DE102019211245A1 - Transport container gripper - Google Patents

Abstract

The invention relates to a transport container gripper (1) with a first gripping device (8.1) which is arranged on a first fork prong (6.1) and is designed to grip the transport container (7) on a first grip section (7.1) on a first side wall of the transport container (7), and a second gripping device (8.2) which is arranged on a second fork prong (6.2) and is designed to grip the transport container (7) on a second handle section (7.2) of a second side wall of the transport container, which is opposite the first handle section (7.1) (7), wherein the first gripping device (8.1) and the second gripping device (8.2) are designed to grip the transport container (7) optionally in a first orientation of the gripping fork (6) in which a bridge section (6.3) of the gripping fork (6 ) engages around a third side wall of the transport container (7) or in a second orientation of the gripping fork (6) rotated from the first orientation, in which he the bridge section (6.3) of the gripping fork (6) engages around a top wall of the transport container (7).

Description

The invention relates to a transport container gripper, having a gripper base body which comprises a connection device for attaching the transport container gripper to a flange of a robot arm.

The US 6,579,052 B1 describes a storage and retrieval unit with a rear wall on which a plurality of shelves is attached that can carry one or more wafer carrier capsules. The structure also includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf support wall. A horizontal rail extends between and is translationally mounted on the vertical rails, the horizontal rail carrying a gripper that can move along the horizontal rail. By moving the horizontal rail along the vertical rails and moving the gripper along the horizontal rail, the gripper can be positioned anywhere in an XZ plane, including the storage racks.

The object of the invention is to create a transport container gripper which can handle transport containers particularly flexibly and reliably.

• - einen Greifergrundkörper, der eine Anschlusseinrichtung zum Befestigen des Transportbehältergreifers an einem Flansch eines Roboterarms umfasst,
• - eine an dem Greifergrundkörper angeordnete Greifgabel, die eine erste Gabelzinke, eine zweite Gabelzinke und einen die erste Gabelzinke mit der zweiten Gabelzinke verbindenden Brückenabschnitt umfasst, der mit dem Greifergrundkörper verbunden ist und der die erste Gabelzinke in einem solchen Abstand zur zweiten Gabelzinke anordnet, dass ein Transportbehälter zwischen der ersten Gabelzinke und der zweiten Gabelzinke positioniert durch den Transportbehältergreifer aufnehmbar ist,

• - eine an der ersten Gabelzinke angeordnete erste Greifeinrichtung, die ausgebildet ist, zum Greifen des Transportbehälters an einem ersten Griffabschnitt an einer ersten Seitenwand des Transportbehälters,
• - eine an der zweiten Gabelzinke angeordnete zweite Greifeinrichtung, die ausgebildet ist, zum Greifen des Transportbehälters an einem dem ersten Griffabschnitt gegenüberliegenden zweiten Griffabschnitt einer zweiten Seitenwand des Transportbehälters, wobei die erste Greifeinrichtung und die zweite Greifeinrichtung ausgebildet sind, zum Greifen des Transportbehälters wahlweise in einer ersten Orientierung der Greifgabel, in welcher der Brückenabschnitt der Greifgabel eine dritte Seitenwand des Transportbehälters umgreift oder in einer aus der ersten Orientierung gedrehten zweiten Orientierung der Greifgabel, in welcher der Brückenabschnitt der Greifgabel eine Deckenwand des Transportbehälters umgreift.

The object of the invention is achieved by a transport container gripper, having:

• - A gripper base which comprises a connection device for attaching the transport container gripper to a flange of a robot arm,
• - A gripping fork arranged on the gripper main body which comprises a first fork prong, a second fork prong and a bridge section connecting the first fork prong to the second fork prong, which is connected to the gripper main body and which arranges the first fork prong at such a distance from the second fork prong that a transport container positioned between the first fork prong and the second fork prong can be picked up by the transport container gripper,

• a first gripping device which is arranged on the first fork prong and is designed to grasp the transport container at a first grip section on a first side wall of the transport container,
• - A second gripping device arranged on the second fork prong, which is designed for gripping the transport container on a second grip portion of a second side wall of the transport container opposite the first grip portion, the first gripping device and the second gripping device being designed for gripping the transport container optionally in one first orientation of the gripping fork, in which the bridge section of the gripping fork engages around a third side wall of the transport container or in a second orientation of the gripping fork rotated from the first orientation, in which the bridge section of the gripping fork grips around a top wall of the transport container.

The containers to be handled by means of a transport container gripper according to the invention can generally be used in any handling applications. The containers to be handled by means of a transport container gripper according to the invention are used in a special application, for example in the semiconductor industry and there specifically for the transport of semiconductor material slices (wafers) between different processing stations, in particular clean rooms in a production facility in the semiconductor industry. In this respect, the transport container gripper according to the invention can also be referred to as a clean room transport container gripper in this case.

