DE102013103253A1 - Laser light-section sensor with improved accuracy due to reduction of speckles - Google Patents

Abstract

The present invention relates to a method for measuring a surface (20) of a test object with a light section sensor (1) and the light section sensor for it, comprising the following steps: a) Generating a light section plane by a first laser light beam (11) for projection onto the surface ( 20) of the test item; b) metrological recording of the light section on the surface (20) with a camera sensor (53) of the light section sensor (1) and thereby generating first image data; characterized by c) generating the same light section plane by a second laser light beam (12) different from the first laser light beam (11) for projection onto the surface (20); d) detecting the light section generated by the second laser light beam (12) on the surface (20) by the camera sensor (53) and thereby generating second image data; and e) using an algorithm to determine the resulting image data from the first and second image data by a computing unit, the algorithm being designed to convert the measured light section, which is superimposed with speckles in the first and second image data, into the resulting image data with less show pronounced speckles.

Description

The present invention relates to a method and a device for measuring a test piece or extruded profile with a light section sensor according to the triangulation principle. In this case, the light-section sensor generates a light-section plane through a first and another second light beam and measures their light sections, with respective image data being processed into resulting image data such that the resulting image data has less pronounced speckles.

DE 10 2011 000 304 A1 describes a method and a measuring device comprising at least one light section sensor according to the preamble of the present invention. In this case, a surface or a cross section of a strand or Blechwalzprofils is measured from several positions around the extruded profile, wherein carried out during the measurement simultaneously via common references and / or reference marker in a respective adjacent measuring range calibration of the respective sensor at the respective position becomes. By using a laser light to generate the light section plane, however, the speckles occur, which significantly disturb the measurement and thus the measurement accuracy.

Due to the laser light emitted coherently by the light section sensor, interferences occur in the reflection at the light section in the reflected light waves, which in part lead to an increase in intensity and in part to an extinction. The speckle pattern is superimposed on the actual image. In a measurement of the cross section of the extruded profile by the light section is shown in a camera sensor in the light section sensor instead of a line a dotted line, which is correspondingly poor or inaccurate automatically measured.

Summary of the invention

Therefore, it is an object of the present invention, in order to avoid the disadvantages of the prior art, to provide a method and a light section sensor for measuring a surface or part of a cross section of a specimen with which the surface of the specimen is the same or similar as with a known laser light-section sensor can be measured, but with higher accuracy and in particular with less interference by speckles.

The above object and other objects to be taken from the description are achieved by a method and a measuring device for measuring a test piece or an extruded profile according to the characterizing features of the independent claims 1 and 10, respectively.

By generating a light slicing plane for measuring a surface of a specimen not only with a first laser light beam but also with another second laser light beam, other speckles are detected in first image data obtained by the first laser light beam in second image data generated by the second laser light beam. Thus, the speckles of the second image data can be detected and compensated or filtered out by comparison with the first image data. By an algorithm or a corresponding image processing of the first image data with the second, the speckles that represent disturbances in the survey, reduce or compensate. The image processing algorithm thus generates cleaned, resulting image data which only has a speckles pattern with a significantly lower expression. As a result, measurement errors generated by the speckles can be reduced or avoided to a high degree.

In a first embodiment, the first and the second, second laser light beam bundles are generated by different wavelengths of the respective laser light. In a second embodiment, the first and the second, second laser light beam bundles are generated by different polarization planes of the respective laser light. In a third embodiment, the first and the second, second laser light beam bundles are generated by different light propagation directions of the respective laser light. In a fourth embodiment, the first and the second, second laser light beam bundles are generated by different phase angles of the respective laser light. In a fifth embodiment, the first and the second, second laser light beam bundles are generated by differently mixed phases and / or polarizations of the respective laser light. Also, the generation of the various light beams of the above embodiments may also be combined by, for example, generating the first laser light beam having the first wavelength and the first phase and the second laser light beam having the second wavelength and the second phase. Common to all methods and devices is that the first and the second light beam form the same light section plane in order to produce and detect the same light section on the test object, and that by the first and the second light beam as possible different Speckles pattern in the respective Create image data.

