DE102013207599A1 - Placement device and placement method for accurately aligning and / or equipping a substrate with a component - Google Patents

Abstract

The invention relates to a placement device for precisely aligning and / or equipping a substrate (1) with at least one component (2) complementary thereto, with a first holding device (10) for the at least one component (2) or the substrate (1) in the open End of a lever arm (11) which can be pivoted about a pivot axis (A), a second holding device (3) for the respectively complementary substrate (1) or component, characterized by a) a first optical axis (32) of a first camera device (31) which is aligned with the first holding device (10) with at least one component (1) or a substrate (2), and b) a second optical axis (34) of a second camera device (33) which is connected to the second holding device (20) with the each complementary substrate or component (1, 2) is aligned, and by c) a position evaluation device (50) for creating an output data set (41) from processing the images of the camera devices (31, 33), the output data record (41) having an overlay of the images of the first and second camera devices (31, 33) for display on an output device (40) and / or the output data record (41) difference data on relative positions of the component (2) and substrate (1), recorded with the first and second camera devices (31, 33).

Description

The invention relates to a placement device for positionally accurate loading of a substrate with a component according to claim 1 and a placement method for positionally accurate loading of a substrate with a component according to claim 13.

In the production of, in particular, electronic, optical and optoelectronic products, as well as microsystems, the object is to arrange components automatically on a substrate. The components may e.g. Memory chips or microprocessors that need to be deposited on a substrate. Other examples include the mounting of VCSEL devices, photodiodes, MEMS devices, or chip-on-glass devices.

Subsequently, a further processing of the substrate takes place together with the component. In particular, u.U. a more durable connection of substrate and device, e.g. by thermocompression, ultrasound, soldering or gluing.

Placing devices are known, for example from the DD 242 320 A1 or the DE 195 24 475 C1 in which the deposition of a component takes place on a substrate by means of lever arms.

In order to realize ever higher placement accuracies, placement devices and methods are needed that are simple and efficient to manufacture and use.

This object is achieved by a placement device with the features of claim 1. This serves for positionally accurate alignment and / or equipping of a substrate with at least one complementary component. It has a first holding device for the at least one component or the substrate at the free end of a pivotable about a pivot axis lever arm and a second holding device for the respective complementary substrate or component.

Two camera devices are used, with a first optical axis of a first camera device being aligned with a first holding device having at least one component or a substrate and a second optical axis of a second camera device being aligned with the second holding device with the respective complementary substrate or component.

A position evaluation device serves to produce an output data record from a processing of the images of the camera devices, wherein the output data record comprises an overlay, if necessary simultaneously recorded images of the first and second camera device for display on an output device and / or the output data record image data of the first and second camera device with difference data to relative positions of device and substrate

Thus, due to the coupled camera devices, the placement device allows a number of image processing. First, the captured images in the form of the output data set can be automatically, e.g. be further processed with an automatic pattern recognition. On the other hand, the captured images can be superimposed and displayed to a viewer, e.g. an operator of the placement device, are displayed on an output device (e.g., a screen directly on the placement device). Basically, a combination of the internal data processing of the output data set and the display of the superimposed image is possible.

A simple and safe construction results when the optical axes of the first and second camera apparatus are arranged fixed relative to one another, in particular at right angles to one another.

Additionally or alternatively, the optical axes of the camera devices are movable parallel to the respective object plane, in particular linearly displaceable. In this way, a plurality of positions of a component and / or substrate can be detected optically, which makes sense in particular for larger components or substrates.

For the same reason, in one embodiment, additionally or alternatively, at least one of the camera devices can be pivoted out of the pivoting range of the lever arm.

If the pivot angle of the lever arm is less than or equal to 270 °, the placement of the placement can be done in a particularly simple manner. It is particularly advantageous if the angle is equal to 180 ° or equal to 90 °.

Furthermore, an advantageous embodiment has an adjusting device with which, in particular, an automatic spatial adjustment of the component and / or of the substrate in dependence on the corrected images of the camera devices is vornehmbar. For the adjustment of the relative position of substrate and components to each other, an advantageous embodiment of a pad as part of the second holding device for the substrate or the component, wherein an adjustment in at least one degree of freedom is possible. The adjustment can therefore along at least one translational degree of freedom and / or a rotational degree of freedom. The pad is thus part of an adjusting device.

A particularly simple structure results when the first and second camera device are of identical construction.

