DE102018202591A1 - Optical system and method of making an optical system - Google Patents

Abstract

The present invention provides an optical system comprising a first carrier device (2) with a top side (2a), a light-conducting element (3) which is arranged on the upper side (2a) of the first carrier device (2) or on the upper side (2a ) is pronounced and comprises a coupling-in region (5a) for coupling light into the light-conducting element (3); and a luminescent sample (4) which is arranged on the upper side (2a) of the first carrier device (2) so that the luminescent sample (4) can be illuminated with light by a first partial region (3a) of the light-conducting element (3). wherein the coupling-in region (5a) is pronounced or arranged in a second partial region (3b) of the light-conducting element (3).

Description

The present invention relates to an optical system and a method of manufacturing an optical system.

State of the art

When using sensor devices which use sensors with a luminescent substance, it is of decisive importance that electromagnetic radiation which is generated and emitted by the luminescence of the sensor is detected over as large a solid angle around the luminescent substance as possible. The luminescent substance emits radiation in wavelengths characteristic of this substance after it has been excited by an action on the substance for luminescence, for example by a laser. By external influence on the sensor, for example by a magnetic field, radiation, temperature or pressure, the type and intensity of the external influence are deduced by measuring the optically detected magnetic resonance (ODMR). In the case of the optically detected magnetic resonance, resonances occur at the characteristic frequency of the irradiated microwave (alternating magnetic field). These resonances can be detected in the ODMR spectrum as a reduction of the luminescence intensity. The characteristic microwave frequency scales in proportion to the intensity of the external influence. The luminescent substance usually radiates isotropically into the room. If the detection optics have too low a collection efficiency, such as a small numerical aperture or too small a detection space angle around the luminescent substance, generally only a small sensor sensitivity is achieved since the signal-to-noise ratio assumes only a small value. To improve the sensor sensitivity, it proves to be advantageous to increase the solid angle of the detection, the sample better from interference from the environment (temperature flow from the light source, electromagnetic interference) shield, and for better flexibility and usability, the sensor as small and portable too shape. For magnetic field sensors, for example, diamonds with nitrogen vacancy defect centers are suitable.

From the DE 10 2010 029 612 A1 For example, a coupling device for coupling light into a planar waveguide is known. The coupling device has a grating coupler, which is placed in the region of an evanescent field of the waveguide on this. Molecules on the surface of the waveguide can be excited to fluoresce in the area of the evanescent field, whereby surface-bound reactions can be investigated.

Disclosure of the invention

The present invention provides an optical system according to claim 1, and a method of manufacturing an optical system according to claim 15.

Preferred developments are subject of the dependent claims.

Advantages of the invention

The idea underlying the present invention is to specify an optical system with a luminescent sample which can detect the luminescence radiation of the sample in the largest possible, almost complete, solid angle, whereby the solid angle at which the sample is excited is kept as small as possible can. Furthermore, advantageously, a high degree of shielding of the sample with respect to the outside temperature, temperature fluctuations in the optical system and mechanical stresses of the sample material can be achieved. Good shielding of the sample can advantageously increase the measurement accuracy of the physical measured variables to be determined. The optical system can furthermore be of small scale (micrometre range, MEMS), energy-saving and cost-effective and can be integrated in a sensor device.

According to the invention, the optical system comprises a first carrier device having an upper side, a photoconductive element which is arranged on the upper side of the first carrier device or which is pronounced on the upper side and a coupling-in region for coupling light into the photoconductive element. The optical system further comprises a luminescent sample, which is arranged on the upper side of the first carrier device, so that the luminescent sample can be illuminated by light through a first partial region of the light-conducting element, wherein the coupling-in region is pronounced or arranged in a second partial region of the light-conducting element ,

The luminescent sample advantageously comprises a solid-state structure, a crystal or a diamond with nitrogen vacancy centers. Upon excitation of the luminescent sample with light, for example from a laser or an LED light source, with microwave radiation or with heat, the sample emits radiation having a measurable wavelength, for example in the visible, UV or IR range. If the sample is exposed to an external influence, for example, a temperature, mechanical stress, a magnetic field or an electric field, it is advantageous by measuring the optically detected magnetic Resonance (ODMR) deduced to the nature and intensity of the external influence. In the case of the optically detected magnetic resonance, resonances advantageously occur at the characteristic frequency of the irradiated microwave. These resonances can be detected in the ODMR spectrum as a reduction of the luminescence intensity. The characteristic microwave frequency scales in proportion to the intensity of the external influence.

