DE102016110611A1 - Device with a Hall structure with an increased signal amplitude - Google Patents

Abstract

The invention relates to a device for measuring the flux density B of a magnetic field by means of the Hall effect with a Hall structure (1) with four contacts (2, 3, 4, 5), at least one measuring current source (10), each with a Meßstromzu- and -Discharge (11, 12) and with two Hall potential cables (13, 14). By switch (6, 7, 8, 9), a contact pair (eg 2, 4) for the current input to the contact pair (eg, 3, 5) are interchanged for the decrease of the Hall voltage whereby the positions of the Meßstromzu- and derivative change into the reverb structure. All contacts that are used for Hall potential detection, with the advantage of space savings can also be used as Stromein- and discharge contact with a suitable position combination of the switch (6, 7, 8, 9). If they are used as Stromein- or discharge contact, these switches (6, 7, 8, 9) by means of switches (21, 22, 23, 24, 25) further contacts (17, 18, 19, 20) connected in parallel, whereby reduces the contact resistance and increases the Hall voltage at the same operating voltage. Each two contacts ((2, 17), (3, 18), (4, 19), (5, 20)) form a contact group. If a contact group is to be used for detecting a Hall potential, the additional contact (17, 18, 19, 20) is opened again by the opening of the relevant switch (21, 22, 23, 24, 25) from the measuring contact (2, 3 , 4, 5) separately.

Description

preamble

The invention is directed to an apparatus for measuring a magnetic quantity, namely the magnetic flux density B by means of a galvano-magnetic component. This galvano magnetic component operates in the device according to the invention on the basis of the Hall effect (IPC G01R 15/20, G01R 33/07, H01L 43/00)

General introduction

Devices for measuring the flux density B of a magnetic field by means of the Hall effect on the basis of integrated semiconducting Hall structures are well known from the prior art (US Pat. 1 ) known. Such structures are preferably produced micronically integrated on a semiconductive substrate and used in many ways. In particular, such sensors are used as actual value transmitters in control systems with magnetic field variables (G05F 1/635) or pedometer (G06M 1/274) or as switches (H01H 36/00). A particularly important application is that in electrical machines (H02K 11/215, H02K 29/08), for example, for determining the position of the rotor. Applications for magnetic recording and reproducing apparatus (G11B 5/37, G11B 5/37) are also known. Particularly preferred is the integration together with other microelectronic components on a substrate. (H01L 27/22) Furthermore, such components in vibration generators or amplifiers (H03B 15/00) and in particular for amplitude modulation control (H03C 1/48, H03C 1/48) are used.

Such a Hall structure ( 1 ) is preferably produced photolithographically in a monocrystalline semiconductor material as a thin layer as possible on the surface of the monocrystalline semiconductor material. The Hall structure ( 1 ) typically has at least four contacts ( 2 . 3 . 4 . 5 ) on. Below are these at least four contacts ( 2 . 3 . 4 . 5 ) as first contact ( 2 ), second contact ( 3 ), third contact ( 4 ) and fourth contact ( 5 ) designated. Particularly preferred is the Hall structure ( 1 ) is rotationally symmetric with a fourfold symmetry axis perpendicular to the surface of the semiconductive substrate in which the Hall structure is made constructed and realized. These four contacts are also present in their functionality in such Hall structures having more than four contacts. A measuring device, as known from the prior art, moreover has a measuring current source ( 10 ), which injects a measuring current (I ₁ ) into the Hall structure ( 1 ) via a measuring current supply line ( 11 ) and via a measuring current derivative ( 12 ) of this Hall structure ( 1 ) takes again. In order to determine the Hall voltage, which is the basis of the measured value determination for the flux density B, the Hall structure ( 1 ) via a first Hall potential line ( 13 ) and a second Hall potential line ( 14 ) connected. It is well known in the art that inhomogeneities, manufacturing defects, and particularly, for example, mechanical stress applied to the crystal of the monolithic integrated circuit, can lead to voltage offsets of the Hall voltage. Therefore, the four basic contact functions, current injection, current drain, detection of the first Hall potential, detection of the second Hall potential and typically also the sign of the measuring current (I ₁ ) in the prior art, cyclically or randomly swapped and the varying measured values a common error-corrected measured value. For this purpose, a measuring device of the prior art has a first switch ( 6 ), a second switch ( 7 ), a third switch ( 8th ) and a fourth switch ( 9 ). The switches ( 6 . 7 . 8th . 9 ) can be realized for example as an analog multiplexer based on MOS or other transistors, but also mechanically, for example as a micromechanical switch. The actual Hall measurement is then evaluated by a Hall voltage evaluation circuit ( 15 ) determined from the detected first and second Hall potential. This may be, for example, an analog circuit with an analog measurement signal output ( 16 ) or even a microcontroller with an ADC and an upstream amplifier, a digital measurement signal output ( 16 ) as date on a data bus as a measurement signal output ( 16 ).

In the simplest case, the assignment of the four basic possible contact functions to the at least four contacts between only two configurations is switched back and forth. The device is then either in a first state or alternatively in this first state in at least a second, further state. The first state is different from the second state. The difference is typically characterized by a differing assignment of the four basic possible contact functions to the at least four contacts.

The first switch ( 6 ) connects the first contact ( 2 ) of the Hall structure ( 1 ) with the measuring current supply line ( 11 ) in the first state electrically and separates the first contact ( 2 ) of the Hall structure ( 1 ) from the second Hall potential line ( 14 ) in the first state electrically.

Conversely, the first switch ( 6 ) the first contact ( 2 ) of the Hall structure ( 1 ) with the second Hall potential line ( 14 ) in the second state electrically and separates it from the measuring current supply line ( 11 ) in the second state electrically.

The second switch ( 7 ) connects the second contact ( 3 ) of the Hall structure ( 1 ) with the first Hall potential line ( 13 ) in the first state electrically and separates the second contact ( 3 ) of the Hall structure ( 1 ) of the measuring current derivative ( 12 ) in the first state. In the second state, the second switch connects ( 7 ) the second contact ( 3 ) of the Hall structure ( 1 ) with the measuring current derivative ( 12 ) electrically and disconnects the second contact ( 3 ) of the Hall structure ( 1 ) from the first Hall potential line ( 13 ) electrically.

The third switch ( 8th ) connects the third contact ( 4 ) of the Hall structure ( 1 ) with the measuring current derivative ( 12 ) in the first state electrically and separates the third contact ( 4 ) of the Hall structure ( 1 ) from the first Hall potential line ( 13 ) in the first state electrically. In the second state, the third switch ( 8th ) the third contact ( 4 ) of the Hall structure ( 1 ) with the first Hall potential line ( 13 ) electrically and disconnects the third contact ( 4 ) of the Hall structure ( 1 ) of the measuring current derivative ( 12 ) in the second state electrically.

The fourth switch ( 9 ) connects the fourth contact ( 5 ) of the Hall structure ( 1 ) with the first Hall potential line ( 13 ) in the first state electrically and separates the fourth contact ( 5 ) of the Hall structure ( 1 ) of the measuring current supply ( 11 ) in the first state electrically. In the second state, the fourth switch connects ( 9 ) the fourth contact ( 5 ) of the Hall structure ( 1 ) with the measuring current supply line ( 11 ) electrically and disconnects the fourth contact ( 5 ) of the Hall structure ( 1 ) from the Hall potential line ( 13 ) in the second state electrically.

The Hall voltage evaluation circuit ( 15 ) generates the measurement output signal ( 16 ), which has a value. This value of the measurement output signal ( 16 ) typically depends on the voltage difference between the electrical potential of the first Hall potential lead ( 13 ) and the electrical potential of the second Hall potential line ( 14 ). This value of the measurement output signal ( 16 ) represents at least temporarily the determined flux density B of at least a portion of the magnetic field that the Hall structure ( 1 ) flows through.

Here, the problem arises that for optimum detection of the Hall voltage, the contacts that are used for the Hall voltage detection should be as small and punctiform as possible. Otherwise, the contacts partially short the Hall voltage, so that the remaining Hall measurement signal shows a reduced Hall measurement voltage. Therefore, the Hall voltage detection efficiency decreases with respect to a pair of ideal point contacts as the contact size increases.

Conversely, the current feed of the measuring current (I ₁ ) into the Hall structure to be measured ( 1 ) by the measuring current source used ( 10 ) be maximum. Typically, however, the devices are powered by voltage sources as energy sources. Therefore, the measuring current (I ₁ ) is typically limited by the operating voltage. This leads to the problem that voltage drops over the contact resistances of the Einleitungskontakts and the Ableitungskontakts given resistance of the Hall structure to a reduced measuring current (I ₁ ) and thus lead to a reduction of the Hall voltage. Therefore, in order to reduce the contact resistance, it makes sense to increase the input contact and the drain contact, thereby reducing the contact resistance.

The necessary cyclic scrambling of the four basic contact functions among the four contacts over time now leads to the problem that one and the same contact in a first measurement phase in a first state of the scrambling of the contacts as Einleitungskontakt or Ableitungskontakt for the measuring current (I ₁ ) is operated and, for example, in a second measurement phase at a different time in a first state of scrambling the contacts used as a contact for detecting the Hall voltage. In the first measuring phase, therefore, a maximization of the contact surface would be desirable while in the second measurement phase, a minimization of this contact surface is desirable. In the prior art, a compromise between these extremes is used today.

Object of the invention

The invention is therefore based on the object to provide a solution which does not have the above disadvantage of the prior art and possibly has further advantages. This object is achieved by a device according to claim 1.

Solution of the problem of the invention

In a Hall structure of the type described above, the object is achieved in that it in addition to the at least four contacts ( 2 . 3 . 4 . 5 ) has further switched on and wegschaltbare contacts. In the simplest case, this is a switchable contact per contact from the prior art. Every contact ( 2 . 3 . 4 . 5 ) of the prior art forms with at least one additional or contactable additional contact a contact group, which now takes over the current contact function of the contact from the prior art in their entirety. Due to the ability to connect and disconnect further contacts, the effective contact area can vary depending on the contact function (current introduction or current drain on one side and detection of the contact surface) first and second Hall potentials on the other side) are increased and decreased. For this purpose, a control device for each switch or switch, with which the switching on and off of the additional contacts is executed, generates suitable control signals as a function of the time and / or control signals for this control device and / or register contents, if the control device has a data bus connection ,

The device according to the invention therefore has at least one fifth contact beyond the prior art ( 17 ), a sixth contact ( 18 ), a seventh contact ( 19 ) and an eighth contact ( 20 ) of the Hall structure ( 1 ) on. To add and remove these contacts ( 17 . 18 . 19 . 20 ) it has a first switch ( 21 ), a second switch ( 22 ), a third switch ( 23 ) and a fourth switch ( 24 ) controlled by the control device. According to the invention, the device must have at least two states, which are distinguished by the assignment of the contact functions to the contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ). Other states may be due to other assignments and / or the measuring current direction of the measuring current (I ₁ ) of the measuring current source ( 10 ). The device according to the invention is therefore, as the devices of the prior art in a first state or alternatively to this first state at least partially in at least a second, further state, wherein the first state is different from the second state;
The switching on and off of the additional at least four contacts ( 17 . 18 . 19 . 20 ) to the original contacts ( 2 . 3 . 4 . 5 ) is done via at least four switches ( 21 . 22 . 23 . 24 ). These can be designed, for example, as transistors or else as mechanical and / or micromechanical switches.

