DE102019112585A1 - Magnetron End Block Housing, Magnetron End Block and Process - Google Patents

Abstract

According to various embodiments, the magnetron end block housing (100 to 1200) can have: a mounting section (100v) on the atmosphere side, which has a first opening (102v) and a sealing surface (104v) surrounding the first opening (102v); a vacuum-side bearing portion (1001) which has a second opening (1021) and a cavity (102h) for receiving a shaft, the cavity (102h) connecting the first opening (102v) with the second opening (1021); wherein the bearing section (1001) has a plurality of channels (106), each channel extending through the bearing section (1001) longitudinally from the cavity (102h) to the vacuum side.

Description

Various exemplary embodiments relate to a magnetron end block housing, a magnetron end block and a method.

In general, workpieces or substrates can be processed or treated, e.g. processed, coated, heated, etched and / or structurally changed. One method for coating a substrate is, for example, cathode atomization (what is known as sputtering or sputter deposition). For sputtering, a plasma-forming gas can be ionized by means of a cathode, and a material to be deposited (target material) can be atomized by means of the plasma formed in the process. The sputtered target material can then be brought to a substrate where it can deposit and form a layer. For example, one layer or several layers can be deposited on a substrate by means of sputtering.

Modifications of cathode sputtering are sputtering using a magnetron, so-called magnetron sputtering, or so-called reactive magnetron sputtering. The formation of the plasma can be supported by means of a magnetic field, which can influence the ionization rate of the plasma-forming gas. The magnetic field can be generated by means of a magnet system, a plasma channel in which the formation of the plasma is stimulated can be formed by means of the magnetic field. For sputtering, the target material (also referred to as coating material) can be arranged between the plasma channel and the magnet system, so that the target can be penetrated by the magnetic field and the plasma channel can be formed on the target. The plasma is supplied with electrical energy conventionally by means of the target material itself.

For example, a tubular magnetron can have a tubular cathode which has the target material, wherein the tubular cathode can be rotatably mounted in a vacuum chamber. A so-called end block (also referred to as a magnetron end block) can be used for operating (e.g. storing and supplying) the cathode. A tubular cathode can clearly be held in a vacuum by means of an end block, the tubular cathode being rotatably mounted by means of the end block, wherein the end block can furthermore be configured to supply the tubular cathode held with electrical energy and / or cooling water. Furthermore, the end block can also provide a drive for rotating the tubular cathode.

For example, the cathode is supplied with electrical current to carry out the sputtering process. The contact can be made by sliding between a fixed grinding element (e.g. electric carbon or another grinding element) and a rotating drive shaft connected to the cathode.

The radial contacting of the drive shaft is conventionally carried out with electric carbons, whereby the contacting can take place, for example, in the atmosphere or in the cooling water. The coals are in contact with the drive shaft, for example, in a radial direction or in an axial direction.

According to various embodiments, a magnetron end block housing, a magnetron end block and a method are provided, which reduce the axial space requirement of the contact and / or facilitate maintenance.

To reduce the space requirement, the carbon brushes (also referred to as contact carbon brushes or collector brushes) can be or are arranged radially around the shaft in such a way that the projected contour on the shaft takes up as little space as possible axially.

According to various embodiments, the magnetron end block housing can have: a mounting section on the atmosphere side, which has a first opening and a sealing surface surrounding the first opening; a vacuum-side bearing portion having a second opening and a cavity for receiving a shaft, the cavity connecting the first opening with the second opening; wherein the bearing section has a plurality of channels, each channel extending through the bearing section longitudinally from the cavity to the vacuum side.

• 1A bis 12B ein Magnetron-Endblockgehäuse gemäß verschiedenen Ausführungsformen in verschiedenen schematischen Ansichten;
• 13 eine Sputtervorrichtung gemäß verschiedenen Ausführungsformen in einer schematischen Querschnittsansicht oder Seitenansicht;
• 14A und 14B jeweils eine Prozessieranordnung gemäß verschiedenen Ausführungsformen in einer schematischen Querschnittsansicht oder Seitenansicht; und
• 15 und 16 jeweils ein Verfahren gemäß verschiedenen Ausführungsformen in einem schematischen Ablaufdiagramm.

Show it

• 1A to 12B a magnetron end block housing according to various embodiments in various schematic views;
• 13 a sputtering device according to various embodiments in a schematic cross-sectional view or side view;
• 14A and 14B each a processing arrangement according to various embodiments in a schematic cross-sectional view or side view; and
• 15th and 16 each a method according to various embodiments in a schematic flowchart.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which there is shown, for purposes of illustration, specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "back", etc. is used with reference to the orientation of the character (s) being described. Because components of embodiments can be positioned in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It goes without saying that other embodiments can be used and structural or logical changes can be made without departing from the scope of protection of the present invention. It goes without saying that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. Therefore, the following detailed description is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

In the context of this description, the terms “connected”, “connected” and “coupled” are used to describe both a direct and an indirect connection (e.g. ohmic and / or electrically conductive, e.g. an electrically conductive connection), a direct or indirect connection as well as a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference symbols, as far as this is appropriate.

According to various embodiments, the term "coupled" or "coupling" can be used in the sense of a (e.g. mechanical, hydrostatic, thermal and / or electrical), e.g. direct or indirect, connection and / or interaction are understood. Several elements can, for example, be coupled to one another along an interaction chain, along which the interaction (e.g. a signal) can be transmitted. For example, two elements coupled together can exchange an interaction with one another, e.g. a mechanical, hydrostatic, thermal and / or electrical interaction. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g. physical) coupling, e.g. by means of direct physical contact. A clutch can be set up to transmit a mechanical interaction (e.g. force, torque, etc.). The coupling can be provided, for example, by means of a form-fitting and / or force-fitting connection.

For a better understanding, reference is made here to carbon brushes or carbon brushes which have carbon brushes. What has been described can also apply analogously to other sliding contacts (also referred to as sliding contacts).

For example, other electrical sliding contacts (e.g. contacting elements, stranded cables, slip rings, etc.) can be used as an alternative or in addition. For example, other materials (e.g. comprising a metal, such as brass, copper, silver, palladium, molybdenum and / or gold) can be used as an alternative or in addition to the carbon or the abrasive body made of carbon. physically contact and / or slide on it.

