DE102017123522A1 - Switchable beam splitter device - Google Patents

Abstract

A switchable beam splitter device (100) for splitting beams into sub-beams is provided. It comprises a first optical input (101), at least a first optical output (102), a first beam guide section (103), a second beam guide section (104), and a partially reflecting layer (105). This is designed to divide an incident beam (106) into at least one associated transmitted partial beam (107) which is passed through the partially reflecting layer (105) and an associated reflected partial beam (108) which is applied to the partially reflecting layer (105 ) is reflected. In addition, the beam splitter device (100) has a cavity (109) present at least in sections between the first beam guide section (103) and the second beam guide section (104). The cavity (109) and the partially reflecting layer (105) are arranged such that a beam path from the first optical input (101) to the first optical output (102) passes through the cavity (109) and the partially reflecting layer (105), when the cavity (109) is filled with a liquid (110).
In addition, a switchable optical filter device and an optical observation device are provided.

Description

The present invention relates to a switchable beam splitter device for splitting a beam into sub-beams and also to a switchable optical filter device. In addition, the invention relates to an optical observation device, in particular a microscope.

Beam splitters or optical splitters are optical components with which a light beam or a beam can be divided into two partial beams or two partial beams. Beam splitters are used, for example, in optical observation equipment, e.g. when using double eyepieces, but also for example in interferometers for use. Likewise, optical observers often use optical filters to filter out, for example, certain spectral components of the incident light.

In order to be able to switchably realize such large-aperture optical elements, these can be realized with mechanically movable components in which elements with different effects in the beam path, i. the path that a beam or, after division, at least one sub-beam thereof, takes through the beam splitter device. For example, Switching a beam splitter on and off or switching between different operating states, switchable optical splitters, for example in the form of geometric, movable splitter blocks, can be used.

Also electronically switchable optical elements are known. In the DE102009057985A1 For example, an electronically switchable dichroic beam splitter is described in which a liquid crystal device whose crystals are provided with a reflective coating can be switched by applying a voltage between light reflection and transmission.

Mechanically movable elements increase the necessary size of the device due to the space required for the movement and the motors possibly used for the drive. In addition, the requirements for the correct adjustment or positioning of the optical elements, for example, a beam splitter with mechanically movable elements are very high. Electronically switchable optical elements have spectrally restricted transmission ranges and reflection ranges with a pronounced spectral characteristic and can be susceptible to scattered light and possibly birefringence effects.

It is an object of the present invention to provide a compact, switchable beam splitter device with improved accuracy, which does not require repeated adjustment between switching operations and is suitable for wide spectral ranges. Accordingly, it is also an object of the invention to provide a switchable optical filter device which can be realized in a compact design and which does not require repeated adjustment between switching operations and is suitable for wide spectral ranges.

This object is achieved with a beam splitter device for splitting a beam into partial beams according to claim 1 and an optical filter device according to claim 17 and an optical observation device according to claim 21. Preferred embodiments and further developments of the invention will become apparent from the dependent claims.

According to one aspect of the invention, a beam splitter device for splitting beams into sub-beams comprises a first optical input, at least a first optical output, a first beam-guiding section, a second beam-guiding section and a partially reflecting layer, i. an optical splitter layer configured to split an incident beam into at least one associated transmitted partial beam passed through the partially reflecting layer and an associated reflected partial beam reflected at the partially reflective layer, the beam splitter device also a cavity present at least in sections between the first beam guiding section and the second beam guiding section, wherein the cavity and the partially reflecting layer are arranged so that a beam path from the first optical input to the first optical output passes through the cavity and the partially reflecting layer, if the Cavity is filled with a liquid.

The device may comprise the liquid, in particular, for example, if it is intended to reuse it, or it may be provided to supply the device with this.

A Strahlleitabschnitt is an optical element or suitable for beam line substrate through which a beam can be passed. First and second beam-guiding sections are either two optical elements or denote a first region of an optical element and a second region of the same optical element, through which a beam path of a radiation beam passes in succession. The beam path extends from a first optical input, where the beam enters one of the Strahlleitabschnitte, at least a first optical output, where the beam or after striking or If at least one partial beam emerges from the beam splitter device when the beam splitting is carried out on the partially reflecting layer. A partially reflecting layer reflects a first portion of the incident beam and passes a second portion through the layer. In addition, depending on the nature of the selected partially reflective layer, a third portion of the radiation beam may also be absorbed by the partially reflecting layer.

An optical output is a location where a beam can exit the beam splitter device. If the beam path, i. the course of a beam through the beam splitter device, changeable by a switching device such as the fillable and emptied with the liquid cavity can exit at the optical output in at least one of the switching states, a beam.

How to arrange the cavity and the partially reflecting layer so that the optical path from the first optical input to the first optical output passes through the liquid-filled cavity and the partially reflecting layer depends on the shape of the beam guiding sections selected in the respective embodiment and the position of the optical input and output at the first and second Strahlleitabschnitt from. In at least one of the operating states of the cavity, the optical output and the optical input are not at the same beam guide section.

For example, a beam splitting device may be a beam splitter cube having first and second half-cube prisms as first and second beam guiding portions between which the partially reflecting layer is disposed, for example, as an optical interface, i. a coating applied to a surface of the first and / or the second beam guiding section, the cavity also being formed, at least in sections, e.g. in the form of a gap between the two Strahlleitabschnitten. This can be filled with the liquid. If it is not in a first operating state in which it is filled with the liquid, it is in a second operating state, depending on the selected embodiment, filled with a different liquid, air or other gas or has a vacuum. For this second mode of operation, the gap will hereinafter be referred to as "deflated" or "empty" even though there is no vacuum, but another liquid, air or other gas therein. Preferably, the beam experiences in the second operating state, i. at the empty, not filled with the liquid cavity a total reflection. It is also preferably provided to use a liquid which has a positive surface tension so that its meniscus bulges outwards. This improves the cancellation of the state of total reflection, and the beam splitter device is switched to a transmission state.