The luminescent sample is advantageously irradiated from a distance by a light or radiation source, and is thus advantageously thermally insulated from it. The excitation of the sample from a distance to the sample is achieved by the transport of light through the photoconductive element from the coupling region to the first partial region, at which the light is coupled out of the photoconductive element and coupled into the luminescent sample.

The first carrier device advantageously comprises a material which is designed to be scattering or reflective for emission radiation of the luminescent sample or at least coated or provided with a scattering or reflecting material. Furthermore, the material of the first carrier device is advantageously heat and voltage insulating with respect to the ambient conditions of the optical system so that temperature and / or mechanical stress gradients are virtually not forwarded to the luminescent sample.

The photoconductive member may be disposed as a discrete member on top of the first support means, or fabricated (patterned) on / in the material of the first support means, e.g., deposited, coated, vapor deposited, adhered, or the like. The light-conducting element is advantageously an optical waveguide which itself has a very low thermal conductivity and conducts almost no temperature fluctuations or mechanical stresses to the luminescent sample. The light-conducting element advantageously has a high optical conductivity, and in particular can pass on a high optical power from a light source to the luminescent sample, and virtually omits the heat transfer from the light source to the sample.

The luminescent sample can advantageously be arranged on the first carrier device after the production of the light-conducting element. The light-conducting element may advantageously be produced particularly small-scale, in particular by means of MEMS / MOEMS applications and by such construction and connection technology (AVT), and may advantageously be so pronounced that it occupies only the smallest possible solid angle to the luminescent sample around it while still advantageously illuminating the sample completely and homogeneously. Furthermore, the light-conducting element for efficient light conduction from the second partial region to the first partial region advantageously has a high refractive index relative to the surrounding material (air, material of the carrier device) and advantageously comprises a dielectric material which is transparent to the luminescence radiation of the sample. Furthermore, the light-conducting element is advantageously elongated on the upper side, wherein it has a small width and compared with it much longer length between the first portion and the second portion to better isolate the luminescent sample from the light source and the small width Cover as little as possible of the luminescent sample on its underside. As a result, a higher proportion of radiated luminescence radiation can be scattered or reflected by the first carrier device to form a photodetective element, and the solid angle for detection can be increased.

The coupling-in region can advantageously be formed directly in the light-conducting element, for example as a periodically structured surface of the light-conducting element (grating coupler), or as an independent element advantageously directly adjacent to the light-conducting element, at the second subregion thereof.

According to a preferred embodiment of the optical system, the luminescent sample is arranged on the photoconductive element in the first subregion of the photoconductive element, wherein the first subregion at least partially covers an underside of the luminescent sample.

The material of the photoconductive element is advantageously in direct contact with the material of the luminescent sample. In order that the light guided from the light-guiding element into the first sub-area can be effectively coupled out of the light-conducting element and advantageously coupled into the luminescent sample immediately after decoupling, the material of the luminescent sample advantageously has a greater refractive index than the material of the light-conducting element (US Pat. For this purpose, the luminescent element advantageously also has a dielectric material). Furthermore, the light-conducting element advantageously extends completely along a longitudinal direction of the luminescent sample in order to advantageously illuminate the sample completely and homogeneously with exciting light. The light-conducting element can advantageously also describe a loop shape below the luminescent sample in plan view of the upper side of the first carrier device, as a result of which the area of the sample to be illuminated can be increased. The loop shape can advantageously also have more complex structures have, for example, a plurality of loop turns or a y-shaped splitting. If the geometry (width, thickness, height) of the light-conducting element remains constant along the sample, the coupled-in light power along the sample decreases. In the course below the luminescent sample, the photoconductive element can advantageously have a changing geometry (loop shape, width, thickness, height) in order to inject a constant light output over the length (or width) of the luminescent sample into it and the solid angle occupied by the photoconductive element advantageously keep as low as possible. This is particularly advantageous if the characteristic length at which the optical power leaves the optical fiber is comparable or smaller than the length over which the light in the sample! Diamond should be coupled. In other words, the geometry of the photoconductive element beneath the luminescent sample can control the distribution of the light across the sample. The coupling into the luminescent sample is advantageously based only on the refraction of light and not on evanescent effects. The light-conducting element underneath the luminescent sample advantageously does not absorb the luminescence radiation of the sample and is permeable to it. Therefore, detection of the luminescence below the photoconductive member thereof is not hindered, and the solid angle of light detection by the photoconductive member is advantageously not reduced by capping. Consequently, advantageously, the entire half-space below the light-conducting element can be used to detect the luminescence radiation (emission radiation of the sample). Compared to optics with lenses which focus light for excitation on the sample, a reduction of the necessary solid angle for irradiation and an increase of the available solid angle for the detection of isotropic luminescence radiation can be achieved by the photoconductive element. The arrangement with the light-conducting element, which is in direct contact with the sample, advantageously replaces an arrangement with an optical access for the excitation as a free jet to the sample.

