DE102017123288B4 - Apparatus and method for testing electronic components - Google Patents

Abstract

Device (100, 200, 300, 400, 500) for testing electronic components, comprising:
- An irradiation bell (110, 210, 310, 410, 510), which is adapted to be inverted, excluding a portion (21) of an electronic assembly (20) via an electronic component (1) of the assembly and thereby an evacuable irradiation chamber (111), wherein the irradiation bell comprises a compressible seal (112, 212, 312, 412, 512) on its edge to be applied;
a particle radiation source (120, 220, 320, 420, 520) for nuclear particles arranged inside the irradiation bell; and
a port (130, 330, 430, 530, 630) adapted to be connected to a vacuum pump for evacuating the irradiation chamber (111), the nuclear particles comprising protons and / or alpha radiation and / or gap Ions heavier than helium nuclei.

Description

The invention relates to a device and a method for testing electronic components.

Electronic components of various applications (such as for use in a space project) typically need to be tested for their response to nuclear particle radiation (protons, heavy ions). This is particularly necessary for those components that were not designed as commercial or industrial components for the particular environment. The nature and frequency of errors then decide on the possible use and possibly necessary protective measures.

While studies based on the irradiation with electrons can be done by a scanning electron microscope, as for example in the document DE 10 2011 087 955 A1 is disclosed, the said radiation tests with protons or heavy ions are usually associated with a great effort. For example, they can be performed on physical accelerator laboratories that can provide such high energy nuclear particle beams. However, this is very expensive because it involves a complex, large and very expensive machine that usually has to be operated by several people.

For a simple radiation test, however, lower energies often suffice than can be achieved with such accelerators. Thus, a circuit with nuclear particles can be irradiated at a cost that is significantly reduced compared to tests carried out in accelerator laboratories.

A radiation source which is or is suitable for emitting nuclear particles is also referred to below as a "particle radiation source" or for short simply as a "radiation source". It may, for example, comprise ²⁵² californium or ¹⁴¹ americium: The former material ²⁵² californium emits spontaneous decomposition heavy ions with energies of about 75 MeV (megaelectronvolt) and 105 MeV. The second ¹⁴¹ Americium emits alpha rays with energies of 5.5 MeV. So enough electrical charge can be generated to cause a relevant effect in the electronic component for the test.

Since the nuclear particles are already slowed down by air so strongly that they reach the chip surface, if at all, only with insufficient energy, tests involving irradiation with heavy nuclear particles are usually carried out in a vacuum chamber comprising an assembly with an electronic component Circuit and contains the above-mentioned particle radiation source and is connected via a plurality of vacuum feedthroughs with the rest of the supply and measuring apparatus. As such a device, for example, the so-called "Californium-252 Assessment of single-event effects" (CASE) ESTEC Noordwijk (Netherlands) includes a large bell jar, which is mounted on a sealing plate and the radiation source held by a mounting arm and a support plate slipped on which the assembly is arranged with the circuit. By means of sealed electrical feedthroughs, the circuit is connected to a power source and a suitable measuring device.

In order to test and irradiate another device (which may, for example, be outside the range of rotation of the radiation source or belong to another assembly), it is generally necessary to remove the bell jar so that the particular circuit to be tested can be replaced or repositioned relative to the radiation source. The vacuum is initially discharged and generated again for the test of the other component, which means a time, control and energy and cost due to the size of the bell jar.

The publication US 4,742,232 relates to an ion generator for generating low-energy ions with which it is then possible to calibrate and test ion-detecting devices.

The present invention has for its object to provide a technique with which the cost of testing electrical components can be simplified to their response to nuclear particle radiation out.

The object is achieved by a device according to claim 1 and a method according to claim 10. Advantageous embodiments are disclosed in the subclaims, the description and the figures.

An apparatus according to the invention is provided for use in testing one or more electronic components of an electronic assembly. An electronic component to be tested can be fixed, for example, directly or in a housing on a printed circuit board of the electronic module, for example, attached to it and / or soldered thereto.

The device comprises an irradiation bell, in the interior of which a radiation source for nuclear particles is arranged; as the "inside" of the irradiation bell is understood in this document, the space under the irradiation bell, which thus of the irradiation bell is overcoupled. The particles that are adapted to emit the particle radiation source may include, for example, helium nuclei (α-rays) and / or those cleavage ions that are heavier than helium nuclei. The particle ^radiation source may contain, for example, ²⁵² californium or ¹⁴¹ americium.