The sliding contacts can optionally match in their construction and / or material, e.g. be set up the same to each other, so that costs are reduced. Alternatively or additionally, the sliding contacts (e.g. carbon brushes) can be provided as cost-effective standard components, which reduces assembly costs. For example, the carbon brushes (or, more generally, grinding bodies) can be configured in the shape of a rod.

According to various embodiments, the current can be coupled in by means of several carbon brushes arranged radially around the shaft, whereby the receiving opening (also referred to as a channel) of the carbon brushes can be provided by means of bores (e.g. of the same diameter), which for example can run perpendicular to the shaft (e.g. its axis) . The power transmission can take place, for example, from the stationary housing (also referred to as the end block housing or magnetron end block housing) to the rotating shaft.

Conventional approaches to current contacts follow carbon brushes, the axial length of which is set up as large as possible, e.g. at least equal to the radial length in order to enter ever greater currents. In contrast, an end block housing is provided herein, in which carbons can be used, the axial extent of which is smaller than the radial extent. According to various embodiments, a small axial installation space is therefore required. As an alternative or in addition, simple radial accessibility is provided (clearly through the radially extended alignment of the channels).

The (for example preloaded) carbons can, for example, provide a stroke that is greater than their axial extent. The brushes provided according to various embodiments thus have a greater stroke than the conventional brushes, in which there is less material radially to wear out. The great radial Expansion thus extends the service life and simplifies the coupling of electricity into the coals.

According to various embodiments, the or each channel for receiving the coals can be provided by means of a round bore. The current can be transmitted to the carbon by means of a stranded wire, for example via a plate that makes electrical contact with the end block housing. The coal is then pressed against the shaft by a spring located between the plate and the coal.

For example, a plurality of channels or carbon brushes are arranged next to one another along a revolution around the shaft, the number and relative arrangement of the channels or carbon brushes therein being able to be specific to the application. Each carbon brush (e.g. its carbon) can provide a minimum and maximum transferable current per surface. Due to the simplified scaling by adapting the number and / or the relative arrangement of the sliding contacts, the current can be optimally adapted to the requirements. This enables a longer service life of the sliding contacts (e.g. carbon). The channels and / or carbon brushes can, for example, be arranged in one or more than one row (i.e. in the plane of the circulation) and / or can be arranged asymmetrically and / or symmetrically per row. Optionally, at least two rows can differ from one another in the number and / or relative arrangement of channels and / or carbon brushes.

The sliding contacts (e.g. carbon) can be accommodated in channels, of which at least one (i.e. exactly one, more than one or each) channel can have, for example, a polygonal (e.g. square or rectangular) or oval cross-section (e.g. transverse to its length) .

The transmission of the current to the sliding contact (e.g. the carbon) can optionally take place directly from the housing to the sliding contact without intermediate elements such as plates and / or braids. In other words, a large part of the power (e.g. essentially all of the power) that is transferred to the shaft can take place via the physical contact between the sliding contact and the bearing section or the wall of the channel.

According to various embodiments, a simpler assembly is provided, since a radially arranged tensioning element (e.g. spring) for fixing the radially arranged sliding contacts (e.g. carbon brushes) can be omitted.

According to various embodiments, a simple encapsulation of the sliding contacts (e.g. carbon brushes) can be or can be provided in order to protect adjacent components from contamination and / or conductive coating by carbon dust.

According to various embodiments, one of the channels (e.g. a bore), e.g. at the 6 o'clock position, can be used to catch any charcoal dust.

Fig.lA illustrates an end block housing 100 according to various embodiments in a schematic side view or cross-sectional view (eg on the direction 101 the axis of rotation) and Fig.lB the end block housing 100 in a schematic front view or front cross-sectional view 100b (e.g. along the direction 101 ).

The end block housing 100 may have an atmosphere-side 112a (ie, on an atmosphere-side 112a arranged) mounting section 100v and a vacuum side (ie on a vacuum side 102a arranged) storage section 1001 exhibit. The end block housing 100 can generally be used for vacuum separation of the atmosphere side 112a from the vacuum side 102a be set up, ie have appropriate sealing structures, such as sealing surfaces or vacuum-tight closures. The assembly section 100v and the storage section 1001 can each have an opening 102v , 1021 which are connected to one another by means of a cavity 102h in the end block housing 100 .

The opening 102v of the assembly section 100v (also referred to as the first opening or assembly opening) can be from a sealing surface 104v (eg in a sealing groove). On the sealing surface 104v For example, a seal (not shown, for example an annular seal) can be in contact with the cavity 102h compared to an outside (on the vacuum side 102a) of the end block housing 100 seals. The cavity 102h can along direction 101 from the opening 1021 of the storage section 1001 (also known as a second opening or bearing opening) into the end block housing 100 be extended into it.

The warehouse section 1001 can use a variety of channels 106 exhibit, each of which canal 106 is elongated through the bearing portion from the cavity to the vacuum side. Any channel 106 can for example be cylindrical, for example provided by means of a bore.

2A and 2 B each illustrate an end block housing 200 according to various embodiments in various views analogous to the end block housing 100 . The end block housing 200 can be set up like the end block housing 100 and also a den cavity 102h circumferential groove 202n have, in which optionally a pivot bearing 202 be or can be arranged. The pivot bearing 202 can be an axis of rotation 111 exhibit. The pivot bearing 202 can, for example, a variety of balls 202w or other rolling elements 202w have, which together form the axis of rotation 111 define.

3A and 3B each illustrate an end block housing 300 according to various embodiments in various views analogous to the end block housing 100 . The end block housing 300 can be set up like the end block housing 100 or 200 and also a wave 302 have which, for example, at least in sections in the cavity 102h is arranged. The wave 302 can by means of the pivot bearing 202 rotatable in the cavity 102h be stored. The wave 302 can from the cavity 102h for example through the warehouse opening 1021 through from the storage section 1001 be extended out. Alternatively or additionally, the shaft 302 (eg having a tube) be hollow.

