DE102017209748A1 - Method for providing a detection signal for objects to be detected - Google Patents

Abstract

The invention relates to a method for providing a detection signal for objects to be detected, wherein
- Two first photon packets of different wavelengths are generated with entangled photon pairs and wherein
- Photons of one of the first photon packets are emitted to an object
- The photon packet reflected by the object then interacts by means of quantum entanglement with the second first photon packet and wherein
- The detection signal is generated based on the time difference of emission of the first photon packet to the object and detection of an interaction between the two photon packets.

Description

The invention relates to a method for providing a detection signal for objects to be detected.

The invention also relates to a sensor device for providing a detection signal for objects to be detected.

The invention also relates to a LIDAR scanner, in particular a microscanner.

Although applicable to any sensor devices, the present invention will be explained with respect to LiDAR macroscanners.

For example, known LiDAR macro scanners have a rotor on which optical elements such as light source and detector are arranged. Other known scanners have only one mirror for beam deflection as a rotating element. In a known manner, with a pulsed light source, for. B. in the form of a laser emits a light beam and its reflection detected on an object to determine the distance of the object based on the reflected light. For this purpose, the macroscanner may have a so-called coaxial arrangement of transmit and receive paths, in which the reflected light is conducted via the light path of the emitting optics. In order to then be able to detect sufficient light in the receiver, the optical components, in particular the mirror of the receiving path are selected to be correspondingly large. When using biaxial arrangements, a large detector array is used due to the lens size and the image scale in order to reduce the optical noise power, for example by sunlight or other extraneous light sources. Biaxial arrangements with static receive channels are usually illuminated from a wide range of angles and have a low signal-to-noise ratio and hence range.

When designing a LiDAR sensor device for consumer and automotive products, eye safety may also be relevant.
From the DE 20 2009 015 194 U1 a security scanner for monitoring a scan plane for entry of objects into the scan plane has become known having a light transmitter, a light deflection unit for deflecting the light into the scan plane, a receiver for providing received signals in response to objects present in the field of vision of the scanner, and an evaluation unit for evaluating the received signals and for providing a security signal, wherein the light emitter emits light having a wavelength between 1200 nm and 1700 nm.

From the DE 10 2007 032 997 A1 For example, a laser scanner for determining roadway characteristics has become known, which uses two wavelengths-900 nm and 1550 nm-to detect different reflections.

From the US 2015/0177128 A1 Furthermore, a method for imaging using photons in quantum mechanical states with two different wavelengths has become known. In this case, photons of a first wavelength are used to illuminate sample material and photons of a second wavelength are fed to a detector, wherein the photons are not emitted and thus separated from the light path.

• - zwei erste Photonenpakete unterschiedlicher Wellenlänge mit verschränkten Photonenpaaren erzeugt werden und wobei
• - Photonen eines der ersten Photonenpakete auf ein Objekt ausgesendet werden wobei
• - das vom Objekt reflektierte Photonenpaket dann mittels Quantenverschränkung mit dem zweiten ersten Photonenpaket wechselwirkt und wobei
• - das Detektionssignal basierend auf der Zeitdifferenz von Aussendung des ersten Photonenpakets auf das Objekt und Detektion einer Wechselwirkung zwischen den beiden Photonenpaketen erzeugt wird.

In one embodiment, the invention provides a method for providing a detection signal for objects to be detected, wherein

• - Two first photon packets of different wavelengths are generated with entangled photon pairs and wherein
• - Photons of one of the first photon packets are emitted to an object
• - The photon packet reflected by the object then interacts by means of quantum entanglement with the second first photon packet and wherein
• - The detection signal is generated based on the time difference of emission of the first photon packet to the object and detection of an interaction between the two photon packets.

In a further embodiment, the invention provides a sensor device for providing a detection signal for objects to be detected, comprising a generating device for generating two first photon packets of different wavelengths with entangled photon pairs, a transmitting device for transmitting one of the first photon packets to the object, a receiving device for receiving the photon packets reflected from the object, an entanglement device for quantum entanglement of received photon packet and a first photon packet, and a detector for generating the detection signal based on the time difference of emission of the first photon packet to the object and detection of an interaction between the two photon packets.

In a further embodiment, the invention provides a LIDAR scanner, in particular a micro scanner, with at least one sensor device according to one of claims 5-12, wherein the LIDAR scanner has a micromechanical Mirror for deflecting one of the first photon packets has.