The irradiation bell is adapted to be slipped over the respective component to be tested, excluding a portion of the electronic assembly (for example, a portion of the circuit board on which the electronic component may be mounted); The particle radiation source is then preferably directed to the device. The irradiation bell comprises a compressible seal on its edge (which is to be placed over it).

In this way, the device is set up, together with the electronic module (eg together with an associated printed circuit board and / or optionally one or more further component (s) such as a housing section of the electronic component and / or a separate adapter element to compensate for unevenness On the circuit board) an evacuable (sealed to the outside) irradiation chamber in the interior of the irradiation bell, so to enclose. This contains the device to be tested, whereas the excluded portion of the electronic assembly, which may in particular comprise a further electronic component, is arranged outside the irradiation chamber.

The device further comprises a port adapted or intended to be connected to a vacuum pump, for example by means of a hose. Thus, the irradiation chamber can then be evacuated with the vacuum pump. For example, the port may be configured to be connected to a hose leading to the vacuum pump.

In the irradiation chamber, the electronic component to be tested can be irradiated. Its response may then be measured, for example, by means of a measuring device preferably connected to the electronic assembly (e.g., the printed circuit board) (which may include a power connection).

An inventive method is used to test at least one electronic component of an electronic module. In this case, an evacuable irradiation chamber is formed by an irradiation bell is slipped over the electronic component, excluding a portion of the electronic assembly (for example, a portion of an associated circuit board); The irradiation bell preferably has a compressible seal on its edge to be placed on or placed on. This can be placed on slipping on at least one element of the module, for example, on a circuit board on which the electronic component to be tested can be attached to a housing portion of the electronic component and / or one or more further (eg the component adjacent) component In particular, an adapter element to compensate for unevenness (eg on the circuit board or on a housing of the electronic component). The irradiation chamber with the component to be tested therein can thus be delimited in particular by the printed circuit board and / or the further component (s); the excluded portion of the electronic assembly is located outside the irradiation chamber. In particular, the slipping over can take place such that at least one further electronic component, which may be fastened (preferably soldered) to the printed circuit board, is located outside the irradiation chamber.

The method further comprises evacuating the irradiation chamber by means of a vacuum pump connected to a connection of the irradiation bell. Thereafter, the electronic device is irradiated with nuclear particles of a particle radiation source (preferably with helium nuclei (a-radiation) and / or those gap ions heavier than helium), and at least one function of the irradiated electronic device is measured.

In particular, a method according to the invention can be carried out with a device according to the invention in accordance with one of the embodiments disclosed in this document.

A part of the electronic module, for example one or more of the associated printed circuit board itself and / or one or more components on the printed circuit board, thus serves as an edge surface of the irradiation chamber in a device or a method according to the invention. The / a compressible seal allows for the evacuability of the irradiation chamber despite any elements present on the circuit board and the resulting uneven (not smooth) structure.

A device according to the invention and a method according to the invention enable a correspondingly small dimensioning of the irradiation chamber and thus only a small expenditure of time and energy when generating the vacuum. In particular, a device according to the invention is preferably designed as a handheld device.

The size of the irradiation bell is / are preferably chosen to match the radiation source used and the size of the test area, so that in particular the particle radiation source finds place in the irradiation bell and a lower opening of the irradiation bell is preferably larger than the surface of the electronic component to be examined.

The irradiation bell or the irradiation chamber may, for example, have an internal volume which is at most 125 ml or at most 50 ml, at most 6 ml or even at most 1 ml and / or which is at least 0.5 ml, at least 1 ml or at least 2 ml or at least 5 ml. The device can thus be easily implemented between different components to be tested and is also suitable for easy transport (in which the particle radiation source is preferably transported separately in an extra enclosed, shielded and intended for transport container).

According to an advantageous embodiment, an outer shape of the irradiation bell is substantially prism-shaped, rotationally symmetric or rotationally symmetrical; a height of a corresponding prism or a rotation or rotation axis preferably runs in a designated radiation direction of the particle radiation source. In particular, the outer shape of the irradiation bell can essentially be designed as a straight or oblique prism, frustoconical or circular-cylindrical.

The seal on the aufzusetzenden edge of the irradiation bell may be formed, for example, as an annular bead. According to an advantageous embodiment, it surrounds an opening whose diameter (in an unloaded, that is not compressed by compression or deformed state of the seal 112 ) is preferably at least 1cm or at least 1.5cm or at least 2cm and / or at most 5cm or at most 3.5cm or at most 2cm. The term "diameter" of the opening in this document is to be understood as the largest occurring distance between two points on the boundary G of the opening. Mathematically speaking, D: = max {d (x, y): x, y ∈ G}, where d (x, y) denotes the Euclidean distance of points x, y. This diameter is referred to in this document as "inside diameter" of the irradiation bell.

