DE102019101953B3 - Flexible mechanism - Google Patents

Abstract

A flexible mechanism according to the invention comprises: a base; a first base body, which is arranged separately from the base and is displaceable in a first axial direction relative to the base; a plurality of first flexible units bridging between the base and the first base body, all of the first flexible units having flexibility in the first axial direction; a crossbar provided on the base and arranged separately from the first base body; a second base body which is slidably arranged on the crossbar and is displaceable relative to the crossbar in a second axial direction; and a plurality of second flexible units that are bridged between the first base body and the second base body, wherein all second flexible units have flexibility in the second axial direction.

Description

Field of the Invention

The present invention relates to a motion platform and, more particularly, to a flexible mechanism that can be used for short-stroke precision positioning platforms to improve motion accuracy and increase response speed.

State of the art

With the development of semiconductor technology in the nanometer range, devices with high precision and high reaction speed have become the goal of continuous technological research and development for semiconductor manufacturers. Although a movement platform, which is widely used as a component of the detection unit, can offer a high movement speed, inertia makes it difficult to stop a moving object in a precise position in a very short time. As a rule, the higher the speed of movement of an object, the greater the fluctuation before it is brought to a complete stop, and the longer the required settling time, so that it is not easy to position it quickly at a precise position.

In order to solve the problem of the difficult movement of the moving objects caused by inertia, the movement errors generated after the displacement are compensated in the prior art by a flexible mechanism in order to shorten the settling time and to increase the precision. This conventional technique can provide compensation for the movement position errors of moving objects. However, in order to ensure the accuracy of the flexible mechanism, all of the components of the conventional flexible mechanism for providing flexibility are integrally formed, making the conventional flexible mechanism difficult to manufacture. In the conventional flexible mechanism, when elastic fatigue occurs at a local site and maintenance is required, only the entire mechanism can be removed and replaced due to its one-piece construction, so that resources cannot be used effectively.

Furthermore, during operation of the conventional movement platform, the power required for moving the movement platform is provided by a motor, so that the movement platform can be moved back and forth on the guide rails provided for this purpose. The displacement of the movement platform along the X-axis and the Y-axis is achieved by stacking two different axial motors. However, the motor below must bear the weight of the other motor, so that the former motor can easily be damaged by excessive stress during operation, which has a negative effect on the life of the motor.

In order to be able to drive the movement platform directly, the conventional motor is usually arranged at a position next to the components moved by the motor, so that the conventional motor is hidden deep in the movement platform and is covered by other components. Therefore, the heat generated by the operation of the engine is prevented from escaping and cannot be dissipated well, which affects the operational efficiency of the engine.

For example, a conventional flexible mechanism and a portal device having the flexible mechanism are described in the publication DE 10 2016 110 606 A1 described. It is also from the publication US 2007/0 157 479 A1 known a conventional XY table module with a position sensor, by means of which a position of an XY table can be determined precisely, and a manufacturing method therefor. It also discloses a storage system with the XY table module.

Object of the invention

It is an object of the present invention to provide a flexible mechanism which consists of several separable separate flexible units and which can be easily manufactured, assembled and repaired.

It is another object of the present invention to provide a flexible mechanism in which the weight of one drive unit is supported by a crossbar to prevent the other drive unit from being damaged by excessive stress.

To achieve the above objects, the present invention provides a flexible mechanism comprising: a base; a first base body, which is arranged separately from the base and is displaceable relative to the base in a first axial direction; a plurality of first flexible units bridging between the base and the first base body, all of the first flexible units having flexibility in the first axial direction; a crossbar provided on the base and arranged separately from the first base body; a second base body which is slidably disposed on the crossbar and relative to the crossbar in a second is axially displaceable; and a plurality of second flexible units that are bridged between the first base body and the second base body, wherein all second flexible units have flexibility in the second axial direction.

The first and second flexible units are each provided with flexibility in the first and second axial directions, which means that the first and second flexible units are flexible due to their structural design, being by the arrangement of the direction and position or are flexible in different directions by changing the angle.

With regard to the specific technical content, each first flexible unit comprises a first body which is fastened on the base, a second body which is connected to the first base body and is arranged separately from the respective first body, and a first flexible section which is connected to the respective first body and the respective second body is connected. The respective first body has an open end, the respective first flexible section and the respective second body being in the open end of the respective first body, the respective first flexible section comprising a first connecting element, a first flexible element and two second flexible elements Elements, wherein the respective first flexible element is arranged bridging between the respective first connecting element and the outer wall surface of the respective second body, wherein the respective second flexible element each bridging between the inner wall surface of the open end of the respective first body and the respective first connecting element is arranged. Thus, all of the first flexible units can have flexibility in the first axial direction.