For a simple and stable implementation of the assembly, it is advantageous if the intersection of the optical axes of the camera devices and the holding devices span a plane whose intersection with the pivot axis forms a square together with the intersection of the optical axes of the camera devices and the holding devices.

Advantageously, the placement device has a number of correction means. A first correction means minimizes optical errors, in particular distortions, in the images of the camera devices by means of calibration data. A second correction means is used to offset mechanical errors of the placement device with calibration data. A third correction means is used to charge the mechanical positions of the camera devices. These correction means may be used singly or in combination with each other.

Furthermore, it is advantageous if the representation of the result of the position evaluation device takes place in real time, so that an operator is enabled, with an adjustment device, manually to spatially adjust the component and / or the substrate as a function of the superposed representation on the output device, especially a screen to perform.

Additionally or alternatively, it is also advantageous if, with an adjusting device, a spatial adjustment of the component and / or of the substrate can be carried out automatically as a function of the result of the position evaluation device. This is e.g. through an automatic image recognition system possible.

A further advantageous embodiment of a placement device has means for further processing of the component and the substrate, in particular means for producing a more durable connection of substrate and component by thermocompression, ultrasonic methods, soldering and / or gluing.

Furthermore, it is advantageous if the images of the first and second camera device were recorded simultaneously and stored in the output data record.

The object is also achieved by a placement method with the features of claim 14.

In the following, embodiments of the invention will be illustrated with reference to drawings. It shows

1A a perspective view of a first embodiment with two fixed camera devices;

1B a side view of the first embodiment;

2A a representation of a second embodiment with two camera devices, which are movable in parallel;

2 B a perspective view of the second embodiment;

3A a perspective view of a third embodiment, in which the camera devices are arranged in the pivoting range of a lever arm and are therefore always moved before pivoting the lever arm from the pivoting range;

3B a side view of the third embodiment;

4 a perspective view of a first position of a variant of the second embodiment, in which the lever arm is pivotable at an angle other than 90 °;

5 a perspective view of a fifth embodiment as a variant of the third embodiment, in which the lever arm is pivotable at an angle other than 90 °;

6 a block diagram of the functionality of an embodiment of a placement device and a placement method with superposition of output data sets as a display on an output device;

7 a block diagram of an embodiment of a placement device and a placement method with correction means for optical and mechanical errors as well as the consideration of the influence of the camera positions with superposition of output data sets as a display on an output device;

8th a block diagram of an embodiment of a placement device and a placement method with correction means for optical and mechanical errors and the consideration of the influence of the camera positions with a (possibly automatic) attitude correction without overlay of output data sets as display on an output device;

9 a block diagram of an embodiment of a placement device and a placement method with correction means for optical and mechanical errors and the consideration of the influence of the camera positions with a position correction and with superposition of output data sets as a display on an output device;

10 a block diagram of the placement process using an adjusting device.

In 1A and 1B is a first embodiment of a placement device 100 shown. Such placement devices 100 are used, for example, a component 2 on a substrate 1 to arrange. The component 2 is here on a lever arm 11 on a first holding device 10 arranged, and the substrate 1 on a pad 21 a second holding device 20 , This mode of representation is maintained below for the sake of simplicity, it being possible in principle that the substrate 1 on the lever arm 11 is arranged and the device 2 on the pad 21 lies. In any case become component 2 and substrate 1 guided by a movement to each other, where it is basically irrelevant, whether the device 2 and / or the substrate 1 to be moved. The component 2 and the substrate 1 are complementary to each other when they match, ie they can be assembled, for example.

In the present case, the substrate 1 on a pad 21 arranged, which is designed to be movable in all three spatial directions. This corresponds to three translatory degrees of freedom. The possibilities of movement along the spatial directions X, Y, Z are in the 1A represented by double arrows. Additionally or alternatively, rotational degrees of freedom β _x , β _y , β _z may also be provided. These too are in 1A shown.

This allows the substrate 1 be positioned in the room, this positioning relative to the first holding device 10 he follows. In alternative embodiments, the height adjustment in the Z direction is missing. This may be sufficient for certain placement tasks.

The first holding device 10 has one about the axis A (see rotation arrow W in 1A ) pivotable lever arm 11 on, at the end of the device 2 is arranged, that to the substrate 1 is complementary, that is, on this substrate 1 fits.

For the precision required for placement down to the sub-micron range, it makes sense that the placement and setup of the placement device and the orientation of the device 1 to the substrate 2 very accurately. Only in this way can a high repeat accuracy be achieved in a sequence of placement processes.