The seal may have an inner boundary (ie, a boundary toward the opening), which may run, for example, along an ellipse (in particular a circle) or a (preferably regular) polygon, in particular a three or rectangular, six or octagon.

In accordance with specific embodiments, the edge of the irradiation bell to be applied rotates over an area of at least 2 cm ² or at least 5 cm ² or even 20 cm ² .

The irradiation bell may be composed of one or more elements such as layers (in particular plates and / or rings), which may be glued or screwed together, for example. Between individual elements, one or more sealing elements such as an O-ring may be arranged. In particular, the compressible seal may be glued or welded to an overlying layer of the irradiation bell. A variant with a replaceable seal, in which it is connected in a positive, force and / or frictional engagement with another element (for example a layer) of the irradiation bell, is advantageous. In particular, one edge of the seal can be inserted into a groove in another element of the irradiation bell.

Due to the compressibility of the seal, the irradiation chamber can be securely sealed even in the event of irregularities on the surface to which it is placed, so that a vacuum can be generated therein. Such irregularities may be, for example, a trace, one or more adjacent devices, and / or a transition to an additional component, such as an optical device. result in a separate adapter element; Such an adapter element may in turn be (or part of the device according to the invention) to compensate for unevenness on the circuit board or on a housing of the respective electronic component between the seal at the edge of the irradiation bell and the circuit board.

According to a preferred embodiment, the compressible seal is elastically compressible, so that after use of the device or performing the method, in particular after removal of the irradiation bell from the circuit board (at least substantially) assumes its original shape. Thus, the device can be easily slipped over another component with a different environmental profile or the process can be performed again.

Preferably, the compressible seal comprises at least one elastomer. In particular, the compressible seal may comprise a soft rubber. According to a special embodiment, the compressible seal consists wholly or partly of a closed cell (or closed-cell) sponge rubber.

According to an advantageous embodiment, the compressible seal in the unloaded state has a thickness of at least 3mm or at least 5mm and / or of at most 10mm or at most 7mm; the thickness is measured in an intended mounting direction, in particular preferably perpendicular to an assembly (or a circuit board associated therewith), to which the irradiation bell is set up or which comprises the electronic component to be tested.

The connection of the device for connection to a vacuum pump may preferably comprise a tube which leads through a wall of the irradiation bell. In particular, such a tube can pass through the seal: this allows a particularly simple production of the device.

According to an advantageous embodiment variant of the present invention, the particle radiation source is arranged on a carrier board, which separates the irradiation chamber (which can be substantially rotationally or at least rotationally symmetrical) from an evacuation chamber in the interior of the irradiation bell. One or more passages in the carrier board interconnect the evacuation chamber and the irradiation chamber in such an embodiment. The connection for connection to the vacuum pump starts at the evacuation chamber, so that therefore the irradiation chamber can be evacuated through the evacuation chamber.

This refinement has the advantage that irradiation or a nuclear particle flow caused by it is possible without being influenced by the connection to the vacuum pump or by the suction flow. In addition, the carrier board acts as a shield, with the propagation of the nuclear particle emitted by the particle radiation source (preferably only) to the electronic component can be ensured. Back radiated nuclear particles are decelerated and absorbed by the carrier plate, so that there is no danger to a person who operates the device or performs the method.

Alternatively, the connection to the vacuum pump (e.g., a tube as mentioned above) may, for example, lead directly from the irradiation chamber to the outside of the irradiation bell.

A method according to the invention can comprise lifting the irradiation bell from the irradiated electronic component (which is also referred to here as a "first" electronic component) after measuring the function, as well as slipping the irradiation bell over another electronic component, which belong in particular to the same assembly (For example, arranged (eg fixed, in particular soldered) on the same circuit board) as the previously measured electronic component; preferably the slipping takes place via the (first) electronic component to the exclusion of the further electronic component and / or the slipping over the further electronic component takes place to the exclusion of the previously measured. When slipping over the further electronic component, the seal of the irradiation bell is preferably placed on a printed circuit board and / or on one or more further (for example, the other electronic component adjacent) component (s) of the assembly. The further electronic component can then be tested analogously by evacuating the irradiation chamber, irradiating with nuclear particles and measuring a function.

An electronic component to be tested in a method according to the invention or with a device according to the invention can be, for example, part of a circuit which is provided for use in a space project, in particular in an experiment setup provided in space. It can, for example, comprise a resistor, a diode, a transistor and / or at least part of a semiconductor integrated circuit (of a chip, in particular of a silicon chip) with such components.