Furthermore, each second flexible unit comprises a third body, which is fixed on the first base body, a fourth body, which is connected to the second base body and is arranged separately from the respective third body, and a second flexible section, which is connected to the respective third body and is connected to the respective fourth body. Here, the respective third body has an open end, with the respective second flexible section and the respective fourth body being in the open end of the respective third body, the respective second flexible section having a third connecting element, a third flexible element and two fourth flexible elements Elements, wherein the respective third flexible element is arranged bridging between the respective third connecting element and the outer wall surface of the respective fourth body, wherein the respective fourth flexible element each bridging between the inner wall surface of the open end of the respective third body and the respective third connecting element is arranged. Thus, all of the second flexible units can have flexibility in the second axial direction.

In order to allow the flexible mechanism to be positioned in an accurate position quickly after a high speed, long stroke movement, the flexible mechanism further includes a first drive unit disposed between the base and the first socket body for driving the first socket body, and a second Drive unit which is arranged between the crossbar and the second base body for driving the second base body. The combination of the above components enables the first and the second flexible units to be matched to the first and the second drive unit, the movement errors being compensated for in the displaced flexible mechanism in order to reduce the settling time and to improve production efficiency.

Since the second drive unit is located on the crossbar, which means that the crossbar bears the weight of the second drive unit, the first drive unit is not loaded by the weight of the second drive unit to prevent the first drive unit from being damaged by excessive loading. The combination of the crossbeam with the base prevents the second drive unit from being covered by other components, so that the heat generated during operation can be dissipated quickly, which enables the second drive unit to dissipate heat more effectively and thus ensures that the Heat-induced impairment of the operating performance of the second drive unit is minimized. Specifically, the crossbeam has a beam body located above the base and two connecting sections each extending from two ends of the beam body to the base, so that the first base body is located between the beam body and the base.

In order to ensure that the components do not interfere with one another during operation of the flexible mechanism, a gap is provided in each case between the respective fastening section and the second drive unit in order to have a margin when the first base body and the associated components are actuated by the first Drive unit are driven. That is, smooth operation is guaranteed and the components do not interfere with each other.

Figure list

• 1 eine perspektivische Ansicht eines ersten Ausführungsbeispiels gemäß der vorliegenden Erfindung;
• 2 eine schematische perspektivische Ansicht des ersten Ausführungsbeispiels gemäß 1, in der der zweite Sockelkörper nicht gezeigt ist;
• 3 eine schematische perspektivische Ansicht des ersten Ausführungsbeispiels gemäß 2, in der der Querbalken und die zweiten flexiblen Einheiten nicht dargestellt sind;
• 4 eine perspektivische Explosionsansicht des ersten Ausführungsbeispiels gemäß der vorliegenden Erfindung;
• 5 eine Draufsicht des ersten Ausführungsbeispiels einer ersten flexiblen Einheit gemäß der vorliegenden Erfindung;
• 6 eine Draufsicht des ersten Ausführungsbeispiels einer zweiten flexiblen Einheit gemäß der vorliegenden Erfindung;
• 7 eine erste Querschnittansicht der Betätigung des ersten Ausführungsbeispiels gemäß 1, die veranschaulicht, dass der erste Sockelkörper durch die erste Antriebseinheit angetrieben wird und alle mit dem ersten Sockelkörper verbundenen Komponenten zur Hin- und Herbewegung in der ersten axialen Richtung X mitbewegt werden;
• 8 eine zweite Querschnittansicht der Betätigung des ersten Ausführungsbeispiels gemäß der weiteren Perspektive von 1, die veranschaulicht, dass der zweite Sockelkörper durch die zweite Antriebseinheit angetrieben wird und der Sockelkörper sowie die zweiten flexiblen Einheiten im Zusammenwirken miteinander in der zweiten axialen Richtung Y hin und herbewegt werden.

The drawings used to explain the exemplary embodiments show:

• 1 a perspective view of a first embodiment according to the present invention;
• 2nd is a schematic perspective view of the first embodiment according to 1 , in which the second base body is not shown;
• 3rd is a schematic perspective view of the first embodiment according to 2nd , in which the crossbar and the second flexible units are not shown;
• 4th an exploded perspective view of the first embodiment according to the present invention;
• 5 a plan view of the first embodiment of a first flexible unit according to the present invention;
• 6 a plan view of the first embodiment of a second flexible unit according to the present invention;
• 7 a first cross-sectional view of the actuation of the first embodiment 1 , which illustrates that the first base body is driven by the first drive unit and that all components connected to the first base body are moved for reciprocation in the first axial direction X;
• 8th a second cross-sectional view of the actuation of the first embodiment according to the further perspective of 1 , which illustrates that the second base body is driven by the second drive unit, and the base body and the second flexible units are reciprocally moved in the second axial direction Y.