In other words, embodiments of the invention provide a sensor device that uses entangled photonic pairs of two wavelengths and splits them into two photon packets - sensor packet and observer packet - of which the sensor packet interacts with the object to be detected at a first wavelength , By means of quantum entanglement, the photons of the sensor packet transmit information of the quanta of the sensor packet from the sensor package to the quanta of the second photon packet, ie the observer packet with a second wavelength. The time between transmission of the sensor packet and detection of the change of the physical parameter in the observer packet serves as a measurement signal for determining the object distance.

The term "black silicon" is to be understood as meaning black silicon.

One of the advantages achieved is that the eye safety can be improved, in particular in that the transmission power and / or the wavelength of the emitted packet can be increased or generally selected independently of the design and / or the spectral sensitivity of the detector. Another advantage is the high sensitivity, since a completely different noise power path is used. A further advantage is increased flexibility, since it is also possible, for example, to use a planar detector in a biaxial arrangement. Another advantage is that the installation space can be reduced because smaller detectors or detection devices can be used with the same signal-to-noise ratio. Likewise, simpler wavelength filters can be used because narrow-band, angle-independent wavelength filters, which are expensive to manufacture, can be omitted.

Further features, advantages and further embodiments of the invention are described below or become apparent:

According to a further advantageous embodiment, photons of the photon packet reflected by the object with the first wavelength and photons of an output light beam with output wavelength are superimposed to produce two second photon packets, one with the first wavelength, one with the second wavelength, each with entangled photon pairs, the two photon packets with photons second Wavelength are superimposed. This allows a reliable interaction between photon packets.

According to a further advantageous embodiment, photons of the second wavelength of the first photon packet circulate in a circulation device for a certain period of time. This can be achieved in a simple manner that the observer package is kept ready until the sensor package has been reflected by the object and detected by the receiving path. Possible time periods are, for example, between 1 ns and 200 ns, in particular between 2 and 100 ns, preferably between 5 and 75 ns.

According to a further advantageous development, the polarization of a photon packet is rotated and / or filtered before the emission and / or before the detection. This makes it possible to achieve that only photons of a specific polarization enter or be emitted into the detector, which improves the detection of the interaction between photon packets of the same wavelength.

According to a further advantageous development, the generation device and / or the entanglement device comprise a non-linear optical crystal. One of the advantages achieved with this is that two light beams with entangled photon pairs can be generated in a simple and reliable manner simultaneously. If the generation device and the entanglement device together comprise a non-linear optical crystal, that is to say if a light beam, photon packet or the like is passed through it several times, this is particularly cost-effective.

According to a further advantageous development, the nonlinear optical crystal is made of in particular periodically poled potassium titanyl phosphate, lithium niobate and / or linear geometric lithium tantalate and / or barium borate, lithium triborate, bismuth borate and / or potassium dihydrogen phosphate. In this way, a nonlinear optical crystal can be produced in a flexible manner.

According to a further advantageous development, the light source is designed to generate pulsed light. By means of a light pulse generating light source photon packets can be generated in a simple manner, which are easier resolved in time and thus can be measured.

According to a further advantageous development, the light source can be controlled by means of a pulse-shaped modulated current source. Thus, the light source can be easily controlled.

According to a further advantageous development, a circulation device is arranged for circulating the light beam with photons of the second wavelength of one of the first photon packets for a specific period of time, in particular in the form of an optical gyroscope. This allows for easy Make sure that the observer photon packet is kept ready until the sensor photon packet is reflected by the object and detected by the receiving path.

According to a further advantageous development, a coupler is arranged in each case for coupling and decoupling a photon package from the circulation device. This makes it easy to achieve a coupling and decoupling of a light beam from the circulation device.

According to a further advantageous embodiment, the coupler for decoupling on an adaptive coupling factor, such that the intensity of the coupled light is substantially constant. Thus, the intensity of the coupled-out light is independent of the energy stored in the circulation means.

According to a further advantageous development, the circulation device and coupler for decoupling have an adjustable distance from one another for adaptation of the coupling factor. This makes it possible to achieve a simple and effective adaptation of the coupling factor. Alternatively or additionally, an adaptation of the coupling factor is electro-optically possible, for example by changing the optical material properties of the coupler. In addition, amplifiers or attenuation can be introduced alternatively or additionally. It is also possible to design the coupler according to the coupling, that is, for example, to adjust the coupling factor by adjusting the distance between the circulation device and coupler for coupling. Alternatively or additionally, an adaptation of the coupling factor is electro-optically possible, for example by changing the optical material properties of the coupler for coupling.