Such transport containers are also referred to in the specialist world as SMIF pods (English: “Standard Mechanical Interface”). A cassette can be arranged within such a transport container, which cassette has a plurality of receiving pockets for one semiconductor material disc, i.e. one wafer each. The transport containers usually have a bottom opening, i.e. a bottom wall of the transport container is detachable from a hood of the transport container, the hood preferably comprising the four side walls and the top wall. In the open state of the transport container, the cassette can be removed and / or one or more semiconductor material disks can be removed from the cassette or inserted into the cassette. When the transport container is closed, an airtight microclean room climate is maintained under the hood. A closed transport container can thus, for example, be removed from a first clean room and transported to a second clean room in a different environment, in particular in an environment with low cleanliness requirements.

The process of transporting the transport container has so far mostly been done manually, ie by people. By means of automation devices, such as automatic, in particular driverless transport systems, robots and, in particular, autonomous robots, ie mobile robots, transport containers can be transported automatically. To a transport container by a robot automatically To be able to handle, a transport container gripper according to the invention is provided. The transport container gripper is designed to be moved automatically in space by a robot. By means of the transport container gripper, the robot, in particular a robot arm, can thus automatically grasp, move and also release the transport container.

To this extent, the robot has a robot arm and a robot controller. The robot arm can be arranged on a driving platform to form a mobile robot or an autonomous robot. The travel platform can have an intermediate storage space, in particular an intermediate storage rack for one or more transport containers. At its distal end, the robot arm has a flange to which the transport container gripper is attached. The transport container gripper has a connection device for fastening it to the flange of the robot arm. The connection device thus forms a coupling means in order to be able to attach the transport container gripper to the flange of the robot arm.

The connection device is connected to a gripper base body of the transport container gripper. The gripper main body is also designed to connect the connection device to a gripping fork of the transport container gripper. The gripper base body can be, for example, an elongated rod or an elongated bar. The rod or the bar can in particular extend longitudinally in a plane which is arranged at right angles to the plane within which the gripping fork of the transport container gripper extends.

The gripping fork can for example have two fork prongs which are connected via a bridge section of the gripping fork. In this respect, the bridge section forms a fixed connecting strut in order to rigidly connect one fork prong to the other fork prong. The two fork prongs are in particular arranged at a fixed distance from one another and in particular extend parallel to one another.

The transport containers can generally have a first handle section on a first side wall and a second handle section on a second side wall. A third side wall of the transport container extends between the first side wall and the second side wall. The transport containers can be designed in a special design, for example in accordance with the SEMI E19 standard. The transport containers can thus have an at least approximately cuboid-like basic shape and in this respect have two pairs of opposite, spaced-apart side walls, as well as a top wall and a bottom wall. The bottom wall can be designed to be detachable. The four side walls can form a hood together with the top wall.

One of the four side walls (first side wall) has a first grip section. An opposite side wall (second side wall) has a second handle section. The other two side walls (third and fourth side wall) of the total of four side walls form a front wall and a rear wall. One of the four side walls is defined as the front wall, which has a holder for a separate sensor device. The rear wall is arranged opposite the front wall. The front wall or the rear wall can optionally be used as the third side wall.

The first handle section and the second handle section are components of the transport container. The first handle section and the second handle section can be formed directly on two opposite side walls of the transport container. Alternatively, the first handle section and the second handle section can be produced as separate handles and fastened to two opposite side walls of the transport container, in particular fastened detachably.

The orientation of the gripping fork is defined according to the invention by the plane in which the two fork prongs and possibly also the bridge section extend longitudinally. The first orientation of the gripping fork thus differs from the second orientation of the gripping fork in that the gripping fork rotates about an axis of rotation which extends within the plane spanned by the two fork prongs.

The first gripping device is designed to be able to pick up the transport container by its first grip section, specifically in two different orientations. The second gripping device is designed to be able to pick up the transport container on its opposite, second gripping section, namely in the two different orientations, so that in a first orientation the gripping fork, in particular the bridge section, grips around the third side wall and in a different second orientation the gripping fork, in particular the bridge section encompasses the ceiling wall. “Gripping around” already means that the gripping fork, in particular the bridge section, is only guided past the side wall or the top wall close to the wall. This does not necessarily have to mean that the gripping fork, in particular the bridge section, has to touch this third side wall or the top wall or even have to have a certain clamping function.