4A and 4B each illustrate an end block housing 400 according to various embodiments in various views analogous to the end block housing 100 . The end block housing 400 can be arranged like one of the end block housings 100 to 300 , the storage section 1001 a sleeve 402 having, which the cavity 102h and the multitude of channels 106 having. The sleeve 402 can for example be tubular and / or monolithic. The sleeve 402 can for example on the mounting section 100v attached and / or connected to this, for example monolithically.

5A and 5B each illustrate an end block housing 500 , e.g. one of the end block housings 100 to 400 , according to various embodiments in various schematic detailed views 500a , 500b (e.g. looking towards the axis of rotation 111 ).

The longitudinal extension 1061 of each channel 106 (e.g. its radial extent 1061 ) can optionally be larger than an extent 106d of the channel towards the storage opening 1021 towards (e.g. its axial extent 106d , e.g. its diameter). The longitudinal extension 1061 of each channel 106 can be perpendicular to the axis of rotation 111 be directed towards this, for example. In general, an extent or direction can be along the axis of rotation 111 as an axial extension or direction and an extension or direction that is transverse to the axis of rotation 111 and to the axis of rotation 111 is directed towards, be referred to as the radial extent or direction. An extension or direction along a revolution around the axis of rotation (eg transverse to the axis of rotation 111 and / or transversely to the radial extent or direction, for example in a radial plane) can be referred to as a circumferential extent or direction.

The axial and / or circumferential extent of each channel can for example be less than about 20 mm, for example about 15 mm, for example about 10 mm. The longitudinal extension 1061 of each channel 106 can be more than about 20 mm, for example than about 40 mm, for example than about 60 mm, for example than about 100 mm.

The variety of channels 106 can optionally be arranged relative to one another in such a way that a plane 511 (also called a radial plane 511 labeled) each channel 106 the multitude of channels 106 cuts. In other words, these can be in the radial plane 511 (from the directions 105 , 103 spanned) be arranged. The radial plane 511 can for example be transverse to the axis of rotation 111 and / or along the longitudinal extension 1061 his. The channels are clear 106 be optionally arranged offset to one another, but less than their axial extent 106d is. This minimizes the space required.

For example, the multitude of channels can be on one level 513 (also as an axial plane 513 projected overlap each other at least in pairs. The axis of rotation 111 can for example in the axial plane 513 lie.

Along the radial plane 511 can the cavity 102h , e.g. on the canals 106 , optionally have a circular cross-section.

6A and 6B each illustrate an end block housing 600 , e.g. one of the end block housings 100 to 500 , according to various embodiments in various schematic detailed views 600a , 600b (e.g. looking towards the axis of rotation 111 ).

The warehouse section 1001 may optionally have one in the cavity 102h (eg this circumferential) facing sealing surface 602 exhibit. The sealing surface 602 can be set up the warehouse opening 1021 from the mounting opening 102v to be separated in a vacuum-tight manner, for example by means of an adjacent seal. The sealing surface 602 can, for example, in a circumferential groove of the bearing section 1001 be set up.

Along the radial plane 511 can the cavity 102h , e.g. on the sealing surface 602 , have a circular cross-section.

7A and 7B each illustrate different channel configurations 700a , 700b an end block housing 700 , e.g. one of the end block housings 100 to 600 , according to various embodiments in various schematic cross-sectional views (for example, looking along the axis of rotation 111 ). In general, a large number of different channel configurations are possible, some of which are described below as examples.

In channel configuration 700a and / or channel configuration 700b can be directly adjacent channels 106 be arranged equidistant from one another, ie the same distance in pairs 106a each other. Alternatively or in addition, channels directly adjacent to one another can be used 106 be oblique to each other.

The channels 106 can be clearly arranged with high density. For example, the distance 106a between two channels 106 each be smaller than the axial, circumferential and / or radial extent 106d , 1061 of the channels 106 . For example, the distance 106a be smaller than an extent 116u (also as extensive expansion 116u denotes, e.g. their diameter) of the channels 106 along a revolution around the axis of rotation 111 is measured.

In channel configuration 700a and / or channel configuration 700b can use the channels 106 with a point on the axis of rotation 111 align (ie their longitudinal extension intersects the axis of rotation as an extension 111 in the point). Alternatively or additionally, at least some (eg all) of the channels 106 align with a point next to the axis of rotation 111 lies (not shown).

Channel configuration 700a can have exactly one pair of channels 106 which are aligned with one another (also referred to as a pair of aligned channels), for example those on opposite sides of the cavity 102h arranged two channels 106 . Channel configuration 700b can have several (e.g. two, three, four, five or more than five) pairs of aligned channels 106 exhibit.

In channel configuration 700a can be an upper side of the storage section 1001 and a lower side of the storage section 1001 differ in their number and / or their volume of channels. For example, the upper side of the bearing section 1001 fewer (e.g. no) channels 106 have than the lower side of the bearing section 1001 . The sides can, for example, on the axial plane 513 adjoin each other. The axis of rotation can for example be in the axial plane 513 lie. In channel configuration 700b can use the top of the storage section 1001 and the lower side of the storage section 1001 in their number and / or their volume of channels 106 to match.

The end block housing 700 can change the channel configuration 700a and channel configuration 700b alternatively or additionally to one another. For example, a first group can channels of the plurality of channels 106 according to the channel configuration 700a (or the channel configuration 700b) set up and / or in a first radial plane 511 be arranged. Alternatively or in addition, a second group can channels of the plurality of channels 106 according to the channel configuration 700b (or the channel configuration 700a) set up and / or in a second radial plane 511 be arranged. For example, the end block housing 700 the first group of channels 106 and the second group of channels 106 have, which are in their distance from the bearing opening 1021 differ from one another and optionally differ from one another in their channel configurations (or are set up in the same channel configuration).

The channels of the channel configuration 700a and / or channel configuration 700b can optionally be arranged symmetrically, ie they can be converted into one another by performing a symmetry operation one after the other. The symmetry operation can, for example, be a rotation operation (rotation through an angle) with respect to the axis of rotation 111 his. For example, n channels 106 (for example, all lying in one plane) have n-fold rotational symmetry. The angle of the configuration 700b can for example be 360 ° / n. The angle of the configuration 700a can be, for example, 360 ° / (2 · n) or less. The more exact the symmetry, the more uniform the operation of the end block housing can be 700 his.