Such devices are relatively simple and inexpensive to implement, for example, when a color-controllable laser is used. The use of a controllable polarizer in an optic is easy and inexpensive to implement. The generation of a controllable or reversible light propagation direction, for example by a second laser light source or an optical deflection is just as easy to implement and inexpensive. Piezo actuators are also inexpensive to produce a shift or change in laser light. Likewise, a control and evaluation by a computing unit or microprocessor unit is simple and increases the measurement accuracy in total by comparing the first and the second image data.

In particular, by the preferred fifth embodiment with a Hadamard diffuser, speckles can be very effectively reduced in the resulting image data. By preferably evaluating the speckles in the first image data and then making a second configuration of the Hadamard diffuser for the generation of the second light beam, speckles can be even better suppressed or averaged.

In particular, by reducing the speckles in the resulting image data or measured value data, the laser light section or the laser line projected on the test object is measured much more accurately. This also allows a more accurate measurement of references or reference markers, allowing measurements from adjacent positions around the sample to be matched. By measuring the test object from a first and a second position around the test object and essentially in a same light section plane and thereby common references are contained in a common measuring range, the measured data of the first position can be compared or related to the measured position of the second position be calibrated. In this case, the measured values of the common references are overlapped in the common measuring range, and the other image data are also overlapped by a corresponding rotation and displacement.

By way of example, punctiform minima in the respective first image data are preferably recognized by the algorithm and replaced by values from the second image data at the points of the point-like minima. Preferably, the algorithm may also calculate an average of the respective pixels of the first and second image data and generate it as the resulting image data.

Preferably, the method can also be further improved by producing a third and / or further wavelength and / or a further polarization and / or a further phase or light propagation direction, which is processed in a detected manner.

Further preferred enhancements may be produced by nano-shifting the light-section sensor or a camera sensor or laser light source contained therein, and subsequently further measuring and billing by the algorithm.

Likewise, further improvements can be produced by a nano-displacement in the longitudinal or in the transverse direction to the emitted beam path and a subsequent further measurement and calculation by the algorithm.

Also, the nano-shifts can be easily and inexpensively by, for example, piezo actuators on which the camera sensor or the laser light source is mounted generate. The essential part of the light section sensor in the interior of the same, comprising the camera sensor and the laser light source, can also be arranged and thus moved on the corresponding piezo actuator. Also, a plate can be easily pivoted in one direction by a plurality of piezo actuators arranged in parallel, whereby the light beam can move by the nano-displacement along the extruded profile.

Preferred nano-shifts are in the range of 0.5-1 wavelengths. Other preferred nano-shifts are in the range of 1-5 wavelengths or in the range of 1-20 wavelengths.

Preferably, a measurement can be carried out simultaneously with the first and the second laser light beam bundles, whereby the first and the second image data are detected by a color camera sensor at the same time, for example by a red or green or blue laser light. Such color image data may thus comprise the first and the second image data. Likewise, both polarization planes can also be transmitted and measured simultaneously, wherein the camera sensor preferably discriminates and detects two different polarization planes, similar to a color camera, but with different polarization pixels.

The method according to the invention achieves a higher accuracy of measurement or lower measurement errors, which become more and more relevant with increasing miniaturization and accordingly increasingly higher demands on surveying devices.

Further advantageous embodiments of the invention are specified in the dependent claims.

A preferred embodiment according to the present invention is illustrated in the following drawings and detailed description, but is not intended to limit the present invention thereto.

Brief description of the drawings

1 shows in perspective view schematically a light section sensor which emits a light section plane on a specimen to produce on its surface a cutting line, wherein the light section plane by two different light beam bundles, which are differently toned, is generated.