The electronic component may be at least partially enclosed in a housing and / or coated with a protective layer or seal. Before slipping over the (first) electronic component and / or via the further electronic component, the electronic component can be exposed, for example by removing the material covering the electronic component (for example plastic). In particular, a protective layer or / and a part of a housing (e.g., a cover of the electronic component) may be removed, e.g. be etched away. As a result, a meaningful measurement (and thus testing) of the electronic component can take place even at relatively low irradiation energy.

The nuclear particles emitted by the particle radiation source as decomposition or cleavage ions are often positively charged electrically, so not all nuclear charges are then neutralized by a completely saturated electron shell. These ions can be deflected in a magnetic and / or electric field. Therefore, embodiments of the present invention are advantageous in which a particle or ion beam by means of Magnets influenced, for example, distracted and / or focused or defocused can be or will.

The irradiation bell may for this purpose comprise one or more radially magnetized permanent magnets, which at least partially surround / surround an intended flow path for nuclear particles radiated by the particle radiation source. Alternatively or additionally, the irradiation bell may comprise one or more axially magnetized permanent magnets which at least partially surround / surround an intended flow path for nuclear particles radiated by the particle radiation source. Such a permanent magnet may each be formed, for example, as a ring magnet

According to an advantageous embodiment of the present invention, the irradiation bell comprises at least one electromagnetic coil (that is, a coil of an electrical conductor), which is connected to a power source or adapted to be connected to a power source so as to form an electromagnet. The at least one coil at least partially surrounds an intended flow path for electrically charged nuclear particles radiated by the particle radiation source. The device may comprise a (preferably dynamically adjustable) current source for connection to the electrical coil, so that it is possible to vary the current and thus manipulate the flow of particles during the irradiation or between two irradiations; the device is therefore very versatile. A method according to the invention may accordingly comprise varying the current applied to the at least one electrical coil; during or after altering, the measurement of the function of another function of the irradiated device may be performed.

The at least one coil may be divided into a plurality (for example two or three) of partial coils which have different respective (abstract geometric) winding axes. For example, the winding axes can intersect at a point which preferably lies on a central axis of the device extending in the intended main radiation direction of the particle radiation source. Particularly advantageous is a variant in which the winding axes of the sub-coils are arranged rotated against each other (about a central axis of the device), for example by 90 ° (in particular in two sub-coils) or by 120 ° (in particular in three sub-coils). This allows on the one hand focusing of the nuclear particles by applying a continuous and equal current in all coils, on the other hand, a lateral deflection of the particle beam by applying different strong currents in the coil sections. In particular, the direction of the focused beam of electrically charged nuclear particles can be changed over the electronic component to be irradiated or tested.

A method according to the invention may comprise, after measuring the function of the irradiated electronic component, changing a current applied to the coil (s). The irradiation of the component with the particle radiation source can be continued or interrupted and resumed, and one (possibly further) function of the component can be measured in each case.

In particular, a method according to the invention, which is carried out with a device (as mentioned above) having a plurality of coil sections with different winding axes, can comprise two measurements, wherein in one of the measurements a continuous and equal current is applied in all coils and in the other Measurements (before or after) different currents are applied in the sub-coils.

Advantageous is an embodiment of a device according to the invention, in which the irradiation bell is assembled or assembled in a modular manner, ie consists of several individual parts which are detachably connected to one another or can be. The irradiation bell is preferably adapted to optionally include a different number (e.g., from 0 to 2 or from 1 to 3) of permanent magnets and / or coils which then at least partially surround an intended flow path for nuclear particles radiated by the particle radiation source. In particular, preferably, none, one or more permanent magnets in the irradiation bell and / or none, one or more coils (e.g., stacked and / or twisted against each other) may be used as needed. Thus, different magnetic flux densities with the device causes the irradiation conditions, under which the electronic components are each tested, so be varied.

According to a preferred development, a method according to the invention correspondingly comprises a change in the number of permanent magnets and / or coils. Subsequently, the irradiation bell with the changed number of permanent magnets and / or coils can again be placed over the electronic component to be tested or another electronic component to be tested, the associated irradiation chamber can preferably be evacuated and the respective component can be irradiated with the particle radiation source. So can the function or another function be measured of the electronic or the other electronic component.

According to an advantageous embodiment, the device comprises in addition to at least one permanent magnet and / or at least one electrical coil, a magnetic yoke made of a ferromagnetic material (eg, iron or an iron alloy or a ferrite material), the at least one permanent magnet or the at least one coil preferably at least partially surrounds. In particular, such a magnetic return can have a larger inner diameter than the at least one permanent magnet or the at least one coil. As a result, a distorted magnetic field whose intensity is particularly large in a (prescribed) irradiation area of the particle radiation source can be formed.

