalts des XML-Dokuments mit den zu prüfenden Eigenschaften des ausgewählten Prüfschemas.

According to a first aspect, a method, in particular an automated method, is proposed for checking report contents of a plurality of report documents that are generated as part of a manufacturing step of a technical system, in particular a lithography system. For each of the report documents, the procedure includes:

• Selecting a check scheme which hierarchically specifies properties to be checked in the report content of the report document from a plurality of check schemes;
• Converting the report document into an XML document which reproduces at least part of the report content of the report document in a structured manner as structured content; and
• Compare the structured content of the XML document with the properties to be checked of the selected checking scheme.

By converting the report document into an XML document, the report content of the report document can be reproduced in a structured manner regardless of the original format of the report document. With the help of the standardized XML format, checking the report content can be simplified. In particular, the structured content of the XML document can be compared directly with the hierarchically specified properties of the checking scheme to be checked. The report content can in particular be checked automatically. This means that there is no need for a manual check, for example.

The method described is described in connection with lithography systems, but it can also be used in the context of the production of any technical systems. In the following, the term “lithography system” can also be replaced by any other technical system. The described checking of the report content is particularly advantageous if several manufactured and tested systems, in particular lithography systems (or the manufactured and tested modules of several systems and / or lithography systems) do not all have exactly the same properties, but are different from one another. The automated method described can take such differences into account.

In particular, the method described offers a generic approach for checking report documents that differ from one another in terms of content. In particular, each report document comprises report content, with report content from different report documents can be different. These differences can affect both the structure of the report content and the information it contains.

The manufacturing step includes, for example, both manufacturing steps and the adjustment and / or testing of the lithography system. The report document is in particular a document that was generated in a test process (also “test process”) when the lithography system was manufactured. The report document is generated, for example, when testing an objective which is manufactured as part of the manufacture of the lithography system and is an example of a module. The report document can be generated using a test device for the lithography system and / or for a module of the lithography system. The report document can be generated in any format, preferably text format. The report document can be generated, for example, as a PDF, text, table and / or image document. The report content corresponds in particular to the information stored in the report document, which includes the test results.

The checking scheme can hierarchically specify properties to be checked as part of the checking of the report content. The test scheme can in particular be assigned to the lithography system module tested (in particular the objective). The test scheme can be generated specifically for a lithography system module (in particular for the objective). This is particularly the case when the respective lithography system modules have differences from one another, which have to be taken into account when analyzing the report content.

Different test schemes can be provided for testing report documents from different lithography system modules (in particular different lenses). When providing new test schemes, a large part of the information from existing test schemes can be reused. As a result, the effort required to provide the test scheme can be reduced. Furthermore, flexibility can be increased because report documents of different manufactured products can be checked. The test scheme can be selected depending on a file name of the report document and / or optionally depending on an absolute or relative file path for testing this report document. The multiplicity of test schemes can be stored in a storage unit or distributed in a network.

The test scheme can be in XML format. In particular, all requirements for the report documents with regard to syntax and semantics are formulated by the check scheme (for example structure of a report document, valid values at certain positions in the report document, etc.).

The content of the test scheme is particularly flexible in order to be able to cover changes, extensions and / or updates of the report document. Regular expressions from the test scheme language can also be used for this purpose. For example, Relax NG or XSD (XML Schema Definition) can be used as the test schema language. Different test scheme languages are described, for example, in the paper “Unification of Template Expansion and XML Validation” (R. Haberland, April 7, 2008).

The abbreviation "XML" describes Extensible Markup Language (in German: Extensible Markup Language). XML is a markup language for displaying hierarchically structured data in the format of a text file. The data contained in an XML document can be structured logically. As a result, XML documents can have a high level of readability and can be processed autonomously. A converter such as a LibreOffice converter can be used to convert the report document to an XML document.