2 shows a side view of an internal structure of a preferred light section sensor with a base plate and arranged thereon a laser light source, a camera sensor and optics.

3 shows in plan view from above a schematic arrangement comprising two laser light sources, each generating and emitting mutually different light beam bundles, which lie in a light section plane.

4 shows similar to 3 in plan view from above a schematic arrangement comprising two laser light sources, each of which generates and emits different, different light beam bundles to each other, which lie in a light section plane.

5 shows a side view of the preferred internal structure of the light section sensor, wherein the laser light source is moved by an actuator in the longitudinal direction.

6 shows a side view of another preferred internal structure of the light section sensor, wherein a polarizing filter or a Hadamard polarizer is additionally arranged in the beam path.

7 shows a perspective view of a measuring device in which a plurality of light section sensors are arranged at different positions around an extruded profile for measuring a surface of the extruded profile.

Detailed description of an embodiment

1 shows in a perspective lying in a plane, he view schematically a light section sensor 1 , the one light section plane on a test piece or an extruded profile 2 emitted to a surface of the specimen or the extruded profile 2 to produce a light cut or line of light and the corresponding reflected light through a camera sensor 53 to detect. The light section sensor is preferably a laser light section sensor and is based on the triangulation principle with respect to the measurement of the light section or the light line of the test object. As a result, the surface profile of the test piece can be measured. The light section plane is thereby through a first beam of light 11 and / or by a different second beam of light 12 generated. By emitting laser light through the respective light beam bundle, however, interferences are generated on the surface of the test object as interference patterns, called speckles, during the reflection of the light section. The interference patterns or speckles superimpose the image data obtained by the measurement, so that the reflected light section on the surface of the test object can only be unclearly identified. This involves measurement errors which are reduced by the present invention in that the light-section plane is generated and measured not only, as disclosed in the prior art, with a light beam, but now with two different light beam bundles.

Here are the first light beam 11 and the other, second beam of light 12 in a plane. The different light beam bundles are differently toned. The first is preferred 11 and the second light beam 12 generated and measured one after the other. But it is also conceivable, the first 11 and the second light beam 12 emit simultaneously when a camera sensor in the light section sensor 1 is formed, the first 11 and the second light beam 12 to detect accordingly discriminated. But it is also conceivable that the first light beam 11 and the other second light beam 12 are emitted in two different, mutually parallel light planes, which are just so far apart from each other that the light planes do not interfere with each other in their detection by the camera sensor, and the first 11 and the other second light beam 12 thus only "essentially" forming a light section plane. When measuring a uniform extruded profile 2 such a parallel offset would be between the first 11 and the second light beam 12 or whose light section planes cause no measurement error. Preferably, the light slicing plane is generated in a certain range and with a width which is the width of the measuring range of the light slit sensor 1 equivalent.

To generate different speckles patterns between the first 11 and the second light beam 12 can the first 11 and the second light beam 12 be generated in different ways.

Preference is given to the first light beam 11 with a laser light having a first wavelength and the second light beam 12 generated as another laser light with a second wavelength. When the first beam of light is emitted 11 become first image data and in the transmission of the second light beam 12 second image data are obtained. Different interference patterns or speckles are generated by the different wavelengths in the reflection of the light sections and imaged accordingly in the first and second image data. The first and second image data are then converted to resulting image data with reduced speckles by a computing unit and by an algorithm or rule executed thereon. The algorithm is designed to image the measured light section, which is superimposed on the first and second image data with speckles, in the resulting image data with less pronounced speckles. The arithmetic unit is preferably in the light section sensor 1 For example, arranged as a microcontroller unit so that only the resulting image data or the surface geometry need to be read out as measured values from the outside. The use of an external arithmetic unit is also possible.