According to a further advantageous development of the coupling factor of the coupler for decoupling by changing its optical properties is adaptable. This can be done, for example, by changing the ambient temperature, a current, a charge carrier density and / or refractive index. This makes it possible to achieve a fast and flexible adaptation of the coupling factor.

According to a further advantageous development, an absorber is arranged at least for photons of the received photon packet from the entanglement device. One of the advantages achieved is that in a simple and reliable manner, the object beam, that is to say the photon packets which are emitted onto the object and / or reflected by it, which emerges from the entanglement device, can be hidden.

According to a further advantageous development of the absorber is made of black silicone. This allows light to be absorbed effectively.

According to a further advantageous development, a receiving device for receiving objects of reflected light beams is arranged, which has a frequency filter, in particular a bandpass filter, which is designed to suppress the first reference beam and to transmit the object beam. A possible advantage is that extraneous light can be reliably faded out. In this case, the bandpass filter for transmitting light of the wavelength of the object beam +/- 10 nm, in particular +/- 5 nm, preferably +/- 2.5 nm and / or preferably +/- 5%, in particular +/- 2%, preferably + / - 1% be trained.

According to a further advantageous embodiment, a time difference device is arranged, which has a digital counter, in particular controlled by clock sources with high frequency, and / or a series connection of several digital gates, Thus, a particularly reliable measurement of the time is possible. High frequencies are frequencies in the GHz range, preferably between 1-300 GHz, in particular between 5-100 GHz.

According to a further advantageous development, the detector device has a non-linear detection characteristic. Thus, an override of the detector can be avoided.

Further important features and advantages of the invention will become apparent from the subclaims, from the drawings, and from associated figure description with reference to the drawings.

It is understood that the features mentioned above and those yet to be explained below can be used not only in the particular combination given, but also in other combinations or in isolation, without departing from the scope of the present invention.

Preferred embodiments and embodiments of the invention are illustrated in the drawings and will be described in more detail in the following description, wherein like reference numerals refer to the same or similar or functionally identical components or elements.

• 1 eine Sensorvorrichtung gemäß einer ersten Ausführungsform der vorliegenden Erfindung;
• 2 ein Messsignal einer Detektoreinrichtung gemäß einer zweiten Ausführungsform der vorliegenden Erfindung; und
• 3 Schritte eines Verfahrens gemäß einer dritten Ausführungsform der vorliegenden Erfindung.

This show in a schematic form

• 1 a sensor device according to a first embodiment of the present invention;
• 2 a measurement signal of a detector device according to a second embodiment of the present invention; and
• 3 Steps of a method according to a third embodiment of the present invention.

1 shows a sensor device according to a first embodiment of the present invention.

In 1 an embodiment of a sensor device with components is shown.

First, a ray 1 consisting of coherent photons of wavelength λ ₀ , for example 531 nm, by means of a laser 11 generated. The laser power of the laser 11 is powered by a pulse-modulated current source 10 with the continuous level I ₁ and the pulse level I ₂ controlled. The laser 11 accordingly emits a continuous service P ₁ , for example, 1 mW and a pulse power P ₂ , for example, 50 W. The pulse length is, for example, between 1 ns to 10 ns, preferably between 2 ns and 8 ns, in particular between 4 ns and 6 ns.

The laser beam 1 then becomes a beam splitter 20 fed. There are two laser beams 1a and 1b. The ray la becomes a first step in a non-linear crystal 30a fed. This may be made of periodically poled potassium titanyl phosphate, periodically poled lithium niobate, periodically poled stoichiometric lithium tantalate, barium borate, lithium triborate, bismuth borate and / or potassium dihydrogen phosphate. This results in a first step in two superimposed beams 4 and 5 entangled photon pairs with two different wavelengths, for example. λ ₁ = 1550 nm and λ ₂ = 810 nm.

