DE102013009592B4 - Fluid flow control device - Google Patents

Abstract

Fluid flow control device, having at least two connection openings (14) enabling a fluid passage and having at least one control group (2) comprising at least three control units (3) each having a working chamber (8) delimited by an elastically deformable wall (6) and one for Causing a working movement (5) of the deformable wall (6) which serves to change the volume of the working chamber (8) and which are fluidically connected in series with their working chambers (9), at least two control units (3) as a connection control units (3a) are formed with an opening into the associated working chamber (8) connection opening (14), between which at least one as a passage control unit (3b) without connection opening (14) formed control unit (3) such that by selectively activating and deactivating the elastomeric actuators (4) a fluid transport through juxtaposed working chambers (8) through between at least two connection openings (14) hervorufbar, characterized in that a plurality of elastomer actuators (4) of the control group (2) in at least one rubber-elastic actuator mat (25) combined and made of several common and stacked Elastomer material layers (18) are constructed.

Description

The invention relates to a fluid flow control device having at least two connection openings enabling a fluid passage and having at least one control group comprising at least three control units, each having a working chamber delimited by an elastically deformable wall and a working movement of the deformable wall effecting a volume change of the working chamber serving electrically and / or magnetically activatable elastomer actuator, and which are fluidically connected in series with their working chambers, wherein at least two control units are designed as connection control units with an opening into the associated working chamber port opening, between which at least one as a passage control unit Arranged without connecting opening control unit is arranged such that by selective activation and deactivation of the elastomer actuators fluid transport by juxtaposed A working chambers between at least two connection openings can be evoked.

One from the US 2004/0 234 401 A1 known fluid flow control device of this type is used as a peristaltic pump or as a mixer and is constructed of a plurality of juxtaposed electroactive polymer actuators. Described are both linear multiple arrangements of such polymer actuators and a matrix-like structure. The polymer actuators are designed as singular actuators and inserted into a housing. Several actuators can be combined in groups by being inserted like a cartridge into individual recesses of an enveloping structure.

From the US Pat. No. 6,450,773 B1 For example, a peristaltic vacuum pump is known that has a plurality of working chambers bounded on an upper side by a one-piece membrane element. This membrane element can be deformed by means of individual piezoactuators in order to produce a pumping effect. The piezoactuators are individually mounted on the membrane element.

The US 5 593 290 A describes a peristaltic pump that has a membrane that has individual areas that are acted upon by their back pressure with compressed air. The control of the compressed air supply takes place by means of remote valves. A similarly constructed and working micropump is also in the US Pat. No. 5,499,909 described, with solenoid valves are provided to pressurize controlled by a diaphragm diaphragm chambers to generate a pumping effect with compressed air.

One from the EP 1 236 900 A1 known fluid flow control device is designed as a pump and includes a control unit which has a piezoelectric actuator and can elastically deform a membrane formed as a movable wall to change the volume of a working chamber. In this working chamber open two connection openings, one of which is equipped with a check valve, so that by performing a caused by the piezo actuator working movement of the deformable wall, a fluid can be sucked through one of the connection openings through and ejected through the other connection opening therethrough.

From the WO 2006/073451 A2 a piezoelectric fluid pump is known in which an elastically deformable membrane is driven by means of a piezo stack to perform a pumping function.

The DE 19720482 A1 describes a micromembrane pump having two interconnected working chambers, each connected to a port. The two working chambers are connected to a pumping chamber bounded by a pumping diaphragm deformable by a piezoactuator to cause fluid flow between the two ports.

In the article "Dielectric Elastomer Actuators - Potential Use in Automation Technology", M. Giousouf, Festo AG & Co. KG, from "ACTUATOR 2012", pages 358 to 361 , the construction of dielectric elastomer actuators is described, which are suitable for use in automation technology and based on pneumatic valves can be realized.

The invention has for its object to provide a simple and compact design, versatile applicable fluid flow control device.

To achieve this object, it is provided in connection with the features mentioned above that several elastomer actuators of the control group are combined in at least one rubber-elastic actuator mat and constructed from a plurality of common and stacked elastomer material layers.