Optionally one or more than one channel can be used 106 the channel configuration 700a and / or channel configuration 700b can be omitted and / or moved to modify them. This achieves a lower symmetry, which can make it possible to create space for other components.

8A and 8B each illustrate different configurations 800a , 800b an end block housing 800 , e.g. one of the end block housings 100 to 700 , according to various embodiments in various schematic cross-sectional views (for example, looking along the axis of rotation 111 ). The configuration 800a and / or configuration 800b can be achieved by modifying the preceding channel configurations 700a , 700b can be obtained.

For example, the configuration 800a can be obtained by one or more than one channel 106 the channel configurations 700a offset or by adding one or more than one channel 106 the channel configurations 700b is omitted. In configuration 800a the channels don't have to necessarily be or will be arranged equidistantly or regularly. For example, at least two pairs of channels directly adjacent to one another can differ from one another in terms of their spacing.

In configuration 800b the channels do not necessarily have to run obliquely to one another or be arranged regularly. For example, n channels 106 (for example, all channels lying on one level) of the configuration 800b be parallel to each other. The channels of the channel configuration 800b can, for example, be arranged in a translationally symmetrical manner, ie can be converted into one another by means of a translation operation (displacement by a distance). The shift can for example be transverse to the axis of rotation 111 respectively. This simplifies the production.

9 Fig. 10 illustrates an end block housing 900 , e.g. one of the end block housings 100 to 800 , according to various embodiments of a schematic cross-sectional view (for example, looking towards the axis of rotation 111 ), with empty spaces shown as dotted lines. The end block housing 900 can, for example, a variety of carbon brushes 802 have, each of which is carbon brush 802 in one channel of the plurality of channels 106 is arranged.

Optionally, the channels can have two sections 1060 , 106u which differ from one another in their axial and / or circumferential extent. A first section remote from the cavity (e.g. adjacent to the exterior) 106o can for example have a greater axial and / or circumferential extent than a second section which is closer to the cavity (for example adjoining it) 106u . That can make it possible to use a carbon brush 802 with plate 802t to be stored as described below.

The or each channel can be closed with a closure 902 (eg a stopper) be closed, eg vacuum-tight. The closure 902 can be opened (e.g. from the outside) to expose the channel. This makes it easier for the carbon brush 802 replace and / or remove their abrasion.

The first paragraph 106o of the or each channel 106 can for example have a radial extension that is greater than its axial extension. Alternatively or additionally, the second section 106u of the or each channel 106 for example, have a radial extent that is greater than its axial extent. This increases the stroke of the carbon brush 802 .

10 Fig. 10 illustrates an end block housing 1000 , e.g. one of the end block housings 100 to 900 , according to various embodiments of a schematic detailed view (for example with a view of the axis of rotation 111 ).

The or each carbon brush 802 can have a plate 106t and a carbon brush 802b (general grinding wheel 802b) have which by means of a connection 802v are connected to each other. The connection 802v can be a braid 8021 and / or a tensioning element 802f (e.g. a spring, e.g. a spiral spring). The connection 802v can be set up the carbon brush 802b to hold and / or against the shaft 302 to press. The connection 802v (e.g. the clamping element 802f) be set up resiliently and provide a spring force that counteracts an approach of the carbon brush 802b and the plate 106t is set up (also referred to as bias).

The carbon 802b can for example be cylindrical, for example at least in sections. Alternatively or additionally, the carbon brush 802b a longitudinal extension 802e (eg along the spring force of the preload) which is greater than a first expansion of the carbon brush 802b transverse to the longitudinal extension 802e and / or as a second extension that is transverse to the longitudinal extension 802e the carbon brush 802b and is transverse to the first extent. For example, the carbon brush 802b be rod-shaped. The longitudinal extension 802e the carbon brush 802b can for example be parallel to the longitudinal extent 1061 of the canal 106 be in which the carbon brush 802b is arranged.

The dish 106t can for example have a circular cross section. The dish 106t More generally speaking, however, it can also be a plate of another shape.

The dish 106t can form-fit between the second section 106u a channel and the shutter 902 be arranged in the channel, for example on the second section 106u resting on and / or pressed against it. This makes assembly easier.

The carbon brush 802 , e.g. their carbon brushes 802b , can contain carbon or be formed from it, for example in a carbon modification (for example graphite or carbon).

The current coupling into the carbon brush 802 takes place, for example, on the plate 802t , with the stranded wire 8021 the current to the carbon brush 802b directs. In other words, the braid can 8021 the plate 802t with the carbon brush 802b couple electrically conductive. The strand 8021 can for example comprise copper or be formed from it.

The strand 8021 and / or the plate 802t can optionally be omitted. Then the stream can be sent directly from the storage section 1001 (or the wall of the channel 106 ) into the carbon brush 802b are coupled into it. The carbon brush can do this 802b especially fitting to the channel 106 be set up and have the largest possible longitudinal extension. For example, the channel can 106 and the carbon brush arranged therein 802b differ in their axial and / or circumferential extent in less than 1/5 mm (millimeter), for example less than 1/10 mm (for example as 1/20 mm or 1/50 mm). In other words, they can be set up according to a transition fit to one another. For example, the carbon brush 802b Slidably fit into the channel (also known as a slip fit).

Alternatively or in addition to the carbon brush 802b (more generally speaking a grinding wheel 802b made of coal) can also be a grinding wheel 802b made of a different material (for example comprising a metal, such as brass, copper, silver, palladium, molybdenum and / or gold) can be used.

The axial and / or circumferential extent of each carbon brush can for example be less than about 20 mm, for example about 15 mm, for example about 10 mm. The longitudinal extension 1061 any carbon brush 106 can be more than about 20 mm, for example than about 40 mm, for example than about 60 mm, for example than about 100 mm.

11A and 11B each illustrate different carbon brush configurations 1100a , 1100b an end block housing 1100 , e.g. one of the end block housings 100 to 1000 , according to various embodiments in various schematic cross-sectional views (for example, looking along the axis of rotation 111 ).