The described beam splitter device for splitting a beam into sub-beams is particularly suitable for the beam splitting of beams with high Lichtleitwerten and offers the advantage that the beam splitter device by simply filling and emptying the intended cavity between two operating states, total reflection and beam splitting, switched back and forth can be without having to move mechanically movable components in and out of the beam path or to have to lead an electrical power supply directly to the beam splitter. In addition, no adjustment after switching to one or the other operating state is required, and with a suitable choice of the liquid, the spectral range of the transmitted light is not or only to a desired extent changed, so that the switchable beam splitter device is also suitable for wide spectral ranges.

In a preferred embodiment, the first beam-guiding section, the second beam-guiding section and the liquid have the same or substantially equal refractive indices. Thus, the liquid, when filled with the cavity or gap between the first and the second Strahlleitabschnitt causes no or only negligible refraction, the total reflection at the empty gap is terminated and the beam can be passed unchanged through the liquid to the partially reflecting layer, to bring about the desired division into partial beams.

In one embodiment, at least one cavity-defining surface comprises a liquid-repellent material. This may be a coating of at least the surface of the respective beam guide section facing the cavity. By way of example, the cavity-defining surface associated with the first beam-guiding section or the second beam-guiding section, or both, can have a material which repels the liquid. A surface delimiting the cavity can also be formed directly by the partially reflecting layer, if it is applied directly to the second or first beam guiding section. The choice of the coating of the cavity bounding surface depends on the liquid used. The coating is chosen to suit the liquid used, for example, either hydrophobic, hydrophilic, oleophobic or oleophilic. In an exemplary embodiment, when using water or an aqueous liquid, a hydrophobic surface coating is provided, eg a lotus coating. In another exemplary embodiment, when using another, for example, an oily liquid, an oleophobic or hydrophilic surface coating is provided. The use of a liquid-repellent material has the advantage that wetting of the surface is avoided and the filled cavity can be emptied as quickly as possible residue-free in a simple manner, so that the switchable beam splitter device changes into the operating state of total reflection. This also supports eg rapid switching operations between the two operating states of the beam splitter device.

In a further embodiment, at least one surface defining the cavity has a structuring or nanostructuring which repels the liquid. This means that the hydrophilic, -phobic, oleophilic or -phobic surface property, for example, is not generated by a coating, but by the structuring of the surface itself, so that, for example, the provision of the liquid-repellent material and the coating operation are eliminated during production can.

The filling of the cavity with the liquid can be carried out in various ways. For example, it may be provided to fill the cavity manually. In a preferred embodiment, however, the beam splitter device has a filling device which is at least adapted to fill the cavity with the liquid in a first operating state. This has the advantage that e.g. Inaccuracies or delays that would be possible with manual filling, be avoided. The filling device comprises a reservoir with the liquid or connects to another, external liquid source. In one exemplary embodiment, the switching of the filling device can take place mechanically if the reservoir or the liquid source is connected to the cavity of the beam splitter device with a mechanical switch. In other embodiments, the switching operation may also be different, e.g. by applying heat or by applying mechanical pressure to the reservoir or by using gravity by changing the position, in particular by turning the entire device by an intended angle.

A reservoir or even a liquid source can be a container which at least temporarily contains the liquid. It can be provided in particular that when emptying the cavity of the beam splitting device, the liquid is returned to the reservoir, so that it can be used again during the next switching operation of the switchable beam splitter device. This has the advantage that the liquid always remains the same, with consistent properties, e.g. exactly adapted refractive index. An external source of liquid may have the property of always supplying new liquid, while the old one, after being used in the cavity, is drained without later reusing it.

It may be provided to manually drain the liquid from the cavity. In a preferred embodiment, however, the filling device is also configured to remove the liquid from the cavity in a second operating state. This offers the advantage that the entire switching of the beam splitter device between the operating states can be automated, which avoids, in particular when used in sensitive optical devices, that the user impairs the achievable quality of the result due to improper operation.

In an exemplary embodiment, the filling device may pump or suck the liquid back into the reservoir. In another exemplary embodiment, the filling device comprises a further reservoir, e.g. at another end of the cavity or gap, so that the liquid can pass alternately into one or the other reservoir, for example by a small rotational movement of the device or by suitable positive and negative pressures at the reservoirs.

In one embodiment, the beam splitter device has a second optical input, and the first optical input and the second optical input are arranged such that when the cavity is filled with the liquid, the beam, when incident through the first optical input, of the partially reflective layer is split such that the associated transmitted partial beam is directed to the first optical output and, when incident through the second optical input, is shared by the partially reflecting layer so that the associated reflected partial beam is directed to the first optical output , This offers the advantage that, if the properties of the partially reflecting layer are not symmetrical, different results are achieved at the first optical output, ie partial beams of different intensity are output, depending on which direction the incident beam impinges on the partially reflecting layer. For example, if a beam is 70% transmitted, 25% reflected, and 5% absorbed when it strikes the partially reflecting layer, then at the first optical output a partial beam will be at either 70% or 25% of the original intensity Beam output. In addition, both optical inputs can be acted on simultaneously with two different beam bundles, so that at the first optical output, a mixed beam is output. This may be advantageous, for example, for overlaying a data reflection image over a visual image.

In an exemplary embodiment, the beam splitter device has a second optical output, wherein the second optical output is arranged such that when the cavity is filled with the liquid, the beam, as it enters through the first optical input, of the partially reflecting layer so dividing the associated reflected sub-beam is directed to the second optical output and, when incident through the second optical input, is shared by the partially reflecting layer so that the associated transmitted sub-beam is directed to the second optical output. Thus, when different beams are irradiated through the first and the second optical input to the partially reflecting layer, at the first optical output of the transmitted portion of the first beam combined with the reflected portion of the second beam can be output combined, while at the second optical output of the reflected portion of the first beam combined with the transmitted portion of the second beam can be outputted.