According to a preferred embodiment of the optical system, the luminescent sample is arranged at a distance from the light-conducting element and facing the first sub-region.

As an alternative to the arrangement of the luminescent sample directly on the photoconductive element, the sample is advantageously also arranged on top of the first carrier device, but is spaced from the photoconductive element, with one end of the first portion of the sample being closest and the sample advantageously being direct can irradiate with light. In order to be able to decouple the light from the light-conducting element for irradiating the sample, the light-conducting element advantageously comprises a decoupling area, which is itself pronounced in the light-conducting element (in the first subarea), or as an independent element directly to the light-conducting element (to the first subarea). Advantageously, the output region comprises a grating coupler or another coupling-out structure on or in the material of the first carrier device (or an intermediate carrier device) for adaptation of the numerical aperture during decoupling. If the luminescent sample then emits light, the solid angle for detection can be advantageously maximized, since the light-conducting element does not cover a region of the sample. For optimal irradiation of the sample from the photoconductive element, such a decoupling region is advantageously used / pronounced such that the numerical aperture is adapted to the refractive indices of the photoconductive element, the sample, the medium in the intermediate region and the distance between the two.

According to a preferred embodiment of the optical system, the first portion is spaced from the second portion.

The two partial regions are advantageously far enough away from each other that no heat influence of the light source is more noticeable at the position of the first partial region.

According to a preferred embodiment of the optical system, the luminescent sample comprises a diamond structure with nitrogen vacancy centers.

A diamond with nitrogen vacancy centers (NV-diamond) responds to an excitation by light with a luminescence radiation, which depends on the temperature of the diamond, for example with a wavelength of 630 nm. By additional irradiation with microwaves, the spectrum of luminescence In this case, electrons in the diamond occupy other spin states (m = + 1) and, among other things, can recombine without radiation (under microwave radiation, the fluorescence is collapsed at a microwave radiation of 2.88 GHz, where the electrons are at the m = 0 level due to the microwaves) be lifted to the m = + - 1 states and be transferred by means of the excitation by laser / light sources in the initial level and then recombine radiation-free). An additional external magnetic field advantageously brings about an additional modification of the spin levels in the diamond (Zeeman effect), which changes the position of the optically detected magnetic resonance (ODMR) in the ODMR spectrum (in the wavelength) (splitting of the m = + - 1 states of emission in two radiation peaks). Here, the frequency spacing of the irradiated microwave field / magnetic alternating field of the resonances (m = 0 -> m = + 1 and m = 0 -> m = -1) advantageously proportional to the magnetic field strength (optically detected magnetic resonance ODMR). To achieve a high sensor sensitivity, it is necessary to keep the diamond almost at a constant temperature, in particular at room temperature. The operating temperature of the diamond can be advantageously adjusted by a heating element in a sensor device (or the optical system), and kept constant by the isolated arrangement of the diamond. The possible temperature fluctuations are advantageously in the range of a few nK. In particular, a temperature gradient along the luminescent sample can be reduced by the heating element and by the insulating arrangement. In this way, a high magnetic field sensitivity of the sensor device of advantageously few pT / (Hz ^ 1/2) is achieved, which is determined by a minimum resolvable frequency shift.

According to a preferred embodiment of the optical system, the first carrier device comprises a semiconductor substrate or a wafer.

According to a preferred embodiment of the optical system, a photodetective element is arranged or pronounced on the upper side.

The first carrier device can be produced by semiconductor technologies as chips, wherein the first carrier device can advantageously comprise a substrate, for example a chip (comprising Si, advantageously crystalline Si) or a wafer. A photodetective element (photodiode) can advantageously be formed as a layer in the chip, for example by doping as pin or pn junction and below the luminescent sample, adjacent to this, and also below the photoconductive element or on the entire top of extend first support means. The light-conducting element may in this case be advantageously produced on the upper side of the first carrier device in the substrate, by structuring, vapor deposition, bonding or the like.