In that the first gripping device and the second gripping device are designed for gripping the transport container optionally in a first orientation of the gripping fork in which the bridge section of the gripping fork engages around a third side wall of the transport container or in a second orientation of the gripping fork rotated from the first orientation, in which the bridge section of the gripping fork engages around a top wall of the transport container, a transport container can be picked up and / or set down in different ways by means of the same transport container gripper. Optionally, the transport container gripper can be grasped at an intermediate storage position for the transport container. Transport containers can thus be handled particularly flexibly.

In a special development of the transport container gripper, the first gripping device can have a first receptacle which is designed to receive the first grip section of the transport container in the first orientation of the gripping fork in a form-fitting manner, and the second gripping device can have a second receptacle which is designed to receive the second grip section in a form-fitting manner of the transport container in the first orientation of the gripping fork, the first gripping device also having a third receptacle separate from the first receptacle, which is designed for positively receiving the first grip portion of the transport container in the second orientation of the gripping fork, and the second gripping device one of the second Receiving has separate fourth receiving, which is designed for positively receiving the second handle portion of the transport container in the second orientation of the gripping fork.

The first receptacle can be a depression or recess in the first fork prong. The recess or recess can have an inner contour which at least substantially corresponds to the outer contour of the first handle section of the transport container, so that the first handle section can be positively inserted into the recess or recess, in particular in a direction from top to bottom. The transport container hangs in this respect by means of its first grip section in the recess or the recess of the first fork prong and is secured laterally against slipping out, in particular due to the raised side walls of the recess or the recess.

In the same way, the second receptacle can be an analog indentation or recess in the second fork prong. The recess or recess can have an inner contour which at least substantially corresponds to the outer contour of the second handle section of the transport container, so that the second handle section can be positively inserted into the recess or recess, in particular in a direction from top to bottom. In this respect, the transport container hangs in the recess or recess of the second fork prong by means of its second grip section and is secured laterally against slipping out, in particular due to the raised side walls of the recess or recess.

The third receptacle has a first support surface which extends in a support plane which is arranged at least substantially at right angles to the plane in which the two fork prongs extend. The first support surface can also extend at right angles to the connection device, i.e. in the assembled state of the transport container gripper on the flange of the robot arm, to the Z-axis or to the direction of impact of the flange of the robot arm. This means that the surface normal of the first support surface can run parallel to the Z axis or to the direction of impact of the flange of the robot arm. This can be a fixed i.e. rigid arrangement.

In the same way, the fourth receptacle can have an analogous second support surface which extends in a support plane which is arranged at least substantially at right angles to the plane in which the two fork prongs extend. The second support surface can also extend at right angles to the connection device, i.e. in the assembled state of the transport container gripper on the flange of the robot arm, to the Z-axis or to the direction of impact of the flange of the robot arm. This means that the surface normal of the second support surface can run parallel to the Z axis or to the direction of impact of the flange of the robot arm. This can be a fixed i.e. rigid arrangement.

The form-fitting reception can already be realized by the fact that the respective handle section of the transport container rests from above on a support surface of the first receptacle, the second receptacle, the third receptacle and / or the fourth receptacle and is held solely due to the influence of gravity. However, it can in particular be provided that the respective handle section of the transport container is additionally secured in a form-fitting manner within the (horizontal) support plane, i.e. to the front, to the rear, to the left and / or to the right by means of corresponding stops.

The first receptacle can have a first pocket sunk into the first fork prong, which is adapted in shape and size to the first handle portion of the transport container and the second receptacle can have a second pocket sunk into the second fork prong, which is adapted in shape and size to the second handle portion of the transport container.

The recessed first pocket can be formed, for example, by a recess milled out of the first fork prong. The recessed second pocket can be formed, for example, by a recess milled out of the first fork prong. The first pocket and / or the second pocket can have one or more elastic supports. The one or more elastic supports can be designed to dampen vibrations when a transport container is held on the transport container gripper.

The formation of the first pocket and the second pocket in shape and size complementary to the respective first handle section or second handle section means in particular that the respective handle section can be inserted or inserted into the respective pocket without any particular expenditure of force, ie without pressing However, the transport container in the inserted state does not have any significant play on the transport container gripper, ie it can no longer be clearly shifted on the transport container gripper, but is held precisely within the task conditions on the transport container gripper.

In a special development, the third receptacle can have a first tab extending away from the first fork prong, which tab has a first tab section which is designed to receive the first grip section of the transport container in the second orientation of the gripping fork, and the fourth receptacle can be a have a second tab extending away from the second fork prong which has a second tab section which is designed to support the second handle section of the transport container in the second orientation of the gripping fork.

The first tab section can be formed by a bent section of a first plate which is fastened to the first fork prong.

The second tab section can be formed by a bent section of a second plate which is fastened to the second fork prong.