According to various embodiments, one or more than one channel can be used 1102 the multitude of channels as wear traps 1102 be set up. The or each channel of the abrasion collector can do this 1102 for example free of a carbon brush 802 his. In other words, more channels can 106 (e.g. exactly one more channel) than carbon brushes 802 . The abrasion catcher 1102 it facilitates the abrasion of the carbon brushes 802 catch and / or remove. This results in less pollution from abrasion.

The abrasion catcher 1102 can for example on one of the mounting opening 102v opposite side of the cavity 102h be arranged. In other words, the cavity 102h between the abrasion catcher 1102 and the mounting opening 102v be arranged. The abrasion trap can be fully assembled 1102 below (ie in the direction of gravity thereof) the cavity 102h be arranged. For example, the place where the abrasion trap 1102 into the cavity 102h opens particularly deep. For example, the abrasion catcher 1102 have that channel from the mounting opening 102v (or the corresponding chamber wall) is furthest away.

Alternatively or additionally, additional channels can be free of a carbon brush 802 . For example, only half of the channels can 106 with a carbon brush 802 be occupied. This makes it easier to adapt to the current strength required. For example, the coals wear out faster if they transport too much or too little electricity. For example, the upper side of the bearing section can 1001 and the lower side of the storage section 1001 differ in their number of coals. For example, only in the lower side of the storage section 1001 Be arranged coals.

12A and 12B each illustrate different configurations 1200a , 1200b of the assembly section 100v an end block housing 1200 , e.g. one of the end block housings 100 to 1100 , according to various embodiments in a detailed view (for example, looking at the axis of rotation 111 ).

The assembly opening 102v can through the mounting section 100v be extended therethrough. The sealing surface 104v may extend along a closed path that defines the mounting opening 102v surrounds. On the sealing surface 104v can be a seal 1204 (e.g. a ring seal). The seals described herein can each comprise or be formed from a polymer, for example an elastomer.

configuration 1200a can be placed on a vacuum side 102a a vacuum chamber 802k be set up. The sealing surface 104v from the cavity 102h be turned away.

configuration 1200b can be pushed through a chamber wall of a vacuum chamber 802k be set up. The sealing surface 104v the cavity 102h be facing, for example by means of a circumferential projection.

The assembly section 100v can be a mounting structure 1208 (eg having threads, bores, eyelets and the like), by means of which the end block housing 1200 to a vacuum chamber 802k can be mounted. The vacuum chamber 802k can have a corresponding assembly structure.

Furthermore, the mounting section 100v an electrical connection 1210 have for electrically contacting the mounting portion 100v . At the port 1210 for example, a power supply can be connected or e.g. by means of an electrical line. The electrical connection 1210 can for example comprise copper and / or gold or be formed therefrom, for example a contact surface therefrom.

Optionally, the end block housing 1200 a dielectric separation structure 1212 (For example, a plate and / or coating) have which the mounting portion 100v from the vacuum chamber 802k galvanically separates.

13 illustrates a sputtering device 704 according to various embodiments in a schematic cross-sectional view or side view (looking along the transport path).

The sputtering device 704 can be one or more than one sputtering target 904 exhibit. The or each sputter target 904 can be part of a magnetron cathode 504 be, by means of which to atomize the sputtering target 904 a plasma is provided. The sputtering target 904 can include or be formed from the target material to be sputtered.

The magnetron cathode 504 and / or the sputter target 904 can be tubular. The tubular magnetron cathode 504 (a so-called tubular cathode) can, for example, have a tubular carrier (a so-called target base tube) on which the (eg brittle and / or fragile) sputter target 904 (eg the target material) can be attached. The sputter target can be clearly illustrated 904 surround the target base tube in the form of a jacket. Alternatively or additionally, a tubular magnetron cathode 504 a tubular sputtering target 904 (a so-called target tube) have (eg a tube made of the target material) or be formed from it.

The or each sputter target 904 can be rotatably mounted, for example by means of at least one end block 710 (also known as a magnetron end block), e.g. a pair of end blocks 710 . The or each end block 710 can be an end block housing 1300 , e.g. one of the end block housings 100 to 1200 , exhibit. By means of the end block housing 1300 can the wave 302 be stored. The wave 302 can be a target coupling 1302 have at which the sputter target 904 is coupled.

The or each end block 710 can also be set up, the magnetron cathode 504 to be supplied with a supply medium, e.g. coolant, electrical energy and / or drive energy.

The carbon brushes 802 can electric current into the shaft 302 couple, which then feed the electric current into the sputtering target 904 coupled in for the electrical supply of the plasma.

Inside the tubular magnetron cathode 504 can be a magnet system 904m be arranged, which can provide the magnetic field that the sputtering target 904 penetrates. The sputtering target can be used so that sputtering can take place on a correspondingly large area 904 an expansion 504b (e.g. along the axis of rotation 111 and / or transversely to a substrate transport direction 111p) have more than about 1 m, for example about 2 m, for example about 3 m.

A magnetron end block 710 can, for example, be set up to carry a lance which is fixedly mounted in relation to this and which extends into the sputtering target and the magnet system 904m wearing.

14A and 14B each illustrate a processing arrangement 1400a , 1400b (also referred to as a vacuum processing arrangement) according to various embodiments in a schematic cross-sectional view or side view.

According to various embodiments, a processing arrangement 1400a , 1400b a vacuum chamber 802k have, for example a substrate therein by means of a sputtering process 102 to coat. Furthermore, the processing arrangement 1400a , 1400b a transport device 108 have for transporting the substrate 102 along a transport path 111f or in a substrate transport direction 111p through the vacuum chamber 802k through. Furthermore, the processing arrangement 1400a , 1400b at least one (ie exactly one or more than one) sputtering device 704 exhibit. The sputtering device 704 can for example be set up for atomizing at least one target material to the transport path 111f down.

The vacuum chamber 802k can be provided by means of the chamber housing. The vacuum chamber 802k can be set up to generate and / or maintain a vacuum therein. For example, the processing arrangement 1400a , 1400b several vacuum chambers 802k have, of which, for example, two immediately adjacent vacuum chambers 802k adjoin each other. The multiple vacuum chambers 802k can be connected to one another by means of a substrate transfer opening so that they form a common vacuum system, for example. The vacuum system can be essentially airtight to the outside, for example by means of at least one valve, at least one chamber cover, several seals and / or at least one transfer opening flap.