Since the algorithm reduces the speckles in the resulting image data to a large extent, the measured values have a higher accuracy therein. Thus, for example, edges in images or the light section or the light line on the surface 20 projected, with less pronounced speckles being sharpened. The speckles show up as a point-like light-dark distribution in the first and second image data. The distribution of speckles is naturally of the wavelength of the light and of the polarization as well as of the surface 20 at which the respective light beam is reflected, depending. For reasons of safety at work, the first and second wavelengths are preferably in a visible wavelength range of 380-780 nm. Preferably, however, the first and / or the second wavelength can also lie in the IR range with a higher wavelength. A use of higher-frequency UV light is also conceivable, with a resolution in principle is better, but speckles can affect more depending on the surface.

The first image data and the second image data are preferably compared pixel-by-pixel, the minima discarded, and cleaned-up resulting image data with reduced speckles obtained therefrom. Arithmetic or quadratic averages can also be calculated and used for the resulting image data.

Preferably, the algorithm is designed so that typical speckles patterns are recognized as a light-dark distribution in the first and second image data and reduced by averaging methods. Preferably, an edge filter is applied to the first and second image data, and the minima of broken edges are bridged by interpolation. Preferably, also or additionally, maximum likelihood estimation methods can be used as an algorithm in order to estimate speckles and the actual light line to be measured in a respective image and to determine the actual light line accordingly.

It is conceivable to also generate a third light beam with a third wavelength, wherein thereby obtained third image data are evaluated by the algorithm in an analogous manner to the first and the second image data.

Alternatively, the first light beam is 11 with a first polarization plane and the second light beam 12 generated with another, second polarization plane. In this case, the second polarization plane to the first polarization plane preferably has an angle of> 45 degrees. Particularly preferably, the second polarization plane is generated orthogonally to the first polarization plane. Preference may also be the first light beam 11 with the first wavelength and the first polarization plane and the second light beam 12 be generated with the second wavelength and the other second polarization plane.

Alternatively, the first light beam is 11 with a first light propagation direction and the second light beam 12 generated with another, second light propagation direction, wherein in each case an average light propagation direction is meant. In this case, the second light beam 12 For example, in the light section plane laterally offset and / or rotated, thereby another incidence of the laser light on the surface 20 and thus to generate another interference pattern of the reflected light beam. In this case, the generation of the other second light beam 12 either through a second laser light source 52b or by a correspondingly controllable optics. For example, can be guided differently by optical fibers light beam and the first light beam 11 or to the second beam of light 12 couple out.

The first is preferred 11 and the second 12 Beam of light emitted in succession and received each. Alternatively, the first 11 and the second 12 Light beam sent and received at the same time. For example, while the first 11 and the second light beam 12 be received by a color camera. In this case, the first image data and the second image data are contained, for example, in color image data of a color image, such as RGB image data. A simultaneous transmission of the first 11 and second light beam 12 with, for example, two different polarizations and / or wavelengths and a reception of the reflected light section through the respective surface 20 reflected light with a trained accordingly for the reception of the camera sensor 53 is also conceivable.

In addition, further image data are preferably acquired, the further image data being recorded by an actuator device 51 after a controlled nano-shift of a laser light source 52 be detected to generate a laser light of the respective light beam. Alternatively or additionally, the optics 55 be moved by the nano-shift. Likewise, alternatively or additionally, the camera sensor 53 be moved by the nano-shift. Here are the laser light source 52 and / or the optics 55 and / or the camera sensor 53 connected to the actuator in the light section sensor and arranged so that the nano-displacement is generated either in the longitudinal direction or in the transverse direction or in the longitudinal and transverse direction of the emitted light beam. The actuator device 51 is arranged and designed so that the nano-displacement creates a different interference pattern in the reflected and detected light. For example, the actuator may be a piezo actuator on which the laser light source 52 and / or the optics 55 and / or the camera sensor 53 is arranged. As an actuator 51 But it is also possible to use a lifting magnet, a controllable elongatable plastic or another length actuator. A vibrator as a vibration generating actuator is also conceivable. The actuator device 51 is designed so that the nano-shift in a range of preferably 0.5-1 or preferably 1-5 or also possible 1-20 wavelengths of the laser light is generated. The further image data are processed by the algorithm for the determination of the resulting image data in order to reduce the speckles. Larger displacements are conceivable and would have to be preprocessed accordingly as image data in order to compensate for the resulting measured value deviation. In this case, the acquired further image data are likewise taken into account by the algorithm for determining the resulting image data.