The first tab section can have a first projection which is designed to interact positively with a first notch on the first handle section of the transport container when the transport container is received on the transport container gripper in the second orientation of the gripping fork and the second tab section can have a second projection, which is designed to interact positively with a second notch on the second handle section of the transport container when the transport container is received on the transport container gripper in the second orientation of the gripping fork.

The first projection can, for example, be a first pin which protrudes from the support plane of the first tab section in the direction of the first grip section of the transport container to be received.

The second projection can, for example, be a second pin which protrudes from the support plane of the second tab section in the direction of the second handle section of the transport container to be received.

The first tab can have a third tab section which extends at a distance from the first tab section, so that the first tab section and the third tab section positively limit the first grip section of the transport container from two opposite sides when the transport container is in the second orientation of the gripping fork the transport container gripper is received, and the second tab can have a fourth tab section which extends at a distance from the second tab section so that the second tab section and the fourth tab section positively limit the second handle section of the transport container from two opposite sides when the transport container is received in the second orientation of the gripping fork on the transport container gripper.

The third tab section can be formed by a further bent section of the first plate which is fastened to the first fork prong.

The fourth tab section can be formed by a further bent section of the second plate, which is attached to the second fork prong.

The first tab can have a fifth tab section which extends at a distance from the first pocket, so that the fifth tab section and the first pocket positively limit the first handle section of the transport container from two opposite sides when the transport container is in the first orientation of the gripping fork the transport container gripper is received, and the second tab can have a sixth tab portion that extends at a distance from the second pocket, so that the sixth tab section and the second pocket limit the second handle section of the transport container from two opposite sides in a form-fitting manner when the transport container is received on the transport container gripper in the first orientation of the gripping fork.

The fifth tab section can be formed by an additional bent section of the first plate which is fastened to the first fork prong.

The sixth tab section can be formed by an additional bent section of the second plate which is fastened to the second fork prong.

In all design variants of the transport container gripper, the gripping fork can have at least one presence sensor, which is designed to provide a signal that indicates the correctness of the reception of the transport container on the gripping fork, both in the first orientation of the gripping fork when the transport container is in the first receptacle and in the second Recording is inserted positively, as well as in the second orientation of the gripping fork when the transport container is inserted positively into the third receptacle and into the fourth receptacle.

The presence sensor is used to automatically determine whether the gripping fork currently has a transport container, i.e. whether it is holding, or whether the gripping fork is free of a transport container so that the gripping fork is ready to receive a transport container. The presence sensor can in particular also serve to be able to determine whether the transport container received on the gripping fork is in the correct position and location on the gripping fork in order to be able to safely handle the transport container by moving the gripping fork.

The presence sensor can represent a sensor system which can have one or more sensor elements. The presence sensor can be designed to determine whether the transport container is received in the first receptacle or in the second receptacle. The presence sensor can be formed by a single unit which is arranged on the gripping fork in such a way that the presence of the transport container in the first receptacle and in the second receptacle can be determined from the same position of the presence sensor on the gripping fork, both in the first orientation of the transport container gripper , and in the second orientation of the transport container gripper, the presence of the transport container in the third receptacle and in the fourth receptacle can be determined.

In the simplest embodiment, the presence sensor can be formed, for example, by a mere switching contact, in particular an electro-mechanical switching contact, which detects the correct presence of the transport container on the gripping fork by mechanically touching the transport container with the switching contact and then, for example, generates an electrical signal, when the switching contact is closed or opened by mechanical contact. However, the presence sensor can also detect using a different physical principle. For example, the presence sensor can comprise a light barrier, an ultrasonic sensor, a laser sensor and / or an optical camera.

In all design variants of the transport container gripper, the gripping fork can have a proximity sensor which is designed to provide a signal which provides information on whether a transport container is already available at a storage location for the transport container or whether the storage location for storing a transport container is free when the transport container gripper is near the storage location.

The proximity sensor can thus, preferably without direct contact, detect the storage location without contact. In this respect, the proximity sensor detects the storage location over a certain distance of the transport container gripper from the storage location. The proximity sensor can detect on the basis of different physical principles. For example, the proximity sensor can be an inductive proximity switch, a capacitive proximity switch, a magnetic proximity switch, an ultrasonic sensor and / or an optical proximity switch, such as a camera or a light barrier.

The storage location can be an intermediate storage location, in particular an intermediate storage location on a mobile platform that carries the robot arm that moves the transport container gripper. The storage location can also be a loading station (“load port”). The charging station can be an interface to a work station, at which the transport container is placed or handed over, for example in the area of a lock, so that the cassette in the transport container can be filled with wafers of semiconductor material or these can be removed from the cassette. Removal and / or filling can in particular take place automatically at the storage location.