Such a magnetic return can be formed, for example, in the form of a clamp, with which a plurality of layers or layers of the irradiation bell can be held together. It may in particular be formed from a spring material, so that a simple loosening or mounting is possible. Preferably, the spring material is ferromagnetic or ferrimagnetic with no remanent magnetization so that it has a high magnetic permeability. In particular, in an embodiment in which the irradiation bell is modularly assembled as mentioned above, such a magnetic return made from a (e.g., ferromagnetic) spring material may advantageously serve as a fastener.

In the following preferred embodiments of the invention will be explained in more detail with reference to drawings. It is understood that individual elements and components can be combined differently than shown.

• 1a: eine exemplarische Ausführungsform einer erfindungsgemäßen Vorrichtung;
• 1b: die Vorrichtung gemäß 1a in Verwendung;
• 2: ein anderes Ausführungsbeispiel einer erfindungsgemäßen Vorrichtung;
• 3: ein weiteres Ausführungsbeispiel einer erfindungsgemäßen Vorrichtung;
• 4: eine erfindungsgemäßen Vorrichtung gemäß einer alternativen Ausführungsform; und
• 5: eine weitere Ausführungsvariante einer erfindungsgemäßen Vorrichtung.

Shown schematically in each case in cross section:

• 1a an exemplary embodiment of a device according to the invention;
• 1b : the device according to 1a in use;
• 2 : another embodiment of a device according to the invention;
• 3 a further embodiment of a device according to the invention;
• 4 a device according to the invention according to an alternative embodiment; and
• 5 : a further embodiment of a device according to the invention.

In 1a is a cross-section through an exemplary embodiment of a device according to the invention 100 shown, 1b shows a use of this device (eg during the implementation of a method according to the invention). The device 100 includes an irradiation bell 110 that - as in 1b shown - is set up to the exclusion of a section 21 an electronic module (in particular an associated circuit board 20 ) about an electronic component to be tested 1 to be inverted and thereby an evacuable irradiation chamber 111 train (so to enclose). An edge of the irradiation bell to be placed over when slipping over comprises a (preferably elastically) compressible seal 112 , which may for example be formed at least partially from soft rubber. In 1b is to recognize how the seal 112 on a housing of a device to be tested 1 comprehensive chips 10 is set up and thereby partially compressed. In the in 1b The situation shown is the component to be tested 1 thereby (while preserving its functionality) exposed, a cover over the device 1 so removed, for example by etching.

The device 100 includes one inside the irradiation bell 110 arranged particle radiation source 120 , In the present case in a receiving housing on a carrier board 113 is arranged. Like in the 1b is characterized separates the carrier board 113 while the irradiation chamber 111 from an evacuation chamber 114 ; passages 115 connect the two chambers. Is a vacuum pump with an attaching to the evacuation chamber and in the present case designed as a tube connection 130 connected to the device, can thus air from the irradiation chamber 111 through the passages 115 and the evacuation chamber 114 be sucked off. In particular, in this way a negative pressure or vacuum (preferably at least one coarse or fine vacuum) in the evacuation chamber 114 and the irradiation chamber 111 be generated, so that a deceleration of the particle radiation source 120 emitted nuclear particles can be reduced or even (at least largely) prevented.

The particle radiation source 120 for nuclear particles, for example Californium 252 or americium 241 which can be completely or partially covered by a gold foil or layer for contact safety. In particular, those of the particle radiation source can then be used 120 emitted nuclear particles (eg helium or heavier atomic nuclei after decay) completely delivered from the carrier board 113 and / or the receiving housing but shielded so that they only through the gold foil to the device 1 spread out (as in the 1a and 1b (as well as in the 2 and 3 ) is illustrated by the dotted area respectively).

The radiation bell 110 in the 1a and 1b illustrated device 100 is modular. It includes several detachably assembled parts, several of which are secured by one or more screws 119 held together. In particular, the irradiation bell as such parts at least one spacer ring 116a . 116b (For example, aluminum), at least one cover plate 117 (For example, aluminum) and / or at least one seal (eg between two other parts, in the 1a . 1b not shown). Two or more of the parts can (optionally in addition to the connection by the screw / n 119 ), preferably by means of a vacuum-suitable or sealing adhesive.