Alternatively or combined, a nano-displacement of the extruded profile 2 be generated in the same way. The nano-displacement can be longitudinal and / or transverse to the extruded profile 2 respectively. In this case, the corresponding further image data are acquired and used to determine the resulting image data.

2 shows a side view of an internal structure of a preferred light section sensor 1 who has a base plate 50 and the laser light source disposed thereon 52 , the optics 55 and the camera sensor 53 includes. Here is the laser light source 52 preferably on the actuator 51 arranged to pass through the actuator 51 according to its position to be shifted by the nano-shift. Also shown is the first one 11 and the second light beam 12 that at the surface 20 of the extruded profile 2 having an illustrated roughness, to the camera sensor 53 is reflected.

By a controllable and preferably swinging controlled longitudinal extent of the actuator 51 becomes the laser light source 52 moved back and forth in the direction of the beam path. An arranged in the beam path optics 55 generates from the laser beam the corresponding, further light beam.

In accordance with other arrangement of the actuator 51 on the picture in the lower part of the base plate 50 and a connection to one side of the laser light source 52 (not in 2 shown) could be the laser light source 52 For example, also be moved transversely to the laser light beam direction. This allows the first light beam frets 11 with the first light propagation direction and the second light beam 12 be generated with the other, second light propagation direction. Larger displacements up to a few millimeters can be generated here, which do not disturb the measurement as long as the light section plane remains the same.

In 3 is a top plan view of a schematic arrangement comprising the laser light source 52 and a second laser light source 52b shown, the laser light source 52 the first light beam 11 and the second laser light source 52b the second beam of light beams 12 generated. It is also conceivable that the laser light source 52 to the position of the second laser light source 52b is moved. Due to the changed position of the laser light source 52 . 52b For example, the first light propagation direction and the second light propagation direction different therefrom are generated, causing other interference and correspondingly other speckles by the surface 20 reflected light can be generated.

4 shows similar to 3 in plan view from above a schematic arrangement comprising two other laser light sources 52 and 52b which each generate and emit different, different light beam bundles to each other, which are the light-section plane form. Preferably, the first happens 11 and the second light beam 12 through a common look 55 , It is also conceivable that for the first 11 and the second light beam 12 each have their own look 55 is arranged and used.

5 shows in side view the preferred internal structure of the light section sensor 1 according to 2 but with the actuator 51 in a first, non-elongated state (penciled) and in a second, elongated state. In the first non-elongated state becomes the first light beam 11 with a first phase position and in the second elongated state, the second light beam 12 sent out with a second phase. Accordingly, the first light beam may alternatively or additionally be generated and emitted with the first phase and the second light beam with the second phase.

6 shows a further preferred embodiment of the light section sensor 1 , in the beam path around a transit time element 54 is extended. By the runtime element 54 , which is, for example, a variable, correspondingly suitable plastic, a gel or a liquid in a transparent container, the phase position of the first or second beam 11 respectively. 12 alternatively to the actuator 51 to be changed. The preferred runtime element is this 54 designed so that it is deformable, for example, by mechanical forces, thereby being able to adjust the phase position.