In all variant embodiments of the transport container gripper, the gripping fork can have a scanner which is designed to read a code of a marking at a storage location for the transport container when the transport container gripper is in the vicinity of the storage location.

The scanner can, for example, be a code reader for the optical scanning of graphic codes, such as bar codes or QR codes. The scanner can for example be a CCD scanner, a laser scanner or a camera scanner (English: “Imager”), such as a smartphone scanner.

An exemplary embodiment of the invention is illustrated by way of example in the accompanying schematic drawings. Specific features of this exemplary embodiment can represent general features of the invention regardless of the specific context in which they are mentioned, possibly also viewed individually or in combinations other than those shown.

• 1 eine perspektivische Darstellung eines beispielhaften erfindungsgemäßen Transportbehältergreifers in einer Vorderansicht,
• 2 eine perspektivische Darstellung des Transportbehältergreifers gemäß 1 in einer Rückansicht,
• 3 eine perspektivische Darstellung des Transportbehältergreifers gemäß 1 mit einem Transportbehälter in einer Greifsituation von hinten,
• 4 eine perspektivische Darstellung des Transportbehältergreifers gemäß 1 mit einem Transportbehälter in einer Greifsituation von vorne,
• 5 eine perspektivische Darstellung des Transportbehältergreifers gemäß 1 mit einem Transportbehälter in einer Greifsituation von oben,
• 6 ein beispielhaftes Szenario mit einem mobilen Roboter, der den erfindungsgemäßen Transportbehältergreifers gemäß 1 bewegt, während eines Entfernens des Transportbehälters von einer Ablagestelle,
• 7 ein beispielhaftes Szenario mit dem mobilen Roboter, der den erfindungsgemäßen Transportbehältergreifers gemäß 1 bewegt, während eines Zwischenlagerns des Transportbehälters an der mobilen Plattform des Roboters,
• 8 ein beispielhaftes Szenario mit dem mobilen Roboter, der den erfindungsgemäßen Transportbehältergreifers gemäß 1 bewegt, während eines Umorientierens des Transportbehälters um eine vertikale Drehachse,
• 9 eine Seitenansicht eines Lagerregals, in dem mehrere Transportbehälter in mehreren Ebenen übereinander in Einzelreihen abgestellt sind, und
• 10 eine Ansicht von oben auf einen Lagertisch, auf dem mehrere Transportbehälter in mehreren Reihen und Spalten matrixartig abgestellt sind.

Show it:

• 1 a perspective illustration of an exemplary transport container gripper according to the invention in a front view,
• 2 a perspective view of the transport container gripper according to 1 in a rear view,
• 3 a perspective view of the transport container gripper according to 1 with a transport container in a gripping situation from behind,
• 4th a perspective view of the transport container gripper according to 1 with a transport container in a gripping situation from the front,
• 5 a perspective view of the transport container gripper according to 1 with a transport container in a gripping situation from above,
• 6 an exemplary scenario with a mobile robot that uses the transport container gripper according to the invention 1 moved while the transport container is being removed from a storage location,
• 7th an exemplary scenario with the mobile robot using the transport container gripper according to the invention 1 moved, while the transport container is temporarily stored on the mobile platform of the robot,
• 8th an exemplary scenario with the mobile robot using the transport container gripper according to the invention 1 moved, during a reorientation of the transport container about a vertical axis of rotation,
• 9 a side view of a storage rack in which several transport containers are placed in several levels one above the other in individual rows, and
• 10 a view from above of a storage table on which several transport containers are placed in a matrix-like manner in several rows and columns.

The in 1 shown transport container gripper 1 has a gripper body 2 on, of a connection device 3 for attaching the transport container gripper 1 on a flange 4th a robotic arm 5 includes.

On the gripper body 2 is a gripping fork 6 arranged that a first fork prong 6.1 , a second fork prong 6.2 and one the first fork prong 6.1 with the second fork prong 6.2 connecting bridge section 6.3 includes. The bridge section 6.3 is with the gripper body 2 connected. The gripper body 2 arranges the first fork prong 6.1 at such a distance from the second fork prong 6.2 indicates that a shipping container 7th ( 3-5 ) between the first fork prong 6.1 and the second fork prong 6.2 can be positioned, so that thereby the transport container 7th by the transport container gripper 1 is recordable.

At the first fork arm 6.1 is a first gripping device 8.1 arranged, which is designed for gripping the transport container 7th on a first handle portion 7.1 on a first side wall S1 of the transport container 7th . On the second fork prong 7.2 is a second gripping device 8.2 arranged, which is designed for gripping the transport container 7th on one of the first handle portion 7.1 opposite second handle section 7.2 a second side wall S2 of the transport container 7th .