In an exemplary embodiment, a first polarizing layer is disposed at least at one of the first optical input and the second optical input. Alternatively, the polarizing layer may be disposed at a different position as long as it polarizes the beam before it strikes the partially reflecting layer. The use of a polarizing layer allows one of the beams to act only in one of the channels or at one of the optical outputs but not in the other.

In a preferred embodiment, a second polarizing layer is disposed on one of the at least one optical output. With a suitable choice of polarization, e.g. by aligning the polarization layer, the beam path can be blocked at one of the optical outputs, without blocking the beam path at the other output.

In a preferred embodiment, therefore, the second polarizing layer is polarizing perpendicular to the first polarizing layer.

In a further preferred embodiment, the second polarizing layer is covered by a polarization filter element which is movable relative to the first polarizing layer. Thus, here the polarizing layer or polarizing layer is movable. In one embodiment, for this purpose, the polarization filter element can be introduced into the beam path of the partial beam emerging from the optical output and can be removed therefrom, e.g. swung in and out. In another embodiment, the polarization filter element is changeable in its orientation, preferably rotatable in a plane perpendicular to the beam path, in particular by 90 °, so that the passage of the partial beam can be switched on and off by the rotation.

In an exemplary embodiment, the movable polarization filter element is a birefringent polarization element with which the partial beam emerging from the optical output can be separated into two sub-beams polarized perpendicular to one another.

In one embodiment, the beam splitter device further comprises a third beam guide section, a fourth beam guide section and a further partially reflecting layer, wherein the further partially reflecting layer is adapted to divide the incident / incident beam into at least one further transmitted partial beam passing through the further partially reflecting layer is passed, and another reflected partial beam, which is reflected at the further partially reflecting layer, and wherein the beam splitter device further comprises at least partially present between the third Strahlleitabschnitt and the fourth Strahlleitabschnitt further cavity, wherein the further cavity and the further partially reflecting layer arranged are that the beam path from the first optical input to the first optical output through the partially reflecting layer and through the cavity v runs when the further cavity is not filled with a liquid, and the beam path from the first optical input to the first optical output through the further partially reflecting layer and through the further cavity extends when the further cavity is filled with a further liquid and the Cavity not with the liquid, ie the first fluid is filled.

In this way, the beam splitter device has more degrees of freedom to produce different output signals. Thus, it can be provided that the partially reflecting layers each have different properties, for example a different ratio of transmission to reflection, so that, depending on how the impinging beam controlled by the respective filling states of the cavity and the further cavity on the partially reflecting layer or the further partially reflecting layer are guided, beams of different intensities can be generated at the optical output or other spectral distributions due to other properties of the respective partially reflecting layers, wherein it is preferably provided by the respective partial beams generated by the beam splitting to direct the partial beams not guided respectively to the (first) optical output to a second optical output. In further embodiments, even more partially reflecting layers and beam guiding sections can be provided. Likewise, further Strahlleitabschnitte or light guide elements may be necessary to direct the beam path of a partial beam correctly to total total reflection on the optical output or to direct the associated to the resulting second partial beam bundle beam path correctly to a second optical output. Preferably, when one cavity is filled, the other cavity is emptied. So it is available as a means for deflecting the beam path by total reflection available.

In an exemplary embodiment, the beam splitter device has a further filling device, which is at least adapted to fill the further cavity with the further liquid in a further first operating state, so that, for example, inaccuracies or delays which would be possible with manual filling are avoided.

Draining the additional liquid could be done manually. In a preferred embodiment, however, it is further provided that the further filling device is also configured to remove the further liquid from the further cavity in a further second operating state so that the filling and emptying of the further cavity can also be automated.

According to a further aspect of the invention, an optical filter device comprises a first optical input, at least a first optical output, a first beam guide section and at least a second beam guide section, wherein the optical filter device further comprises an optical filter element and at least partially between the first beam guide section and the second beam guide section Having the existing cavity, wherein the cavity is arranged such that a beam path from the first optical input to the first optical output through the cavity and not through the optical filter element extends when the cavity is filled with a liquid, and the optical path through the optical Filter element and does not pass through the cavity when the cavity is not filled with a liquid.

The optical filter device thus provides that the beam path from the first optical input to the first optical output is changed in such a way that it is in one of the operating states from the optical input by an optical one, depending on whether the intended cavity is filled with the liquid or not Filter element is guided to the optical output and is guided in the other operating state to the optical output without passing through the optical filter element, in both cases, the optical output stationary and the emission direction of the output at the optical output beam remain unchanged, but still its beam characteristics between the Filtered by the optical filter element and the unfiltered state back and forth can be switched. Thus, the optical filter device can be realized switchable in a simple manner, wherein only in the operating state in which the optical filter element is traversed, for example, certain spectral components of the incident light beam are filtered out by the filter element. Again, the effect of total reflection is exploited to redirect the beam at the empty cavity or gap, while the filled cavity, especially when the refractive index or the refractive index of the liquid matches those of Strahlleitabschnitte, the total reflection is suppressed and the beam the cavity can go through.

In a preferred embodiment, the beam path comprises at least two total reflections on the cavity when the cavity is not filled with the liquid. If the cavity and the beam guide sections are shaped accordingly so that the radiation beam can be totally reflected several times, at least twice on the same cavity, if the cavity is not filled with the liquid, the switchable optical filter device can be realized with only one cavity and one liquid. This offers the advantage that the switchable optical filter device can be switched with a single filling or emptying process, that is, the simultaneous or sequential filling or emptying must not be possible, with no mechanical or electrically driven component to be introduced into the beam path for switching got to.