The runtime element is preferred 54 a matrix-like runtime element 54 in which different fields represent discontinuous run-time elements that vary from field to field. An expanded laser light beam is thereby passed through the various fields or the discontinuous delay elements and is then reunited at the output. Thus, a laser light having different phases is obtained. By a corresponding, different shading of the various fields of the discontinuous transit time elements can thus also the first light beam 11 or the second light beam 12 be generated. The runtime element is preferred 54 can be controlled by the arithmetic unit to the preferred first preferred 11 and second light beam 12 to create. Alternatively, the runtime element 54 also a non-variable runtime element 54 be, for example, by a correspondingly arranged actuator 51 is shifted to thereby produce a first and another, second runtime. The runtime element 54 can also be part of the look 55 represent and be installed in it.

Alternatively, the optics 55 comprise at least one polarizing filter to thereby the first light beam 11 with the first polarization plane and the second light beam 12 to generate with the second polarization plane. Alternatively, it is also possible to use mixed portions of polarization planes for the first light beam bundle 11 and for the second beam of light 12 be generated, wherein the proportions of the polarization planes in the first 11 and in the second beam of light 12 are different. The polarizing filter has an advantage that it can be easily electrically driven to rotate the polarization plane of the laser light. In this case, the laser light rotated by the polarization becomes on the surface 20 which is irregular, reflects differently than a non-polarized or otherwise polarized laser light. This creates another speckles pattern.

Preferably, in the beam path of the light section sensor for generating the first 11 and the second light beam 12 or further light beam bundles a Hadamard diffuser arranged. The Hadamard diffuser is designed to split the laser light into parts and to reunite and emit these parts with different transit times and / or polarizations.

In this case, the different transit times and / or polarizations of the parts of the laser light are preferably controllable. The composition of the laser light emitted from the Hadamard diffuser with the different transit times and / or polarization fractions is determined by a configuration of the Hadamard diffuser. The configuration of the Hadamard diffuser is preferably controllable by the arithmetic unit.

In a preferred embodiment, the first light beam is 11 transmitted with a first configuration controlled by the arithmetic unit and received as the first image data. In this case, the algorithm evaluates the speckles pattern in the first image data, and it accordingly becomes for the generation of the second light beam 12 a second configuration of the Hadamard diffuser determined and controlled. Thus, by the second beam of light 12 other speckles than in the first light beam 11 generated.

Preferably, the second configuration is determined by the algorithm from the first image data such that the speckles in the second image data take a minimum. Accordingly, in this case, only the second image data is output or evaluated as the resulting image data by the algorithm. Alternatively, however, the algorithm may preferably also be designed in such a way, based on the first image data with first speckles, the second configuration of the Hadamard Diffusers so to determine the second beam of light 12 in such a way that this causes as inverse speckles as possible to occur in the second image data. Accordingly, in this case, the algorithm then mainly determines the pixel-by-pixel averages or maxima and outputs them as the resulting image data.

Preferably, the generation of the light section plane in the optics 55 by a rotating mirror or prism integrated therein to distribute a spot beam in the light-section plane.

The camera sensors are preferred 53 either 2D line camera sensors or 3D area camera sensors.

7 shows a perspective view of a preferred measuring device for measuring the test piece or extruded profile 2 which is passed through the measuring device. In this case, a plurality of light section sensors are preferred 1 at a respective position about the extruded profile 2 arranged so that they are aligned to the center, where the extruded profile 2 whose surface is located 20 is measured. The light section sensors are preferred 1 in a plane orthogonal to the extruded profile 2 and thus in the plane of the cross section of the extruded profile 2 arranged to measure the cross section. Instead of several light section sensors 1 can also only a light section sensor 1 movably arranged in the measuring device, which is moved to the respective position before a respective measurement.

If in the measuring device either one of the movable or multiple light section sensors 1 are positioned, the exact position must first not necessarily be known, since the exact positions to each other can be calculated later by a calibration. The arrangement of the at least one light section sensor 1 in the measuring device is preferably carried out so that the largest possible and relevant part of the surface 20 a cross section of the extruded profile 2 from the at least one light section sensor 1 metrologically recorded.

A further preferred embodiment of the measuring device comprises a turntable or turntable on which the test object can be positioned so that it can be brought into certain rotational positions for measurement.