The coupling-in region can also be advantageously embodied as a structure directly in the chip or wafer, for example as a periodic structure, for example as a grating coupler.

According to a preferred embodiment, the optical system comprises an intermediate carrier device, which is arranged on the upper side of the first carrier device, wherein the first carrier device comprises a first cavity, the intermediate carrier device spans the first cavity, the light-conducting element with the first partial region on the intermediate carrier device over the first Cavity is arranged and is arranged laterally adjacent to the second portion with the first cavity.

The intermediate carrier device advantageously comprises a material which has a high level of constancy in temperature and mechanical stress so that the luminescent sample on the intermediate carrier device can be detected from the environment (outer region) of the optical system, from the light source and the heat from its power loss, and from a sensor device, in which the optical system can be integrated, is almost completely insulated from heat and voltage. Strains due to mechanical expansion due to temperature fluctuations in the optical system can be almost prevented by the arrangement with said first support means, the photoconductive member and / or the intermediate support means, since they have very little or no thermal expansion coefficient or have thermal expansion coefficients with the luminescent sample, the optical waveguide and / or the carrier device match, so that there is no mechanical tension in temperature changes (adapted thermal expansion coefficient). In other words, the material of the intermediate carrier device advantageously suppresses any heat and voltage gradients in the direction of the luminescent sample (also the waste heat from a light source in the vicinity of the optical system advantageously does not reach the sample). The intermediate carrier device is preferably transparent to the emission radiation of the sample. The intermediate carrier device advantageously comprises a membrane. For example, the interposer may comprise an alternating stack of insulating materials such as SiO 2, SiN, or the like, and conductive materials such as doped Si or metals. The coupling-in region with the second partial region is advantageously arranged away from the first cavity. The first cavity advantageously increases the solid angle for detection, since the cavity in the half space below the sample has a focusing effect on the emission radiation (due to scattering for a separate photodetective element opposite the cavity or through an improved collection geometry for a photodetective disposed in the cavity Element). The intermediate carrier device can advantageously cover the entire upper side of the first carrier device or only a part thereof. The light-conducting element can advantageously also be directly embossed (structured) in accordance with the arrangement on the carrier device in the material of the intermediate carrier device, or be applied, vapor-deposited, bonded or the like.

By means of a decoupling of the luminescent sample, in particular of the diamond, with respect Tension and temperature from the external conditions (from the light source), in particular by the arrangement on an intermediate support means, can advantageously be improved a depth and width of absorption lines for the microwave radiation (from the irradiation). For magnetic field measurement, the diamond can advantageously be irradiated with a light in the green wavelength range, after which it advantageously emits luminescence in the red wavelength range. The irradiation with microwaves takes place for example in the range from 2 GHz to 4 GHz. In the case of the optically detected magnetic resonance, an increased solid angle in the detection advantageously enables the SNR ratio to be improved and the sensor sensitivity to be increased. For example, the NV diamond has a refractive index of n = 2.4.

As an alternative to the use of an NV diamond, however, other luminescent samples, for example with electrically excitable fluorescent defects, for example in SiC, are also possible.

According to a preferred embodiment of the optical system, a photodetective element is arranged in the first cavity, wherein the photodetective element covers a bottom and / or at least one inner wall of the first cavity.

The first cavity advantageously has a focusing effect on the radiation of the luminescent sample, advantageously in a direction of the opening of the first cavity. Thereby, an improved collection of the emission radiation from the sample is effected by a photodetective element in the cavity, whereby a collection efficiency of the photodetective element can be significantly increased. The photodetective element advantageously surrounds the largest possible solid angle around the luminescent sample, wherein the photodetective element preferably covers all inner walls of the first cavity. The photodetective element itself increases its collection efficiency due to its enclosing shape.

Due to the focussing effect of the first cavity, and advantageously by the large solid angle thus covered for detecting emission radiation, the collection efficiency of the emission radiation isotropically emitted by the sample can be increased significantly compared to optics with lenses, since lens optics have a limited collection efficiency, for example through the limited numerical aperture or the limited solid angle. In this way, the sensor sensitivity of the device is advantageously increased by the increased collection efficiency, in particular the ratio between signal and noise (SNR, signal to noise ratio) is significantly increased.