Detailed description of the exemplary embodiments

It's going on 1 to 8th Referred. The flexible mechanism provided in the first embodiment of the present invention includes: a base 10th ; a first base body 20 from the base 10th is arranged separately and relative to the base 10th is displaceable in a first axial direction X; several first flexible units 30th that between the base 10th and the first base body 20 are arranged bridging, with all first flexible units 30th to limit the direction of movement of the first base body 20 have flexibility in the first axial direction X; a crossbar 40 that's based 10th arranged and from the first base body 20 is arranged separately; a second base body 50 that slidable on the crossbar 40 arranged and relative to the crossbar 40 is displaceable in a second axial direction Y; and several second flexible units 60 between the first base body 20 and the second base body 50 are arranged bridging, with all second flexible units 60 to limit the direction of movement of the second base body 50 have flexibility in the second axial direction Y. In the present embodiment, the first base body 20 and the second base body 50 a rectangular platform structure, the number of first flexible units 30th and the second flexible units 60 is four, each being modular and corresponding to each other at each corner position of the first base body 20 and the second base body 50 are arranged corresponding to each other, with all first flexible units 30th and every second flexible unit 60 can be replaced independently. If at a certain first flexible unit 30th or for a specific second flexible unit 60 If fatigue occurs or is damaged, the maintenance personnel need only replace them and not the entire flexible mechanism, which considerably reduces the maintenance costs of the flexible mechanism and at the same time increases the convenience in maintenance and adjustment.

Every first flexible unit 30th each comprises: a first body 31 that's based 10th is attached; a second body 32 with the first base body 20 connected and from the respective first body 31 is arranged separately; and a first flexible section 33 with the respective first body 31 and the respective second body 32 connected is. It's going on 5 Referred. In the present embodiment, the respective first body 31 an open end 311 on, with the respective first flexible section 33 and the respective second body 32 in the open end 311 of the respective first body 31 located, the respective first flexible section 33 a first connecting element 331 , two first flexible elements 332 and two second flexible elements 333 has, wherein the respective first flexible element 332 spaced between the respective first connecting element 331 and the outer wall surface of the respective second body 32 is arranged bridging, the respective second flexible element 333 each between the inner wall surface of the open end 311 of the respective first body 31 and the respective first connecting element 331 is arranged bridging. Here are the relative position, number, shape or configuration of the first flexible elements 332 and the second flexible elements 333 are not limited to the above embodiment and can be varied according to the actual conditions.

Furthermore, the third body 61 , the fourth body 62 and the second flexible sections 63 of the second flexible units 60 identical to the components of the first flexible units 30th . The third fasteners 631 , the third flexible elements 632 and the fourth flexible elements 633 of the second flexible sections 63 are similar to the components of the first flexible sections 33 (as in 6 is shown). The only difference is that each third body 61 with the first base body 20 and the respective fourth body 62 with the second base body 50 connected is.

In order to allow the flexible mechanism to be quickly positioned in an accurate position after a high speed, long stroke movement, the flexible mechanism further comprises a first drive unit 70 that between the base 10th and the first base body 20 to drive the first base body 20 is arranged, and a second drive unit 80 between the crossbar 40 and the second base body 50 for driving the second base body 50 is arranged. By combining the above components, the first flexible units 30th and the second flexible units 60 each on the first drive unit 70 and the second drive unit 80 can be coordinated, with the displaced flexible mechanism compensating for the movement errors in order to reduce the settling time and to improve production efficiency.

The first drive unit 70 instructs one on the base 10th arranged first stator element 71 and one on the first socket body 20 arranged and to an end face of the base 10th adjacent first runner element 72 on, the first rotor element 72 through that between it and the adjacent first stator element 71 generated magnetic field the first base body 20 can drive for reciprocation along the first axial direction X. The second stator element 81 and the second runner element 82 the second drive unit 80 are identical to the components of the first drive unit 70 and serve to drive the reciprocation of the second base body 50 along the second axial direction Y. In the present exemplary embodiment, the first base body has 20 a first recess 21 for receiving the first rotor element 72 on, with the second base body 50 a second recess 52 for receiving the second rotor element 82 having. Here is the number of the first recesses 21 and the second recesses 52 in accordance with the number of first rotor elements 72 and the second runner elements 82 configured.