The first gripping device 8.1 and the second gripping device 8.2 are designed to grip the transport container 7th optionally in a first orientation of the gripping fork 6 , in which the bridge section 6.3 the gripping fork 6 a third side wall S3 of the transport container 7th encompasses ( 3 , 4th ) or in a second orientation of the gripping fork rotated from the first orientation 6 , in which the bridge section 6.3 the gripping fork 6 a top wall D of the transport container 7th encompasses ( 5 ).

The first gripping device 8.1 has a first receptacle in the case of the illustrated embodiment 9.1 which is designed to receive the first grip portion in a form-fitting manner 7.1 of the transport container 7th in the first Orientation of the gripping fork 6 . The second gripping device 8.2 has a second receptacle in the case of the illustrated embodiment 9.2 which is designed to receive the second handle portion in a form-fitting manner 7.2 of the transport container 7th in the first orientation of the gripping fork 6 , wherein the first gripping device 8.1 also one from the first recording 9.1 separate third recording 9.3 which is designed to receive the first grip portion in a form-fitting manner 7.1 of the transport container 7th in the second orientation of the gripping fork 6 , and wherein the second gripping device 8.2 one from the second shot 9.2 separate fourth recording 9.4 which is designed to receive the second grip portion in a form-fitting manner 7.2 of the transport container 7th in the second orientation of the gripping fork 6 .

The first shot 9.1 can one in the first fork prong 6.1 recessed first pocket 10.1 have the shape and size of the first handle portion 7.1 of the transport container 7th is adapted to complement the shape and the second recording 9.2 can do one in the second fork prong 6.2 recessed second pocket 10.2 have the shape and size of the second handle portion 7.2 of the transport container 7th is adapted to complement the shape.

In the case of the illustrated embodiment, the third receptacle 9.3 one away from the first fork prong 6.1 first flap extending away 11 on which a first tab portion 11.1 which is formed, the first grip portion 7.1 of the transport container 7th in the second orientation ( 5 ) the gripping fork 6 and the fourth recording 9.4 shows one of the second fork prong 6.2 second flap extending away 12 on which a second tab section 12.2 which is formed, the second handle portion 7.2 of the transport container 7th in the second orientation ( 5 ) the gripping fork 6 to be supported.

The first tab section 11.1 has in the case of the illustrated embodiment a first projection 17.1 which is formed with a first notch on the first handle portion 7.1 of the transport container 7th cooperate positively when the transport container 7th in the second orientation ( 5 ) the gripping fork 6 on the transport container gripper 1 is received and the second tab portion 12.2 has a second projection 17.2 which is formed with a second notch on the second handle portion 7.2 of the transport container 7th cooperate positively when the transport container 7th in the second orientation ( 5 ) the gripping fork 6 on the transport container gripper 1 is recorded.

The first tab 11 can have a third tab section 11.3 have, which is at a distance from the first tab portion 11.1 extends so that the first tab portion 11.1 and the third tab portion 11.3 the first grip section 7.1 of the transport container 7th limit form-fitting from two opposite sides when the transport container 7th in the second orientation ( 5 ) the gripping fork 6 on the transport container gripper 1 is recorded. The second tab 12 has a fourth tab section 12.4 on, which is at a distance from the second tab section 12.2 extends so that the second tab portion 12.2 and the fourth tab section 12.4 the second handle section 7.2 of the transport container 7th limit form-fitting from two opposite sides when the transport container 7th in the second orientation ( 5 ) the gripping fork 6 on the transport container gripper 1 is recorded.

The first tab 11 has in the case of the present embodiment a fifth tab section 11.5 on, which is at a distance from the first pocket 10.1 extends so that the fifth tab section 11 . 5 and the first bag 10.1 the first grip section 7.1 of the transport container 7th limit form-fitting from two opposite sides when the transport container 7th in the first orientation ( 3 , 4th ) the gripping fork 6 on the transport container gripper 1 is recorded. The second tab 12 has a sixth tab section 12.6 on, which is at a distance from the second pocket 10.2 extends so that the sixth tab section 12.6 and the second bag 10.2 the second handle section 7.2 of the transport container 7th limit form-fitting from two opposite sides when the transport container 7th in the first orientation ( 3 , 4th ) the gripping fork 6 on the transport container gripper 1 is recorded.

In the case of the present exemplary embodiment, the gripping fork 6 also at least one presence sensor 14th on, which is designed, a the correctness of the inclusion of the transport container 7th at the gripping fork 6 provide a characteristic signal, both in the first orientation ( 3 , 4th ) the gripping fork 6 when the shipping container 7th in the first recording 9.1 and into the second recording 9.2 is inserted positively, as well as in the second orientation ( 5 ) the gripping fork 6 when the shipping container 7th in the third recording 9.3 and in the fourth recording 9.4 is inserted positively.