The additional first switch ( 21 ) connects the fifth contact ( 17 ) with the measuring current supply line ( 11 ) in the first state and disconnects the fifth contact ( 17 ) from the measuring current supply line ( 11 ) in the second state. The second switch ( 22 ) connects the sixth contact ( 18 ) with the measuring current derivative ( 12 ) in the second state and separates the sixth contact ( 18 ) from the measuring current derivative ( 12 ) in the first state. The third switch ( 23 ) connects the seventh contact ( 19 ) with the measuring current derivative ( 12 ) in the first state and separates the seventh contact ( 19 ) from the measuring current derivative ( 12 ) in the second state. The fourth switch ( 24 ) connects the eighth contact ( 20 ) with the measuring current supply line ( 11 ) in the second state and disconnects the eighth contact ( 20 ) from the measuring current supply line ( 11 ) in the second state.

As before, the Hall voltage evaluation circuit ( 15 ) the measuring output signal ( 16 ), which has a value. This value of the measurement output signal ( 16 ) depends on the voltage difference between the electrical potential of the first Hall potential line ( 13 ) and the electrical potential of the second Hall potential line ( 14 ). This value of the measurement output signal ( 16 ) here also at least temporarily represents the determined flux density B of at least a portion of the magnetic field which is the Hall structure ( 1 ) flows through.

Advantage of the invention

Such a Hall structure ( 1 ) allows, at least in some implementations, to maximize sensitivity in the μV / Tesla range. The advantages are not limited to this.

Description of the developments / embodiments of the invention

In a first particular embodiment of the invention, this has additional additional contacts, which can be switched on or off. The device according to the invention then has, for example, a ninth contact ( 26 ), a tenth contact ( 27 ), an eleventh contact ( 28 ) and a twelfth contact ( 29 ) of the Hall structure ( 1 ) in addition. In addition, the device has a fifth switch ( 30 ), a sixth switch ( 31 ), a seventh switch ( 32 ) and an eighth switch ( 33 ), which are controlled by a control device. For those already said for the other switches. The fifth switch ( 30 ) connects the ninth contact ( 26 ) with the measuring current supply line ( 11 ) in the first state and separates the ninth contact ( 26 ) from the measuring current supply line ( 11 ) in the second state. The sixth switch ( 31 ) connects the tenth contact ( 27 ) with the measuring current derivative ( 12 ) in the second state and separates the tenth contact ( 27 ) from the measuring current derivative ( 12 ) in the first state. The seventh switch ( 32 ) connects the eleventh contact ( 28 ) with the measuring current derivative ( 12 ) in the first state and separates the eleventh contact ( 28 ) from the measuring current derivative ( 12 ) in the second state. The eighth switch ( 33 ) connects the twelfth contact ( 29 ) with the measuring current supply line ( 11 ) in the second state and separates the twelfth contact ( 29 ) from the measuring current supply line ( 11 ) in the second state. As a result of these further contacts, the contact resistance for the contact groups, via which the measuring current (I ₁ ) is introduced or removed, is further reduced if necessary. Preferably, the contacts of a contact group are arranged in close proximity to one another. Preferably, all contacts have a minimum size and are as close as possible to each other at maximum distance from a typically centered symmetry point of the Hall structure ( 1 ) or the centroid of the Hall structure ( 1 ) arranged. typically, All contacts are located on a circle around this symmetry or centroid.

The invention can also be described on the basis of contact groups. In this case, a contact group has contacts that are used in a state in which the contact group is used to initiate or dissipate the measuring current (I ₁ ), typically all contacts of this contact group are used for this input or output of the measuring current (I ₁ ).

• 1. Kontaktgruppe zur Einleitung des Messstromes (I₁) (erste Mindestkontaktgruppenfunktion)
• 2. Kontaktgruppe zur Ableitung des Messstromes (I₁) (zweite Mindestkontaktgruppenfunktion)
• 3. Kontaktgruppe zur Erfassung eines ersten Hall-Potenzials (dritte Mindestkontaktgruppenfunktion)
• 4. Kontaktgruppe zur Erfassung eines zweiten Hall-Potenzials (vierte Mindestkontaktgruppenfunktion)

Such a device according to the invention comprises at least four contact groups ( 34 . 35 . 36 . 37 ) for each one of the four minimum contact functions, which is now a contact group function. Each of the contact groups comprises at least n contacts ( 2 . 17 . 26 ; 3 . 18 . 27 ; 4 . 19 . 28 ; 5 . 20 . 29 ), which the Hall structure ( 1 ) contact electrically. Here, n is a positive, integer, which is preferably the same for all contact groups. In order to obtain the desired effect, it is necessary that the number n of contacts per contact group of each of these contact groups in each contact group is larger than the number one per contact group. The device is, as before, at least temporarily during operation of the device in a first state (Z ₁ ) or alternatively to this first state (Z ₁ ) at other times of operation of the device at least temporarily in at least one further, second state ( Z ₂ ). At least two states of these states differ by a different configuration of the contact group functions in relation to the assignment of the four minimum contact group functions to the contact groups. The states (Z ₁ , Z ₂ ) are therefore different from each other. The state of the at least two states present at an operating time is referred to below as the current state (Z _a ) for better clarity. The change of the current state (Z _a ), for example, from a first state (Z ₁ ) to a second state (Z ₂ ) and vice versa or for example from another, not described here state in the first state (Z ₁ ) or the second state (Z ₂ ) and vice versa, or for example from another, not described here state to another, also not described state and vice versa is always associated with a change of configuration in the sense of this disclosure. Here, the contact groups can occupy at least the following contact group functions (minimum contact group functions):

• 1. Contact group for the introduction of the measuring current (I ₁ ) (first minimum contact group function)
• 2. Contact group for deriving the measuring current (I ₁ ) (second minimum contact group function)
• 3. Contact group for detecting a first Hall potential (third minimum contact group function)
• 4. Contact group for detecting a second Hall potential (fourth minimum contact group function)

• • Kontaktgruppe zur Einleitung eines positiven Messstromes (I₁)
• • Kontaktgruppe zur Einleitung eines negativen Messstromes (I₁)
• • Kontaktgruppe zur Ableitung eines positiven Messstromes (I₁)
• • Kontaktgruppe zur Ableitung eines negativen Messstromes (I₁)
• • Kontaktgruppe zur Erfassung eines ersten Hall-Potenzials
• • Kontaktgruppe zur Erfassung eines zweiten Hall-Potenzials
• • Kontaktgruppe zur Einleitung eines weiteren positiven Messstromes (I₂)
• • Kontaktgruppe zur Einleitung eines weiteren negativen Messstromes (I₂)
• • Kontaktgruppe zur Ableitung eines zusätzlichen positiven Messstromes (I₃)
• • Kontaktgruppe zur Ableitung eines zusätzlichen negativen Messstromes (I₃)
• • usw.
• • Isolierte Kontaktgruppe ohne Funktion
• • Kontaktgruppe zur Erfassung eines dritten Hall-Potenzials
• • Kontaktgruppe zur Erfassung eines vierten Hall-Potenzials
• • usw.

In further embodiments of the invention, the contact groups can assume, for example, the following contact group functions, wherein the four minimum contact group functions are fulfilled and must be Kischhoff's laws:

• • Contact group for initiating a positive measuring current (I ₁ )
• • Contact group for initiating a negative measuring current (I ₁ )
• • Contact group for deriving a positive measuring current (I ₁ )
• • Contact group for deriving a negative measuring current (I ₁ )
• • Contact group for detecting a first Hall potential
• • Contact group for detecting a second Hall potential
• • contact group for initiating another positive measuring current (I ₂ )
• Contact group for initiating another negative measuring current (I ₂ )
• • Contact group for deriving an additional positive measuring current (I ₃ )
• • Contact group for deriving an additional negative measuring current (I ₃ )
• • etc.
• • Isolated contact group without function
• • Contact group for detecting a third Hall potential
• • Contact group for detecting a fourth Hall potential
• • etc.

The number of possible configurations is thus determined by the number of contact groups and the number of useful contact group functions. Typically, several of these possible configurations of contact group functions are selected and cycled. For each configuration, the at least two Hall potentials are detected at the corresponding contact groups having a corresponding third or fourth contact group function for detecting a Hall potential in the corresponding configuration. After creating all selected configurations in which configurations can also be created multiple times, a common measured value is calculated. The calculation of this measurement varies depending on the selected sequence of configurations.

In one configuration, each of the at least four contact groups ( 34 . 35 . 36 . 37 ) associated with exactly one of at least four possible contact group functions in the current state (Z _a ). Conversely, each of the four minimum contact group functions must have at least one of the at least four contact groups ( 34 . 35 . 36 . 37 ) in the current state (Z _a ), so that a meaningful calculation of the measured value is possible.

The contact group function referred to below as the first contact group function is characterized in that a contact group, which is assigned to this first contact group function, is used for current introduction of the measuring current (I ₁ ) into the Hall structure;
The contact group function referred to below as the second contact group function is characterized in that a contact group, which is assigned to this second contact group function, is used to derive the current from the measuring current (I ₁ ) from the Hall structure;
The contact group function referred to below as the third contact group function is characterized in that a contact group, which is assigned to this third contact group function, is used to detect a first Hall potential;
The contact group function referred to below as the fourth contact group function is characterized in that a contact group, which is assigned to this fourth contact group function, is used to detect a second Hall potential;
In a contact group associated with the first contact group function, more contacts than the number of one contact of that contact group are used for the power input. As a result, the contact resistance of the contact group is lowered in this first contact group function.