The connection openings of the fluid flow control device are suitable, depending on the application, for supplying or discharging a fluid, which is intended to flow through a plurality of working chambers of the control units, between to overflow at least two connection openings. Depending on the existing number of each with a port equipped terminal control units and port-open passage control units, a fluid flow control device can be realized, which can be used for example as a pumping device, as a fluid distribution device, as a valve device or as a fluid mixing device. Within the control group, the desired fluid flow can be caused and / or influenced by selective activation and deactivation of the elastomer actuators belonging to the individual control units. The use of electrically and / or magnetically activated elastomer actuators for driving the elastically deformable walls of the control units allows compliance with very small dimensions and operation with low energy consumption.

Several and expediently all elastomer actuators are combined in at least one rubber-elastic actuator mat, which in combination with electroactive polymer actuators composed of a plurality of common and stacked elastomeric material layers and conveniently between the elastomeric material layers located flexible electrodes. In this way it is very easy to integrate a plurality of individual actuators within a composite material. For example, a plurality of elastomeric material layers, in particular made of silicone, may be stacked, between which flexible electrodes are arranged, which are mutually connected to two outer electrodes in order to realize a multilayer structure. By applying a voltage to the electrodes, the electrodes are pulled towards each other so that the elastomer actuator is shortened and the associated deformable wall is deformed in the sense of increasing the volume of the associated working chamber. Such an actuator mat can be produced, in particular, by applying and solidifying liquid silicone layers in succession on a plate, for example on a printed circuit board, wherein after the application of each silicone layer an electrode layer is applied, for example by spraying a graphite layer. The electrodes can be contacted alternately within the actuator mat, in particular by means of so-called vias, ie by means of plated-through holes. Depending on the design of the fluid flow control device, the uppermost elastomeric material layer can be used as a seal or as a switching element in a valve.

Based on the inventive concept, a fluid flow control device equipped with a plurality of elastomer actuators grouped in array arrangements or also in multi-dimensional array arrangements and switching and / or pumping fluids as required can be designed / or mix. In the case of matrix-type arrangements, the direction of flow within the control group can also be influenced and varied by the selective actuation of the elastomer actuators.

Advantageous developments of the invention will become apparent from the dependent claims.

Conveniently, in each control unit, the elastically deformable wall is formed directly by the associated elastomer actuator. The elastomer material deforming upon actuation of the elastomer actuator can therefore be used directly as a limiting, movable element of the working chamber. In this way, a structurally very simple structure.

Preferably, in at least part of the control units, the deformable wall is movable into a shut-off position in which fluid passage through the associated working chamber is prevented. In this way, the relevant control unit can be used to selectively allow or prevent fluid flow through the working chamber. If the control group contains a plurality of control units constructed in this way, the flow direction within the control group can even be varied in conjunction with a multi-dimensional matrix-like arrangement of control units. This can be used to advantage especially when the fluid flow control device is used for mixing or for distributing fluids.

The shut-off position of the deformable wall can be realized, in particular, by pressing it against the stationary working boundary wall by appropriate activation of the elastomer actuator.

Preferably, the fluid flow control device has a structure such that it has a fixed boundary wall which limits the working chamber of all the control units of the control group together with one of the elastically deformable walls. These elastically deformable walls of the various control units face the fixed boundary wall and can be deformed relative to the fixed boundary wall to vary the volume of the associated working chamber by activating or deactivating the associated elastomeric actuator. Conveniently, all existing connection openings of the fluid flow control device are formed in the stationary boundary wall.

The deformable wall of at least one control unit is expediently opposite a concave region of the stationary boundary wall. This applies in particular to all control units. The concavity defines a deformation clearance that allows the deformable wall of a deactivated elastomeric actuator to deflect in the direction of the working motion as adjacent elastomeric actuators are actuated and undergo a cross-sectional change as they are actuated.

A preferred construction of the fluid flow control device provides that the elastomer actuators are designed as electroactive polymer actuators. This is mainly thought of so-called dielectric elastomer actuators, which have elastomeric portions which are flanked by electrodes, so that upon application of an electrical voltage electrostatic forces of attraction between the electrodes are formed, by which the electrodes are moved towards each other and thus the elastomeric material is deformed. In the case of the elastomeric material, in particular silicone material is used, although in principle any material that deforms elastically elastically is very well suited.