For the sake of clarity, it should be noted that a respective laser light beam is understood by the respective light beam.

For the sake of clarity, it is stated that the term extruded profile 2 For all types of test specimens to be measured, for example, have along the length of a variable profile.

For the sake of clarity, it is stated that the resulting image data is understood to mean the resulting image data which is largely cleaned up by Speckle.

Further possible embodiments are described in the following claims.

The reference numerals mentioned in the claims are for better understanding, but do not limit the claims to the shapes shown in the figures.

LIST OF REFERENCE NUMBERS

1

Light section sensor

2

extruded profile

11

first laser beam

12

second laser beam

13

reflected light

20

Surface of the extruded profile

50

Base plate (of the light section sensor)

51

Piezo actuator

52

Laser light source

52b

another laser light source

53

camera sensor

54

optical delay element

55

optics

X, Y, Z

coordinate direction

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102011000 [0002]

Claims (16)

Method for measuring a surface ( 20 ) of a test object with a light section sensor ( 1 ), comprising the following steps: a) generating a light section plane through a first laser light beam ( 11 ) for projection onto the surface ( 20 ) of the test piece; b) metrological detection of the light section on the surface ( 20 ) with a camera sensor ( 53 ) of the light section sensor ( 1 ) and thereby generating first image data; characterized by c) producing the same light section plane through one of the first laser light beam ( 11 ) different second laser beam ( 12 ) for projection onto the surface ( 20 ); d) detecting the light emitted by the second laser beam ( 12 ) produced on the surface ( 20 ) by the camera sensor ( 53 while generating second image data; and e) determining, by an algorithm, resulting image data from the first and second image data by an arithmetic unit, the algorithm being configured to map the measured light intercept superimposed with speckles in the first and second image data into the resulting image data with less depict strongly pronounced speckles. Method according to claim 1, wherein the first laser light beam ( 11 ) having a first wavelength and the second laser light beam ( 12 ) are generated at a different, second wavelength. Method according to claim 1 or 2, wherein the first laser light beam ( 11 ) with a first polarization plane and the second laser light beam ( 12 ) are generated with another, second polarization plane. Method according to one of the preceding claims, wherein the first laser light beam ( 11 ) with a first light propagation direction and the second laser light beam ( 12 ) are generated with another, second light propagation direction. Method according to one of the preceding claims, wherein in step e) the algorithm compares or evaluates the first and second image data pixel by pixel by determining for each pixel or pixel region maximum values or mean values between the first and second image data and storing them as the resulting image data so as to reduce interference minima of speckles. Method according to one of the preceding claims, wherein in step e) the algorithm interpolates a partially interrupted by the speckles light intersection line by adjacent points. Method according to one of the preceding claims, wherein prior to step e) additional image data are additionally detected, wherein the further image data after a controlled nano-displacement of a laser light source ( 52 ) and / or optics ( 55 ) and / or the camera sensor ( 53 ) are detected in the light section sensor for generating or detecting a laser light of the respective laser light beam; wherein the nano-displacement is generated either in the longitudinal direction or in the transverse direction or in the longitudinal and transverse direction of the respectively emitted light beam; wherein the nano-displacement by at least one actuator ( 51 ) and is in a range of 0.5-1 or 1-5 or 1-20 wavelengths of the laser light; and wherein in step e) the further image data for the determination of the resulting image data are equally processed by the algorithm. Method according to one of the preceding claims, wherein in the beam path of the light section sensor for generating the first and second light beam bundles ( 12 ) a Hadamard diffuser is arranged, through which the first light beam ( 11 ) is emitted with a first configuration controlled by the arithmetic unit, in that different light components with different phases and / or polarizations are generated by the first configuration, and then the second light beam bundle ( 12 ) is sent out with a controlled, other, second configuration. Method according to claim 8, wherein the