According to various embodiments, the processing arrangement 1400a , 1400b a Vacuum pump arrangement 814 (having at least one main vacuum pump and / or one rough vacuum pump). The vacuum pump arrangement 814 can be set up the vacuum chamber 802k to withdraw a gas (e.g. a process gas) so that inside the vacuum chamber 802k a vacuum (ie a pressure less than 0.3 bar) and / or a pressure in a range from approximately 10 ^-3 millibars (mbar) to approximately 10 ^-7 mbar (in other words high vacuum) or a pressure less than high vacuum, for example less than approximately 10 ^-7 mbar (in other words ultra-high vacuum) can be provided or can be provided. The process gas can have a (eg inert) working gas and optionally a reactive gas or a gas mixture of several working gases and several optional reactive gases.

According to various embodiments, the processing arrangement 1400a , 1400b a gas supply 702 exhibit. By means of the gas supply 702 can the vacuum chamber 802k the process gas can be supplied to form a process atmosphere in the vacuum chamber 802k . The process pressure can be formed from an equilibrium of process gas, which is generated by means of the gas supply 702 fed and by means of the vacuum pump arrangement 814 is withdrawn.

According to various embodiments, the processing arrangement 1400a , 1400b a control device 1802 have, which with one or more components of the processing arrangement 1400a , 1400b can be coupled (shown in dashed lines) for controlling and / or regulating an operating point in the vacuum chamber 802k . For example, the vacuum chamber 802k be set up in such a way that the operating point (the process conditions) within the vacuum chamber 802k can be set or regulated, for example during the coating, for example by means of the control device 1802 .

For example, the control device 1802 be set up to control and / or regulate the coating process, for example according to a setpoint operating point. In this case, the target operating point can, for example, be a target operating parameter of the sputtering device 704 (e.g. recorded electrical target power, applied electrical target voltage, recorded electrical target current and / or target emission rate).

According to various embodiments, the transport device 108 the processing arrangement 1400a a supply roll 1002a have for unwinding a strip-shaped substrate 102 towards the coating area 706 . Furthermore, the transport device 108 the processing arrangement 1400a a take-up roll 1002b for winding up the strip-shaped substrate 102 have which from the direction of the coating area 706 is transported. Optionally, the substrate transport device 108 the processing arrangement 1400a a variety of transport rollers 320 have, which have a (for example, single or multiple curved) transport path 111f define, along which the strip-shaped substrate 102 between the supply roll 1002a and the take-up roll 1002b at the plasma generation area 502 is transported past.

A tape-shaped substrate 102 (Tape substrate) can have a film, a fleece, a tape and / or a woven fabric or be formed therefrom. For example, a tape-shaped substrate 102 a metal tape, a metal foil, a plastic tape (polymer tape) and / or a plastic film (polymer film) have or be formed therefrom.

Alternatively, the transport device 108 the processing arrangement 1400b a variety of transport rollers 320 have which for transporting a plate-shaped substrate 102 are set up. The plate-shaped substrate 102 can, for example, on the transport rollers 320 overlying and / or in a substrate carrier 1110 inserted, transported. The plate-shaped substrate 102 can for example have a wafer or another semiconductor substrate.

15th illustrates a procedure 1500 according to various embodiments in a schematic side view or cross-sectional view. The procedure 1500 can be used to operate an end block 710 be set up.

The procedure 1500 can have: in 1501 , Rotating the shaft; and in 1503 , electrical supply of the rotating shaft 302 by means of a plurality of sliding contacts (for example carbon brushes), each of which sliding contact is arranged in one of the plurality of channels and makes contact with the shaft. Rotating the shaft can include, for example: coupling mechanical energy into the shaft. For example, a sputtering target that rotates with the rotating shaft can be coupled to the rotating shaft. For example, a fluid (eg a liquid) can be supplied to and / or withdrawn from the sputtering target through the shaft.

Optionally, the channel of the abrasion collector 1102 be free of a sliding contact, which the shaft 302 contacted. This allows space to be created to collect the coal debris.

The electrical supply can include: coupling electrical energy (eg an electrical current) into the shaft by means of the multiplicity of sliding contacts (eg carbon brushes) 302 .

The procedure 1500 can optionally have: in 1505 Forming a plasma by means of the electrical energy; and / or in 1507 Sputtering a target material by means of the plasma.

The procedure 1500 can optionally have: in 1509 Coating a substrate with the sputtered target material.

16 illustrates a procedure 1600 according to various embodiments in a schematic side view or cross-sectional view. The procedure 1600 can be used to operate an end block 710 (also called a magnetron end block).

The procedure 1600 can in 1503 have: electrical supply to a shaft. The procedure 1600 can optionally at least one (ie exactly one, more than one or each) component 1501 , 1505 , 1507 , 1509 of the procedure 1500 exhibit.

The electrical supply 1503 the shaft of the end block 710 can by means of at least one (ie exactly one, more than one or each) sliding contact of the end block 710 respectively. Furthermore, mechanical energy can optionally be coupled into the shaft. The electrical supply of the shaft can for example take place while the shaft is rotating 1501 becomes.

Due to the rotation of the shaft, at least part of the at least one sliding contact on the shaft can be mechanically abraded (also referred to as abrasion). The abrasion can e.g. driven by gravitational force, are displaced into a channel of the magnetron end block (the wear collector) extending away from the shaft. For example, the abrasion can trickle into the channel. The part of the at least one sliding contact can clearly be caught in a channel of the magnetron end block which extends away from the shaft and which is closed from outside the magnetron end block.

The procedure 1600 may include in 1601: removing the part of the at least one sliding contact from the channel (eg when the electrical supply 1503 and / or turning 1501 the wave is interrupted). The channel can be the channel of the abrasion collector 1102 his.

The removal 1601 may include: opening the channel of the magnetron end block from outside the end block. After removing 1601 less material of the sliding contact can be arranged in the channel than before. In other words, the amount of material of the at least one sliding contact in the channel can be reduced.