Alternatively, the electroactive polymer actuators can also be realized in the form of ionic polymer actuators, in which directly the actuator material itself undergoes a change in shape due to electrochemical reaction. Overall, electroactive polymer actuators have the advantage that they can reach very high strains and are hardly limited in their deformation behavior.

As an alternative to electroactive polymers, it is also possible to use elastomers with magnetic particles for the realization of the elastomer actuators, in which case the elastomers can be compressed or stretched by the application of external magnetic fields. Due to their possible flat construction, however, the electroactive polymers are particularly suitable for the purposes of the invention.

At least one actuator mat of the fluid flow control device is expediently designed in the form of a plate or strip. It can be used with a planar, flat extension, for example, to define only a single row of several successive elastomer actuators or even a multi-dimensional structure with matrix-like distribution of elastomer actuators in a plane.

It is also possible to combine the elastomer actuators in several control groups, which are arranged in mutually parallel planes and which are fluidly interconnected. This results in a three-dimensional actuator matrix.

There is also the advantageous possibility to roll up at least one actuator mat to a winding body and suitably surrounded by a sleeve-like housing. With such a construction, the winding body centrally encloses a through-channel, which is composed of working chambers which are lined up in the longitudinal direction of the winding body and which can be influenced in terms of their volume by diametrical deformation of the elastomer material. There is the advantageous possibility of designing the elastomeric material layers in such a way that, when the actuator mat is rolled up, they form tubular extensions which define the connection openings.

A rolled up to a winding body actuator mat consists in particular of several superimposed and preferably cohesively interconnected mat bodies. Each such mat body may be composed of an elastomeric material layer and an electrode structure applied thereto on one side. The electrode structure is expediently a strip structure in the form of electrode strips extending parallel to one another in the winding direction or retraction direction. If necessary, the rolled elastomer structure can be glued to a so-called flex conductor, by means of which the electrodes can be contacted and led out of the housing accordingly.

Alternatively, the actuator mat can also be wound onto an existing elastomer hose which, in this case, defines with its axially successive hose wall sections the elastically deformable wall of the individual control units.

It is also possible to wind a plurality of originally strip-shaped actuator mats into individual actuator rollers, each defining an elastomeric actuator and being stackable in an axial direction to realize the desired array of elastomeric actuators. This juxtaposition is expediently done by insertion into a sleeve-shaped housing. Individual actuator rollers can be stacked side by side or by flexible, perforated cutting discs, which consist for example of a resilient material, strung together. The cutting discs compensate for the occurring during actuation of the elastomer actuators transverse strain of the elastomeric material.

Upon activation of a stacked elastomeric actuator, the actuator volume will increase due to movement in the direction of movement Compression also displaced to the side. Therefore, it is useful, even to achieve a larger actuator stroke, to allow the adjacent, currently not activated elastomer actuators to dodge in the direction of the working movement. This can be done in particular by a suitable structuring of the already mentioned stationary boundary wall, in particular by the formation of concave areas. Another advantageous possibility for compensating for the transverse strains of the elastomeric material is to provide expansion grooves on one side between the respectively adjacent elastomeric actuators in an actuator mat defining the elastomeric actuators. Such expansion grooves may for example be introduced in the manner of slots and form a free space into which the elastomeric material of the currently activated elastomer actuator can escape. The expansion grooves are expediently provided only on one side, so that there is a continuous closed elastomer structure in the region of the working chambers.

In a possible embodiment of the fluid flow control device several and expediently all the control units of the control group are arranged in a linear row successively. In this way, a fluid can be transported, for example, between two connection control units which terminate the end of the actuator series, for example by means of a pumping function or by means of a valve function. In a pumping function, the elastomeric actuators can be sequentially activated and deactivated alternately so that the juxtaposed work spaces define a traveling gap that actively transports the fluid. A pumping device realized in this way can be called a peristaltic pump.

To realize a valve function, all elastomer actuators can be activated simultaneously to cause a continuous connection through the existing work spaces between at least two connection openings, so that a fluid can flow through automatically due to a pending pressure difference. Depending on how many of the existing control units are designed as connection control units, valve functions of different functionality can be realized, for example in the sense of a 2/2-way valve or a 3/2-way valve.