algorithm evaluates a speckles pattern on the basis of the first image data and the arithmetic unit determines and controls the second configuration of the Hadamard diffuser as a function of this evaluation. Light section sensor ( 1 ) for generating a laser light-section plane and for measuring a light section that passes through the laser light-section plane on a surface ( 20 ) of a device under test, comprising: a light-beam generating means for generating and transmitting the laser-light-section plane as a first laser light beam ( 11 ); a camera sensor ( 53 ) for detecting the surface ( 20 ) reflected light section, wherein the camera sensor ( 53 ) is arranged at a certain distance from the light-beam generating means and at a certain angle to the emitted laser light-section plane in order to be able to geometrically measure the reflected light section according to the triangulation measurement principle, wherein the camera sensor ( 53 ) generates corresponding image data; characterized in that the light-cut generating means is formed, the laser light-section plane through a first and / or from a first laser light beam bundle ( 11 ) differing second laser light beam ( 12 ) to create; and in that a computing unit is present and configured to drive the light-ray generating means to generate the first laser light beam ( 11 ) and thereby generate first image data from the camera sensor ( 53 ) to read in and save; To drive the light-beam generating means to the second laser light beam ( 12 ) and thereby generate second image data from the camera sensor ( 53 ) to read in and save; and process the first and second image data into resulting image data by an algorithm to produce reduced or compensated speckles in the resulting image data as compared to the first image data. Light section sensor ( 1 ) according to claim 10, wherein the at least one light section sensor ( 1 ) and the computing unit are formed, the first laser light beam ( 11 ) having a first wavelength and the second laser light beam ( 12 ) to generate and detect at a different, second wavelength. Light section sensor ( 1 ) according to claim 10 or 11, wherein the at least one light section sensor ( 1 ) and the computing unit are formed, the first laser light beam ( 11 ) with a first polarization plane and the second laser light beam ( 12 ) with another, second polarization plane. Light section sensor ( 1 ) according to one of the preceding claims 10-12, wherein the at least one light section sensor ( 1 ) and the computing unit are formed, the first laser light beam ( 11 ) with a first light propagation direction and the second laser light beam ( 12 ) with another, second light propagation direction. Light section sensor ( 1 ) according to any one of the preceding claims 10-13, wherein the algorithm for determining the resulting image data is adapted to compare or evaluate the first and second image data pixel by pixel, for each pixel or pixel region maximum values or mean values between the first and the second image data are determined and stored as the resulting image data to reduce interference minima of the speckles in the resulting image data, wherein either arithmetic, quadratic or median value averages are formed in the case of averaging. Light section sensor ( 1 ) according to one of the preceding claims 10-14, wherein in the light section sensor ( 1 ) at least one actuator ( 51 ) is arranged so as to pass through the actuator ( 51 ) a laser light source ( 52 ) and / or a camera sensor ( 53 ) by a nano-shift controlled by the computing unit to shift or rotate and thereby generate further image data, and wherein the arithmetic unit and the algorithm are adapted to process the further image data according to and to determine the resulting image data, wherein the actuator ( 51 ) is designed and arranged to generate the nano-shift in a range of 0.5 - 2 or 1-5 or 1-20 wavelengths of the laser light, and the nano-displacement or twist either in the longitudinal direction or in the transverse direction or in the longitudinal and transverse directions to produce the respective emitted light beam. Light section sensor ( 1 ) according to one of the preceding claims 10-15, wherein the light section sensor ( 1 ) is either designed so that in the beam path between a laser light source ( 52 ) for generating the laser light and the emitted, respective light beam or between the reflected, incident light and a camera sensor ( 53 ) an optic ( 55 ) arranged to controllably change the phase, the polarization or a rotation of the light propagation direction by the arithmetic unit; or that in the beam path between the laser light source ( 52 ) and the emitted, light beam bundle a Hadamard diffuser arranged and controlled by the arithmetic unit accordingly.

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