As in 1B recognizable, corresponds to the distance B between the pivot axis A and the lever arm 11 arranged component 2 while the distance B between the pivot axis A and on the base 21 arranged substrate 1 ,

The lever arm 11 is arranged in the embodiment shown here by a nominal 90 ° pivotable. If it requires the assembly, the lever arm can 11 be swiveled up to 270 °.

For the exact, relative orientation of the first holder device 10 with the lever arm 11 on the second holding device 20 with the substrate 1 become camera devices 31 . 33 used.

The first optical axis 32 the first camera device 31 is perpendicular to the surface 21 (please refer 1B ) aligned to the substrate 1 on the pad 21 visually detect.

Perpendicular to the first optical axis 32 is a second optical axis 34 the second camera device 33 arranged to the device 2 on the lever arm 11 capture.

The two optical axes 32 . 34 both lie in a plane E (see 1B ). This plane E cuts the device 2 , the substrate 1 and the pivot axis A of the lever arm 11 ,

The intersection of the optical axes 32 . 34 , the component 2 on the lever arm 11 in the initial position, the intersection of the plane E with the pivot axis A and the substrate 1 lie on a square with the side length B (see 1B ).

In the first embodiment according to 1A and 1B are the two camera devices 31 . 33 fixed relative to each other and outside the pivoting range of the lever arm 11 , possibly with connected components 1 arranged.

The two camera devices 31 . 33 are with a position evaluation device 50 , eg a data processing system, coupled. The position evaluation device 50 especially in the placement device 100 be integrated. Also it can be a correction device 60 (with different correction means 71 . 72 . 73 ) and / or a Image recognition system 63 to which, in connection with the 7 to 9 will be received.

This is the independent determination of the spatial position of the component 2 and substrate 1 relative to the placement device 100 using the images of the first and second camera device 31 . 33 possible. The pictures of the camera devices 31 . 33 are won at the same time, so no movements of the camera devices 31 . 33 required are. In principle, it is also possible to record the recordings at different times.

The position evaluation device 50 creates an output record 41 (which can also consist of several parts) from the captured images of the camera devices 31 . 33 , Basically, there are several ways of processing the output data set 41 possible. So can the output record 41 can be further processed directly, for example, by being fed to an automatic image processing, which automatically detects the position of the substrate 1 and component 2 determined and taken into account in the further control. For example, predetermined markers can be used.

It is also possible that the output record 41 a superposition of the two images of the camera devices 31 . 33 which is then on an output device 40 are displayed. This embodiment is in 1A shown schematically. A machine operator can work on the output device 40 directly the relative placement position of substrate 1 and component 2 recognize during operation.

In principle, it is also possible to use automatic image processing and display on an output device 40 to use at the same time

The output record 41 has, for example, difference data resulting from the position of the component 2 relative to the position of the substrate 1 result. The differences are made by an automatic image processing eg by means of pattern recognition from the images that the camera devices 31 . 33 record, calculated, or by the viewing of the real-time image overlay and the subjective recognition of structures and contours of the device and the substrate for the machine operator recognizable. A translational and / or rotational change in the position of the component 2 or substrate 1 leads to a change of this difference data and thus to a new output data record.

For the sake of clarity are in the 2 to 5 the location evaluation devices 50 , the output records 41 and the dispenser 40 each not shown.

In the 6 to 9 Embodiments for the creation of output records in placement methods are presented.

For a more flexible presentation and / or evaluation of the images, the camera devices 31 . 33 be equipped with a zoom device (mechanical and / or software).

With the two camera devices 31 . 33 is thus a separate recording of component 2 and substrate 1 possible. Due to a possible overlay of images, the position of component 2 and substrate 1 be coordinated with each other.

A second embodiment is in 2A and 2 B shown. The basic structure of the placement device 100 corresponds to the first embodiment, so that the above statements can be used. The way of attaching the camera devices 31 . 33 However, it is different. In 2A (and also in the following illustrations) are camera devices 31 . 33 in the shifted state represented by dashed lines.

The camera devices 31 . 33 are here parallel to the respective object planes displaced, especially parallel to the pivot axis A, and outside the pivoting range of the lever arm 11 arranged. In the first alignment position, this embodiment corresponds to the in 1A . 1B illustrated variant. The displaceability allows the detection of partial structures of component 1 and substrate 2 at other positions, which in particular for the exact alignment of large components 1 is advantageous.