In a contact group associated with the second contact group function, more contacts than the number of one contact of that contact group are used for the current drain. As a result, the contact resistance of the contact group is also lowered in this second contact group function.

In a contact group associated with the third contact group function, it is preferable to use exactly one contact of that contact group to detect the first Hall potential. The other contacts of this contact group are then electrically connected to one another exclusively via the Hall structure. Otherwise, without the connection via the Hall structure itself, these are electrically isolated from each other. This prevents that the Hall voltage is short-circuited by the additional contact surface of the contact group for the current introduction when using this contact group in connection with a first or second contact group function, locally within the contact group area. The level of the Hall voltage is increased.

In a contact group, which is assigned to the fourth contact group function, preferably exactly one contact of this contact group is used to detect the second Hall potential. The other contacts of this contact group are then also electrically connected to one another exclusively via the Hall structure. Otherwise, without the connection via the Hall structure itself these are electrically isolated again against each other. As a result, it is also prevented here that the Hall voltage is short-circuited locally within the contact group area by the additional contact area of the contact group for the current introduction when using this contact group in connection with a first or second contact group function. The level of the Hall voltage is thus also increased.

In order, depending on the current state (Z _a ), each of the four contact groups (Z _a ) 34 . 35 . 36 . 37 ) assign exactly one of the at least four contact group functions or other contact group functions, the device according to the invention has suitable means. These are in the present case, the switches and switches. This device also has means to change the current state. It is typically a control device that takes over the decision about the configuration to be created and the control of the measurement.

The Hall structure according to the invention preferably has a point of symmetry (S). The Hall structure (1) preferably has an m-fold symmetry, where m is preferably greater than or equal to four. Very particular preference is given to symmetries with an m = k · 4-fold symmetry axis, where k can have the value greater than or equal to 1.

Accordingly, the Hall structure according to the invention preferably has m contact groups corresponding to the m factor of the symmetry axis. These contact groups particularly preferably form an m-fold symmetrical contact group structure with one another whose symmetry point particularly preferably coincides with the point of symmetry (S) of the Hall structure (1).

Particularly preferably, the configurations are now chosen so that the geometric center of gravity of the contact groups, which introduce the measuring currents (I ₁ , I ₂ , I ₃ ) in the symmetry point (S) of the Hall structure (1). At the same time, the configurations are particularly preferably chosen such that the geometric center of gravity of the contact groups which are used to detect the Hall potentials in the respective configuration lies in the point of symmetry (S) of the Hall structure (1). Unless this happens, the plurality of configurations are preferably selected such that the average of the corresponding geometric centroid coordinates of the corresponding geometric centroids of the same kind lies in the symmetry point (S) of the Hall structure (1).

Thus, several measured values recorded in chronological succession can then be combined in such a way that again results in an average center of gravity for a kind of contact group functions in the symmetry point (S).

In the case of the first and second contact group function of the current introduction or current derivation, it is conceivable to distinguish the configurations from one another so that the number n of contacts via which the measuring current is introduced or derived via the relevant contact group is a different number in one configuration than in another. It is thus conceivable that the total contact area of the current-introducing or dissipating contact groups distinguishes two configurations from one another. Particularly preferably, but not necessarily, all contact groups used in a current injection or current dissipation configuration have the same total contact area, preferably the same number of contacts, used for this purpose of current injection or current dissipation in the particular configuration. The unused contacts of such a contact group are then connected to the other contacts of the Hall structure only via the Hall structure itself. It is therefore also conceivable that in a contact group less than all contacts of the contact group in question are used for the current introduction or current discharge. From the measurement differences between a configuration in which, for example, all contacts are used for contact group for the input and output of the measuring current, and a further configuration in which, for example, each contact group one contact less for feeding the measuring current is used, can be concluded on the contact resistance become. The parasitic effect of the contact resistance can thus be used to obtain further information about the current density distribution in the region of the contacts of a contact group, which can also be used for the evaluation.

Also in the case of the contact group function of detecting the Hall potential at a contact group, it is conceivable to distinguish the configurations from each other so that the number of contacts through which the Hall potential at the contact group concerned is detected is different in one configuration Number is as in another. It is thus conceivable that the total contact area of the contacts of the relevant contact group used for detecting the Hall potential at the position of the contact group distinguishes two configurations from one another. Most preferably, but not necessarily, all of the contact groups used in a Hall potential configuration have the same total contact area used for this purpose, that of the Hall potential in the particular configuration. The unused contacts of such a contact group are then connected to the other contacts of the Hall structure only via the Hall structure itself. It is therefore also conceivable that in a contact group more than one contact of the contact group in question is used for the detection of the Hall potential. From the measurement differences between a configuration in the per contact group only one contact for detecting the Hall potential and a further configuration, for example, each contact group two contacts are used to detect the Hall potential can thus to a Hall voltage parallel to the line connecting the two relevant contacts in the respective contact group. The parasitic effect of the short circuit can thus be used to obtain information about the current density distribution in the area of the contacts of a contact group. Thus, in contrast to the prior art, it is possible, with certain restrictions, to obtain information not only about the magnitude of the Hall voltage but also about the magnitude and direction thereof within a contact group, and these for the determination of the flux density and other information, such as e.g. Use distortions caused by parasitic effects such as mechanical stress.

Any two states of the at least two states are in any case exactly the same if the assignment of the at least four contact group functions to the at least four contact groups of the device is different.

In certain cases, however, it may be sufficient to regard two arbitrary states as different if, with respect to the measurement task, the number n of contacts varies, with n being the whole, positive number. In any case, it is recommended to use at least the four minimum contact group states for the acquisition of a measured value.

In addition to the device can thus also a method for operating a device according to the invention with a Hall structure ( 1 ) specify. In this case, the method requires a device which has at least four contact groups ( 34 . 35 . 36 . 37 ) of at least n contacts ( 2 . 17 . 26 ; 3 . 18 . 27 ; 4 . 19 . 28 ; 5 . 20 . 29 ) having the Hall structure ( 1 ) contact electrically. The number n of contacts per contact group of each of these contact groups in each contact group is greater than the number one per contact group, which allows the advantages of the invention. The device is again temporarily during operation of the device in a first state (Z ₁ ) or alternatively to this first state (Z ₁ ) at other times of operation of the device at least temporarily in at least one further, second state (Z ₂ ). Where these states (Z ₁ , Z ₂ ) are from each other different. The state of the at least two states (Z ₁ , Z ₂ ) which exists at an operating time is again referred to below as the current state (Z _a ). The current state is thus one of the at least two states (Z ₁ , Z ₂ ) in the following.

• a. Eine erste Kontaktgruppenfunktion ist die Mindestkontaktgruppenfunktion des Einleitens eines Messstromes (I₁) in die Hall-Struktur (1).
• b. Eine zweite Kontaktgruppenfunktion ist die Mindestkontaktgruppenfunktion des Ableitens eines Messstromes (I₁) aus der Hall-Struktur (1).
• c. Eine dritte Kontaktgruppenfunktion ist die Mindestkontaktgruppenfunktion der Erfassung eines ersten Hall-Potenzials der Hall-Struktur (1).
• d. Eine vierte Kontaktgruppenfunktion ist die Mindestkontaktgruppenfunktion der Erfassung eines zweiten Hall-Potenzials der Hall-Struktur (1).

In each case one of at least four contact groups among the contact groups, in each state (Z1, Z2) exactly one of the following four minimum contact group functions is assigned as a contact group function. These minimum contact group functions are:

• a. A first contact group function is the minimum contact group function of introducing a measurement current (I ₁ ) into the Hall structure ( 1 ).
• b. A second contact group function is the minimum contact group function of deriving a measurement current (I ₁ ) from the Hall structure ( 1 ).
• c. A third contact group function is the minimum contact group function of the detection of a first Hall potential of the Hall structure ( 1 ).
• d. A fourth contact group function is the minimum contact group function of the detection of a second Hall potential of the Hall structure ( 1 ).

• 1. Festlegen eines aktuellen Zustand (Z_a) zu Beginn;
• 2. Zuordnen jeweils einer der vier Mindestkontaktgruppenfunktionen zu jeder der mindestens vier Kontaktgruppen (34, 35, 36, 37), • wobei die Zuordnung vom aktuellen Zustand (Z_a) abhängig ist und • wobei die mindestens zwei Zustände (Z₁, Z₂), von denen ein Zustand dieser mindestens zwei Zustände (Z₁, Z₂) immer der aktuelle Zustand (Z_a) ist, sich durch unterschiedliche Zuordnungen der mindestens vier Kontaktgruppenfunktionen unterscheiden.
• 3. Einleiten eines Messstromes (I₁) in die Hall-Struktur (1) über mindestens eine erste Anzahl von Kontakten der Kontaktgruppen, denen die erste Kontaktgruppenfunktion im aktuellen Zustand (Z_a) zugeordnet ist, wobei diese erste Anzahl größer als die Zahl eins ist;
• 4. Ableiten des Messstromes (I₁) aus die Hall-Struktur (1) über mindestens eine zweite Anzahl von Kontakten der Kontaktgruppen, denen die zweite Kontaktgruppenfunktion im aktuellen Zustand (Z_a) zugeordnet ist, wobei diese zweite Anzahl größer als die Zahl eins ist;
• 5. Erfassung eines ersten Hall-Potenzials über eine dritte Anzahl von Kontakten pro Kontaktgruppe der Kontaktgruppen, denen die dritte Kontaktgruppenfunktion im aktuellen Zustand (Z_a) zugeordnet ist, wobei die anderen Kontakte dieser Kontaktgruppe ausschließlich über die Hall-Struktur miteinander elektrisch verbunden sind und wobei die dritte Anzahl kleiner ist als die zweite Anzahl und erste Anzahl;
• 6. Erfassung eines zweiten Hall-Potenzials über eine vierte Anzahl von Kontakten pro Kontaktgruppe der Kontaktgruppen, denen die vierte Kontaktgruppenfunktion im aktuellen Zustand (Z_a) zugeordnet ist, wobei die anderen Kontakte dieser Kontaktgruppe ausschließlich über die Hall-Struktur miteinander elektrisch verbunden sind und wobei die vierte Anzahl kleiner ist als die zweite Anzahl und erste Anzahl;
• 7. Abspeichern der erfassten Werte des ersten und zweiten Hall-Potenzials, sofern noch nicht alle einzunehmenden Zustande eingenommen wurden, oder optionale Abspeicherung der im aktuellen Zustand erfassten Werte des ersten und zweiten Hall-Potenzials, sofern alle einzunehmenden Zustande eingenommen wurden.
• 8. Ändern des aktuellen Zustands (Z_a) und Wiederholung der Messung ab dem Schritt 2 bis alle einzunehmenden Zustände eingenommen wurden.
• 9. Ermittlung eines Messwertes für einen Parameter des Magnetfeldes oder einer Teilkomponente des Magnetfeldes, das die Hall-Struktur (1) durchströmt auf Basis der gespeicherten Werte des Hall-Potenzials und ggf. aufgrund der zuletzt erfassten Werte des Hall-Potenzials, wenn diese nicht gespeichert wurden. In diesem Schritt wird die Hall-Spannung in Abhängigkeit vom dem erfassten ersten und dem erfassten zweiten Hall-Potenzial ermittelt.