In the case of the present exemplary embodiment, the gripping fork also has a proximity sensor 15th which is designed to provide a signal which provides information about whether at a storage location 13 for the Transport container already in the storage location 13 occupying transport container 7th is present or the storage location 13 for storing a transport container 7th is free when the transport container gripper 1 near the depository 13 is located.

In the case of the present exemplary embodiment, the gripping fork 6 also a scanner 16 that is formed, a code of a mark 18th at the deposit point 13 for the transport container 7th read out when the transport container gripper 1 near the depository 13 is located.

As in the examples in 7th to 10 is shown, the storage location 13 an interim storage facility 13.1 be, especially an interim storage location on a mobile platform 19th who have favourited the robotic arm 5 carries the transport container gripper 1 emotional. The filing point 13 but can also be a charging station 13.2 his. The charging station 13.2 can be an interface to a workstation at which the transport container, for example in the area of a lock 7th is parked or handed over, so that the in the transport container 7th existing cassette with semiconductor material wafers ie can be filled with wafers or these can be removed from the cassette. Removal and / or filling can be done at the storage location 13 in particular take place automatically.

In the semiconductor industry, special transport containers are used to transport silicon wafers. So-called SMIF pods are a widely used type. The semiconductor industry is increasingly trying to automate the largely manual transport process. This can be done, for example, via overhead conveyors, linearly guided robot systems or mobile robots. All systems have one thing in common. The transport containers must be picked up by means of automatic gripping systems. As a loading and unloading device, each processing machine can have a so-called load port (loading station 13.2 ) to serve.

With three different gripping orientations, namely front gripping ( 4th ), back gripping ( 3 ) and overhead gripping ( 5 ) almost all load port types can be used. In addition, it is now possible to move the transport containers both vertically ( 9 ) and horizontal ( 10 ) to stack or to arrange in shelving systems. In the specific case of a mobile robotic arm 5 this means that during the transport the transport container 7th can be deposited vertically and side by side. At the destination, for example a storage rack, the transport containers are 7th then stacked horizontally, side by side and / or on top of each other. Another advantage is the loading of the charging stations 13.2 and / or intermediate storage locations 13.1 in which the transport container 7th for example, can be inserted rotated 180 ° against the standard position. With the transport container gripper according to the invention 1 it is possible to use the transport container 7th from the charging station 13.2 and / or the interim storage facility 13.1 to remove, to buffer, to rotate again by 180 °, in order to then return to the standard position, for example on a shelf 20th ( 9 ) stacked on top of each other or on a table 21st ( 10 ) next to each other and / or one behind the other in the depth direction.

The 6 , 7th and 8th accordingly show the various possible gripping positions and the possible storage options for the transport containers 7th .

QUOTES INCLUDED IN THE DESCRIPTION

This list of the documents listed by the applicant was generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Patent literature cited

• US 6579052 B1 [0002]

Claims (10)