The SNR is proportional to the root of the signal, in particular to the root of the number of emitted photons of the luminescent sample.

According to a preferred embodiment of the optical system, this comprises an optical filter element, wherein the optical filter element between the photodetective element and the luminescent sample is arranged.

The optical filter element is advantageously used if the noise is limited by photon shot noise.

The optical filter element may advantageously be a coating (by deposition) on the photodetective element. In order to reduce the received interference radiation at the photodetective element, the optical filter element is advantageously permeable only to the expected emission radiation of the sample.

According to the invention, the optical sensor device comprises an optical system according to the invention and a second carrier device, which comprises a photodetective element which is arranged in a radiation direction of the luminescent sample.

According to a preferred embodiment of the sensor device, this comprises a light source, by means of which the coupling-in region can be irradiated with a radiation for exciting the luminescent sample.

According to a preferred embodiment of the sensor device, the light source is included in a semiconductor chip.

According to a preferred embodiment of the sensor device, this is pronounced as a magnetic field sensor in a mobile or portable device.

The optical system is advantageously integrated as a component in a sensor device. In particular, by the use of semiconductor technologies and MEMS or MOEMS applications as well as by such a construction and connection technology (AVT), advantageously a particularly small-scale and cost-effective and energy-saving sensor device can be produced in large quantities and advantageous in mass applications in industry, private use, in the automotive sector or other areas. By using MEMS or MOEMS applications, as well as such assembly and connection techniques (AVT), integration of the sample (placement of an NV diamond on a membrane), any light source, of the sample can advantageously be achieved photodetective element and other components, such as a microwave source, done in the sensor device. In this regard, the sensor device is on the order of less than 1 cm ^ 3 executed. In this case, in particular in the arrangement of light sources for excitation, microwave radiators, collection devices (mirrors) and photodetective elements can be dispensed with a separate AVT, whereby the sensor device is kleinscaliger and cheaper. A small-scale version of the sensor device advantageously allows an identical or at least similar sensor sensitivity, as in laboratory sensors, in which light sources, microwave radiators and light detectors, as laboratory equipment, for example as table laser sources, microscopes or table-top microwave ovens are used. By a miniaturized design of the sensor device can be advantageously dispensed großskalige, laboratory-bound and expensive laboratory equipment. Such a mobile sensor device can be advantageously used in various products as a magnetic field sensor. The sensor device is suitable as a miniaturized sensor also in mobile telecommunications equipment (lOT applications, Internet of Things), vehicles or in devices which can search for example metallic elements (such as in walls and floors) or determine the direction of the compass for navigation.

The photodetective element of the second carrier device is advantageously arranged downstream of the luminescent sample in a radiation direction of the sample, advantageously spaced from the sample so as not to expose the sample to any mechanical strain or temperature variation due to absorption at the photodetective element. Furthermore, the photodetective element is shaped such that it encloses the largest possible solid angle around the luminescent sample. Therefore, the photodetective element may advantageously extend in curved form at least partially around the sample. For example, the photodetective element forms at least one hemisphere. In the half space opposite the photodetective element, which adjoins the luminescent sample, a reflective element (such as a mirror) can be advantageously arranged, which reflects and focuses the luminescence radiation in the direction of the photodetective element.

An optical filter element can be arranged on the photodetective element or spaced therefrom and spaced from the sample and arranged independently. The second carrier device can advantageously comprise a second cavity, with which a solid angle over the luminescent sample can be covered. The second carrier unit advantageously comprises an Si substrate as a semiconductor chip or wafer, wherein a photodetective element may be formed in the second cavity. The second carrier device can be applied in a compact design (small scale) as a chip on the top of the first carrier device, preferably bonded. The photodetective element in the second carrier device can advantageously be formed as a doped layer in the substrate of the semiconductor material or be arranged as an independent component in the second cavity.

The second carrier device can advantageously comprise the same material as the first carrier device, or be made of a different material. The two carrier devices can advantageously form an inner space in which the sample is arranged and thus advantageously completely surround the luminescent sample and therefore advantageously maximize the roughness angle for the detection of luminescence, preferably reach a complete solid angle of 4pi (the photodetective element can advantageously have as many surfaces cover the carrier devices in the interior as possible).