In an unloaded (not compressed or deformed) state of the seal 112 has a bordered by the seal opening a diameter D , which is also called the inner diameter of the irradiation bell 110 referred to as. The inner diameter D is preferably measured along a plane of the aufzusetzenden edge (ie a plane in which the aufzusetzende edge is); An intended Aufsetzrichtung the irradiation bell is preferably perpendicular to this plane. An outer diameter A the irradiation bell is defined as its maximum extent occurring parallel to said plane. A height H The device is measured in an unloaded state of the seal in a central region of the irradiation bell (in particular above the particle radiation source), perpendicular to the plane of the aufzusetzenden edge (and thus in a direction Aufsetzrichtung).

The particle radiation source 120 has a distance d ₁ from a plane of the edge to be set up. When slipping the irradiation bell 110 via an electronic component 1 (By placing on a circuit board and / or another component and / or on a component enclosing the housing, for example a chip 10 ) results as in 1b is shown, a distance d ₂ the particle radiation source from the electronic component. The in the 2 - 5 not shown dimensions of the devices shown are to be understood accordingly.

• - für den Außendurchmesser A gilt A ≤ 6cm gilt, bevorzugter A ≤ 4cm oder sogar A ≤ 3cm; und/oder
• - für den Innendurchmesser D gilt D ≤ 5cm oder D ≤ 3,5cm oder sogar D ≤ 2cm; und/oder
• - für den Innendurchmesser D gilt D ≥1cm oder D ≥ 1,5cm oder sogar D ≥ 2cm; und/oder
• - für die Höhe H gilt H ≤ 5cm, bevorzugter H≤ 3,5cm oder sogar H ≤ 2,5cm; und/oder
• - für den Abstand d₁ gilt d₁ ≤3,5cm, bevorzugter d₁ ≤ 2cm oder sogar d₁ ≤ 1,8cm; und/oder
• - für den Abstand d₂ gilt d₂ ≤2cm, bevorzugter d₂ ≤ 1,8cm oder sogar d₂ ≤ 1,2 cm.

Particularly advantageous embodiments of the present invention, in which

• - for the outside diameter A A ≤ 6cm applies, more preferably A ≤ 4cm or even A ≤ 3cm; and or
• - for the inside diameter D D ≤ 5cm or D ≤ 3.5cm or even D ≤ 2cm; and or
• - for the inside diameter D D ≥1cm or D ≥ 1.5cm or even D ≥ 2cm; and or
• - for the height H H ≤ 5 cm, more preferably H ≤ 3.5 cm or even H ≤ 2.5 cm; and or
• - for the distance d ₁ applies d ₁ ≤3.5cm, more preferable d ₁ ≤ 2cm or even d ₁ ≤ 1.8cm; and or
• - for the distance d ₂ applies d ₂ ≤2cm, more preferable d ₂ ≤ 1.8cm or even d ₂ ≤ 1.2 cm.

In 2 is an alternative embodiment of a device according to the invention 200 shown, which is an irradiation bell 210 with a compressible seal 212 , a particle radiation source 220 for nuclear particles and a connection 230 for connection to a vacuum pump. Unlike in the 1a . 1b embodiment shown, the connection sets 230 In this case, directly to the irradiation chamber, so a separate evacuation chamber does not exist here.

The particle radiation source 220 is in this embodiment in a disc-shaped receiving housing 213 bordered, at the same time a cover plate of the irradiation bell 210 forms. The receiving housing 213 is in a dome frame 215 used, the connection through sealing rings 219 , Preferably O-rings is sealed.

3 shows a variant of a device according to the invention 300 which is particularly easy to manufacture: it includes an irradiation bell 310 with a (preferably elastic) compressible seal 312 , a particle radiation source 320 for nuclear particles and a connection 330 for connection to a vacuum pump.

The particle radiation source 320 is doing as in the embodiment of 2 in a disk-shaped receiving housing 313 arranged; this may be at least partially made of the same elastic, vacuum-tight material as the seal.
The receiving housing 313 for the particle radiation source is in a recess of the compressible seal 312 used (for example, glued) and forms with the seal 312 together out the radiation bell. The trained as a tube connection 330 passes through the compressible seal 312 , which may for example at least partially consist of a closed-cell (or closed-cell) sponge rubber.

In 4 is another alternative embodiment of a device according to the invention 400 shown, which is an irradiation bell 410 with a compressible seal 412 , a particle radiation source 420 for nuclear particles and a connection 430 for connection to a vacuum pump.

The radiation bell 410 has a radially magnetized permanent magnet 416 on, a designated flow path B for from the particle radiation source 420 at least partially surrounds emitted nuclear particles. The permanent magnet 416 is formed in the illustrated embodiment as a ring magnet, through the inner circle of the intended flow path B for emitted by the particle radiation source nuclear particles passes.