The method therefore comprises the steps

• 1. setting a current state (Z _a ) at the beginning;
• 2. Assign one of the four minimum contact group functions to each of the at least four contact groups ( 34 . 35 . 36 . 37 ), Wherein the assignment is dependent on the current state (Z _a ) and wherein the at least two states (Z ₁ , Z ₂ ), of which a state of these at least two states (Z ₁ , Z ₂ ) is always the current state ( Z _a ) is distinguished by different assignments of the at least four contact group functions.
• 3. Introduction of a measuring current (I ₁ ) into the Hall structure ( 1 ) over at least a first number of contacts of the contact groups to which the first contact group function in the current state (Z _a ) is assigned, this first number being greater than the number one;
• 4. Deriving the measuring current (I ₁ ) from the Hall structure ( 1 ) over at least a second number of contacts of the contact groups to which the second contact group function in the current state (Z _a ) is assigned, this second number being greater than the number one;
• 5. detecting a first Hall potential over a third number of contacts per contact group of the contact groups to which the third contact group function in the current state (Z _a ) is assigned, the other contacts of this contact group are electrically connected to each other exclusively through the Hall structure and wherein the third number is smaller than the second number and first number;
• 6. detection of a second Hall potential over a fourth number of contacts per contact group of the contact groups, which the fourth contact group function is assigned in the current state (Z _a ), the other contacts of this contact group are electrically connected to each other exclusively via the Hall structure and wherein the fourth number is less than the second number and first number;
• 7. storing the sensed values of the first and second Hall potential, if not all the states to be assumed have been taken, or optionally storing the values of the first and second Hall potentials detected in the current state, if all states to be taken have been taken.
• 8. Change the current state (Z _a ) and repeat the measurement from step 2 until all states to be assumed have been taken.
• 9. determination of a measured value for a parameter of the magnetic field or of a partial component of the magnetic field which determines the Hall structure ( 1 ) flows on the basis of the stored values of the Hall potential and possibly on the basis of the last recorded values of the Hall potential, if these were not stored. In this step, the Hall voltage is determined as a function of the detected first and the detected second Hall potential.

In the context of the preparation of the invention has now been recognized that a connection via switch ( 21 . 22 . 23 . 24 . 30 . 31 . 32 . 33 . 42 . 44 . 49 . 51 . 56 . 58 . 63 . 65 ) still leads to a certain short circuit of the Hall voltage. It has now been recognized that the superposition principle of electrodynamics can be used. For this purpose, the contacts of a contact group must be independent in terms of potential. It was recognized that it makes sense to control each contact of a contact group with its own power source. As a result, the potential of each contact is no longer determined by the average of all contacts of a contact group and the Hall voltage increases again.

The invention therefore furthermore also includes an apparatus for measuring the flux density B of a magnetic field by means of the Hall effect with a Hall structure ( 1 ) with n = 2 · m contacts ( 2 . 3 . 4 . 5 . 17 . 18 ), which the Hall structure ( 1 ), where m is an integer positive number. To these contacts ( 2 . 3 . 4 . 5 . 17 . 18 ) then at least one first contact ( 2 ) and a second contact ( 3 ) and a third contact ( 4 ) and a fourth contact ( 5 ) and a fifth contact ( 17 ) and a sixth contact ( 18 ). The device may have other contacts that are either at a neutral potential, such as a contact at the point of symmetry, or other purposes serve and are turned off during a measurement. Such additional contacts must not disturb the symmetry and are preferred not even provided. The device according to the invention has in this embodiment several measuring current sources ( 10 . 66 . 67 . 68 ) on. These measuring current sources include at least a first measuring current source ( 10 ) and a second measuring current source ( 66 ) and a third measuring current source ( 67 ) and a fourth measuring current source ( 68 ). As before, this version also includes a Hall voltage evaluation circuit ( 15 ) with a measuring signal output ( 16 ).

The first measuring current source ( 10 ) emits a first measuring current (I ₁ ) and directs it into the first contact ( 2 ) one.

The second measuring current source ( 66 ) emits a second measuring current (I ₂ ) and passes it to the second contact ( 3 ) one.

The third measuring current source ( 67 ) emits a third measuring current (I ₃ ) and passes it to the third contact ( 4 ) one. This third measuring current (I ₃ ) deviates in magnitude from the second measuring current (I ₂ ) not more than 10% and / or better not more than 5%.

The fourth measuring current source ( 68 ) emits a fourth measuring current (I ₄ ) and passes it to the fourth contact ( 5 ) one. This fourth measuring current (I ₄ ) differs from the first measuring current (I ₁ ) amount not more than 10% and / or better not more than 5%. The Hall structure ( 1 ) preferably has a first symmetry axis (SL1) for a mirror symmetry and a second symmetry axis (SL2) for a mirror symmetry perpendicular to the first axis of symmetry (SL1). The fifth contact ( 17 ) and the sixth contact ( 18 ), with which the first and second Hall potential and thus the Hall voltage are detected, lie on the first symmetry axis (SL1). The fifth contact ( 17 ) lies mirror-symmetrically to the sixth contact ( 18 ) with respect to the second axis of symmetry (SL2).

The first contact ( 2 ) is mirror-symmetric to the fourth contact ( 5 ) with respect to the first axis of symmetry (SL1). This and the current injection symmetry described above ensure that the current density vector of the current from the first measuring current source ( 10 ) and the fourth measuring current source ( 68 ) perpendicularly crosses the first axis of symmetry (SL1).

For the same reason, the second contact ( 3 ) also mirror-symmetric to the third contact ( 4 ) with respect to the first axis of symmetry (SL1).

Due to Kirchhoff's law, the sum of the measuring currents (I1, I2, I3, I4) with respect to the Hall structure ( 1 ) be zero.

The device according to the invention now has (in this embodiment) means ( 13 . 14 . 15 . 16 ) for detecting the Hall voltage between the fifth contact ( 17 ) and the sixth contact ( 18 ) and for generating and processing or passing on a measured value. These means are, for example, the first Hall potential line ( 13 ), the second Hall potential line ( 14 ), the Hall voltage evaluation circuit ( 15 ) and the measuring signal output ( 16 ) for signaling the acquired measured value. Typically, a conversion of the Hall voltage into an analog measured value and / or a digital data word takes place. The digital data word is sent via the measuring signal output ( 16 ), which is then typically a data bus. An output can also represent the actuation of an actuator and the same. The term measuring signal output ( 16 ) is so very broad.

In a further embodiment of this variant of the invention, the symmetry is increased, which is typically advantageous. The first contact ( 2 ) is then, for example, also mirror-symmetric to the second contact ( 3 ) with respect to the second axis of symmetry (SL2) and the third contact ( 4 ) mirror-symmetric to the fourth contact ( 5 ) with respect to this second axis of symmetry (SL2). As a result, parasitic elements are further minimized.

In another further embodiment of this variant of the invention, the Hall structure ( 1 ) has an n = 2 · m-fold rotational symmetry. In the examples of the drawings, there are given 4-count, 6-count and 8-count examples. Higher-count structures such as 10-, 12-, 14-, or 16-, countless structures are quite conceivable and useful. It is also useful, but not absolutely necessary, to provide a contact as potential reference point in the point of symmetry (S), in addition, the Hall potentials can be measured relatively. In the device described here, this contact in the point of symmetry is not in the n = 2 × m contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ) containing the Hall structure ( 1 ), where m is a whole positive number greater 3 is. In this embodiment of the invention, the device according to the invention has at least one seventh contact ( 19 ) and at least one eighth contact ( 20 ) additionally under the contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ) on. Furthermore, the device according to the invention in this embodiment has a plurality of measuring current sources ( 10 . 66 . 67 . 68 . 69 . 70 ) on. Under these measuring current sources ( 10 . 66 . 67 . 68 . 69 . 70 ) is at least a fifth measuring current source ( 69 ) and a sixth measuring current source ( 70 ). Thus, the device according to the invention in this expression six Measuring current sources. Two less than contacts. At this point it should be noted only briefly that obviously the contacts also by contact groups several contacts can be replaced. Now preferably the seventh contact ( 19 ) and the eighth contact ( 20 ) on the second axis of symmetry (SL2). At the same time, the seventh contact ( 19 ) mirror-symmetric to the eighth contact ( 20 ) with respect to the first axis of symmetry (SL1). These two symmetry conditions disturb the additional contact pair ( 19 . 20 ) the symmetry of the Hall structure not. The fifth measuring current source ( 69 ) now conduct a fifth measuring current ( I5 ) in the seventh contact ( 19 ) one. The sixth measuring current source ( 70 ) conduct a sixth measuring current ( I6 ) from the eighth contact ( 20 ) and picks up this sixth measuring current (I ₆ ), which differs in magnitude from the fifth measuring current (I ₁ ) not more than 10% and / or not more than 5%. Preferably, all measuring currents (I ₁ , I ₂ , I ₃ , I ₄ , I ₅ , I ₆ ) deviate from each other not more than 10% and / or not more than 5% from each other.

In a further variant of this embodiment, the device again comprises means ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 . 78 . 79 ) for changing the assignments between the measuring current sources ( 10 . 66 . 67 . 68 . 69 . 70 ) and the means ( 13 . 14 . 15 , 16) for detecting the Hall voltage on one side and the contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ) on the other hand. These means are preferably switches, switches, analog multiplexers, switchable amplifiers with multiple inputs and the like, and their interconnections. The control of these means is carried out by means of a not shown in the drawings control device for actuating the means which is part of the device. This control takes place in such a way that no further measuring current source of the plurality of measuring current sources can be assigned to each contact to which a measuring current source is assigned to the plurality of measuring current sources. In order to detect the Hall voltage, at least two contacts are not assigned to any measuring current source.