In a second step, the beam 4 with the wavelength λ ₁ and the beam 5 with the wavelength λ ₂ by means of a wavelength-selective beam splitter 60 , for example in the form of a dichroic mirror, spatially separated. Due to the pulsed excitation of the laser 11 become the beam 4 to the sensor (photon) package λ ₁ and the beam 5 to the observer (photon) package λ ₂ , An absorber for the photons of the laser 11 can be used optionally.
The beam 5 of the observer package is transmitted via a waveguide and a first coupler 111 an optical resonator 110 fed. There, the photons circulate for a period of about 1-200 ns, preferably 10-150 ns, in particular 50-100 ns, in particular 75-95 ns. With the help of a second coupler 112 In particular, a small part of the photons is continuously decoupled. The coupling factor is chosen so that for the duration of the sensor package from the device to the object 70 and back (T _TOF ) a sufficient number of photons in the resonator 110 remain (-20 to -80 dB). In a particularly advantageous embodiment, the coupler 112 an adaptive coupling factor such that the intensity of the coupled-out light is constant and does not depend on the energy stored in the resonator. This is, for example, by an adaptive change in the distance of the coupler 112 from the resonator 110 or electro-optically by changing the optical material properties of the coupler 112 in consequence of an electrical signal. Alternatively or additionally, amplifiers or attenuators can also be arranged. The same applies accordingly for the coupler 111 ,

The means of the coupler 112 decoupled light 5 is over the deflecting mirror 56 a beam combiner 90 fed. The waveguides, the couplers 111 . 112 and the resonator 110 are in the wavelength range around the wavelength λ ₂ transparent. Suitable materials for their preparation are, for example, SiN or SiO. The waveguide has here, for example, a width of about 1 micron and a thickness of about 500 nm. The resonator 110 has a diameter of, for example, 10 .mu.m and an attenuation of, for example, <0.9 dB / cm.

The photons of the light beam 4 of the sensor package are optionally produced after generation and entanglement by means of a retardation plate 65 , in particular a λ / 4 plate, rotated in polarization and by means of a transmitting device optionally or additionally with a deflection device 68 the measuring object 70 fed. The photons of the sensor package 4 become of the measurement object 70 here diffuse, reflected and proportionate of a receiving optics 67 added. The receiving optics 67 Optionally has a wavelength filter 66 on. The wavelength filter 66 is preferably a bandpass filter with high transmission at, for example, λ ₁ +/- 10 nm, in particular λ ₁ +/- 5 nm, preferably λ ₁ +/- 2.5 nm or λ ₁ +/- 1.5 nm and / or preferably λ ₁ + / -5%, in particular λ ₁ +/- 2%, preferably λ ₁ +/- 1% and low transmission at λ ₂ , preferably in a range λ ₂ +/- 10 nm, in particular λ ₂ +/- 5 nm, preferably λ ₂ +/- 2.5nm or λ ₂ +/- 1.5nm and / or preferably λ ₂ +/- 5%, especially λ ₂ +/- 2%.

In the third step, those of the receiving optics 67 picked up photons from the beam 4 a beam combiner 80 fed and there with the light 1b of the coherent laser 11 superimposed. The superimposed rays 4 . 1b become a second non-linear crystal 30b fed. This results in more entangled photon pairs 4 . 5 ' with the first and second wavelengths 5 ' , for example λ ₁ = 1550 nm and λ ₂ = 810nm or any wavelength between 700nm and 1600nm. The newly generated photons are the first wavelength λ ₁ of the beam 4 from the previously generated photons of the first wavelength λ ₁ indistinguishable and thus continue to be denoted by reference numerals 4 in 1 designated. The photons of the beam 4 are no longer needed for detection and can be an absorber 96 be supplied. An absorber for the photons of the laser 11 can optionally be used additionally.

In the fourth step, the photons of the light beam decoupled from the resonator become 5 of the observer package with the photons generated in step three indistinguishably superimposed and in the fifth step by means of an optional polarization filter 95 the detector 100 fed and converted into an electrical signal. The detector 100 For example, a photodiode that detects the intensity of the photon current or may have a SPAD diode that responds to individual photons. The latter enables reliable detection even at low light intensity.