After removing 1601 the electrical supply of the shaft can optionally take place with the multitude of sliding contacts. For example, the electrical supply to the shaft with the multiplicity of sliding contacts can be interrupted in order to remove the abrasion and can be continued with the same sliding contacts. For example, the configuration of the sliding contacts (e.g. the carbon brush configuration) can be retained.

Various examples are described below that relate to those described above and shown in the figures.

Example 1 is an end block case for a magnetron (also referred to as a magnetron end block case), comprising: an atmosphere-side mounting portion having a first opening and a sealing surface (e.g., vacuum sealing surface) surrounding the first opening; a vacuum-side bearing portion which has a second opening and a cavity for receiving a shaft (to be supported), the cavity connecting the first opening to the second opening (e.g., fluidly); wherein the bearing section has a plurality of channels, each channel extending through the bearing section longitudinally from the cavity to the vacuum side.

Example 2 is the magnetron end block housing according to Example 1, the bearing portion further comprising: a sleeve having the cavity and the plurality of channels.

Example 3 is the magnetron end block housing according to Example 1 or 2, wherein the longitudinal extension (e.g., an extension away from the cavity) of each channel of the plurality of channels is greater than an extension of the channel towards the first opening.

Example 4 is the magnetron end block housing according to any one of Examples 1 to 3, wherein the plurality of channels are arranged relative to one another such that a first plane intersects each channel of the plurality of channels, for example an axis of rotation of the shaft being transverse to the first plane .

Example 5 is the magnetron end block housing according to any one of Examples 1 to 4, wherein the cavity has a circular cross-section, the center of which lies on an axis of rotation of the shaft, the cross-section being, for example, transverse to the cross-section.

Example 6 is the magnetron end block housing according to one of Examples 1 to 5, wherein the plurality of channels projected onto a second plane overlap one another, wherein, for example, an axis of rotation of the shaft lies in the second plane.

Example 7 is the magnetron end block housing according to one of Examples 1 to 6, the bearing section further comprising: an additional sealing surface facing (eg delimiting) the cavity (eg surrounding it) for vacuum-tight separation of the first opening from the second opening.

Example 8 is the magnetron end block housing according to Example 7, wherein the additional sealing surface is arranged between the plurality of channels and the second opening.

Example 9 is the magnetron end block housing according to one of Examples 1 to 8, wherein each channel of the plurality of channels is assigned a point within the cavity with which it is aligned, with at least two (e.g. all) of the assigned points on an axis of rotation of the shaft lie; and / or at least two (e.g. all) of the assigned points lie on top of one another.

Example 10 is the magnetron end block housing according to one of Examples 1 to 9, wherein the plurality of channels are at least 5 (e.g. 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 20, 30, 50 or more) has channels.

Example 11 is the magnetron end block housing according to one of Examples 1 to 10, wherein the channels of the plurality of channels are arranged equidistant from one another and / or can be converted into one another by means of a symmetry operation.

Example 12 is the magnetron end block housing according to one of Examples 1 to 11, wherein the cavity has a circular cross-section, which is adjoined by the plurality of channels and / or the additional sealing surface.

Example 13 is the magnetron end block case according to any one of Examples 1 to 12, wherein the bearing portion is: monolithically arranged; and / or has two regions which are arranged on opposite sides of the cavity, for example one or more than one channel of the plurality of channels being arranged in each region of the two regions.

Example 14 is the magnetron end block housing according to one of Examples 1 to 13, wherein at least one (eg each) channel of the plurality of channels is at a distance from an immediately adjacent channel of the plurality of channels, the spacing of each channel of the plurality of channels being smaller is as a longitudinal extension (e.g. radial extension in the direction away from the cavity) of the channel.

Example 15 is the magnetron end block housing according to one of Examples 1 to 14, wherein at least one (i.e. exactly one, more than one or each) channel of the plurality of channels is oblique to one of the plurality of channels immediately adjacent thereto.

Example 16 is the magnetron end block housing according to one of Examples 1 to 15, wherein at least two channels of the plurality of channels form a pair of channels, wherein for example the plurality of channels is made up of a plurality of pairs of channels and optionally exactly one additional channel (e.g. providing the attrition collector), wherein the at least two channels (eg, each pair of channels) of the plurality of channels: are disposed on opposite sides of the cavity; are parallel to each other; and / or align with each other.

Example 17 is the magnetron end block housing according to one of Examples 1 to 16, wherein two immediately adjacent channels of the plurality of channels are oblique (or parallel) to one another, for example an angle between the directions along which the two immediately adjacent channels extend are less than about 90 °, e.g. than about 45 °, e.g. than about 30 °, e.g. than about 15 °, e.g. than about 10 °.

Example 18 is the magnetron end block housing according to any of Examples 1 to 17, wherein the plurality of channels are arranged substantially evenly around the circumference of the cavity, e.g. each quadrant of the perimeter having one or more than one of the plurality of channels.

Example 19 is the magnetron end block housing according to one of Examples 1 to 18, wherein the bearing section has a first half-side and a second half-side which adjoin one another (e.g. at a second plane), the half-side having more channels of the plurality of channels than the side second half-side, for example an axis of rotation of the shaft lying in the second plane.

Example 20 is the magnetron end block housing according to one of Examples 1 to 19, further comprising: a rotary bearing which is arranged in the cavity and defines, for example, an axis of rotation of the shaft.

Example 21 is the magnetron end block housing according to any one of Examples 1 to 20, wherein the cavity extends into the magnetron end block housing along an axis of rotation of the shaft from the first opening.

Example 22 is the magnetron end block housing according to one of Examples 1 to 21, further comprising: a plurality of sliding contacts (e.g. carbon brushes), each of which sliding contact is arranged in one of the plurality of channels, the sliding contact, for example, having an elongated sliding body.

Example 23 is the magnetron end block housing according to any one of Examples 1 to 22, wherein the first opening extends in a first direction (eg radial direction) into the mounting section, the first direction being transverse: to an axis of rotation of the shaft and / or to a second direction (eg axial direction) in which the second opening extends into the bearing portion.

Example 24 is the magnetron end block housing according to any one of Examples 1 to 23, wherein the cavity is angled.