Because the camera devices 31 . 33 are firmly connected to each other, the above-described square of the axes must not be set again and again.

The third embodiment according to 3A . 3B is a variant of the second embodiment, so that reference can be made to the corresponding descriptions. Here are the camera devices 31 . 33 in the swivel range of the lever arm 11 , so that the intersection of the optical axes 32 . 34 behind the lenses of the camera devices 31 . 33 lies. This results in a smaller working distance between the object plane and the lenses of the camera devices 31 . 33 reached. Thus, a higher optical resolution and thus a more accurate placement are possible.

As in the second embodiment, the camera devices fixedly coupled with each other 31 . 33 formed displaceable parallel to the pivot axis A, for example, to avoid a collision.

Basically it is possible to use the two camera devices 31 . 33 also to move separately. This applies to all embodiments.

In principle, the first three embodiments can also be used in conjunction with a lever arm 11 can be used, which is formed pivotable by more than 90 °. In 4 a further variant of the first two embodiments is shown, whereby the corresponding descriptions are relevant here as well. In 4 is shown that the lever arm 11 180 ° from the surface 21 opened. This creates a mechanical free space that can be used, for example, in an efficient manner for an automatic tool change or a fully automatic component feed.

In 4 an embodiment is shown in which the camera devices 31 . 33 - As in the second embodiment - are fixed relative to each other, but together are parallel to the object plane, in particular to the pivot axis A movable. The camera devices 31 . 33 are arranged outside the swivel range.

In 5 a variant of the embodiments is shown in 4 is shown so that the description can be referred to. In contrast to the embodiment of the 4 are the camera devices 31 . 33 arranged within the pivoting range. So if the lever arm 11 is pivoted, it must first be ensured that the camera devices 31 . 33 be moved from the swivel range by being preferably moved laterally parallel to the pivot axis A.

In 6 is shown schematically as a placing device 100 or a placement method allows superposition of images.

The two camera devices 31 . 33 take a substrate 1 (symbolized by a distorted cross) and a component 2 (symbolized by a distorted rectangle). As part of the output data set 41 become the image of the substrate 35 and the picture of the component 36 from the attitude evaluation device 50 superimposed in real time and on the display device as an output device 40 displayed. The overlaid image 37 shows that component 1 and substrate 2 are not optimally adjusted relative to each other, so that a manual position correction is possible in a simple manner. The output record 41 in this embodiment comprises the superimposed image 37 the two pictures 35 . 36 from substrate 1 and component 2 ,

With an output device, like a monitor 40 can the superimposed image 37 being represented.

In 7 is the data flow of a variant of the embodiment according to 6 shown. It is assumed that the camera images of the camera devices 31 . 33 a systematic error of the placement device 100 are offset. Systematic errors can be caused, for example, by optical errors of the camera devices 31 . 33 , such as distortions, and / or caused by mechanical errors of the placement device.

In 7 is shown that the image of the substrate 35 and the picture of the component 36 are distorted by optical errors. Since these are systematic errors, they can be corrected by the correction device 60 associated with the attitude evaluation device 50 can be coupled, be compensated (see, eg 1A ).

So can by correcting steps 61 . 62 (executed by correction means 71 ) optical errors, especially distortions in the images of the camera devices 31 . 33 be minimized by means of calibration data. With a second correction means 72 (see eg 1A ) can cause mechanical errors of the placement device 100 in the pictures of the camera devices 31 . 33 be compensated with calibration data. With a third correction means 73 (see eg 1A ) become the mechanical positions of the camera devices 31 . 33 included.

By correction steps 61 . 62 can through the correction device 60 equalized pictures 35 ' . 36 ' from substrate 1 and component 2 be generated. These are then superimposed in real time and converted into an output data record 41 (see eg 1A ) merged. When overlaying, the positions of the camera devices go 31 . 33 and their systematic mistakes. This takes into account that the mechanical positioning of the camera devices 31 . 33 never completely faultless. Once this error has been determined, it can be taken into account mathematically (eg by shifting and / or rotation by one pixel size). Analog also once certain systematic errors of the placement 100 (eg the swivel arm 11 ) taken into account in the calculation. This is to ensure that the display of the superimposed image represents the expected placement result.