However, in one embodiment, the optical filter element can be realized as one or more filter coatings on the surface of one or more of the beam guide sections in the beam path of the beam to be filtered, in another embodiment, however, also as a mechanically movable optical filter element, for example in the form of a filter wheel or a filter slide. This embodiment has the advantage that the filter effect can be varied depending on the setting of the filter wheel or the filter slide.

The filling can be done manually, for example. In one embodiment, however, the optical filter device has a filling device which is at least adapted to fill the cavity with the liquid in a first operating state. This has the advantage that e.g. Inaccuracies or delays that would be possible with manual filling, be avoided.

In a preferred embodiment of the optical filter device, the filling device is also configured to remove the liquid from the cavity in a second operating state, so that all switching operations can be automated.

According to yet another aspect of the invention, an optical observation device, for example a microscope, comprises a beam splitter device and / or an optical filter device according to one of the embodiments described above. In this way, the advantages and particularities of the beam splitter device according to the invention for splitting bundles of rays into partial beams or the optical filter device are also implemented in the context of an optical observation device.

• 1 eine schematische Darstellung einer ersten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung zum Teilen von Strahlenbündeln in Teilstrahlenbündel in einem ersten Betriebszustand;
• 2 eine schematische Darstellung der ersten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung in einem zweiten Betriebszustand;
• 3 eine schematische Darstellung einer zweiten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung zum Teilen von Strahlenbündeln in Teilstrahlenbündel in einem ersten Betriebszustand;
• 4 eine schematische Darstellung der zweiten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung in einem zweiten Betriebszustand;
• 5 eine schematische Darstellung einer dritten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung zum Teilen von Strahlenbündeln in Teilstrahlenbündel in einem ersten Betriebszustand;
• 6 eine schematische Darstellung der dritten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung in einem zweiten Betriebszustand;
• 7 eine schematische Darstellung einer vierten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung zum Teilen von Strahlenbündeln in Teilstrahlenbündel in einem ersten Betriebszustand;
• 8 eine schematische Darstellung der vierten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung in dem ersten Betriebszustand in kompakter Bauweise;
• 9 eine schematische Darstellung der vierten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung in einem zweiten Betriebszustand;
• 10 eine schematische Darstellung der vierten beispielhaften Ausgestaltung einer erfindungsgemäßen Strahlteilervorrichtung in dem zweiten Betriebszustand in kompakter Bauweise;
• 11 eine schematische Darstellung einer ersten beispielhaften Ausgestaltung einer erfindungsgemäßen optischen Filtervorrichtung in einem ersten Betriebszustand;
• 12 eine schematische Darstellung der ersten beispielhaften Ausgestaltung einer erfindungsgemäßen optischen Filtervorrichtung in einem zweiten Betriebszustand;
• 13 eine schematische Darstellung einer zweiten beispielhaften Ausgestaltung einer erfindungsgemäßen optischen Filtervorrichtung in einem ersten Betriebszustand;
• 14 eine schematische Darstellung der zweiten beispielhaften Ausgestaltung einer erfindungsgemäßen optischen Filtervorrichtung in einem zweiten Betriebszustand; und
• 15 eine schematische Darstellung einer beispielhaften Ausgestaltung eines erfindungsgemäßen optischen Beobachtungsgeräts.

The invention will be explained in more detail below in conjunction with the following description of embodiments with reference to the accompanying drawings. Show it:

• 1 a schematic representation of a first exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state;
• 2 a schematic representation of the first exemplary embodiment of a beam splitter device according to the invention in a second operating state;
• 3 a schematic representation of a second exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state;
• 4 a schematic representation of the second exemplary embodiment of a beam splitter device according to the invention in a second operating state;
• 5 a schematic representation of a third exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state;
• 6 a schematic representation of the third exemplary embodiment of a beam splitter device according to the invention in a second operating state;
• 7 a schematic representation of a fourth exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state;
• 8th a schematic representation of the fourth exemplary embodiment of a beam splitter device according to the invention in the first operating state in a compact design;
• 9 a schematic representation of the fourth exemplary embodiment of a beam splitter device according to the invention in a second operating state;
• 10 a schematic representation of the fourth exemplary embodiment of a beam splitter device according to the invention in the second operating state in a compact design;
• 11 a schematic representation of a first exemplary embodiment of an optical filter device according to the invention in a first operating state;
• 12 a schematic representation of the first exemplary embodiment of an optical filter device according to the invention in a second operating state;
• 13 a schematic representation of a second exemplary embodiment of an optical filter device according to the invention in a first operating state;
• 14 a schematic representation of the second exemplary embodiment of an optical filter device according to the invention in a second operating state; and
• 15 a schematic representation of an exemplary embodiment of an optical observation device according to the invention.

In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.

It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described are combined together unless otherwise specified. The description is therefore not to be considered in a limiting sense, and the scope of the present invention is defined by the appended claims.

1 shows a schematic representation of a first exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state. The beam splitter device 100 includes a first optical input 101 , a first optical output 102 , a first beam guiding section 103 in the form of a first Habwürfelprismas, a second Strahlleitabschnitt 104 in the form of a second half-cube prism and a partially reflecting layer 105 , with which an incident or incident beam 106 in at least one associated transmitted partial beam 107 passing through the partially reflecting layer 105 is passed through, and an associated reflected partial beam 108 that at the partially reflecting layer 105 is reflected, shared. The beam splitter device 100 also has a between the first Strahlleitabschnitt 103 and the second beam guiding section 104 existing cavity 109 in the form of a gap between the first and second half cube prisms. The cavity 109 and the partially reflecting layer 105 are arranged so that a beam path in the illustrated first operating state, in which the cavity 109 with a liquid 110 is filled, from the first optical input 101 to the first optical output 102 through the partially reflecting layer 105 and through the cavity 109 runs.