In particular, there is a structured XML document and a hierarchically structured test scheme. The contents of the two documents can be compared on a computer basis. This corresponds in particular to a comparison of the structured content of the XML document (i.e. the report content) and the properties of the test scheme to be checked. In the case of comparisons, individual entries in the test scheme can be compared with individual entries in the XML document. In particular, the structure of the checking scheme is compared with the structure of the XML document. It can also be checked whether the XML document has patterns that match the requirements of the checking scheme. It can also be checked whether numbers in the XML document are in areas that are specified by the checking scheme.

The individual procedural steps described (selecting a checking scheme, converting the report document into XML and comparing the structured content with the properties to be checked) can be carried out one after the other for the individual report documents.

The method steps described can be carried out with the aid of a computer.

The procedure described can also be used in other areas in which test reports are checked. Possible areas of application include all industrial Manufacturing processes, in particular those in which manufactured objects are not all identical, but have differences, and / or those in which testing is quite complex and makes manual testing more difficult.

• Ausgeben einer Fehlermeldung, die einen fehlerhalfen Berichtinhalt angibt, falls beim Vergleichen des strukturierten Inhalts des XML-Dokuments mit den zu prüfenden Eigenschaften des Prüfschemas Abweichungen zwischen dem strukturierten Inhalt und den zu prüfenden Eigenschaften erkannt werden.

According to one embodiment, the method further comprises:

• Output of an error message indicating that the report content was incorrect if deviations between the structured content and the properties to be checked are detected when comparing the structured content of the XML document with the properties of the test schema to be checked.

Deviations can be recognized, for example, if the structured content and the properties to be checked are not 100% identical or if more than 10% of the structured content does not match the properties to be checked. It is also possible to identify discrepancies in individual compared entries in the XML document and the checking scheme. Alternatively, deviations can be recognized if the structured content and the properties to be checked do not match according to a predetermined pattern.

The error message can include a visual notification and / or an audio notification. The error message can also indicate which discrepancies were detected in which data. The error message can indicate where the error is (especially in which line of the report document). This enables a user to recognize and correct the error in the module produced. It is also conceivable to additionally or alternatively save the error message.

It is possible for the review of a report document to stop as soon as an error is detected in the comparison with the test scheme. Alternatively, the check can also be continued and at the end of the entire check, all detected errors can be indicated. It is also conceivable to specify a maximum number of permitted errors and to let the test run until this maximum number is reached.

According to a further embodiment, at least two of the report documents have different formats. The format of a report document particularly refers to a file format, for example Word, PDF, HTML, XML or the like. In particular, the report documents are text files or binary files.

Although the different report documents originally have different formats, the information (report content) from the respective report documents can each be reproduced in an XML document. In particular, report contents from the respective report documents can be transferred uniformly into XML format. In this way, for example, checking the report content can be simplified and / or automated.

• Auswählen eines Transformationsskripts für das umzuwandelnde Berichtdokument aus einer Vielzahl von Transformationsskripten, wobei das Umwandeln des Berichtdokuments in ein XML-Dokument ein Extrahieren des strukturierten Inhalts anhand des ausgewählten Transformationsskripts umfasst, wobei das ausgewählte Transformationsskript insbesondere ein Transformationsprimer ist.

According to a further embodiment, the method further comprises:

• Selecting a transformation script for the report document to be converted from a plurality of transformation scripts, the conversion of the report document into an XML document comprising an extraction of the structured content on the basis of the selected transformation script, the selected transformation script being in particular a transformation primer.

If a converter without a transformation script is used to convert a report document to an XML document, the converter may output a generic XML document that is not suitable for comparison with the properties of the test schema. In particular, the generic XML document contains a large amount of information that is not required for checking the report content. In order to filter out only the relevant information, a transformation script (or several transformation scripts one after the other) can be used in the conversion step. With the help of the transformation script, the XML document is generated in particular in such a way that it reproduces the structured content with at least parts of the report content. In particular, the transformation script is used to generate a predominantly similar output XML format for different report documents so that these can be checked more easily and the associated schemas can be defined more easily. The (first) transformation script can also be referred to as a transformation primer. The transformation script can be selected depending on a file name of the report document for testing this report document.

According to a further embodiment, the selection of the test scheme and / or the selection of the transformation script takes place on the basis of a pre-stored mapping file, the mapping file storing an assignment (in particular an assignment list) of the report documents and the test schemes and / or the transformation primer.