Because the second drive unit 80 for supporting the weight of the second stator element 81 on the crossbar 40 is arranged, the first drive unit 70 not by the weight of the second runner element 82 loaded to prevent the first drive unit 70 is damaged by excessive stress. By combining the crossbar 40 with the base 10th it is avoided that the second drive unit 80 is covered by other components so that the heat generated during operation can be dissipated quickly, causing the second drive unit 80 a more effective heat dissipation is made possible and thus it is ensured that the heat-induced impairment of the operating performance of the second drive unit 80 is minimized. The crossbar points in detail 40 one above the base 10th located beam body 41 and two each from two ends of the beam body 41 to the base 10th extending connecting sections 42 so that the first base body 20 between the beam body 41 and the base 10th located. Here is the second stator element 81 the second drive unit 80 on the beam body 41 arranged.

In the present exemplary embodiment, the first base body can 20 or the second base body 50 be hollow to achieve significant weight reduction, cost savings and improved strength. In this way, the first drive unit can also 70 acting load can be reduced and by the operation of the first drive unit 70 generated heat can be further reduced.

Furthermore, the underside of the second base body 50 with several fastening sections 51 , each with the fourth body 62 the respective second flexible unit 60 are combined. In the present exemplary embodiment, the fastening sections 51 at all corner positions of the second base body 50 arranged, creating the bottom of the second socket body 50 together with the mounting sections 51 a space for receiving the second drive unit 80 form.

In order to ensure that the components do not interfere with one another during operation of the flexible mechanism, there is a gap W between the respective fastening section 51 and the second drive unit 80 provided to have a margin when the first socket body 20 and the related components for actuation by the first drive unit 70 are driven. That is, smooth operation is guaranteed and the components do not interfere with each other.

Claims (10)

Flexible mechanism, including: a base (10); a first base body (20) which is arranged separately from the base (10) and is displaceable in a first axial direction (X) relative to the base (10); a plurality of first flexible units (30) bridging between the base (10) and the first base body (20), all first flexible units (30) having flexibility in the first axial direction (X); a crossbar (40) which is provided on the base (10) and is arranged separately from the first base body (20); a second base body (50) which is slidably arranged on the crossbar (40) and is displaceable relative to the crossbar (40) in a second axial direction (Y); and a plurality of second flexible units (60), which are arranged bridging between the first base body (20) and the second base body (50), all second flexible units (60) having flexibility in the second axial direction (Y). Flexible mechanism after Claim 1 , in which the crossbar (40) has a beam body (41) located above the base (10) and two connecting sections (42) each extending from two ends of the beam body (41) to the base (10), so that the first base body (20) between the bar body (41) and the base (10). Flexible mechanism after Claim 2 , wherein each first flexible unit (30) each have a first body (31) which is fixed on the base (10), a second body (32) which is connected to the first base body (20) and separated from the respective first body ( 31) is arranged separately, and comprises a first flexible section (33) which is connected to the respective first body (31) and the respective second body (32). Flexible mechanism after Claim 3 , wherein every second flexible unit (60) each have a third body (61) which is fixed on the first base body (20), a fourth body (62) which is connected to the second base body (50) and by the respective third body (61) is arranged separately, and comprises a second flexible section (63) which is connected to the respective third body (61) and the respective fourth body (62). Flexible mechanism after Claim 4 , in which the respective first body (31) has an open end (311), the respective first flexible section (33) and the respective second body (32) being located in the open end (311) of the respective first body (31) , wherein the respective first flexible section (33) has a first connecting element (331), a first flexible element (332) and two second flexible elements (333), the respective first flexible element (332) between the respective first connecting element (331 ) and an outer wall surface of the respective second body (32) is arranged bridging, the respective second flexible element (333) in each case between an inner wall surface of the open end (311) of the respective first body (31) and the respective first connecting element (331 ) is arranged bridging. Flexible mechanism after Claim 5 , in which the respective third body (61) has an open end (611), the respective second flexible section (63) and the respective fourth body (62) being located in the open end (611) of the respective third body (61) , wherein the respective second flexible section (63) has a third connecting element (631), a third flexible element (632) and two fourth flexible elements (633), the respective third flexible element (632) between the respective third connecting element (631 ) and the outer wall surface of the respective fourth body (62) is arranged bridging, the respective fourth flexible element (633) in each case between the inner wall surface of the open end (611) of the respective third body (61) and the respective third connecting element (631 ) is arranged bridging. Flexible mechanism after Claim 6 , in which the underside of the second base body (50) is provided with a plurality of fastening sections (51) which are each combined with the fourth bodies (62) of the respective second flexible unit (60). Flexible mechanism after Claim 7 wherein it further comprises a first drive unit (70) arranged between the base (10) and the first base body (20) for driving the first base body (20). Flexible mechanism according to one of the Claims 1 to 8th , wherein it further comprises a second drive unit (80), which is arranged between the crossbar (40) and the second base body (50) for driving the second base body (50). Flexible mechanism after Claim 9 , in each of which an intermediate space (W) is provided between the respective fastening section (51) and the second drive unit (80).

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