The light source can advantageously also be installed as an independent component in the sensor device, and arranged, for example as a miniaturized chip on the top of the first support means (glued, bonded, flip-chip method) that this thermally from the second portion and the luminescent sample is isolated and irradiates the coupling region with light. Since the light source does not have to be produced on the first carrier device, process-related influences can be reduced or advantageously avoided by manufacturing the light source on the optical system. For example, LEDs, lasers or VCSEL (vertical cavity surface emitting laser) lasers can be installed as the light source.

According to the invention, in a method for producing an optical system in a method step S1 a first carrier device provided. In one process step S2 a light-conducting element is arranged on an upper side of the first carrier device. In one process step S3 For example, a coupling-in region for coupling light into the light-conducting element is arranged in a second subregion of the light-conducting element. In one process step S4 For example, a luminescent sample is placed on top and on a first portion of the photoconductive member.

The method for producing an optical system and also a sensor device (for example, placing an NV diamond on an intermediate carrier device) can advantageously be combined with the features of the invention Versions of the optical system and the sensor device take place.

The sensor device can advantageously be produced by means of semiconductor technologies and MEMS or MOEMS applications and assembly and connection technology (AVT).

Further features and advantages of embodiments of the invention will become apparent from the following description with reference to the accompanying drawings.

list of figures

• 1 eine schematische Schnittdarstellung eines optischen Systems gemäß einer Ausführungsform der vorliegenden Erfindung;
• 2 eine schematische Schnittdarstellung eines optischen Systems gemäß einer weiteren Ausführungsform der vorliegenden Erfindung;
• 3 eine schematische Draufsicht auf eine erste Trägereinrichtung gemäß einer Ausführungsform der vorliegenden Erfindung;
• 4 eine schematische Schnittdarstellung einer optischen Sensorvorrichtung gemäß einer Ausführungsform der vorliegenden Erfindung; und
• 5 eine schematische Schnittdarstellung einer optischen Sensorvorrichtung gemäß einer weiteren Ausführungsform der vorliegenden Erfindung.

The present invention will be explained in more detail with reference to the exemplary embodiments indicated in the schematic figures of the drawings. Show it:

• 1 a schematic sectional view of an optical system according to an embodiment of the present invention;
• 2 a schematic sectional view of an optical system according to another embodiment of the present invention;
• 3 a schematic plan view of a first carrier device according to an embodiment of the present invention;
• 4 a schematic sectional view of an optical sensor device according to an embodiment of the present invention; and
• 5 a schematic sectional view of an optical sensor device according to another embodiment of the present invention.

In the figures, like reference numerals designate the same or functionally identical elements.

1 shows a schematic sectional view of an optical system according to an embodiment of the present invention.

In the optical system 1 is on the top 2a a first carrier device 2 is an elongated photoconductive element 3 arranged, which is a first subarea 3a and a second portion spaced therefrom 3b includes. In the second part 3b is a coupling area 5a in the first carrier device 2 structured, applied or directly adjoined to this on the top 2a arranged. Through the coupling area 5a can light into the photoconductive element 3 be coupled and from the second subarea 3b to the first section 3a be transported (arrow). The coupling area 5a preferably comprises a grating coupler. In the first part 3a is a luminescent sample 4 , in particular a NV diamond, on the photoconductive element 3 and on the top 2a arranged. Here, the photoconductive element covers 3 in the first subarea 3a the bottom 4a the luminescent sample 4 advantageous in part, by a difference in the refractive indices between the photoconductive element 3 and luminescent sample 4 the light from the light-conducting element 3 into the sample 4 couple. Along the first section 3a may be the geometry of the photoconductive element 3 (Width, height) favorably change to a constant light output in the sample 4 couple.

2 shows a schematic sectional view of an optical system according to another embodiment of the present invention.

The embodiment of the 2 differs only by the arrangement of the luminescent sample 4 of the 1 , In the 2 becomes the luminescent sample 4 at a distance from the first subarea 3a and the photoconductive element 3 on the top 2a arranged. This is the luminescent sample 4 from the light from the photoconductive element 3 from the side which the photoconductive element 3 facing, illuminated (arrow). To decouple the light from the photoconductive element 3 and for adjusting the opening angle of the irradiation of the sample 4 Advantageously, a photonic structure, for example a grating coupler, in the first subregion 3a or be arranged adjacent to this or in the light-conducting element 3 be pronounced (structuring of the dielectric material of the photoconductive member 3 ).