Particularly advantageous is a structure is considered in which several and suitably all the control units of the control group are arranged in a multi-dimensional multidimensional side by side in a matrix-like distribution. In this case, in particular a two-dimensional matrix structure should be emphasized, in which the existing control units are arranged side by side transversely to the direction of the working movements of the elastomer actuators. It is possible to operate the existing elastomer actuators individually or in groups, depending on the purpose for which the fluid flow control device is used. Such a construction is particularly suitable for mixing or for distributing fluids, in particular liquids. The connection options can be provided as needed, depending on where you place a designed as a connection control unit control unit.

By way of example, one or more connection control units may be arranged in a central area, around which several pass-through control units extend, which in turn in turn follow a plurality of connection control units. In this way, a multi-dimensional flow distribution can be realized, for example for pure pumping purposes or else for mixing or distribution of one or more fluids.

The elastomer actuators are in particular designed such that, viewed in their axial direction, ie in the direction of the working movement, they have a rectangular and in particular square outer contour. Such contoured elastomer actuators can be arranged in a particularly tightly packed manner to a checkerboard distribution. Another, advantageous contouring provides a hexagonal outer contour of the elastomer actuators, which allows the advantageous composition to a honeycomb structure, so that even more diverse flow directions can be realized within the control group than in a distribution in the manner of a checkerboard pattern. In addition, the number of elastomer actuators per unit area can be further increased here.

A particularly advantageous fluid flow control device is designed as a peristaltic pumping device, in which by alternately activating and deactivating adjacent elastomer actuators a gradual fluid transport between the working chambers of adjacent control units can be caused.

Further advantageous embodiments of the fluid flow control device are a fluid mixing device or a fluid distribution device. In a construction as a fluid mixing device, fluids fed to a plurality of port control units can be mixed with each other by selectively operating the individual passage control units, and then passed to another port control unit, where the fluid mixture is discharged.

When used as a fluid distribution device, a fluid fed to only one or more port controllers may be split among a larger number of other port controllers to, for example, simultaneously supply different consumers with a pressurized fluid.

• 1 eine bevorzugte erste Bauform der Fluidströmungs-Steuervorrichtung in einem Längsschnitt, wobei sämtliche Steuereinheiten in einer linearen Reihe aufeinanderfolgend angeordnet sind,
• 2 eine Draufsicht der Anordnung aus 1 im Schnitt,
• 3 eine weitere Ausführungsform der Fluidströmungs-Steuervorrichtung, die sich von derjenigen der 1 und 2 durch eine besondere Strukturierung einer ortsfesten Begrenzungsfläche der diversen Arbeitsräume auszeichnet,
• 4 eine weitere alternative Ausführungsform der Fluidströmungs-Steuervorrichtung, bei der eine die Elastomer-Aktuatoren definierende Aktuatormatte mit schlitzartigen Dehnungsnuten versehen ist,
• 5 eine weitere Ausführungsform einer Fluidströmungs-Steuervorrichtung mit einer zweidimensionalen matrixartigen Verteilung mehrerer Steuereinheiten in einem Schnitt in einer Draufsicht,
• 6 eine alternative Ausführungsform der Fluidströmungs-Steuervorrichtung mit matrixartiger Verteilung der Steuereinheiten, wobei die Elastomer-Aktuatoren zu einer Wabenstruktur zusammengefasst sind,
• 7 erneut eine weitere Ausführungsform der Fluidströmungs-Steuervorrichtung, die hier bevorzugt als Fluid-Verteilvorrichtung genutzt wird,
• 8 eine weitere Ausführungsform der Fluidströmungs-Steuervorrichtung, die über eine zu einem Wickelkörper aufgerollte Aktuatormatte verfügt, dargestellt in einem Längsschnitt gemäß Schnittlinie VIII-VIII aus 9,
• 9 die Anordnung aus 8 in einem Querschnitt gemäß Schnittlinie IX-IX, und
• 10 eine weitere Ausführungsform der Fluidströmungs-Steuervorrichtung, bei der einzelne, streifenförmige Aktuatormatten jeweils zu einer Aktuator-Rolle aufgewickelt sind und mehrere Aktuator-Rollen axial aufeinanderfolgend in einem hülsenförmigen Gehäuse untergebracht sind.