The further processing corresponds to that in 6 illustrated embodiment, so that reference may be made to the above description. The output record 41 in this embodiment comprises the superimposed image 37 the two pictures 35 . 36 from substrate 1 and component 2 ,

In 8th is a variant of the embodiment according to 7 but without superimposing the images for display on an output device 40 ,

As in the embodiment according to 7 Here, too, an equalized image of the substrate 35 ' and an equalized image of the device 36 ' generated.

These equalized pictures 35 ' 36 ' are then sent to an image recognition system 63 transmitted with the position evaluation device 50 is coupled.

This is done for both pictures 35 ' . 36 ' each one image recognition, in which, for example, markers can be evaluated. Taking into account the recorded pixel scale and the positions of the camera devices 31 . 33 takes place for both pictures 35 ' . 36 ' a conversion 66 . 67 in machine coordinates of the placing device 100 , It takes into account that the mechanical positioning of the camera devices 31 . 33 never completely faultless. Once this error has been determined, it can be taken into account mathematically (eg by shifting and / or rotation by one pixel size) and converted into machine coordinates.

Along with other systematic errors of the placement device 100 Now a calculation of position correction values takes place 68 , These position correction values 68 are part of the output data set 41 , These position correction values 68 then possibly allow the automatic position correction in the placement 100 ,

Thus, by the automatic determination of the position correction values, a feedback takes place, for example by means of a position evaluation device 50 coupled adjustment can be done. The adjusting device can, for example, convert these position correction values directly into correction movements in the spatial directions X, Y, Z and / or the rotational directions β _x , β _y and β _z .

In 9 becomes the combination of the embodiments according to 7 and 8th so that reference may be made to the above description.

Starting from the rectified pictures 35 ' 36 ' becomes a superimposed picture 37 generated. These equalized pictures 35 ' . 36 ' are also used by the image recognition system 63 used to make a position correction (possibly automatically) of substrate 1 and component 2 to enable.

In 10 becomes an embodiment for further processing of an output data set 41 shown. If one of the in the 6 to 9 described method is carried out, then there are information as component 2 and substrate 1 taking into account the errors match each other. In a test step 80 is determined by means of the output data record 41 determines if the device 2 relative to the substrate 1 is positioned correctly. If not, then by means of the adjusting device in an adjustment step 81 the component 2 and / or the substrate 1 realigned and it becomes a new output record 41 generated.

Is the relative position of component 2 and substrate 1 correct, so will in the placement step 82 the component 2 on the substrate 1 placed. Subsequently, in a further processing step 83 For example, a joining process can be performed.

LIST OF REFERENCE NUMBERS

1

substratum

2

module

10

first holding device

11

lever arm

20

second holding device

21

document

31

first camera device

32

first optical axis

33

second camera device

34

second optical axis

35

Picture substrate

35 '

 corrected image of the substrate

36

Image component

36 '

 corrected image of the device

37

superimposed image

40

output device

41

Output record

50

 Position evaluation device

60

corrector

61

Correction step for image of the substrate

62

Correction step for picture of the component

63

Image recognition system

64

Image recognition substrate

65

Image recognition component

66

Conversion of the substrate image into machine coordinates

67

Conversion of the component image into machine coordinates

68

Calculation position correction

71

first correction means

72

second correction means

73

third correction means

80

Test step

81

adjusting step

82

Platzierschritt

83

Further processing step

100

 placement device

A

Swivel axis lever arm

B

Distance pivot axis component, pivot axis substrate

e

level

W

Angle of rotation about pivot axis A

X, Y, Z

Movement possibilities in spatial directions

β _x , β _y , β _z

 Movement possibilities around spatial axes

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DD 242320 A1 [0004]
• DE 19524475 C1 [0004]

Claims (14)