3 shows a schematic plan view of the first carrier device according to an embodiment of the present invention.

The top view on the top 2a the first carrier device 2 shows an embodiment according to the 1 , The light-conducting element 3 points in the second subarea 3b the coupling area 5a on, which light (arrow) to the first part 3a derives, which is a distance from the second subarea 3b removed on the first carrier device 2 located. The luminescent sample 4 is advantageously sufficiently removed from the region of the light irradiation in the light-conducting element, so that it is thermally decoupled from this area. To the luminescent sample 4 advantageous to illuminate completely and homogeneously, or at least to improve the coupling efficiency, has the light-conducting element 3 a change in the geometry in the first subarea 3a on. The light-conducting element 3 describes in plan view a loop below the luminescent sample 4 where the loop can also take on more complex forms, may include several loop turns or a y-shaped splitting of the light guide. Furthermore, for detecting the luminescence radiation from the sample 4 a photodetective element 6a on the top 2a be arranged of the first support means, wherein the first portion 3a and the luminescent sample 4 Advantageously, in a plan view completely within the outer sides of the photodetective element 6a are located.

To irradiate or irradiate the sample 4 With a microwave radiation, such as an alternating magnetic field (thus the spin transition of eg m = 0 to m = 1) to improve, in particular to make more efficient, a waveguide, for example, a metallic strip conductor is advantageously used to the corresponding magnetic alternating field (microwave frequency ) to the place of the sample 4 which is advantageously more efficient than mere irradiation without a waveguide. The metallic strip conductor may comprise, for example, a Helmholtz coil. The metallic strip conductor is advantageous on the carrier device 2 , arranged on a base (spacer), so that this in plan view the sample 4 advantageous laterally at least partially circulates. In this case, a distance between the sample is advantageous 4 and the metallic strip conductor kept as low as possible. The metallic strip conductor is not shown for reasons of clarity.

4 shows a schematic sectional view of an optical sensor device according to an embodiment of the present invention.

On the optical system 1 , advantageous according to the embodiment according to 1 and or 3 , Advantageously, becomes a light source L arranged. The light source L sends a radiation S from and is arranged such that the coupling region 5a from the radiation S is irradiated. The radiation S advantageously has such a light spectrum, with which an excitation of the luminescent sample 4 is possible. The light source L may be advantageous as a semiconductor chip on the first carrier device 2 Bonded, glued or placed in a flip-chip method. The light source L is, for example, an LED, a laser, a VCSEL, or other light sources which meet the requirements of size, weight, manufacturability, low heat generation or the like for mounting on a first carrier device, in particular on a wafer or chip, meet.

5 shows a schematic sectional view of an optical sensor device according to another embodiment of the present invention.

The sensor device 10 from the 5 differs from the sensor device 10 from the 4 in that the first carrier device 2 a first cavity 2 B includes which interior walls 2d and a floor 2c includes. In the first cavity 2 B is on the interior walls 2d a photodetective element 6b arranged so that this all interior walls 2d covered. Through the photodetective element 6b the solid angle for detecting the luminescence radiation in the half space below the luminescent sample 4 increased. An intermediate carrier device 7 is on the top 2a arranged and spans the cavity 2 B , In the 5 the intermediate carrier device extends 7 only partially over the top 2a However, it is also possible that these are the top 2a completely covered. The light-conducting element 3 is on or in the intermediate carrier device 7 arranged, wherein the first partial area 3a with the luminescent sample 4 completely over the first cavity 2 B located. The coupling area 5a is also on the subcarrier device 7 arranged but laterally from the first cavity 2 B spaced so that the first portion 3a thermally from the coupling region 5a in the second subarea 3b is isolated. The light from the coupling area 5a is in the photoconductive element 3 over the first cavity 2 B for trial 4 directed. A decoupling succeed only in the sample 4 into, as by appropriate materials of the photoconductive element 3 and the subcarrier device 7 (Their refractive indices) no decoupling in the intermediate carrier device 7 he follows. The arrangement of the first carrier device 2 , the photoconductive element 3 with the coupling area 5a , the intermediary institution 7 and the luminescent sample 4 Advantageously form the optical system 1 , The optical system 1 is advantageously a component in the sensor device 10 , This becomes a light source L Advantageously, as a chip comprising an LED, a laser, or a VCSEL, over the coupling-in area 5a on the first carrier device 2 , Advantageously, a chip arranged. The chip with the light source L can in this case on the intermediate carrier device 7 , and also on the photoconductive element. Due to the thermally insulating effect of the materials of the intermediate carrier device 7 and the photoconductive element 3 the sample stays 4 advantageously well insulated from the light source. Furthermore, a second carrier device 11 with a second cavity on the top 2a the first carrier device 2 arranged so that the second cavity above the first cavity 2 B and the luminescent sample 4 in the half space above the first support means 2 surrounds (in the direction of radiation). On the inner walls and / or the bottom of the second cavity is a photodetective element 6c arranged, which is advantageous from an optical filter element 8th is covered. Such a trained sensor device, in particular based on MEMS applications and corresponding AVT, may be advantageous particularly small-scale, cost-saving, energy-saving, mobile and yet highest sensor sensitivity, produced / be.