In the embodiment shown, the first beam guide section 103 , the second beam guiding section 104 and the liquid 110 all have the same as possible refractive index, ie as far as possible the same refractive index (n1). In addition, the surface defining the cavity has 111 ie the cavity 109 facing surface of the first Strahlleitabschnittes 103 as well as the cavity 109 facing side of the splitter layer 105 a fluid-repellent material to a residue as possible emptying the cavity 109 from the liquid 110 to enable. The material may be a coating, or the material may correspond to that of the respective beam-guiding section and be designed, for example, to be liquid-repellent by nanostructuring. The material again has as far as possible the same refractive index (n1) as the liquid and the beam guide sections, so that refraction of the beam is avoided. Depending on the liquid used, it is chosen to be either hydrophobic, hydrophilic, oleophobic or oleophilic.

The beam splitter device shown 100 has a filling device 112 directly or via a medium-conducting connection with the cavity 109 connected is. In the first operating state shown, the filling device 112 that have a reservoir for the liquid 110 has the cavity 109 with the liquid 110 filled so that the reservoir is completely or partially emptied or filled with another medium or contains a vacuum.

In the following, the same or further exemplary embodiments of a beam splitter device according to the invention are each shown in a first or a second operating state, in which the cavity is either filled with the liquid or emptied. In the embodiments shown, certain features differ from those in FIG 1 shown embodiment in the first operating state, while others agree. In order to avoid repetition, the description of the following embodiments and operating conditions other than those described in U.S. Pat 1 shown distinguishing features, wherein like reference numerals refer to the same or similar components.

2 shows a schematic representation of the first exemplary embodiment of a beam splitter device according to the invention in a second operating state. The cavity 109 the beam splitter device 100 is from the filling device 112 from the liquid 110 emptied. This is located in the reservoir of the filling device 112 , In this second operating state that is through the first optical input 101 incident beams not on the partially reflecting layer 105 passed, but learns of the emptied cavity 109 limiting surface a total reflection, so that the beam path is not the first optical output 102 runs.

3 shows a schematic representation of a second exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state. The illustrated embodiment of a beam splitter device 300 corresponds in essential parts of in 1 shown beam splitter device 100 , In the 3 shown beam splitter device 300 has a second optical input 301 , The first optical input 101 and the second optical input 301 are arranged so that in the illustrated first operating state in which the cavity 109 with the liquid 110 filled, the beam when passing through the first optical input 101 is incident from the partially reflecting layer 105 is divided so that the associated transmitted partial beams 107 to the first optical output 102 is directed and in this embodiment additionally, when passing through the second optical input 301 is incident from the partially reflecting layer 105 is shared so that the associated reflected partial beams 302 to the first optical output 102 is conducted, so that when the properties of the partially reflecting layer are not symmetrical, different results are achieved at the first optical output, ie partial beams of different intensity are output, depending on which direction the incident beam is incident on the partially reflecting layer. In addition, both optical inputs can be applied simultaneously with two different beams, so that at the first optical output 102 a mixed beam would be output.

In the embodiment shown, the beam splitter device has 300 also via a second optical output 303 that is arranged so that when the cavity 109 with the liquid 110 filled, the beam when passing through the first optical input 101 is incident from the partially reflecting layer 105 is shared so that the associated reflected partial beams 108 to the second optical output 303 and if it passes through the second optical input 301 it comes from the partially reflecting layer 105 is divided so that the associated transmitted partial beams 304 to the second optical output 303 is directed so that when different beams through the first and the second optical input 101 . 301 on the partially reflecting layer 105 be irradiated, at the first optical output 102 the transmitted portion of the first beam combined with the reflected portion of the second beam are output combined, while at the second optical output 303 the reflected portion of the first beam combined with the transmitted portion of the second beam could be output.

However, the in 3 shown beam splitter device 300 at the second optical input 301 over a first polarizing layer 305 and at the second optical output 303 over a second polarizing layer 306 perpendicular to the polarization through the first polarizing layer 305 polarizing acts. The polarizing layers are designed here as coatings of the beam guiding elements. The mutually perpendicular polarization causes the exit of the transmitted portion of the via the second optical input 301 incident beam at the second optical output 303 is blocked while the reflected portion at the first optical output 102 is output, possibly together with the transmitted portion of the through the first optical input 101 incident beam.

4 shows a schematic representation of the second exemplary embodiment of a beam splitter device according to the invention in a second operating state. The cavity 109 the beam splitter device 300 is from the filling device 112 from the liquid 110 emptied. This is located in the reservoir of the filling device 112 , In this second operating state that is through the first optical input 101 incident beams not on the partially reflecting layer 105 passed, but learns of the emptied cavity 109 limiting surface a total reflection, so that the beam path is not the first optical output 102 runs, but to the second optical output 303 where the beam from the second polarizing layer 306 is polarized. That through the second optical input 301 incident beams experience polarization at the first polarizing layer 305 and then also a total reflection, so that the beam path to the first optical output 102 runs.

5 shows a schematic representation of a third exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state. The illustrated embodiment of a beam splitter device 500 corresponds in essential parts of in 3 shown beam splitter device 300 , However, the second polarizing layer is not as a coating on the second optical output 303 on the first Strahlleitabschnitt 103 applied, but by a movable polarizing filter element 501 comprising, in a position perpendicular to the first polarizing layer 305 polarizing acts, but in addition either rotatably mounted or is provided from the beam path and swing-out, so that its effect on the beam path can be changed.

6 shows a schematic representation of the third exemplary embodiment of a beam splitter device according to the invention in a second operating state. The cavity 109 the beam splitter device 500 is from the filling device 112 from the liquid 110 emptied. This is located in the reservoir of the filling device 112 , In this second operating state is the polarization filter element 501 swung out of the beam path and therefore not shown. That through the first optical input 101 incident beams undergoes at the emptied cavity 109 limiting surface a total reflection, so that the beam path to the second optical output 303 runs. That through the second optical input 301 incident beams experience polarization at the first polarizing layer 305 and then also a total reflection, so that the beam path to the first optical output 102 runs.