The means ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 . 78 . 79 ) and their control are designed so that at least two different assignments, ie a first state (Z ₁ ) and a second state (Z ₂ ) can be set by the control device. Here, this means ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 . 78 . 79 ) and their control designed so that the features described above, even after changing the assignment, ie the current state (Z _a ), continue to apply when one of these at least two assignments is set by the control device. For example, pairs of contacts that have hitherto perceived the contact function of measuring current feed can exchange the contact function with another contact pair which has hitherto perceived the contact function Hall voltage detection. Also, the signs of the measuring currents can be reversed etc.

It is certainly clear to the person skilled in the art that, instead of two measuring current sources related to a reference potential, which supply a contact pair with measuring current, a single potential-free current source is also possible which supplies this contact pair with measuring current. The Hall structure ( 1 ) has in this case at least two symmetry axes (SL1, SL2) which intersect at a point of symmetry (S). At least one pair of two measuring current sources (( 10 . 67 ) 66 . 68 ) 69 . 70 )) is replaced in this sense by a measuring current source that is potential-free. This new measuring current source conducts a measuring current with the first connection of this measuring current source by means of a contact of the contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ) into the Hall structure ( 1 ) and with the second terminal of this measuring current source, this measuring current again from another contact of the contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ). Also in this variant, these two contacts are preferably arranged mirror-symmetrically with respect to the point of symmetry (S).

List of figures

1 shows a Hall structure ( 1 ) according to the prior art in a first state (Z ₁ ).

2 shows a Hall structure ( 1 ) according to the prior art in a second state (Z ₂ ).

3 shows a Hall structure ( 1 ) according to the prior art in a third state (Z ₃ ), which corresponds to the first state (Z ₁ ) with reversed measuring current (I ₁ ).

4 shows a Hall structure ( 1 ) according to the prior art in a fourth state (Z ₄ ), which corresponds to the second state (Z ₁ ) with inverse measurement current (I ₁ ).

5 shows a Hall structure according to the invention ( 1 ) in a first state (Z ₁ ).

6 shows a Hall structure according to the invention ( 1 ) in a second state (Z ₂ ).

7 shows a Hall structure according to the invention ( 1 ) in a third state (Z ₃ ), which corresponds to the first state (Z ₁ ) with reversed measuring current (I ₁ ).

8th shows a Hall structure according to the invention ( 1 ) in a fourth state (Z ₄ ), which corresponds to the second state (Z ₂ ) with reversed measuring current (I ₁ ).

9 shows a Hall structure according to the invention ( 1 ) with three contacts per contact group in a first state (Z ₁ ).

10 shows a Hall structure according to the invention ( 1 ) with three contacts per contact group in a first state (Z ₁ ) with marked contact groups.

11 shows a Hall structure according to the invention ( 1 ) with three contacts per contact group in a second state (Z ₂ ) with marked contact groups.

12 shows a Hall structure according to the invention ( 1 ) with three contacts per contact group in a third state (Z ₃ ) with marked contact groups.

13 shows a Hall structure according to the invention ( 1 ) with three contacts per contact group in a fourth state (Z ₄ ) with marked contact groups.

14 shows a Hall structure according to the invention ( 1 ) with three contacts per contact group AND 2 × 4 contact groups in a first state (Z ₁ ) with marked contact groups.

15 shows a Hall structure according to the invention ( 1 ) with three contacts per contact group AND 2 × 4 contact groups in a second state (Z ₂ ) with labeled contact groups. The power supply is rotated by 45 °.

16 shows a Hall structure according to the invention ( 1 ) with two contacts per contact group and six contact groups in a first state (Z ₁ ).

17 shows a Hall structure according to the invention ( 1 ) without reconfiguration with one contact per contact group and six contacts ( 2 . 3 . 17 . 4 . 5 . 18 ) in a first, non-changeable state (Z ₁ ) and with four independent measuring current sources ( 68 . 67 . 66 . 10 ).

18 shows a Hall structure according to the invention ( 1 ) with possibility of reconfiguration with one contact per contact group and six contacts ( 2 . 3 . 17 . 4 . 5 . 18 ) in a first state (Z ₁ ) and with four independent measuring current sources ( 68 . 67 . 66 . 10 ) and funds ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 ) for reconfiguration to the state change.

19 shows a Hall structure according to the invention ( 1 ) with possibility of reconfiguration with one contact per contact group and six contacts ( 2 . 3 . 17 . 4 . 5 . 18 ) in a first state (Z ₁ ) and with six independent, switchable measuring current sources ( 70 . 69 . 68 . 67 . 66 . 10 ) and other resources ( 6 . 7 ) for reconfiguration to the state change.

20 shows a Hall structure according to the invention ( 1 ) with possibility of reconfiguration with one contact per contact group and eight contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ) in a first state (Z ₁ ) and with six independent measuring current sources ( 70 . 69 . 68 . 67 . 66 . 10 ) and funds ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 . 78 . 79 ) for reconfiguration to the state change.

21 shows a Hall structure according to the invention ( 1 ) with possibility of reconfiguration with one contact per contact group and six contacts ( 2 . 3 . 17 . 4 . 5 . 18 ) in a first (Z ₁ ) and with three independent potential-free measuring current sources ( 68 . 67 . 10 ) and funds ( 6 . 7 . 8th . 9 . 43 . 50 ) for reconfiguration to the state change.

22 shows a Hall structure according to the invention ( 1 ) with possibility of reconfiguration with one contact per contact group ( 34 . 35 . 36 . 37 . 41 . 48 . 55 . 62 ) and eight contacts ( 2 . 46 . 3 . 17 . 4 . 5 . 18 ) in a first (Z ₁ ) and with three independent potential-free measuring current sources ( 68 . 67 . 10 ) and funds ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 ) for reconfiguration to the state change.

23 shows a typical measurement procedure

Description of the figures

Fig. 1

1 shows an exemplary Hall structure ( 1 ) with simplified, schematic, exemplary interconnection from the prior art (SdT). The Hall structure ( 1 ) is replaced by a first contact ( 2 ), a second contact ( 3 ), a third contact ( 4 ) and a fourth contact ( 5 ) contacted electrically.

The interconnection has a first switch ( 6 ), a second switch ( 7 ), a third switch ( 8th ) and a fourth switch ( 9 ), which are controlled by a not shown control device. It is an exemplary first state (Z ₁ ) in the 1 shown.

In this exemplary first state (Z ₁ ), the first switch connects ( 6 ) the first contact ( 2 ) with a measuring current supply ( 11 ). The first switch ( 6 ) holds a position in which the first switch (also 6 ) connected second Hall potential line ( 14 ) not with the first contact ( 2 ) connected is. The first switch ( 6 ) is preferably realized as a transistor circuit.

In the exemplary first state (Z ₁ ), the second switch connects ( 7 ) the second contact ( 3 ) with the second Hall potential line ( 14 ). The second switch ( 7 ) has a position, in which the second switch (also 7 ) connected measuring current derivative ( 12 ) not with the second contact ( 3 ) connected is. The second switch ( 7 ) is preferably realized as a transistor circuit.

In the exemplary first state (Z ₁ ), the third switch connects ( 8th ) the third contact ( 4 ) with a measuring current derivative ( 12 ). The third switch ( 8th ) has a position in which the third switch (also 8th ) connected first Hall potential line ( 13 ) not with the third contact ( 4 ) connected is. The third switch ( 8th ) is preferably realized as a transistor circuit.

In the exemplary first state (Z ₁ ), the fourth switch connects ( 9 ) the fourth contact ( 5 ) with the first Hall potential line ( 13 ). The fourth switch ( 9 ) has a position in which the also to the fourth switch ( 9 ) connected measuring current supply ( 11 ) not with the fourth contact ( 5 ) connected is. The fourth switch ( 9 ) is preferably realized as a transistor circuit.

• 1. Einleiten des Messstroms (I₁) (erste Kontaktfunktion)
• 2. Ableiten des Messstroms (I₁) (zweite Kontaktfunktion)
• 3. Erfassen des ersten Hall-Potenzials (dritte Kontaktfunktion)
• 4. Erfassen des zweiten Hall-Potenzials (vierte Kontaktfunktion)

Since the switches here in this example can take only two positions, the to the switch ( 6 . 7 . 8th . 9 ) connected contacts ( 2 . 3 . 4 . 5 ) perform only two of the four possible contact functions:

• 1. Initiation of the measuring current (I ₁ ) (first contact function)
• 2. Deriving the measuring current (I ₁ ) (second contact function)
• 3. Detecting the first Hall potential (third contact function)
• 4. Detecting the second Hall potential (fourth contact function)

The first contact ( 2 ) can in this example only the contact functions 1 and 4 perceive.

The second contact ( 3 ) can in this example only the contact functions 2 and 4 perceive.

The third contact ( 4 ) can in this example only the contact functions 2 and 3 perceive.

The fourth contact ( 5 ) can in this example only the contact functions 1 and 3 perceive.

In addition, according to this disclosure, it is also conceivable to choose an interconnection, for example, so that each contact can perform all contact functions.

The measuring current supply ( 11 ) is preferably connected to the first pole of a measuring current source ( 10 ) connected. This measuring current source ( 10 ) feeds via the measuring current supply ( 11 ) and the corresponding switch ( 6 ) the measuring current (I ₁ ) in the contact ( 2 ), which is currently performing the first contact function. The measuring current source ( 10 ) is preferably controlled in magnitude and / or sign by the control device connected to the Hall voltage evaluation circuit (FIG. 15 ) may be identical or may be part of it.

The measuring current derivative ( 12 ) is preferably connected to the second pole of the measuring current source ( 10 ) connected. The measuring current source ( 10 ) conducts via the measuring current derivative ( 12 ) and the switch ( 8th ) the measuring current (I ₁ ) from the contact ( 4 ) performing the second contact function.

A Hall voltage evaluation circuit ( 15 ) evaluates the potential of the first Hall potential line ( 13 ) out. The first Hall potential lead ( 13 ) is via the corresponding switch ( 9 ) with the contact ( 5 ), which performs the third contact function.

The Hall voltage evaluation circuit ( 15 ) additionally evaluates the potential of the second Hall potential line ( 14 ) out. The second Hall potential lead ( 14 ) is via the corresponding switch ( 7 ) with the contact ( 3 ) which performs the fourth contact function.

The Hall voltage evaluation circuit ( 15 ) determined from the potentials of the first Hall potential line ( 13 ) and the second Hall potential line ( 14 ) the value of the measuring signal output and outputs this value via the measuring signal output ( 16 ) out.