Although the present invention has been fully described above with reference to the preferred embodiment, it is not limited thereto but may be modified in a variety of manners.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102010029612 A1 [0003]

Claims (15)

Optical system (1) comprising - A first support means (2) having a top (2a); - A light-conducting element (3), which on the upper side (2a) of the first support means (2) is arranged or on the upper side (2a) is pronounced and comprises a coupling-in region (5a) for coupling light into the light-conducting element (3) ; and a luminescent sample (4) which is arranged on the upper side (2a) of the first carrier device (2) so that the luminescent sample (4) can be illuminated by light through a first partial region (3a) of the light-conducting element (3), wherein the coupling-in region (5a) is pronounced or arranged in a second partial region (3b) of the light-conducting element (3). Optical system (1) after Claim 1 in which the luminescent sample (4) is arranged on the light-conducting element (3) in the first subregion (3a) of the light-conducting element (3), wherein the first subregion (3a) has at least one underside (4a) of the luminescent sample (4) partially covered. Optical system (1) after Claim 1 in which the luminescent sample (4) is arranged at a distance from the light-conducting element (3) and facing the first sub-region (3a). Optical system (1) according to one of Claims 1 to 3 in which the first portion (3a) is spaced from the second portion (3b). Optical system (1) according to one of Claims 1 to 4 in which the luminescent sample (4) comprises a diamond structure with nitrogen vacancy centers. Optical system (1) according to one of Claims 1 to 5 in which the first carrier device (2) comprises a semiconductor substrate or a wafer. Optical system (1) according to one of Claims 1 to 6 in which a photodetective element (6a) is arranged or pronounced on the upper side (2a). Optical system (1) according to one of Claims 2 or 4 to 7 , as far as referring back to Claim 2 which comprises an intermediate carrier device (7) which is arranged on the upper side (2a), wherein - the first carrier device (2) comprises a first cavity (2b), - the intermediate carrier device (7) spans the first cavity (2b), the light-conducting element (3) with the first partial region (3a) is arranged on the intermediate carrier device (7) above the first cavity (2b) and is arranged laterally adjacent to the first cavity (2b) with the second partial region (3b). Optical system (1) after Claim 8 in which a photodetective element (6b) is arranged in the first cavity (2b), wherein the photodetective element (6b) covers a bottom (2c) and / or at least one inner wall (2d) of the first cavity (2b). Optical system (1) after Claim 7 or 9 which comprises an optical filter element (8), wherein the optical filter element (8) is arranged between the photodetective element (6a; 6b) and the luminescent sample (4). An optical sensor device (10) comprising an optical system (1) according to any one of Claims 1 to 10 , and - a second carrier device (11), which comprises a photodetective element (6c), which is arranged in a radiation direction of the luminescent sample (4). Optical sensor device (10) according to Claim 11 which comprises a light source (L), by means of which the coupling-in region (5a) can be irradiated with a radiation (S) for exciting the luminescent sample (4). Optical sensor device (10) according to Claim 12 in which the light source (L) is included in a semiconductor chip. Optical sensor device (10) according to Claim 13 , which is pronounced as a magnetic field sensor in a mobile or portable device. Method for producing an optical system (1) comprising the steps: - S1) providing a first carrier device (2); - S2) arranging a light-conducting element (3) on an upper side (2a) of the first carrier device (2); - S3) arranging a coupling-in region (5a) for coupling light into the photoconductive element (3) in a second partial region (3b) of the photoconductive element (3); and - S4) arranging a luminescent sample (4) on the top (2a) and on a first portion (3a) of the light-conducting element (3).

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