A magnetic inference 417 of a magnetic material, which is preferably formed as a (for example slotted) clamp (and in the example shown forms an outer wall of the irradiation bell), in particular surrounds the permanent magnet 416 ; the inference can preferably at least partially consist of a ferromagnetic spring material and the various components of the modularly constructed irradiation bell 410 stick together. Permanent magnet and inference form in the 4 shown embodiment, a distorted magnetic field, which is indicated in the drawing by dash-dot lines and its largest concentration in the region of the intended flow path B is for emitted by the particle radiation source nuclear particles. The magnetic field deflects the nuclear particles on arcuate paths which, depending on the field orientation, can have a focusing or defocusing effect, with which the particle flow under the particle radiation source increases or decreases.

By stacking two or more permanent magnets 416 can the magnetic flux density of the magnetic field and thus the extent of influencing the particle flow change.

5 shows a further exemplary embodiment of a device according to the invention 500 , This includes an irradiation bell 510 with a compressible seal 512 , a particle radiation source 520 for nuclear particles and a connection 530 for connection to a vacuum pump. The device 500 also includes an electrical coil 518 , which is adapted to be connected to a power source, and the intended flow path B for from the particle radiation source 520 surrounds emitted nuclear particles. In addition, the device has two magnetic conclusions 517a . 517b made of a ferromagnetic material. The inference 517a , which is preferably formed as a (for example slotted) clamp (and in the example shown forms an outer wall of the irradiation bell), in particular surrounds the coil 518 ; it may at least partially consist of a ferromagnetic spring material and hold together the various components of the modular radiation bell. The inference 517b is annular and extends flat substantially parallel to a plane in which the aufzusetzende edge of the irradiation bell 510 lies. An inside diameter of the conclusion 517b , that is, a diameter of the area that the conclusion 517b preferably not more than 2 cm, more preferably not more than 1 cm. In particular, the inner diameter of the return path can be smaller than the inner diameter D the irradiation bell at the aufzusetzendem edge. Preferably, the inner diameter of the conclusion is at most as large as half or even at most as large as one third of the inner diameter D the irradiation bell at the aufzusetzendem edge.

When applying power to the coil 518 a magnetic field is generated which is in 5 is characterized by dash-dot lines and its highest flux density in the region of the intended flow path B is for emitted by the particle radiation source nuclear particles. The inner diameter of the magnetic return path 517a for example, at least twice, at least three times or even at least four times the inner diameter of the magnetic yoke 517b be. The very different diameters of the magnetic conclusions 517a and 517b provide a highly distorted field, which acts like a magnetic lens focusing or defocusing on the particle beam. The influence depends on the direction and the strength of the electrical excitation current in the coil 518 and can thus be changed by modifying the current.

The sink 518 can consist of several (preferably two or three) individual coils (not visible in the figure), the winding axes can be made obliquely against each other. As a result, the strongly distorted magnetic field (dash-dotted lines) can be given an additional horizontal component that the particle beam B can distract sideways.

Alternatively or in addition to the coil 518 For example, the irradiation bell may include at least one annular, axially magnetized magnet (as commonly used in speakers). The electrical connection can then be omitted if necessary. The magnetic field can be changed in such an embodiment by stacking a plurality of similar magnets.

Disclosed is a device 100 . 200 . 300 . 400 . 500 for testing electronic components. The device comprises an irradiation bell 110 . 210 . 310 . 410 . 510 , which is set up to the exclusion of a section 21 an electronic assembly 20 via an electronic component 1 to be put over the assembly while an evacuable irradiation chamber 111 train. At its edge to be placed on the irradiation bell has a compressible seal 112 . 212 . 312 . 412 . 512 on. Inside the irradiation bell is a particle radiation source 120 . 220 . 320 . 420 . 520 arranged for nuclear particles. The device also includes a connection 130 . 330 . 430 . 530 . 630 for connection to a vacuum pump.

Also disclosed is a method for testing at least one electronic component 1 an electronic assembly 20 ,

LIST OF REFERENCE NUMBERS

1

electronic component

10

chip

20

circuit board

21

Section of the circuit board 20

100, 200, 300, 400, 500

Device for testing electronic components

110, 210, 310, 410, 510

irradiation bell

111

irradiation chamber

112, 212, 312, 412, 512

compressible seal

113

carrier board

114

evacuation chamber

115

passage

116a, 116b

spacer ring

117

cover

119

screw

120, 220, 320, 420, 520

Particle radiation source for nuclear particles

130, 330, 430, 530, 630

Connection for connection to a vacuum pump

213, 313

Housing for the particle radiation source

215

coupling frame

219

seal

416

permanent magnet

417, 517a, 517b

conclusion

518

Kitchen sink

A

Outer diameter of the irradiation bell

B

provided flow path for emitted by the particle radiation source nuclear particles