The mapping file can, for example, specify which checking scheme is to be used for a specific report document. In some embodiments, the mapping file can select the verification scheme based on a serial number and a report document. In addition, in cases where a transformation primer is used, the mapping file can also select this depending on the report document.

According to a further embodiment, the mapping file assigns several of the report documents to the same checking scheme and / or the same transformation primer. The mapping file can also assign exactly one test scheme and / or one transformation primer to a report document.

Several report documents can advantageously be tested with the same test setting (test scheme and / or transformation primer). Different test settings can be selected for other report documents.

According to a further embodiment, the mapping file selects the checking scheme and / or the transformation script of the report document as a function of a file name of the report document. In particular, the mapping file selects the test scheme and / or the transformation script of the report document as a function of the first suitable file name including path information.

According to a further embodiment, entries stored in the mapping file are stored as a linear list with a flat structure.

Such a structure of the mapping file allows, for example, individual entries in the mapping file to be added and / or deleted without having to restructure and / or change the other entries in the mapping file. This makes it easier to update the mapping file, for example when adding products to be tested. The list-like structure of the mapping file can also increase the traceability of the mapping file for a user. The entries in the mapping file are checked one after the other (auto mode) or checked individually (single check mode).

According to a further embodiment, the test schemes are in the Relax NG programming language. The use of another specific schema language can be enforced for one or more report documents in the mapping file.

According to a further embodiment, a (universal) LibreOffice converter is used to convert the (practically any) report document into an XML document.

Using a LibreOffice converter is particularly beneficial because it is a widely used converter. In particular, LibreOffice converters from any LibreOffice version can be used.

According to a further embodiment, the XML document structures the structured content using a markup language.

According to a second aspect, a computer program product is proposed which initiates the fully automated implementation of the method according to the first aspect or according to an embodiment of the first aspect on a program-controlled device.

A computer program product, such as a computer program means, for example, can be provided or delivered as a storage medium such as a memory card, USB stick, CD-ROM, DVD, or also in the form of a downloadable file from a server in a network. This can take place, for example, in a wireless communication network by transmitting a corresponding file with the computer program product or the computer program means.

• eine Auswähleinheit zum Auswählen, für jedes der Berichtdokumente, eines Prüfschemas, das in dem Berichtinhalt zu prüfende Eigenschaften hierarchisch angibt, aus einer Vielzahl von Prüfschemas;
• eine Umwandlungseinheit zum Umwandeln der jeweiligen Berichtdokumente in XML-Dokumente, welche jeweils zumindest einen Teil des Berichtinhalts des zugehörigen ursprünglichen Berichtdokuments als strukturierten Inhalt strukturiert wiedergibt; und
• eine Vergleichseinheit zum Vergleichen des strukturierten Inhalts des jeweiligen XML-Dokuments mit den zu prüfenden Eigenschaften des für das zugehörige Berichtdokument ausgewählte Prüfschemas.

According to a third aspect, a device (checking device) for checking report contents of a plurality of report documents that are generated in the context of a manufacturing step of a technical system, in particular a lithography system, is proposed. The device comprises:

• a selection unit for selecting, for each of the report documents, a test scheme which hierarchically specifies properties to be checked in the report content from a plurality of test schemes;
• a conversion unit for converting the respective report documents into XML documents, each of which reproduces at least part of the report content of the associated original report document in a structured manner as structured content; and
• a comparison unit for comparing the structured content of the respective XML document with the properties to be checked of the checking scheme selected for the associated report document.

The checking device according to the third aspect is particularly suitable that To carry out the method according to the first aspect or according to an embodiment of the first aspect. The respective units (selection unit, conversion unit and comparison unit) can be part of a computer or computer program. The conversion unit can be the converter described above.

The selection unit, the conversion unit and / or the comparison unit can each be implemented in terms of hardware and / or also in terms of software. In the case of a hardware implementation, the respective unit can be designed as a device or as part of a device, for example as a computer, as a microprocessor or as a control computer. In the case of a software implementation, the respective unit can be designed as a computer program product, as a function, as a routine, as part of a program code or as an executable object.