7 shows a schematic representation of a fourth exemplary embodiment of a beam splitter device according to the invention for splitting bundles of rays in partial beams in a first operating state. The beam splitter device shown 700 allows switching between different division ratios, spectral, in polarization or in intensity - or in any combination of these properties.

The beam splitter device 700 is shown in a first operating state, in which the cavity 709 with a (first) liquid 710 is filled. The beam splitter device 700 includes a first optical input 701 , a first optical output 702 , a first beam guiding section 703 in the form of a first Habwürfelprismas, a second Strahlleitabschnitt 704 in the form of a second half-cube prism and a (first) partially reflecting layer 705 , with which an incident or incident beam 706 in at least one associated transmitted partial beam 707 passing through the partially reflecting layer 705 is passed through, and an associated reflected partial beam 708 that at the partially reflecting layer 705 is reflected, shared. The beam splitter device 700 also points between the first beam guiding section 703 and the second beam guiding section 704 the cavity 709 in the form of a gap between the first and second half cube prisms. The cavity 709 and the partially reflecting layer 705 are arranged so that a beam path in the illustrated first operating state, in which the cavity 709 with the liquid 710 is filled, from the first optical input 701 to the first optical output 702 through the partially reflecting layer 705 and through the cavity 709 runs.

The second beam guide section 704 is shaped, for example, by using a further Halbwürfelprismas as another Strahlleitabschnitt 713 in that, by total reflection, the (first) partially reflecting layer 705 passed partial beam 707 to a third Strahlleitabschnitt 714 is diverted. In addition, the beam splitter device has 700 via a fourth beam guide section 715 and another partially reflecting layer 716 and one between the third beam guiding portion 714 and the fourth beam guiding section 715 existing additional cavity 717 , In the first operating state shown, however, only the (first) cavity is 709 with the (first) liquid 710 filled while the more cavity 717 contains no liquid, so that the beam path is not to the other partially reflecting layer 716 runs, but through the first partially reflecting layer 705 passed through partial beams 707 at the other cavity 717 undergoes total reflection and the first optical output 702 is steered.

The at the (first) partially reflecting layer 705 reflected partial beams 708 is via a fifth Strahlleitabschnitt 718 and a sixth beam guide section 719 in the form of half-cube prisms and intervening third cavity 720 , in the first operating state filled with liquid, to a second optical output 721 guided. In the embodiment shown, the beam path is via the further semi-prism beam guiding section 722 and the seventh beam guiding section 723 at a deflated fourth cavity 725 between the seventh beam guide section 723 and an eighth beam guide section 724 by total reflection on the second optical output 721 redirected, which, like the first optical output 702 , in the first and in connection with 9 described second operating state remains stationary and exiting beam emits each under unchanged beam angle.

8th shows a schematic representation of the fourth exemplary embodiment of a beam splitter device according to the invention in the first operating state in a compact design. The (first) cavity 709 and the more cavity 717 are here through a common gap with a first separator 726 realized for the division into two partial cavities, that of a first filling device 727 and a further filling device, ie second filling device 728 can be filled separately with a liquid. Likewise, the third cavity 720 and the fourth cavity 725 through a common gap with a second separator 729 for the division into two partial cavities realized by a third filling device 730 and a fourth filling device 731 can be filled separately with a liquid.

9 shows a schematic representation of the fourth exemplary embodiment of a beam splitter device according to the invention in a second operating state, in which the (first) cavity 709 not filled with the liquid and the more cavity 717 filled with the liquid. In addition, the third cavity 720 not filled with the liquid while the fourth cavity 725 filled with the liquid. In this operating state, the beam is 706 not from the (first) partially reflecting layer 705 but of the further partially reflecting layer 716 divided, which is adapted to divide an incident / incident beam into at least one further transmitted partial beam, through the further partially reflecting layer 716 passed through and through the third Strahlleitabschnitt to the first optical Output is guided, and another reflected partial beam that at the other partially reflecting layer 716 reflected and through the eighth Strahlleitabschnitt 724 , with a liquid to the refractive index of the eighth and seventh Strahlleitabschnitts 723 matched refractive index filled fourth cavity 725 and the seventh beam guiding section 723 to the second optical output 721 to be led.

In this way, the ray bundle 706 , depending on the operating state of the beam splitter device 700 , with different division ratios divided into transmitted and reflected partial beams, when the (first) partially reflecting layer 705 and the further partially reflecting layer 716 have different division properties. In particular, the in 7 and 9 In the first and second operating states shown arrangement of Strahlleitabschnitten, enclosed cavities and partially reflecting layers that a switchable beam splitter device with a stationary (first) optical input 701 and two equally fixed optical outputs 702 . 721 is realized. The beam splitter device shown 700 allows that with only one input beam at two optical outputs 702 . 721 according to the selected properties of the two optical partial reflecting layers 705 . 716 by switching between the first operating state according to 7 and the second operating state according to 9 Partial beams can be radiated with different properties due to different beam divisions and filtering, wherein the first and the second optical output 702 . 721 nevertheless remain unchanged in the position and emission direction of the output partial beams, even if it is possible to switch between emitted partial beams with different beam properties, for example with respect to intensity, spectrum and / or polarization, at the two outputs depending on the current operating state. For example, between an intensity ratio of 50:50 and an intensity ratio of 80:20 of the intensities at the first and second optical output 702 . 721 be switched back and forth. Switching between other intensity ratios can also be provided.

10 shows a schematic representation of the fourth exemplary embodiment of a beam splitter device according to the invention in the second operating state in a compact design. In the second operating state, the (first) cavity 709 and the third cavity 720 not filled with the liquid while the second, ie the further cavity 717 and the fourth cavity 725 filled with the liquid.