D

Inner diameter of the irradiation bell at her aufzusetzenden edge

H

Height of the radiation bell

d ₁

Distance of the particle radiation source from a plane of the aufzusetzenden edge

d ₂

Distance of the particle radiation source from the electronic component

Claims (13)

Device (100, 200, 300, 400, 500) for testing electronic components, comprising: - An irradiation bell (110, 210, 310, 410, 510), which is adapted to be inverted, excluding a portion (21) of an electronic assembly (20) via an electronic component (1) of the assembly and thereby an evacuable irradiation chamber (111), wherein the irradiation bell comprises a compressible seal (112, 212, 312, 412, 512) on its edge to be applied; a particle radiation source (120, 220, 320, 420, 520) for nuclear particles arranged inside the irradiation bell; and a port (130, 330, 430, 530, 630) adapted to be connected to a vacuum pump for evacuating the irradiation chamber (111), the nuclear particles comprising protons and / or alpha radiation and / or gap Ions heavier than helium nuclei. Device according to Claim 1 wherein the particle radiation source is arranged on a carrier board (113) which separates the irradiation chamber (111) from an evacuation chamber (114) inside the irradiation chamber, wherein the evacuation chamber and the irradiation chamber are interconnected by at least one passage (115) in the carrier board and wherein the port (130) attaches to the vacuum pump in the evacuation chamber (114). Device according to one of Claims 1 or 2 wherein the irradiation bell (110, 210, 310, 410, 510) has an inner diameter (D) at the edge to be applied, which is at least 1 cm or at least 1.5 cm or at least 2 cm and / or which is at most 5 cm or at most 3.5 cm or not more than 2cm. Device according to one of the preceding claims, wherein the irradiation bell comprises at least one radially magnetized permanent magnet (416) which at least partially surrounds an intended flow path (B) for nuclear particles radiated by the particle radiation source. Apparatus according to any one of the preceding claims, wherein the irradiation bell comprises at least one annular, axially magnetized permanent magnet at least partially surrounding a designated flow path (B) for nuclear particles radiated by the particle radiation source. Device according to one of the preceding claims, wherein the irradiation bell comprises at least one electrical coil (518) which is connected to a power source or adapted to be connected to a power source, wherein the at least one coil a provided flow path (B) of the Particle radiation source at least partially surrounds emitted nuclear particles. Device after Claim 6 wherein the at least one coil (518) comprises two or three sub-coils having different winding axes. Device according to one of Claims 4 to 7 wherein the irradiation bell further comprises a magnetic yoke (417, 517a, 517b) made of a ferromagnetic material which is adapted to influence a magnetic field generated by the permanent magnet or by the at least one coil. Apparatus according to any one of the preceding claims, wherein the irradiation bell is modularly disassembled, and wherein the irradiation bell is adapted to optionally comprise a different number of permanent magnets (416, 516) and / or coils (518) having a designated one Flow path (B) for at least partially surrounded by the particle radiation source (420, 520) emitted nuclear particles. Method for testing at least one electronic component (1) of an electronic assembly (20), comprising: - Forming an evacuable irradiation chamber (111) by slipping an irradiation bell (110, 210, 310, 410, 510) excluding a portion (21) of the electronic assembly via the electronic component (1); - Evacuate the irradiation chamber (111) by means of a connected to a port (130, 230, 330, 430, 530) of the irradiation bell vacuum pump; irradiating the electronic component with nuclear particles from a particle radiation source (120, 220, 320, 420, 520); and measuring a function of the irradiated electronic component (1), the nuclear particles comprising protons and / or alpha radiation and / or gap ions heavier than helium nuclei. Method according to Claim 10 , which further comprises: - lifting the irradiation bell (110, 210, 310, 410, 510) from the electronic component (1); - Forming a further irradiation chamber by slipping the irradiation bell over another electronic component (1); evacuating the further irradiation chamber by means of the vacuum pump connected to the connection (130, 230, 330, 430, 530) of the device; - irradiating the further electronic component (1) with the particle radiation source (120, 220, 320, 420, 520); and measuring a function of the further irradiated electronic component (1). Method according to one of Claims 10 or 11 which additionally comprises influencing a flow path of the nuclear particles through a magnetic field of at least one permanent magnet (416, 516) and / or at least one coil (518). Method according to Claim 12 in addition to changing the magnetic field and measuring another function or re-measuring the same function of the irradiated electronic component.

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