By setting runtime parameters in a console, the selection unit can, for example, set a directory prefix for all report documents which adds as a prefix to the imported file name of the respective mapping file entries.

According to a fourth aspect, a method for producing a lithography system is provided which comprises the method for checking a report content of a report document according to the first aspect or according to an embodiment of the first aspect.

The embodiments and features described for the method for checking a report content of a report document apply accordingly to the proposed computer program product, the proposed device and the proposed method for producing a lithography system, and vice versa.

In the present case, “a” is not necessarily to be understood as restricting to exactly one element. Rather, several elements, such as two, three or more, can also be provided. Any other counting word used here is also not to be understood to mean that there is a restriction to precisely the specified number of elements. Rather, numerical deviations upwards and downwards are possible, unless otherwise stated.

Further possible implementations of the invention also include combinations, not explicitly mentioned, of features or embodiments described above or below with regard to the exemplary embodiments. The person skilled in the art will also add individual aspects as improvements or additions to the respective basic form of the invention.

• 1A zeigt eine schematische Ansicht einer Ausführungsform einer EUV-Lithographieanlage;
• 1B zeigt eine schematische Ansicht einer Ausführungsform einer DUV-Lithographieanlage;
• 2 zeigt eine Vorrichtung zum Überprüfen eines Berichtinhalts eines Berichtdokuments;
• 3 zeigt ein Verfahren zum Überprüfen eines Berichtinhalts eines Berichtdokuments gemäß einer ersten Ausführungsform;
• 4 zeigt ein Verfahren zum Überprüfen eines Berichtinhalts eines Berichtdokuments gemäß einer zweiten Ausführungsform;
• 5 zeigt ein Beispiel einer Assoziation einer Mapping-Datei; und
• 6 zeigt ein Beispiel einer Datenverarbeitung.

Further advantageous configurations and aspects of the invention are the subject matter of the subclaims and of the exemplary embodiments of the invention described below. The invention is explained in more detail below on the basis of preferred embodiments with reference to the attached figures.

• 1A shows a schematic view of an embodiment of an EUV lithography system;
• 1B shows a schematic view of an embodiment of a DUV lithography system;
• 2 Fig. 11 shows an apparatus for checking a report content of a report document;
• 3 Fig. 10 shows a method for checking a report content of a report document according to a first embodiment;
• 4th Fig. 13 shows a method for checking a report content of a report document according to a second embodiment;
• 5 shows an example of an association of a mapping file; and
• 6th shows an example of data processing.

In the figures, elements that are the same or have the same function have been given the same reference symbols, unless otherwise indicated. It should also be noted that the representations in the figures are not necessarily to scale.

1A shows a schematic view of an EUV lithography system 100A , which is a beam shaping and lighting system 102 and a projection system 104 includes. EUV stands for "extreme ultraviolet" (English: extreme ultraviolet, EUV) and describes a wavelength of work light between 0.1 nm and 30 nm. The beam shaping and lighting system 102 and the projection system 104 are each provided in a vacuum housing (not shown), each vacuum housing being evacuated with the aid of an evacuation device (not shown). The vacuum housings are surrounded by a machine room, not shown, in which drive devices are provided for mechanically moving or adjusting optical elements. Furthermore, electrical controls and the like can also be provided in this machine room.

The EUV lithography system 100A has an EUV light source 106A on. As an EUV light source 106A For example, a plasma source (or a synchrotron) can be provided, which radiation 108A in the EUV range (extreme ultraviolet range), for example in the wavelength range from 5 nm to 20 nm. In the beam shaping and lighting system 102 becomes the EUV radiation 108A bundled and the desired operating wavelength from the EUV radiation 108A filtered out. The one from the EUV light source 106A generated EUV radiation 108A has a relatively low transmissivity through air, which is why the beam guidance spaces in the beam shaping and lighting system 102 and in the projection system 104 are evacuated.