The invention will be explained in more detail with reference to the accompanying drawings. In this show:

• 1 a preferred first design of the fluid flow control device in a longitudinal section, wherein all the control units are arranged in a linear row successively,
• 2 a plan view of the arrangement 1 on average,
• 3 another embodiment of the fluid flow control device, which differs from that of the 1 and 2 characterized by a special structuring of a stationary boundary surface of the various working spaces,
• 4 a further alternative embodiment of the fluid flow control device, wherein an actuator mat defining the elastomer actuators is provided with slot-like expansion grooves,
• 5 FIG. 2 shows a further embodiment of a fluid flow control device with a two-dimensional matrix-like distribution of a plurality of control units in a section in a top view, FIG.
• 6 an alternative embodiment of the fluid flow control device with matrix-like distribution of the control units, wherein the elastomeric actuators are combined to form a honeycomb structure,
• 7 again another embodiment of the fluid flow control device, which is preferably used here as a fluid distribution device,
• 8th a further embodiment of the fluid flow control device, which has an actuator mat rolled up to a winding body, shown in a longitudinal section along section line VIII-VIII 9 .
• 9 the arrangement 8th in a cross section along section line IX-IX, and
• 10 a further embodiment of the fluid flow control device, in which individual, strip-shaped Aktuatormatten are each wound into an actuator roller and a plurality of actuator rollers axially successively housed in a sleeve-shaped housing.

In the drawing are fluid flow control devices 1 illustrated different designs that are available depending on the nature of their operation in different ways.

The 1 to 4 show an embodiment as a pumping device, which can also be used as a valve device. The 5 to 7 show further possible embodiments for use as a pumping device, but which can also be used as a fluid mixing device or as a fluid distribution device. The 8th to 10 again show an embodiment for use as a pumping device or as a valve device.

All embodiments of the fluid flow control device 1 characterized by at least one as a control group 2 designated assembly or assembly, which consists of at least three and preferably more than three control units 3 composed. Every control unit 3 contains an electrically and / or magnetically activated elastomer actuator 4 and one through the elastomeric actuator 4 to a direction indicated by a double arrow, preferably linear working movement 5 drivable elastic deformable wall 6 , The elastically deformable wall 6 may be a respect to the elastomer actuator 4 be separate component, which is based on the embodiment of 10 applies where it comes from a rubber-elastic hose 7 is formed by the associated elastomeric actuators 4 can be acted upon. However, the construction realized in the other exemplary embodiments is considered particularly expedient in which the elastically deformable wall of each control unit 3 directly from the associated elastomeric actuator 4 is formed and therefore is a part of this elastomer actuator.

Every control unit 3 contains a varying volume of work in terms of volume 8th coming from the elastically deformable wall 6 is limited. The volume change can be due to the working movement 5 and thus by the deformation of the elastically deformable wall 6 be caused and results from the actuation of the respective associated elastomer actuator 4 ,

According to the in 1 to 7 Illustrated embodiments, each working chamber 8th except from the elastically deformable wall 6 also of a fixed and in particular rigid boundary wall 12 be limited. Preferably, a fixed boundary wall 12 present to the working chambers 8th all tax units 3 the control group 2 limited. The stationary boundary wall 12 is, for example, plate-shaped and / or may in the manner of a lid on the elastomer actuators 4 be set up. The stationary boundary wall 12 is placed so that it fits the deformable walls 6 the control units 3 in the direction of movement of the working movement 5 opposite.

Every deformable wall 6 can by specifying a corresponding operating state of the associated elastomer actuator 4 optionally in a fixed boundary wall 12 approximated and in particular adjacent first working position or in at least one more or less far from the fixed boundary wall 12 be lifted off second working position. In this way, different volumes of the working chamber arise 8th , wherein the chamber volume im at the stationary boundary wall 12 adjacent condition of the deformable wall 6 especially equal to zero. All embodiments have in common that the first working position is a shut-off position in which by the interaction between the deformable wall 6 and the fixed boundary wall 12 a fluid passage through the associated working chamber 8th through is prevented. In contrast, the at least one second working position is a fluid passage through the associated working chamber 8th enabling open position, wherein the possible volume flow is variable by specifying the size of the chamber volume.