wobei c₀ die Lichtgeschwindigkeit darstellt. Die Zeitspanne kann mit bekannten Methoden der elektrischen Zeitmessung bestimmt werden. Besonders geeignet sind digitale Zähler, welche von hochfrequenten Taktquellen inkrementiert werden oder die Hintereinanderschaltung von digitalen Gattern, wobei das Signal t₀ die Messung auslöst und die Detektion von S_d die Messung beendet.In the 1 illustrated embodiment of the sensor device is a LiDAR system, which corresponds to a detection signal 2 supplies. The basic level of the laser P ₁ leads to a detection signal level S ₁ , At the time of pulse generation t ₀ , the detection signal becomes the level S ₂ solid rising. It is possible to prevent overloading by a non-linear detector characteristic. In the time span between the emission of the pulse and the arrival of the reflected light t _TOF , just as before the pulse generation, only quanta of the light rays are present at the detector 5 and 5 ' to detect which in no interaction with the quanta of the light beam 4 of the sensor package. At the time of arrival of the reflected quanta 4 the sensor packet and the generation of the other entangled quanta in the third step finds an interaction between the quanta by means of quantum entanglement 5 the observer package and the quantum 4 the sensor package instead. Due to the corresponding indistinguishable superposition and optionally filtering by means of a polarization filter, a change in the detection signal S _d generated. The time period t _TOF between the generation of the pulse and the detection of the influence of the quanta of the observer Paktes can by means of a time measuring device 200 measured and by means of an evaluation 300 be converted into the desired object distance d via the equation: $$\text{d}={\mathrm{\tau }}_{\text{TOF}}*{\text{c}}_0/\mathrm{2,}$$

in which c ₀ represents the speed of light. The time span can be determined by known methods of electrical time measurement. Particularly suitable are digital counters, which are incremented by high-frequency clock sources or the series connection of digital gates, wherein the signal t ₀ the measurement triggers and the detection of S _d the measurement ends.

3 shows steps of a method according to a third embodiment of the present invention.

In a first step T1 become entangled photon pairs with two different wavelengths λ ₁ . λ ₂ by means of a coherent laser 11 and a first nonlinear crystal 30a generated.

In a second step T2 these are separated into two photon packets, one of which is the first packet - sensor package - with a first wavelength λ ₁ with an object 70 interacts and the second package - observer package - with a second wavelength λ ₂ in an optical gyro 110 circulated for a period of time in the range of ~ 100 ns. The photons of the sensor package become after generation and entanglement by means of a retardation plate 65 , in particular in the form of a λ / 4 plate in the polarization in a third step T3 turned.

By means of a transmitting device and in addition or alternatively with a deflection device then photons of the sensor pact the measurement object 70 in a fourth step T4 fed. The photons of the sensor package become diffuse from the measurement object in a fifth step T5 reflected and proportionate of the receiving optics in a sixth step T6 added.

In a seventh step T7 The captured photons become a second non-linear crystal 30b fed and there with the light of the coherent laser 11 in an eighth step T8 superimposed. This results in further entangled photon pairs with the first and the second wavelength λ ₁ . λ ₂ , The newly generated photons are the first wavelength λ ₁ from the previously in the second step T2 generated photons of the first wavelength λ ₁ indistinguishable. From those in the optical gyro 110 circulating photons of the second wavelength λ ₂ which in the first step T1 are generated by means of a coupler twelve a particular small part in a ninth step T9 decoupled and in the tenth step T10 with the eighth step T8 generated photons of the second wavelength λ ₂ indistinguishable superimposed. The superimposed photons of the second wavelength λ ₂ be in an eleventh step T11 a detector 110 fed and converted into an electrical signal. By means of a time measuring device 200 can in a twelfth step T12 the time span t _TOF between the Generation of the pulse and the detection of the influence of the quanta of the observer Pact measured and by means of an evaluation 300 into the sought object distance d in a thirteenth step T13 be converted.

In summary, the invention, and in particular its embodiments, and in particular the embodiments described, provide a compact, cost-effective and reliable LiDAR sensor system with high sensitivity and high eye safety. In detail, by separating the wavelength for the illumination of the object and the detection, for example, an optimization of eye safety and / or maximizing the allowable transmission power regardless of the realization of a suitable detector possible. Furthermore, a bandwidth of a spectral filter arranged in the detection path is no longer determinative of the noise power and thus in particular independent of the sunlight. Thus, for example, a planar detector can be used in a biaxial detection path or the entire light collected by the receiving optics can be fed to a single detector by means of a suitable structure in the integrated photonics, thus avoiding a receiving array. At the same time can be dispensed with a very narrow-band, angle-independent, but complicated wavelength filter.