Placement device for positionally aligning and / or equipping a substrate ( 1 ) with at least one complementary component ( 2 ), with a first holding device ( 10 ) for the at least one component ( 2 ) or the substrate ( 1 ) at the free end of a pivotable about a pivot axis (A) lever arm ( 11 ), a second holding device ( 3 ) for the respective complementary substrate ( 1 ) or component, characterized by a) a first optical axis ( 32 ) a first camera device ( 31 ), which on the first holding device ( 10 ) with at least one component ( 1 ) or a substrate ( 2 ) and b) a second optical axis ( 34 ) a second camera device ( 33 ), which on the second holding device ( 20 ) with the respectively complementary substrate or component ( 1 . 2 ) and by c) a position evaluation device ( 50 ) for creating an output data record ( 41 ) from processing the images of the camera devices ( 31 . 33 ), the output data set ( 41 ) a superposition of the images of the first and second camera device ( 31 . 33 ) for display on an output device ( 40 ) and / or the output data set ( 41 ) Difference data on relative positions of component ( 2 ) and substrate ( 1 ) recorded with the first and second camera devices ( 31 . 33 ), having. Placement device according to claim 1, characterized in that the optical axes ( 32 . 34 ) of the first and second camera devices ( 31 . 33 ) are arranged fixed relative to each other, in particular at right angles. Placement device according to claim 1 or 2, characterized in that at least one of the optical axes of the camera devices ( 31 . 33 ) is displaceable parallel to the respective object plane. Placement device according to at least one of the preceding claims, characterized in that at least one of the camera devices ( 31 . 33 ) can be brought out of the pivoting range of the lever arm. Placement device according to at least one of the preceding claims, characterized in that the pivot angle of the lever arm ( 11 ) is less than or equal to 270 °, in particular equal to 180 °, very particularly equal to 90 °. Placement device according to at least one of the preceding claims, characterized by an adjusting device ( 21 ) for the relative orientation of substrate ( 1 ) and component ( 2 ) to each other in at least one spatial direction and / or direction of rotation. Placement device according to at least one of the preceding claims, characterized in that the first and second camera device ( 31 . 33 ) are constructed identical. Placement device according to at least one of the preceding claims, characterized in that the intersection of the optical axes ( 32 . 34 ) of the camera devices ( 31 . 33 ) and the holding devices ( 10 . 20 ) span a plane (E) whose intersection with the pivot axis (A) together with the intersection of the optical axes (E) 32 . 34 ) of the camera devices ( 31 . 33 ) and the holding devices ( 10 . 20 ) form a square. Placement device according to at least one of the preceding claims, characterized by a first correction means ( 71 ) for the images of the camera devices ( 31 . 33 ) by means of calibration data for minimizing the optical errors, in particular distortions, and / or a second correction means ( 72 ) for the images of the camera devices ( 31 . 33 ) with calibration data for offsetting mechanical errors of the placement device ( 100 ) and / or a third correction means ( 73 ) for images of the camera devices ( 31 . 33 ) with calibration data for offsetting the mechanical positions of the camera devices ( 31 . 33 ). Placement device according to at least one of the preceding claims, characterized in that the representation of the result of the position evaluation device ( 50 ) is performed in real time, so that an operator is enabled, with an adjusting device manually a spatial adjustment of the component ( 2 ) and / or the substrate ( 1 ) depending on the superimposed representation on the output device ( 40 ), in particular a screen to perform. Placement device according to at least one of the preceding claims, characterized in that with an adjusting device automatically a spatial adjustment of the component ( 2 ) and / or the substrate ( 1 ) depending on the result of the position evaluation device ( 50 ) is vornehmbar. Placement device according to at least one of the preceding claims, characterized by means for further processing of component ( 2 ) and substrate ( 1 ), in particular means for producing a more durable connection of substrate ( 1 ) and component ( 2 ) preferably by thermocompression, ultrasonic methods, soldering and / or gluing. Placement device according to at least one of the preceding claims, characterized in that the images of the first and second camera device ( 31 . 33 ) were recorded simultaneously. Placement method for a placement device ( 100 ) for positionally aligning and / or equipping a substrate ( 1 ) with at least one complementary component ( 2 ), with a first holding device ( 10 ) for the at least one component ( 2 ) or the substrate ( 1 ) at the free end of a pivotable about a pivot axis (A) lever arm ( 11 ), a second holding device ( 3 ) for the respective complementary substrate ( 1 ) or component, characterized by a first optical axis ( 32 ) a first camera device ( 31 ), which on the first holding device ( 10 ) with at least one component ( 1 ) or a substrate ( 2 ) and a second optical axis ( 34 ) a second camera device ( 33 ), which on the second holding device ( 20 ) with the respectively complementary substrate or component ( 1 . 2 ) and by a position evaluation device ( 50 ), which provide an output record ( 41 ) from processing the images of the camera devices ( 31 . 33 ), whereby the output data set ( 41 ) a superposition of the images of the first and second camera device ( 31 . 33 ) for display on an output device ( 40 ) and / or the output data set ( 41 ) Difference data on relative positions of component ( 2 ) and substrate ( 1 ) recorded with the first and second camera devices ( 31 . 33 ), having.

Images