This in 1A beam shaping and lighting system shown 102 has five mirrors 110 , 112 , 114 , 116 , 118 on. After going through the beam shaping and lighting system 102 becomes the EUV radiation 108A guided onto a photomask (Engl .: reticle) 120. The photo mask 120 is also designed as a reflective optical element and can be used outside of the systems 102 , 104 be arranged. EUV radiation can also be used 108A by means of a mirror 122 on the photo mask 120 be steered. The photo mask 120 has a structure which, by means of the projection system 104 scaled down to a wafer 124 or the like is mapped.

The projection system 104 (also known as projection lens or just lens) has six mirrors M1 to M6 for imaging the photomask 120 on the wafer 124 on. Individual mirrors can be used M1 to M6 of the projection system 104 symmetrical about an optical axis 126 of the projection system 104 be arranged. It should be noted that the number of mirrors M1 to M6 the EUV lithography system 100A is not limited to the number shown. There can also be more or less mirrors M1 to M6 be provided. Furthermore are the mirrors M1 to M6 usually curved on their front side for beam shaping.

1B shows a schematic view of a DUV lithography system 100B , which is a beam shaping and lighting system 102 and a projection system 104 includes. DUV stands for "deep ultraviolet" (English: deep ultraviolet, DUV) and describes a wavelength of work light between 30 nm and 250 nm. The beam shaping and lighting system 102 and the projection system 104 can - as already with reference to 1A described - be arranged in a vacuum housing and / or surrounded by a machine room with appropriate drive devices.

The DUV lithography system 100B has a DUV light source 106B on. As a DUV light source 106B For example, an ArF excimer laser can be provided, which radiation 108B emitted in the DUV range at 193 nm, for example.

This in 1B beam shaping and lighting system shown 102 directs the DUV radiation 108B on a photo mask 120 . The photo mask 120 is designed as a transmissive optical element and can be used outside of the systems 102 , 104 be arranged. The photo mask 120 has a structure which, by means of the projection system 104 scaled down to a wafer 124 or the like is mapped.

The projection system 104 has multiple lenses 128 and / or mirror 130 for imaging the photomask 120 on the wafer 124 on. You can use individual lenses 128 and / or mirror 130 of the projection system 104 symmetrical about an optical axis 126 of the projection system 104 be arranged. It should be noted that the number of lenses 128 and mirror 130 the DUV lithography system 100B is not limited to the number shown. There can also be more or fewer lenses 128 and / or mirror 130 be provided. Furthermore are the mirrors 130 usually curved on their front side for beam shaping.

An air gap between the last lens 128 and the wafer 124 can through a liquid medium 132 be replaced, which has a refractive index> 1. The liquid medium 132 can be ultrapure water, for example. Such a structure is also referred to as immersion lithography and has an increased photolithographic resolution. The medium 132 can also be referred to as immersion liquid.

2 shows an apparatus 200 to check a report content of a report document 206 . The device shown 200 can also be used as a verification device 200 are designated. The device 200 is part of a computer and can be used to view the report content of a report document 206 that occurs during the manufacture of the projection lens 104 the lithography system 100A , 100B is generated to check. The report document 206 is used when testing properties of the (partially or fully) manufactured projection lens 104 generated. The report content includes test data.

The device shown 200 includes a selection unit 201 (Directory), a unit of conversion 202 and a comparison unit 203 , which over a line 204 are connected to each other. The function of the device 200 is related to the 3 explains which one Method for checking a report content of a report document 206 according to a first embodiment.

In one step S1 of the 3 becomes a test scheme 205 provided. The provision of the test scheme 205 takes place by a user of the device 200 using the selection unit 201 as an aid. The test scheme 205 specifies which properties of the report content should be checked. The test scheme 205 indicates, for example, that a first test property should lie between a first and a second threshold value and gives the threshold values a value. The test scheme 205 also indicates repetitions to be tested (text and / or sample) and / or whether deviations are rejected or allowed (in particular knowingly ignored). The test scheme 205 gives several such test properties as a list. The test scheme 205 is specially made for the lens to be tested 104 made because every lens made 104 has other properties.