In this example the 1 are the switches ( 6 . 7 . 8th . 9 ) so that the first contact the first contact function 1 the second contact ( 3 ) the fourth contact function 4 the third contact ( 4 ) the second contact function 2 and the fourth contact ( 5 ) the third contact function 3 performs.

FIG. 2

This prior art example corresponds to the position of the switches ( 6 . 7 . 8th . 9 ) the the 1 , Here is a second state (Z ₂ ) is shown. In this example the 2 are the switches ( 6 . 7 . 8th . 9 ) so that the first contact the fourth contact function 4 the second contact ( 3 ) the second contact function 2 the third contact ( 4 ) the third contact function 3 and the fourth contact ( 5 ) the first contact function 1 performs.

By switching between the first state (Z ₁ ) and the second state (Z ₂ ) a certain compensation can already be achieved. The current flow is only rotated by 90 °. Only the following 3 and 4 show the possibility of a 360 ° rotation in 90 ° increments.

Fig. 3

This example from the prior art corresponds to the direction of the measuring current (I ₁ ) of the 1 , Here is a third state (Z ₃ ) exemplified.

Fig. 4

This example from the prior art corresponds to the direction of the measuring current (I ₁ ) of the 2 , Here is a fourth state (Z ₄ ) exemplified.

Fig. 5 to Fig. 8

In 5 is the example of 1 shown again. According to the invention, each of the contacts ( 2 . 3 . 4 . 5 ) about a neighboring further contact ( 17 . 18 . 19 . 20 ) added. It is the fifth contact ( 17 ), the sixth contact ( 18 ), the seventh contact ( 19 ) and the eighth contact ( 20 ). The fifth contact ( 17 ) is in this example the first contact ( 2 ) adjacent. The sixth contact ( 18 ) is in this example the second contact ( 3 ) adjacent. The seventh contact ( 19 ) is in this example the third contact ( 4 ) adjacent. The eighth contact ( 20 ) is in this example the fourth contact ( 5 ) adjacent.

A first switch ( 21 ) connects the fifth contact ( 17 ) with the measuring current supply line ( 11 ), when the first contact ( 2 ) performs the first contact function. This is in 5 shown. This leads the fifth contact ( 17 ) also the first contact function. The first contact ( 2 ) and the fifth contact ( 17 ) form in this example the 5 a contact group, the first contact group function of the introduction of the measuring current (I ₁ ) in the Hall structure ( 1 ).

A second switch ( 22 ) connects the sixth contact ( 18 ) with the measuring current derivative ( 12 ), when the second contact ( 3 ) performs the second contact function. This is in 6 shown. This leads the sixth contact ( 18 ) also the second contact function. The second contact ( 3 ) and the sixth contact ( 18 ) form in this example the 6 a contact group, the second contact group function of the derivative of the measuring current (I ₁ ) from the Hall structure ( 1 ).

A third switch ( 23 ) connects the seventh contact ( 19 ) with the measuring current derivative ( 12 ), if the third contact ( 4 ) performs the second contact function. This is in 5 shown. As a result, the seventh contact ( 19 ) also the second contact function. The third contact ( 4 ) and the seventh contact ( 19 ) form in this example the 5 a contact group, the second contact group function of the derivative of the measuring current (I ₁ ) from the Hall structure ( 1 ).

A fourth switch ( 24 ) connects the eighth contact ( 20 ) with the measuring current introduction ( 11 ), when the fourth contact ( 5 ) performs the first contact function. This is in 6 shown. This leads to the eighth contact ( 20 ) also the first contact function. The fourth contact ( 5 ) and the eighth contact ( 20 ) form in this example the 6 a contact group, the first contact group function of the introduction of the measuring current (I ₁ ) from the Hall structure ( 1 ).

The 7 and 8th correspond to the 5 and 6 with the difference that the sign of the measuring current (I ₁ ) has been changed. The 5 thus provides a first state (Z ₁ ), the 6 a second state (Z ₂ ), the 7 a third state (Z ₃ ) and the 8th a fourth state (Z ₄ ). This device is just one example of several possible implementations.

9 the figure shows the following 10 for a better overview without any contact groups.

10 to FIG. 13

In 10 is the example of 5 shown again. According to the invention, each of the contacts ( 2 . 3 . 4 . 5 ) and ( 17 . 18 . 19 . 20 ) and thus each of the corresponding contact groups around a neighboring further contact ( 26 . 27 . 28 . 29 ) against the 5 added. It is the ninth contact ( 26 ), the tenth contact ( 27 ), the eleventh contact ( 28 ) and the twelfth contact ( 29 ). The ninth contact ( 26 ) is in this example the first contact ( 2 ) and the fifth contact ( 17 ) adjacent. The tenth contact ( 27 ) is in this example the second contact ( 3 ) and the sixth contact ( 18 ) adjacent. The eleventh contact ( 28 ) is in this example the third contact ( 4 ) and the seventh contact ( 19 ) adjacent. The twelfth contact ( 29 ) is in this example the fourth contact ( 5 ) and the eighth contact ( 20 ) adjacent.

A fifth switch ( 30 ) connects the ninth contact ( 26 ) with the measuring current supply line ( 11 ), when the first contact ( 2 ) performs the first contact function. This is in 10 shown. This leads the ninth contact ( 26 ) also the first contact function. The first contact ( 2 ), the fifth Contact ( 17 ) and the ninth contact ( 26 ) form in this example the 10 and 11 a first contact group ( 34 ), which in the example of the 10 the first contact group function of the introduction of the measuring current (I ₁ ) into the Hall structure ( 1 ). Here lead in the example of 10 all three contacts ( 2 . 17 . 26 ) the first contact function of the introduction of the measuring current (I ₁ ) into the Hall structure ( 1 ) out.

A sixth switch ( 31 ) connects the tenth contact ( 27 ) with the measuring current derivative ( 12 ), when the second contact ( 3 ) performs the second contact function. This is in 11 shown. This leads the tenth contact ( 27 ) also the second contact function. The second contact ( 3 ), the sixth contact ( 18 ) and the tenth contact ( 27 ) form in this example the 10 and 11 a second contact group ( 35 ), which in the example of the 11 the second contact group function of the derivative of the measuring current (I ₁ ) from the Hall structure ( 1 ). Here lead in the example of 11 all three contacts ( 3 . 18 . 27 ) the second contact function of the derivative of the measuring current (I ₁ ) from the Hall structure ( 1 ) out.

A seventh switch ( 32 ) connects the eleventh contact ( 28 ) with the measuring current derivative ( 12 ), if the third contact ( 4 ) performs the second contact function. This is in 10 shown. As a result, the eleventh contact ( 28 ) also the second contact function. The third contact ( 4 ), the seventh contact ( 19 ) and the eleventh contact ( 28 ) form in this example the 10 and 11 a third contact group ( 36 ), which in the example of the 10 the second contact group function of the derivative of the measuring current (I ₁ ) from the Hall structure ( 1 ). Here lead in the example of 10 all three contacts ( 4 . 19 . 28 ) the second contact function of the derivative of the measuring current (I ₁ ) from the Hall structure ( 1 ) out.

An eighth switch ( 33 ) connects the twelfth contact ( 29 ) with the measuring current introduction ( 11 ), when the fourth contact ( 5 ) performs the first contact function. This is in 11 shown. This leads to the twelfth contact ( 29 ) also the first contact function. The fourth contact ( 5 ), the eighth contact ( 20 ) and the twelfth contact ( 29 ) form in this example the 10 and 11 a fourth contact group ( 37 ), which in the example of the 11 the first contact group function of the introduction of the measuring current (I ₁ ) from the Hall structure ( 1 ). Here lead in the example of 11 all three contacts ( 5 . 20 . 29 ) the second contact function of the derivative of the measuring current (I ₁ ) from the Hall structure ( 1 ) out.

The 12 and 13 correspond to the 10 and 11 with the difference that the sign of the measuring current (I ₁ ) has been changed. The 10 thus provides a first state (Z ₁ ), the 11 a second state (Z ₂ ), the 12 a third state (Z ₃ ) and the 13 a fourth state (Z ₄ ). This device is just one example of several possible implementations.

Fig. 14

14 based on 10 , But now there are four more contact groups, a fifth contact group ( 41 ) and a sixth contact group ( 48 ) and a seventh contact group ( 55 ) and an eighth contact group ( 62 ), added. These can be like the structure in 10 operate. In the example of the state of 14 These additional contact groups will perform a fifth contact group function. This fifth contact group function is that of a neutral contact group.

As before, the contact groups can again perceive different contact group functions. Each configuration represents a state. Due to the more diverse interconnection options, more possible states arise. By preferably cyclically switching between the increased states, a measured value can now be determined more accurately.

Preferably, the four additional contact groups, if they do not perceive a neutral contact group function, are operated as in 10 shown. The original four contact groups are then preferably switched to the neutral contact group function. Thus, the result then comes into rotation of the structure 10 equal to 45 °.

Fig. 15

15 based on 14 with the difference being a different state than in 14 is pictured. The interconnection through the switches is now such that the current flow has been rotated 45 ° counterclockwise in the structure. In the extreme case, a temporally rotating current density vector can be generated for this structure.

Fig. 16

The 16 essentially corresponds to the 10 with the difference that only two contact groups have been added. However, this configuration has the disadvantage that the Hall signal is typically weaker.

Fig. 17

As mentioned above, it has been recognized according to the invention that it can be useful to supply each contact with its own current source. 17 shows a Hall structure according to the invention ( 1 ) without reconfiguration option with one contact each Contact group and six contacts ( 2 . 3 . 17 . 4 . 5 . 18 ) in a first, non-changeable state (Z1) and with four independent measuring current sources ( 68 . 67 . 66 . 10 ). The contacts or contact groups ( 2 . 3 . 4 . 5 ), is introduced into the stream or derived from the current, each with its own power source ( 10 . 66 . 67 . 68 ) provided. As a result, the potential of the contacts ( 2 . 3 . 4 . 5 ) and can be moved against each other by the local Hall potentials.

Fig. 18

18 shows a Hall structure according to the invention ( 1 ) based on 17 but now with reconfiguration option with one contact per contact group and six contacts ( 2 . 3 . 17 . 4 . 5 . 18 ) in a first (Z ₁ ) and with four independent measuring current sources ( 68 . 67 . 66 . 10 ) and funds ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 ) for reconfiguration to the state change. These are eight switches ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 ).