Example 25 is the magnetron end block housing according to Example 24, wherein the plurality of sliding contacts (e.g. carbon brushes) has a number of sliding contacts (e.g. carbon brushes) which is less than a number of channels of the plurality of channels; and / or wherein at least one channel of the plurality of channels is free from a sliding contact, wherein for example the at least one channel is arranged on a side of the cavity opposite the first opening.

Example 26 is the magnetron end block case according to any of Examples 1 to 25, the mounting portion further comprising: a mounting structure for mounting the magnetron end block case to a vacuum chamber; and / or an electrical connection for connecting an electrical supply to the mounting section.

Example 27 is the magnetron end block case according to any one of Examples 1 to 26, further comprising: a dielectric separation structure covering a side of the mounting portion on which sealing surface is arranged; and / or a cooling fluid line extending through the first opening; and / or a cooling fluid connection in the first opening; and or .

Example 28 is the magnetron end block housing according to one of Examples 1 to 27, further comprising: a multiplicity of closures, each closure of which is configured to close one of the multiplicity of ducts in a vacuum-tight manner.

Example 29 is the magnetron end block housing according to one of Examples 1 to 28, wherein at least one (e.g. each) channel of the plurality of channels is provided by means of a bore (e.g. with a circular cross section) and / or at least partially has a cylindrical shape.

Example 30 is the magnetron end block housing according to any one of Examples 1 to 29, wherein the bearing portion has a ring segment-shaped area in which the plurality of channels are arranged, an extension of the ring-segment-shaped area in the direction toward the first opening is smaller than: one Longitudinal extension (eg radial extension) of each channel of the plurality of channels and / or an (eg radial) extension of the region in the direction away from the cavity.

Example 31 is a magnetron end block, comprising: a magnetron end block housing according to one of Examples 1 to 30, the shaft which is received in the cavity and, for example, extends through the second opening, the shaft, for example, having two immediately adjacent sliding contacts with one another conductive coupling; the shaft, for example, on the plurality of channels (e.g. directly adjacent and / or overlapping) having a circumferential surface consisting of several segments that are electrically conductively (and / or monolithically) coupled to one another and / or to an end face of the shaft .

Example 32 is a method e.g. set up for operating a magnetron end block according to example 31, comprising: optionally rotating the shaft; electrical supply of the shaft by means of at least one sliding contact (e.g. carbon brush), e.g. a plurality of sliding contacts (e.g. carbon brushes), of which each sliding contact is arranged, for example, in one of the plurality of channels and / or contacts the shaft; wherein, for example, at least a portion of the at least one sliding contact is mechanically abraded and displaced into a channel (e.g. of the plurality of channels) of the magnetron end block extending away from the shaft; optional removal of the (abraded) part of the at least one sliding contact from the channel (e.g. if the electrical supply is interrupted); after removal, optionally continuing the rotation of the shaft and / or the electrical supply of the shaft by means of the at least one sliding contact, e.g. by means of the large number of sliding contacts.

Example 33 is the method of Example 32, wherein the channel of the plurality of channels is free of sliding contact, e.g. free of a sliding contact that makes contact with the shaft.

Example 34 is the method according to Example 33, wherein the channel is arranged below the shaft with respect to a direction of gravity.

Example 35 is the method of any one of Examples 32-34, providing one or more than one of the following: the shaft with a fluid (e.g., through the first opening); a magnetron cathode, which is coupled to the shaft, with a fluid (e.g. through the shaft) and / or with electrical energy (e.g. through the shaft).

Claims (14)

Magnetron end block housing (100 to 1200), comprising: A mounting section (100v) on the atmosphere side, which has a first opening (102v) and a sealing surface (104v) surrounding the first opening (102v); • a vacuum-side bearing section (1001) which has a second opening (1021) and a cavity (102h) for receiving a shaft, the cavity (102h) connecting the first opening (102v) to the second opening (1021); • wherein the bearing section (1001) has a plurality of channels (106), each channel of which is elongated through the bearing section (1001) from the cavity (102h) to the vacuum side. Magnetron end block housing (100 to 1200) according to Claim 1 , the bearing portion (1001) further comprising: a sleeve (402) having the cavity (102h) and the plurality of channels (106). Magnetron end block housing (100 to 1200) according to Claim 1 or 2 wherein the longitudinal extension of each channel of the plurality of channels (106) is greater than an extension of the channel in the direction of the first opening (102v). Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 3 , the bearing section (1001) further comprising: an additional sealing surface (602) facing the cavity (102h) for the vacuum-tight separation of the first opening (102v) from the second opening (1021). Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 4th wherein at least one channel of the plurality of channels (106) is inclined to a channel of the plurality of channels (106) immediately adjacent thereto. Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 5 wherein at least two channels of the plurality of channels (106) are arranged on opposite sides of the cavity (102h). Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 6th wherein at least two channels of the plurality of channels (106) are aligned with one another. Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 7th , further comprising: a plurality of sliding contacts (802), each of which sliding contact is arranged in one of the plurality of channels (106). Magnetron end block housing (100 to 1200) according to Claim 8 wherein at least one of the plurality of channels (106) is free of a sliding contact. Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 9 , the mounting portion (100v) further comprising: a mounting structure (1208) for mounting the magnetron end block housing (100 to 1200) to a vacuum chamber (802k). Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 10 , further comprising: a plurality of closures (902), each of which closes a channel of the plurality of channels (106) in a vacuum-tight manner. Magnetron end block housing (100 to 1200) according to one of the Claims 1 to 11 wherein each channel of the plurality of channels (106) has a cylindrical shape at least in sections. Magnetron end block (710), comprising: a magnetron end block housing (100 to 1200) according to one of the Claims 1 to 12 • the shaft (302) which is received in the cavity (102h) and extends through the second opening (1021). A method (1600) for operating a magnetron end block (710), comprising: Electrical supply (1503) to a shaft (302) of the magnetron end block (710) by means of at least one sliding contact (802), at least part of the at least one sliding contact (802) being mechanically abraded and moving away from the shaft (302) relocating the extending channel (106) of the magnetron end block (710); • removing (1601) the part of the at least one sliding contact (802) from the channel (106).

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