Transport container gripper (1), comprising: - A gripper main body (2) which comprises a connection device (3) for fastening the transport container gripper (1) to a flange (4) of a robot arm (5), - A gripping fork (6) arranged on the gripper base body (2) and comprising a first fork prong (6.1), a second fork prong (6.2) and a bridge section (6.3) connecting the first fork prong (6.1) to the second fork prong (6.2), which is connected to the gripper body (2) and which arranges the first fork prong (6.1) at such a distance from the second fork prong (6.2) that a transport container (7) is positioned between the first fork prong (6.1) and the second fork prong (6.2) can be picked up by the transport container gripper (1), - A first gripping device (8.1) which is arranged on the first fork prong (6.1) and is designed to grasp the transport container (7) on a first grip section (7.1) on a first side wall of the transport container (7), - A second gripping device (8.2) which is arranged on the second fork prong (6.2) and is designed to grasp the transport container (7) on a second grip section (7.2) of a second side wall of the transport container (7) opposite the first handle section (7.1), wherein the first gripping device (8.1) and the second gripping device (8.2) are designed for gripping the transport container (7) optionally in a first orientation of the gripping fork (6) in which the bridge section (6.3) of the gripping fork (6) has a third side wall of the transport container (7) or in a second orientation of the gripping fork (6) rotated from the first orientation, in which the bridge section (6.3) of the gripping fork (6) engages around a top wall of the transport container (7). Transport container gripper after Claim 1 , characterized in that - the first gripping device (8.1) has a first receptacle (9.1) which is designed for positively receiving the first grip section (7.1) of the transport container (7) in the first orientation of the gripping fork (6), - the second Gripping device (8.2) has a second receptacle (9.2) which is designed for positively receiving the second grip section (7.2) of the transport container (7) in the first orientation of the gripping fork (6), - the first gripping device (8.1) one of the first Receptacle (9.1) has a separate third receptacle (9.3) which is designed for positively receiving the first grip section (7.1) of the transport container (7) in the second orientation of the gripping fork (6), - the second gripping device (8.2) one of the second The receptacle (9.2) has a separate fourth receptacle (9.4) which is designed to receive the second grip section (7.2) of the transport container (7) in the second O in a form-fitting manner orientation of the gripping fork (6). Transport container gripper after Claim 2 , characterized in that the first receptacle (9.1) has a first pocket (10.1) sunk into the first fork prong (6.1), the shape and size of which is adapted to complement the shape of the first handle section (7.1) of the transport container (7) and which second receptacle (9.2) has a second pocket (10.2) sunk into the second fork prong (6.2), the shape and size of which is adapted to complement the shape of the second handle section (7.2) of the transport container (7). Transport container gripper after Claim 2 or 3 , characterized in that the third receptacle (9.3) has a first tab (11) which extends away from the first fork prong (6.1) and which has a first tab section (11.1) which is designed to hold the first handle section (7.1) of the transport container ( 7) in the second orientation of the gripping fork (6) and the fourth receptacle (9.4) has a second tab (12) which extends away from the second fork prong (6.2) and which has a second tab section (12.2) which is formed to pick up the second grip section (7.2) of the transport container (7) in the second orientation of the gripping fork (6). Transport container gripper after Claims 4 , characterized in that the first tab section (11.1) has a first projection (17.1) which is designed to interact positively with a first notch on the first handle section (7.1) of the transport container (7) when the transport container (7) is in the second Orientation of the gripping fork (6) is received on the transport container gripper (1) and the second tab section (12.2) has a second projection (17.2) which is designed to interact positively with a second notch on the second handle section (7.2) of the transport container (7) when the transport container (7) is received on the transport container gripper (1) in the second orientation of the gripping fork (6). Transport container gripper after Claim 4 or 5 , characterized in that the first tab (11) has a third tab section (11.3) which extends at a distance from the first tab section (11.1) so that the first tab section (11.1) and the third tab section (11.3) form the first grip section (7.1) of the transport container (7) from two opposite sides positively limit when the transport container (7) in the second orientation of the gripping fork (6) the transport container gripper (1) is received, and the second tab (12) has a fourth tab section (12.4) which extends at a distance from the second tab section (12.2), so that the second tab section (12.2) and the fourth tab section (12.4 ) delimit the second handle section (7.2) of the transport container (7) from two opposite sides in a form-fitting manner when the transport container (7) is received on the transport container gripper (1) in the second orientation of the gripping fork (6). Transport container gripper according to one of the Claims 4 to 6 , characterized in that the first tab (11) has a fifth tab section (11.5) which extends at a distance from the first pocket (10.1) so that the fifth tab section (11.5) and the first pocket (10.1) the first handle section (7.1) of the transport container (7) from two opposite sides with a positive fit when the transport container (7) is received on the transport container gripper (1) in the first orientation of the gripping fork (6), and the second tab (12) has a sixth tab section ( 12.6) which extends at a distance from the second pocket (10.2), so that the sixth tab section (12.6) and the second pocket (10.2) delimit the second handle section (7.2) of the transport container (7) from two opposite sides in a form-fitting manner, when the transport container (7) is received in the first orientation of the gripping fork (6) on the transport container gripper (1). Transport container gripper according to one of the Claims 2 to 7th , characterized in that the gripping fork (6) has at least one presence sensor (14) which is designed to provide a signal indicative of the correctness of the reception of the transport container (7) on the gripping fork (6), both in the first orientation of the gripping fork ( 6) when the transport container (7) is positively inserted into the first receptacle (9.1) and into the second receptacle (9.2), as well as in the second orientation of the gripping fork (6) when the transport container (7) into the third receptacle (9.3) and is inserted positively into the fourth receptacle (9.4). Transport container gripper according to one of the Claims 1 to 8th , characterized in that the gripping fork (6) has a proximity sensor (15) which is designed to provide a signal which provides information about whether a storage location (13) for the transport container (7) is already a storage location (13 ) occupying transport container (7) is present or the storage location (13) for storing a transport container (7) is free when the transport container gripper (1) is located near the storage location (13). Transport container gripper according to one of the Claims 1 to 9 , characterized in that the gripping fork (6) has a scanner (16) which is designed to read a code of a marking (18) at a storage location (13) for the transport container (7) when the transport container gripper (1) is in is near the storage point (13).

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