Fig. 19

19 shows a Hall structure according to the invention ( 1 ) with possibility of reconfiguration with one contact per contact group and six contacts ( 2 . 3 . 17 . 4 . 5 . 18 ) in a first state (Z ₁ ) and with six independent, switchable measuring current sources ( 70 . 69 . 68 . 67 . 66 . 10 ) and other resources ( 6 . 7 ) for reconfiguration to the state change. The switchable measuring current sources ( 70 . 69 . 68 . 67 . 66 . 10 ) are used instead of the switch 18 used. This has the advantage that the current source transistor can be used for this purpose, whereby eliminating the transistors of the switch. Instead of switching on and off, intermediate states with a reduced measuring current for the measuring current sources ( 70 . 69 . 68 . 67 . 66 . 10 ) as state variants conceivable.

Fig. 20

The 20 equals to 18 with the difference that the Hall structure according to the invention ( 1 ) eight contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ) having. Accordingly, it has six independent measuring current sources ( 70 . 69 . 68 . 67 . 66 . 10 ) and corresponding switching means ( 6 . 7 . 8th . 9 . 43 . 50 . 57 . 64 . 78 . 79 ) for reconfiguration to the state change. The Hall voltage is in this first state here exemplified at the fifth contact ( 17 ) and the sixth contact ( 18 ) and the Hall voltage evaluation circuit ( 15 ). Preferably, three contacts ( 2 . 19 . 3 ) or via three contact groups in each case a predefined measuring current (I ₁ , I ₂ , I ₃ ) impressed. So that the latter crosses the latter as perpendicularly as possible to the first axis of symmetry (SL1) and thus produces a maximum Hall voltage, the same current (I ₁ , I ₂ , I ₃ ) is applied to the contact (corresponding symmetrically on the other side of the first symmetry axis). 5 . 20 . 4 ) and the corresponding measuring current sources ( 67 . 68 . 70 ) fed again. The current in the Hall structure injecting contacts ( 2 . 19 . 3 ) lie here mirror-symmetrically with respect to the first axis of symmetry (SL1) to the current-removing contacts ( 5 . 20 . 4 ). This interconnection achieves a maximum symmetrical current density distribution along the first axis of symmetry (SL1). Particularly preferred is a six-fold symmetry for this number of contacts. With a corresponding increase in the number of contacts, the symmetry should be increased accordingly.

Fig. 21

21 essentially corresponds 18 with the difference that the function of switching between power supply and detection of the Hall potential via switches ( 6 . 7 . 8th . 9 . 43 . 50 ) and the power sources are floating. In the 21 drawn power sources each correspond to each two sources of power accordingly 19 , Since the current direction can be reversed, all relevant measurements can also be made with this arrangement. The currents are passed through the central point of symmetry in this example. Instead, it would also be possible the interconnection deviating from 21 to choose so that the currents are always parallel to the vertical axis, ie vertical to the direction of the Hall voltage. For this, the first measuring current source ( 10 ) with power supply not with the first contact ( 2 ) and the third contact ( 4 ), but with the first contact ( 2 ) and the fourth contact ( 5 ) and the second measuring current source ( 10 ) with power supply not with the second contact ( 3 ) and the fourth contact ( 5 ), but with the second contact ( 3 ) and the third contact ( 4 ). In that case, however, more switch positions would be necessary to repeat this geometry of currents when the Hall voltage detection is rotated by reconfiguration. Therefore, if necessary, the use of a changeover switch arrangement as in 20 also useful here.

Fig. 22

22 corresponds to 21 with the difference that now eight contacts ( 2 . 3 . 4 . 5 . 17 . 18 . 19 . 20 ) can be used for the Hall measurement. Of these, in this state, six contacts ( 2 . 4 . 19 . 17 . 18 . 20 ) for the supply of the measuring currents (I ₁ , I ₂ , I ₃ , I ₄ ) of the four current sources ( 10 . 66 . 67 . 68 ) into the Hall structure ( 1 ) and two ( 3 . 5 ) for detecting the Hall potential.

Fig. 23

23a shows a typical measurement sequence: The device is first in the first state (Z ₁ ), for example, the 5 , operated. At least one first measured value is determined. The device is then brought into a second state (Z ₂ ), for example that of 23 , At least one first measured value is determined. From such measured values, a corrected measured value is then determined. The process is repeated.

23b Shows the corresponding sequence with n states. Particularly preferred is a process flow with m = 4 or m = k · 4 states with k as a whole positive number.

glossary

business

With operation times of intended use of the device are meant.

Operating time

By operating time is meant a time during the operation of the device.

following

The word "following" in the claims means the following text within the claim to its end.

medium

Means are devices and methods that can be used in devices of all kinds to achieve the stated purpose.

Hallspannungsauswerteschaltkreis

The Hall voltage evaluation circuit ( 15 ) is a sub-device of the device according to the invention, which converts the recorded Hall potentials into a measured value stores and / or outputs this or otherwise, for example, used to control electromagnetically operated devices, etc.

Hall structure

A hall structure ( 1 ) in the sense of this disclosure is a semiconducting structure which is intended and suitable for detecting, with the aid of the Hall effect, a Hall voltage which depends on a subcomponent of a magnetic field which determines the Hall structure (FIG. 1 ) flows through. A typical hall structure ( 1 ) is, for example, a Van der Pauw structure.

Hall-potential line

A Hall potential line is used in the sense of this disclosure to determine a Hall potential. A Hall potential line connects via a switch at least one contact of the Hall structure with a device for evaluating the Hall potentials, for example with a Hall voltage evaluation circuit (US Pat. 15 ).

Hall

Potential Hall potential refers to an electrical potential that is detected at the Hall structure.

Hall voltage

Hall voltage is a weighted sum of at least two Hall potentials. Typically this is the difference between these at least two Hall potentials.

Contact

A contact in the sense of this disclosure is a structure in a micro-integrated circuit which makes electrical contact with a semiconductive layer in a semiconductive substrate. A contact is used to connect electrical cables to the wiring.

Contact group

A contact group consists of contacts that share a first and / or second contact group function when the current state provides one of these contact group functions for that contact group.

first contact group function

The first contact group function is characterized in that a contact group, which is assigned to this contact group function, is used to introduce current into the Hall structure.

second contact group function

The second contact group function is characterized in that a contact group, which is assigned to this contact group function, is used to derive current from the Hall structure.

third contact group function

The third contact group function is characterized in that a contact group, which is assigned to this contact group function, is used to detect a first Hall potential.

fourth contact group function

The fourth contact group function is characterized in that a contact group, which is assigned to this contact group function, is used to detect a second Hall potential.

neutral contact group function

The neutral contact group function is characterized in that the contacts of a contact group, which is assigned to this contact group function, are isolated from one another except for the connection via the Hall structure and no measuring current into the Hall structure ( 1 ) is initiated via the contacts of the contact group or derived therefrom and no Hall potential is detected.

Measuring signal output

The measurement signal output can be any kind of signaling e.g. electrically, optically, acoustically, etc. or comprise actuators, which is carried out as a function of the measurement result. This may also be a memory cell, the content of which is changed or established as a function of the measurement result, for example by the Hall voltage evaluation circuit.

Measuring power source

A measuring current source is a current source which supplies an electric current whose intensity is predetermined by means of a current specification value or is detected with sufficient accuracy as the measured current value, so that with the aid of at least one of these values a device, for example a Hall voltage evaluation circuit (US Pat. 15 ) the measured value signal at the measuring signal output ( 16 ).

Measuring current dissipation

This is the line through which the measuring current (I ₁ ) of the measuring current source (I ₁ ) 1 ) into the Hall structure ( 1 ) is initiated.

Measuring current dissipation

This is the line through which the measuring current (I ₁ ) of the measuring current source (I ₁ ) 1 ) from the Hall structure ( 1 ) is derived.

switch

For the purposes of this disclosure, a switch connects two lines in one state with one another and separates them again in another state.

current injection

Current introduction refers to the introduction of the measurement current into the Hall structure ( 1 ).

power dissipation

Current derivative refers to the derivative of the measurement current from the Hall structure ( 1 ).

switch

A change-over switch is a sub-device of a device according to the invention which has two connections or more connections (I connections) on one side and typically a connection on the other side. The switch typically selects a port on the first page depending on the current state and connects it to the typically one port on the other side. All other ports on the first page are isolated from each other and typically have a port on the other side. It may be an I: 1 analog multiplexer.

Status

A state of the device according to this disclosure is characterized by the configuration of contact group functions of the contact groups of the device and by the measuring current (I ₁ ). Two states can also differ by different measuring currents (I ₁ ).

LIST OF REFERENCE NUMBERS

1

 Hall plate

2

first contact ( 2 ) of the Hall structure ( 1 );

3

second contact ( 3 ) of the Hall structure ( 1 );

4

third contact ( 4 ) of the Hall structure ( 1 );

5

fourth contact ( 5 ) of the Hall structure ( 1 );

6

 first switch

7

 second switch

8th

 third switch

9

 Fourth switch

10

 Measuring power source

11

 first measuring current supply

12

 second measuring current derivation

13

 first Hall potential line

14

 second Hall potential line

15

 Hallspannungsauswerteschaltkreis

16

 Measuring signal output

17

fifth contact ( 17 ) of the Hall structure ( 1 );

18

sixth contact ( 18 ) of the Hall structure ( 1 );

19

seventh contact ( 19 ) of the Hall structure ( 1 );

20

Eighth contact ( 20 ) of the Hall structure ( 1 );

21

 first switch

22

 second switch

23

 third switch

24

 fourth switch

25

 not used

26

ninth contact ( 26 ) of the Hall structure ( 1 );

27

tenth contact ( 27 ) of the Hall structure ( 1 );

28

eleventh contact ( 28 ) of the Hall structure ( 1 );

29

twelfth contact ( 29 ) of the Hall structure ( 1 );

30

fifth switch ( 30 );

31

sixth switch ( 31 );

32

seventh switch ( 32 );

33

eighth switch ( 33 );

34

first contact group of the Hall structure comprising in the example of 4 the first contact ( 2 ), the fifth contact ( 17 ) and the ninth contact ( 26 )

35

second contact group of the Hall structure comprising in the example of 4 the contact ( 3 ), the sixth contact ( 18 ) and the tenth contact ( 27 second

36

third contact group of the Hall structure comprising in the example of 4 the third contact ( 4 ), the seventh contact ( 19 ) and the eleventh contact ( 28 )

37

fourth contact group of the Hall structure comprising in the example of 4 the fourth contact ( 5 ), the eighth contact ( 20 ) and the twelfth contact ( 29 )