In one step S2 of the 3 becomes the report document 206 into an XML document 207 transformed. The generated XML document 207 gives at least part of the report content of the original report document 206 structured again as structured content. The report document 206 , which is originally available in Excel format, for example, is converted using the conversion unit 202 the device 200 transformed. The conversion unit 202 uses a LibreOffice converter for this.

Optionally use the conversion unit 202 also transformation scripts to extract the relevant information (namely the report content) and an XML document 207 that does not contain any information that is useless for checking, but merely reproduces the report content in a uniform manner (for example, aligned with lines).

In one step S3 of the 3 compares the comparison unit 203 the structured content of the XML document 207 with the properties of the test scheme to be tested 205 . The individual entries of the XML document 207 with the individual properties of the test scheme 205 compared.

The 4th Fig. 10 shows a method of checking a report content of a report document 206 according to a second embodiment. The procedure of 4th is a further development of the process of 3 and can also be used with the device 200 implemented.

The procedure according to 4th also includes the steps S1 to S3 . It is also done in one step S7 that before the step S1 takes place, a generic resource check, in which it is checked whether all necessary files (check scheme, transformation scripts, etc.) exist and are valid.

Furthermore, in one step S4 of the 4th using the comparison unit 203 determines whether there are any discrepancies between the structured content of the XML document 207 and the properties of the test scheme to be tested 206 are present. There is a deviation if an entry in the structured XML document 207 does not meet the requirements of the associated property to be tested.

If in the step S4 of the 4th a deviation is recognized ("yes" in step S4 ), gives the comparison unit 203 in one step S5 an error message. This error message is a visual error message (for example a graphic text indication) which the user of the device 200 is displayed on a screen not shown. The error message indicates which discrepancy was detected and, if necessary, can also indicate what caused this error to occur. The user of the device 200 the lens may be due to the error message 104 have it corrected or sorted out. It is also possible to simply save the error message.

In the example of the 4th will be testing in step S3 carried out completely, regardless of whether errors were detected or not. In step S5 then, if any, all detected errors are indicated. Alternatively, however, it is also possible to carry out the testing (step S3 ) to cancel when a first error is detected or when the total number of errors reaches a maximum number. If in the step S4 of the 4th no deviation is recognized ("no" in step S4 ), gives the comparison unit 203 indicates that no error was found. The tested lens 104 in this case corresponds to all checked requirements and can be used in the lithography system 100A , 100B can be used and / or the manufacturing process can be continued.

There are various deviations from the procedures described in 3 and 4th conceivable. For example, it is possible to use the procedures for reviewing multiple report documents 206 to be used in parallel. For this purpose, the procedures of 3 and 4th for each report document 206 be carried out separately.

The 6th is a schematic representation of data processing that takes place as part of a data review of several report contents. This data processing can also be done with the device 200 are carried out and includes in particular the process steps of 3 and / or 4.

In the example of the 6th is a report document 206 from a multitude 206 ' of report documents 206 selected. For the selected document 206 determines the mapping file 208 a transformation script ("transformation primer") 209 as well as an associated test scheme.

The 5 represents an association of a mapping file 208 The mapping file 208 specifies how report documents 206 with test schemes 205 and transformation scripts 209 are linked. N (N≥1) report documents are linked with 1 or M (where, for example, 1 <M≤N) test schemes and a transformation script. With the based on the mapping file 208 selected transformation script 209 becomes an optimized XML document 207 generated (step S2 ), which has a better comparable representation.

With the mapping file 208 is also a test scheme 205 selected which to review the report document 206 is used. This will be done as before in connection with the step S3 described with the XML document 207 compared.

Although the present invention has been described on the basis of exemplary embodiments, it can be modified in many ways. For example, it is possible to prioritize the checking of different report documents differently.