11 shows a schematic representation of a first exemplary embodiment of an optical filter device according to the invention in a first operating state. The optical filter device 1100 includes a first optical input 1101 , a first optical output 1102 , a first beam guiding section 1103 and at least a second beam guiding section 1104 , The optical filter device 1100 also includes an optical filter element 1105 . 1106 , which is designed here as a coating, and at least partially between the first Strahlleitabschnitt 1103 and the second beam guiding section 1104 existing cavity 1107 where the cavity 1107 is arranged such that a beam path from the first optical input 1101 to the first optical output 1102 through the cavity 1107 and not through the optical filter element 1105 . 1106 runs when the cavity 1107 with a liquid 1108 is filled, and the beam path through the optical filter element 1105 . 1106 and not through the cavity 1107 runs when the cavity 1107 not with a liquid 1108 is filled. To fill and empty the cavity 1107 to control is a filling device 1109 provided in the reservoir in the first operating state of the optical filter device shown 1100 the liquid 1108 located. Taking advantage of the total reflection becomes the beam 1110 passed through the optical filter element.

In the following, the same or further exemplary embodiments of an optical filter device according to the invention are each shown in a first or a second operating state, in which the cavity is either emptied or filled with the liquid. In the embodiments shown, certain features differ from those in FIG 11 shown embodiment in the first operating state, while others agree. In order to avoid repetition, the description of the following embodiments and operating conditions other than those described in U.S. Pat 11 shown distinguishing features, wherein like reference numerals refer to the same or similar components.

12 shows a schematic representation of the first exemplary embodiment of an optical filter device according to the invention in a second operating state. In the second operating state, the cavity becomes 1107 from the filling device 1109 with the liquid 1108 filled so that the beam of light 1110 through the cavity 1107 and another Strahlleitabschnitt 1111 and the first optical output 1102 achieved without passing through the optical filter element 1105 . 1106 to be guided.

So can by filling and emptying the cavity 1107 the optical filter element 1105 . 1106 be switched into the beam path or be removed from this. In a further embodiment, the further beam guide section 1111 additionally a further optical filter element 1112 . 1113 eg in the form of coatings of its cavity 1107 facing surface.

13 shows a schematic representation of a second exemplary embodiment of an optical filter device according to the invention in a first operating state. The illustrated embodiment of an optical filter device 1300 corresponds in essential parts of in 11 shown optical filter device 1100 , However, the optical filter element is not here as a coating, but as a movable optical filter element 1301 realized. This can be realized for example as a filter slide or filter and in the beam path in the first operating state in the cavity 1107 be swiveled.

14 shows a schematic representation of the second exemplary embodiment of an optical filter device according to the invention in a second operating state. In the second operating state, the cavity becomes 1107 from the filling device 1109 with the liquid 1108 filled so that the beam of light 1110 through the cavity 1107 and another Strahlleitabschnitt 1111 and the first optical output 1102 achieved without through the movable optical filter element 1301 to be guided. So can by filling and emptying the cavity 1107 the movable optical filter element 1301 be switched into the beam path or be removed from this.

15 shows a schematic representation of an exemplary embodiment of an optical observation device according to the invention. This may be, for example, a microscope. The optical observation device 1500 includes at least one beam splitter device 100 and / or an optical filter device 1100 , as described above.

Unless otherwise stated, terms such as "first" and "second" or "further" or the like have been used. used (for example, first and second beam guide section, first and second optical input, cavity and other cavity, etc.) to distinguish between the respective elements. The use of terms therefore does not necessarily imply a functional or other prioritization of one or the other element.

As used herein, the term "and / or" when used in a series of two or more elements means that each of the listed elements may be used alone, or any combination of two or more of the listed elements may be used. For example, when describing a composition containing components A, B and / or C, composition A may be alone; B alone; C alone; A and B in combination; A and C in combination; B and C in combination; or A, B, and C are included in combination.

The present invention has been described in detail by way of embodiments for explanatory purposes. Those skilled in the art will recognize that details described with respect to one embodiment may also be used in other embodiments. The invention is therefore not intended to be limited to individual embodiments, but only by the appended claims.

LIST OF REFERENCE NUMBERS

100

Beam splitting device

101

first optical input

102

first optical output

103

first beam guide section

104

second beam guide section

105

partially reflecting layer

106

ray beam

107

passed partial beam

108

reflected partial beam

109

cavity

110

liquid

111

the cavity limiting surface

112

filling device

300

Beam splitting device

301

second optical input

302

reflected partial beam

303

second optical output

304

passed partial beam

305

first polarizing layer

306

second polarizing layer

500

Beam splitting device

501

Polarization filter element

700

Beam splitting device

701

first optical input

702

first optical output

703

first beam guide section

704

second beam guide section

705

partially reflecting layer

706

ray beam

707

passed partial beam

708

reflected partial beam

709

cavity

710

liquid

713

another beam guide section

714

third beam guide section

715

fourth beam guide section

716

another partially reflecting layer

717

another cavity

718

fifth beam guide section

719

sixth beam guide section

720

third cavity

721

second optical output

722

another beam guide section

723

seventh beam guide section

724

Eighth beam guide section

725

fourth cavity

726

first separating element

727

first filling device

728

second filling device

729

second separating element

730

third filling device

731

fourth filling device

1100

optical filter device

1101

first optical input

1102

first optical output

1103

first beam guide section

1104

second beam guide section

1105

optical filter element

1106

optical filter element

1107

cavity

1108

liquid

1109

filling device

1110

ray beam

1111

another beam guide section

1112

another optical filter element

1113

another optical filter element

1300

optical filter device

1301

movable optical filter element

1500

optical observation device

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102009057985 A1 [0004]

Claims (21)