38

 thirteenth contact

39

 Fourteenth contact

40

 fifteenth contact

41

fifth contact group of the Hall structure ( 1 ) comprising in the example of 14 the thirteenth contact ( 38 ), the fourteenth contact ( 39 ) and the fifteenth contact ( 40 )

42

 ninth switch

43

 fifth switch

44

 tenth switch

45

 Sixteenth contact

46

 seventeenth contact

47

 eighteenth contact

48

sixth contact group of the Hall structure ( 1 ) comprising in the example of 14 the sixteenth contact ( 45 ), the seventeenth contact ( 46 ) and the eighteenth contact ( 47 )

49

 eleventh switch

50

 sixth switch

51

 twelfth switch

52

 nineteenth contact

53

 twentieth contact

54

 Twenty-first contact

55

seventh contact group of the Hall structure ( 1 ) comprising in the example of 14 the nineteenth contact ( 52 ), the twentieth contact ( 53 ) and the twenty-first contact ( 54 )

56

 thirteenth switch

57

 seventh switch

58

 fourteenth switch

59

 Twenty-second contact

60

 Twenty-third contact

61

 Twenty-fourth contact

62

eighth contact group of the Hall structure ( 1 ) comprising in the example of 14 Twenty-second contact ( 59 ), the twenty-third contact ( 60 ) and the twenty-fourth contact ( 61 )

63

 fifteenth switch

64

 eighth switch

65

 sixteenth switch

66

 second measuring current source

67

 third measuring current source

68

 fourth measuring current source

69

 fifth measuring current source

70

 sixth measuring current source

71

 second measuring current supply

72

 third measuring current supply

73

 fourth measuring current supply

74

 second measuring current derivation

75

 third measuring current derivation

76

 fourth measuring current derivation

77

 ninth switch

78

 tenth switch

79

I ₁

 first measuring current

I ₂

 second measuring current

I ₃

 third measuring current

I ₄

 fourth measuring current

I ₅

 fifth measuring current

I ₆

 sixth measuring current

S

Symmetry point of the Hall structure ( 1 )

SdT

 State of the art

SL

 axis of symmetry

SL1

 first axis of symmetry

SL2

 second axis of symmetry

SL3

 third axis of symmetry

SL4

 fourth axis of symmetry

Z ₁

 first condition

Z ₂

 second state

Z ₃

 third state

Z ₄

 fourth state

Z _n

 nth state

Z _a

 current state

Claims (3)

Device for measuring the flux density B of a magnetic field by means of the Hall effect - with a Hall structure ( 1 ); - with a first contact ( 2 ) of the Hall structure ( 1 ); - with a second contact ( 3 ) of the Hall structure ( 1 ); - with a third contact ( 4 ) of the Hall structure ( 1 ); - with a fourth contact ( 5 ) of the Hall structure ( 1 ); - with a measuring current source ( 10 ); - with a measuring current supply ( 11 ); - with a measuring current derivative ( 12 ); - with a first Hall potential lead ( 13 ); - with a second Hall potential lead ( 14 ); - with a first switch ( 6 ); - with a second switch ( 7 ); - with a third switch ( 8th ); - with a fourth switch ( 9 ); - with a Hall voltage evaluation circuit ( 15 ); - with a measuring signal output ( 16 ); - with at least one fifth contact ( 17 ) of the Hall structure ( 1 ); - with at least one sixth contact ( 18 ) of the Hall structure ( 1 ); - with at least one seventh contact ( 19 ) of the Hall structure ( 1 ); - with at least one eighth contact ( 20 ) of the Hall structure ( 1 ); With at least one first switch ( 21 ); - with at least one second switch ( 22 ) - with at least one third switch ( 23 ); - with at least a fourth switch ( 24 ); - The device is in a first state or is alternatively to this first state in at least a second, further state; - wherein the first state is different from the second state; - where the first switch ( 6 ) the first contact ( 2 ) of the Hall structure ( 1 ) with the measuring current supply line ( 11 ) electrically connects in the first state and from the second Hall potential line ( 14 ) electrically disconnects in the first state; - where the first switch ( 6 ) the first contact ( 2 ) of the Hall structure ( 1 ) with the second Hall potential line ( 14 ) electrically connected in the second state and of the measuring current supply ( 11 ) electrically separates in the second state; - wherein the second switch ( 7 ) the second contact ( 3 ) of the Hall structure ( 1 ) with the first Hall potential line ( 13 ) in the first state electrically connects and from the measuring current derivative ( 12 ) electrically disconnects in the first state; - wherein the second switch ( 7 ) the second contact ( 3 ) of the Hall structure ( 1 ) with the measuring current derivative ( 12 ) electrically connects in the second state and from the first Hall potential line ( 13 ) electrically isolated; - where the third switch ( 8th ) the third contact ( 4 ) of the Hall structure ( 1 ) with the measuring current derivative ( 12 ) electrically connects in the first state and from the first Hall potential line ( 13 ) electrically disconnects in the first state; - where the third switch ( 8th ) the third contact ( 4 ) of the Hall structure ( 1 ) with the first Hall potential line ( 13 ) electrically connected in the second state and of the measuring current derivative ( 12 ) electrically separates in the second state; - where the fourth switch ( 9 ) the fourth contact ( 5 ) of the Hall structure ( 1 ) with the first Hall potential line ( 13 ) electrically connected in the first state and of the measuring current supply ( 11 ) electrically disconnects in the first state; - where the fourth switch ( 9 ) the fourth contact ( 5 ) of the Hall structure ( 1 ) with the measuring current supply line ( 11 ) electrically connects in the second state and from the Hall potential line ( 13 ) electrically separates in the second state; - where the first switch ( 21 ) the fifth contact ( 17 ) with the measuring current supply line ( 11 ) in the first state and from the measuring current supply ( 11 ) separates in the second state; - the second switch ( 22 ) the sixth contact ( 18 ) with the measuring current derivative ( 12 ) in the second state and from the measuring current derivative ( 12 ) in the first state separates; - where the third switch ( 23 ) the seventh contact ( 19 ) with the measuring current derivative ( 12 ) in the first state and from the measuring current derivative ( 12 ) separates in the second state; - the fourth switch ( 24 ) the eighth contact ( 20 ) with the measuring current supply line ( 11 ) in the second state and from the measuring current supply ( 11 ) separates in the second state; - wherein the Hall voltage evaluation circuit ( 15 ) the measuring output signal ( 16 ) having a value; - where this value of the measuring output signal ( 16 ) of the voltage difference between the electrical potential of the first Hall potential line ( 13 ) and the electrical potential of the second Hall potential line ( 14 ) depends; - where this value of the measuring output signal ( 16 ) at least temporarily represents the determined flux density B of at least a portion of the magnetic field that the Hall structure ( 1 ) flows through. Device according to claim 1 - with a ninth contact ( 26 ) of the Hall structure ( 1 ); - with a tenth contact ( 27 ) of the Hall structure ( 1 ); - with an eleventh contact ( 28 ) of the Hall structure ( 1 ); - with a twelfth contact ( 29 ) of the Hall structure ( 1 ); - with a fifth switch ( 30 ); - with a sixth switch ( 31 ); - with a seventh switch ( 32 ); - with an eighth switch ( 33 ); - where the fifth switch ( 30 ) the ninth contact ( 26 ) with the measuring current supply line ( 11 ) in the first state and from the measuring current supply ( 11 ) separates in the second state; - where the sixth switch ( 31 ) the tenth contact ( 27 ) with the measuring current derivative ( 12 ) in the second state and from the measuring current derivative ( 12 ) in the first state separates; - where the seventh switch ( 32 ) the eleventh contact ( 28 ) with the measuring current derivative ( 12 ) in the first state and from the measuring current derivative ( 12 ) separates in the second state; - the eighth switch ( 33 ) the twelfth contact ( 29 ) with the measuring current supply line ( 11 ) in the second state and from the measuring current supply ( 11 ) in the second state. Device with a Hall structure ( 1 ) - comprising at least four contact groups ( 34 . 35 . 36 . 37 ) of at least n contacts ( 2 . 17 . 26 ; 3 . 18 . 27 ; 4 . 19 . 28 ; 5 . 20 . 29 ), which the Hall structure ( 1 ) contact electrically; Wherein the number n of contacts per contact group of each of these contact groups in each contact group is greater than the number one per contact group; - The device is temporarily during operation of the device in a first state (Z ₁ ) or alternatively to this first state (Z ₁ ) at other times of operation, the device at least temporarily in at least one further, second state (Z ₂ ) is located; - These states (Z ₁ , Z ₂ ) are different from each other; - wherein the state of the at least two states that exist at an operating time in the following is the current state (Z _a ); Each of four contact groups of the at least four contact groups ( 34 . 35 . 36 . 37 ) exactly one of at least four, listed below contact group functions (first, second third and fourth contact group function) in the current state (Z _a ) is assigned; Each of the four following contact group functions having at least one of the at least four contact groups ( 34 . 35 . 36 . 37 ) is assigned in the current state (Z _a ); - wherein a first contact group function of the at least four contact group functions is characterized in that a contact group, which is assigned to this contact group function, is used for current introduction into the Hall structure; - wherein a second contact group function of the at least four contact group functions is characterized in that a contact group, which is assigned to this contact group function, is used for current dissipation from the Hall structure; - wherein a third contact group function of the at least four contact group functions is characterized in that a contact group, which is assigned to this contact group function, is used to detect a first Hall potential; - wherein a fourth contact group function of the at least four contact group functions is characterized in that a contact group, which is assigned to this contact group function, is used to detect a second Hall potential; Wherein, in a contact group associated with the first contact group function, a first number of contacts of more than the number of one contact of that contact group are used for the current injection; Wherein, in a contact group associated with the second contact group function, a second number of contacts of more than the number of one contact of that contact group are used for the current drain; Wherein, in a contact group associated with the third contact group function, at least one contact of that contact group but less than the first and second number of contacts is used to detect the first Hall potential and the other contacts of that contact group are exclusively through the Hall Structure are electrically connected to each other; - Wherein in a contact group, which is assigned to the fourth contact group function, at least one contact of this contact group, but less than the first and second number of contacts, is used to detect the second Hall potential and wherein the other contacts of this contact group exclusively on the Hall Structure are electrically connected to each other; - wherein the device comprises means for, depending on the current state (Z _a ) of each of the four contact groups ( 34 . 35 . 36 . 37 ) assign exactly one of four possible contact group functions; - wherein the device has means to change the current state; - Wherein any two states of the at least two states relating to this claim are exactly different if the assignment of the at least four contact group functions to the at least four contact groups of the device is different.

Images