This provides high sensitivity by using a completely different noise performance path, allowing for a compact LiDAR system with smaller lenses and possibly micromirror deflection, for use with complex receiver arrays. Similarly, the LiDAR system can also be combined with optical phase arrays

Although the present invention has been described in terms of preferred embodiments, it is not limited thereto, but modifiable in a variety of ways.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 202009015194 U1 [0006]
• DE 102007032997 A1 [0007]
• US 2015/0177128 A1 [0008]

Claims (13)

Method for providing a detection signal (S _D ) for objects to be detected (70), wherein - two first photon packets (4, 5) of different wavelengths (λ ₁ , λ ₂ ) are generated with entangled photon pairs and wherein - photons of one of the first photon packets ( λ ₁ ) are transmitted to an object (70) wherein - the photon packet reflected by the object (70) interacts with the second first photon packet (λ ₂ ) by means of quantum entanglement and wherein - the detection signal (S _D ) is based on the time difference of transmission of the signal first photon packet (4) on the object (70) and detection of an interaction between the two photon packets (λ ₁ , λ ₂ ) is generated. Method according to Claim 1 in which - photons of the photon packet (4) reflected by the object (70) are superimposed with first wavelength (λ ₁ ) and photons of an output light beam (1) with output wavelength (λ ₀ ) for producing two second photon packets (4, 5 ') with first wavelength (λ ₁ ), one with second wavelength (λ ₂ ), each with entangled photon pairs and wherein - the two photon packets (5, 5 ') are superimposed with photons of the second wavelength (λ ₂ ). Method according to one of Claims 1 or 2 in that photons of the second wavelength (λ ₂ ) of the first photon packet (5) circulate in a circulation device (110) for a certain period of time. Method according to one of Claims 1 - 3 wherein before the emission and / or before the detection, the polarization of a photon packet is rotated and / or filtered. Sensor device for providing a detection signal (S _d ) for objects to be detected (70), comprising generating means (10, 11, 30a) for generating two first photon packets (4, 5) of different wavelengths (λ ₁ , λ ₂ ) with entangled photon pairs, a transmitting device (60, 65, 68) for emitting one of the first photon packets (4) onto the object, a receiving device (66, 67, 80) for receiving the photon packet (4) reflected by the object, an entanglement device (30b, 90) for Quantum entanglement of received photon packet (4) and a first photon packet (5), and a detector for generating the detection signal (S _D ) based on the time difference of emission of the first photon packet (4) on the object (70) and detection of an interaction between the two photon packets (4, 5). Sensor device according to Claim 5 wherein the generating means (10, 11, 60) and / or the entangling means (30b, 90) comprise a non-linear optical crystal (30a, 30b), the non-linear optical crystal (30a, 30b) being made of, in particular, periodically poled Potassium titanyl phosphate, lithium niobate, and / or stoichiometric lithium tantalate and / or barium borate, lithium triborate, bismuth borate, and / or potassium dihydrogen phosphate. Sensor device according to one of Claims 5 or 6 in which a circulation device (110) is arranged to circulate the light beam with photons of the second wavelength (λ ₂ ) of one of the first photon packets (5) for a certain period of time, in particular in the form of an optical gyroscope. Sensor device according to Claim 7 , wherein for coupling and decoupling of a photon packet from the circulation device (110) each have a coupler (111, 112) is arranged, which have an adaptive coupling factor, such that the intensity of the coupled-out light is substantially constant. Sensor device according to Claim 8 in that the circulation device (110) and coupler for decoupling (112) have an adjustable distance from one another for adaptation of the coupling factor. Sensor device according to Claim 8 , wherein the coupling factor of the coupler for coupling (112) is adaptable by means of changing its optical properties. Sensor device according to one of Claims 5 - 10 wherein an absorber (96) is arranged at least for photons of the received photon packet (4) from the entangling means (30b), which may be made of black silicone. Sensor device according to one of Claims 5 - 11 in which a receiving device (66, 67, 68) is arranged for receiving light beams (4) reflected by objects (70), which has a frequency filter, in particular a bandpass filter, for suppressing light of one of the wavelengths and for transmitting the other Wavelength is formed. LIDAR scanner, in particular a micro-scanner, with at least one sensor device according to one of the Claims 5 - twelve , wherein the LIDAR scanner has a micromechanical mirror for deflecting one of the first photon packets (4).

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