A beam splitter device (100) for splitting beams into sub-beams, comprising - a first optical input (101); at least a first optical output (102); a first beam guiding section (103); a second beam guiding section (104); and a partially reflecting layer (105) adapted to divide an incident beam (106) into at least one associated transmitted partial beam (107) which is passed through the partially reflecting layer (105) and an associated reflected partial beam (108) ), which is reflected at the partially reflective layer (105), characterized in that the beam splitter device (100) also - at least partially between the first Strahlleitabschnitt (103) and the second Strahlleitabschnitt (104) existing cavity (109), wherein the Cavity (109) and the partially reflecting layer (105) are arranged such that a beam path from the first optical input (101) to the first optical output (102) through the cavity (109) and the partially reflecting layer (105) extends when the cavity (109) is filled with a liquid (110). Beam splitter after Claim 1 wherein the first beam guiding section (103), the second beam guiding section (104) and the liquid (110) have equal refractive indices. Beam splitter after Claim 1 or Claim 2 wherein at least one surface (111) delimiting the cavity (109) has a material repelling the liquid (110). Beam splitter after Claim 1 or Claim 2 , wherein at least one surface (111) delimiting the cavity (109) has a structure which repels the liquid (110). Beam splitter device according to one of the preceding claims, wherein the beam splitter device (100) has a filling device (112) which is at least adapted to fill the cavity (109) with the liquid (110) in a first operating state. Beam splitter after Claim 5 wherein the filling device (112) is also configured to remove the liquid (110) from the cavity (109) in a second operating state. A beam splitter device according to any one of the preceding claims, wherein the beam splitter device (100) has a second optical input (301), and wherein the first optical input (101) and the second optical input (301) are arranged such that when the cavity (109 ) is filled with the liquid (110), the beam (106), when incident through the first optical input (101), is shared by the partially reflecting layer (105) such that the associated transmitted partial beam (107) is adjacent to the first optical output (102) and, when incident through the second optical input (301), is shared by the partially reflective layer (105) such that the associated reflected sub-beam (302) is directed to the first optical output (102) , Beam splitter after Claim 7 wherein the beam splitter device (100) has a second optical output (303), and wherein the second optical output (303) is arranged such that when the cavity (109) is filled with the liquid (110), the beam (106 ), when incident through the first optical input (101), is shared by the partially reflecting layer (105) such that the associated reflected partial beam (108) is directed to the second optical output (303) and, if passing through the second optical input (301), is shared by the partially reflecting layer (105) so that the associated transmitted partial beam (304) is conducted to the second optical output (303). Beam splitter after Claim 7 or Claim 8 , wherein at least at one of the first optical input (101) and the second optical input (301), a first polarizing layer (305) is arranged. Beam splitter after Claim 9 wherein a second polarizing layer (306) is disposed on one of the at least one optical output (102, 103). Beam splitter after Claim 10 wherein the second polarizing layer (306) is polarizing perpendicular to the first polarizing layer (305). Beam splitter after Claim 10 wherein the second polarizing layer (306) is comprised of a polarizing filter element (501) movable with respect to the first polarizing layer (305). Beam splitter after Claim 12 wherein the movable polarizing filter element (501) is a birefringent polarizing element. A beam splitter device according to any one of the preceding claims, wherein the beam splitting device (700) further comprises: - a third beam guiding section (714); a fourth beam guiding section (715); and - another partial reflective layer (716) configured to divide the incident beam (706) into at least one further transmitted partial beam passed through the further partially reflective layer (716) and another reflected partial beam at the other Partial reflecting layer (716) is reflected, wherein the beam splitter device (700) further - an at least partially between the third Strahlleitabschnitt (714) and the fourth Strahlleitabschnitt (715) existing further cavity (717), wherein the further cavity (717) and the further partially reflective layer (716) are arranged such that the beam path from the first optical input (701) to the first optical output (702) through the partially reflecting layer (705) and through the cavity (709) extends when the further cavity ( 717) is not filled with a liquid, and the beam path from the first n optical input (701) to the first optical output (702) through the further partially reflecting layer (716) and through the further cavity (717) extends when the further cavity (717) is filled with a further liquid and the cavity (709 ) is not filled with the liquid. Beam splitter after Claim 14 , wherein the beam splitter device (700) has a further filling device (728), which is at least adapted to fill the further cavity (717) with the further liquid in a further first operating state. Beam splitter after Claim 15 , wherein the further filling device (728) is also adapted to remove the further liquid from the further cavity in a further second operating state. An optical filter device (1100) comprising - a first optical input (1101); at least a first optical output (1102); a first beam guiding section (1103); and - at least one second beam guiding section (1104), characterized in that the optical filtering device (1100) further comprises - an optical filter element (1105, 1106), and - at least partially between the first beam guiding section (1103) and the second beam guiding section (1104 ), wherein the cavity (1107) is arranged such that a beam path from the first optical input (1101) to the first optical output (1102) through the cavity (1107) and not through the optical filter element (1105 , 1106) extends when the cavity (1107) is filled with a liquid (1108) and the beam path passes through the optical filter element (1105, 1106) and not through the cavity (1107) if the cavity (1107) does not the liquid (1108) is filled. Optical filter device according to Claim 17 wherein the beam path comprises at least two total reflections at the cavity (1107) when the cavity (1107) is not filled with the liquid (1108). Optical filter device according to Claim 17 or Claim 18 wherein the optical filter device (1100) comprises a filling device (1109) which is at least adapted to fill the cavity (1107) with the liquid (1108) in a first operating state. Optical filter device according to Claim 19 wherein the filling device (1109) is also adapted to remove the liquid (1108) from the cavity (1107) in a second operating state. An optical observation device (1500) comprising a beam splitter device (100) according to any one of Claims 1 to 16 or an optical filter device (700) according to any one of Claims 17 to 20 ,

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