List of reference symbols

100A

EUV lithography system

100B

DUV lithography system

102

Beam shaping and lighting system

104

Projection system

106A

EUV light source

106B

DUV light source

108A

EUV radiation

108B

DUV radiation

110

mirror

112

mirror

114

mirror

116

mirror

118

mirror

120

Photomask

122

mirror

124

Wafer

126

optical axis

128

lens

130

mirror

132

medium

200

Verification device

201

Selection unit

202

Conversion unit

203

Comparison unit

204

management

205

Test scheme

206

Report document

206 '

Variety of report documents

207

XML document

208

Mapping file

209

Transformation script

M1

mirror

M2

mirror

M3

mirror

M4

mirror

M5

mirror

M6

mirror

S1 - S7

Procedural steps

QUOTES INCLUDED IN THE DESCRIPTION

This list of the documents listed by the applicant was generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Patent literature cited

• EP 1801708 A2 [0005]
• EP 1837779 A1 [0005]

Claims (14)

A method for checking report contents of a plurality of report documents (206) which are generated in the course of a manufacturing step of a technical system, in particular a lithography system (100A, 100B), the method for each of the report documents (206) comprising: Selecting (S1) a checking scheme (205) which hierarchically specifies properties to be checked in the report content of the report document (206) from a plurality of checking schemes (205); Converting (S2) the report document (206) into an XML document (207) which reproduces at least part of the report content of the report document (206) as structured content in a structured manner; and Comparing (S3) the structured content of the XML document (207) with the properties to be checked of the selected checking scheme (205). Procedure according to Claim 1 , further comprising: outputting (S5) an error message indicating incorrect report content if, when comparing (S3, S4) the structured content of the XML document (207) with the properties of the checking scheme (205) to be checked, deviations between the structured content and the properties to be tested are recognized. Procedure according to Claim 1 or 2 wherein at least two of the plurality of report documents (206) have different formats. Method according to one of the Claims 1 to 3 , further comprising: selecting a transformation script (209) for the report document (206) to be converted from a plurality of transformation scripts (209), wherein converting the report document (206) into an XML document (207) involves extracting the structured content based on the selected Transformation scripts (209), wherein the selected transformation script (209) is in particular a transformation primer. Method according to one of the Claims 1 to 4th , wherein the selection (S1) of the test scheme (205) and / or the selection of the transformation script (209) takes place on the basis of a pre-stored mapping file (208), the mapping file (208) assigning the report documents (206) and the Test schemes (205) and / or the transformation scripts (209) stores. Procedure according to Claim 5 , wherein the mapping file (208) assigns several of the report documents (206) to the same test scheme (205) and / or the same transformation primer as a transformation script (209), and / or wherein the mapping file (208) is a report document (206) assigns exactly one test scheme (205) and / or one transformation primer as transformation script (209). Procedure according to Claim 5 or 6th wherein the mapping file (208) selects the test scheme (205) and / or the transformation script (209) of the report document (206) as a function of a file name of the report document (206). Method according to one of the Claims 5 to 7th wherein entries stored in the mapping file (208) are stored as a linear list with a flat structure. Method according to one of the Claims 1 to 8th , the test schemes (205) being in the Relax NG programming language. Method according to one of the Claims 1 to 9 wherein a LibreOffice converter is used to convert the report document (206) into an XML document (207). Method according to one of the Claims 1 to 10 , wherein the XML document (207) reproduces the structured content of the report document (206) using a markup language. Computer program product which, on a program-controlled device, enables the fully automated implementation of the method according to one of the Claims 1 to 11 caused. Device (200) for checking report contents of a plurality of report documents (206) which are generated as part of a manufacturing step of a technical system, in particular a lithography system (100A, 100B), in particular according to the method according to one of the Claims 1 to 11 wherein the device (200) comprises: a selection unit (201) for selecting, for each of the report documents (206) a test scheme (205), which hierarchically specifies properties to be checked in the report content, from a plurality of test schemes (205); a conversion unit (202) for converting the respective report documents (206) into XML documents (207) which each reproduce at least part of the report content of the associated original report document (206) as structured content; and a comparison unit (203) for comparing the structured content of the respective XML documents (207) with the properties to be checked of the checking scheme (205) selected for the associated report document. A method for producing a lithography system (100A, 100B) which comprises the method for checking a report content of a report document (206) according to one of the Claims 1 to 11 includes.

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