In the embodiments of the 8th to 10 are the elastically deformable walls 6 ring-shaped or sleeve-shaped and in particular concentric with respect to a major axis 13 arranged. By actuating the associated elastomeric actuator 4 can the deformable wall 6 Here, diametrically deformed, so that the diameter of the enclosed by her work chamber 8th changed and in the usable as shut-off first working position is zero.

The elastically deformable wall 6 is suitably made of an elastomeric material, wherein the term elastomeric material is intended to include any material having rubbery properties. This material is particularly elastically reversible stretchable.

At least a plurality and preferably all control units 3 the control group 2 are with their working chambers 8th fluidly connected in series. If the elastically deformable walls 6 immediately adjacent to each other arranged control units 3 at the same time assume an open position, results in a continuous fluidic connection between the respective working chambers 8th , The fluid connection can be in the range of any control unit 3 be interrupted by that by appropriate actuation of the elastomeric actuator 4 the deformable wall located there 6 is moved into the shut-off position.

At least two of the control units 3 the control group 2 have one directly into the associated working chamber 8th opening, a fluid passage enabling connection opening 14 , Depending on the purpose of the fluid flow control device 1 can easily have more than two control units 3 with such a connection opening 14 be equipped, which is based on the embodiments of the 5 to 7 true. Through the respective connection opening 14 through which a fluid, whose flow through the fluid flow control device 1 should be controlled, fed or removed. For better distinction, each control unit 3 in their working chamber 8th directly a connection opening 14 opens, also as a connection control unit 3a be designated.

In at least one and preferably in several control units 3 the control group 2 there is no direct connection between the assigned working chamber 8th and a connection opening 14 in front. Any such control unit 3 is also referred to below as a transmission control unit 3b designated. You can only optionally a fluid connection between the working chambers 8th neighboring control units 3 release or shut off. In the open position, a fluid is passed therethrough to between two adjacent to the passage control unit 3b arranged further control units 3 gush.

The described structure makes it possible by selective activation and deactivation of the elastomer actuators 4 the control units 3 a fluid transport by juxtaposed working chambers 8th through between at least two connection openings 14 cause. Contains the fluid flow control device 1 more than two connection openings 14 , a fluid movement between several or all of these more than two connection openings 14 be effected.

The connection openings 14 are in the case of the presence of a fixed boundary wall 12 expediently in this stationary boundary wall 12 trained, what for the embodiments of the 1 to 7 true. In the embodiments of the 8th to 10 are the connection openings 14 of tubular connecting pieces 15 formed, which is coaxial with the working chamber 8th the connection control unit 3a connect and expediently coaxial with the main axis 13 are formed. At the Embodiment of 10 are the tubular connecting pieces 15 from the two opposite end portions of the already mentioned rubber-elastic hose 7 educated.

All embodiments have in common that they can cause fluid transport on the peristaltic principle. Thus, no pressure difference is required to the fluid flow through the interconnected control units 3 through. The fluid transport can be active by alternately activating and deactivating the elastomeric actuators 4 be caused. However, it should be noted that the fluid flow control device 1 is also suitable for the passage of fluids whose fluid pressure has a potential gradient, which is the case, for example, when in one of the connection openings 14 is introduced under pressure over pressure medium, be it liquid or gaseous.

Regardless of its mode of operation, the fluid flow control device is suitable 1 for controlling the flow of both gaseous and liquid fluids.

To be able to realize the peristaltic pumping principle, the elastically deformable walls are expediently 6 all tax units 3 together by a one-piece and preferably one-piece elastomeric wall body 16 educated. In the embodiments of the 1 to 7 has the elastomeric wall body 16 expediently a planar expansion and is in particular plate-like structured. It preferably extends parallel to the stationary boundary wall 12 and is on a wall facing him 17 the fixed boundary wall 12 arranged. When deactivated, the elastomeric wall body is 16 essentially relaxed and lies under sealing on the said wall surface 17 the fixed boundary wall 12 on. This corresponds to the deactivated state of all elastomer actuators. Will be an elastomeric actuator 4 activated, the elastomer wall body lifts 16 with the section containing the elastically deformable wall 6 of the relevant elastomer actuator 4 defined by the wall surface 17 and takes an open position. If the elastomer actuators are then alternately activated and deactivated in succession in a desired direction, a wandering gap thus results between the elastomer wall body 16 and the fixed boundary wall 12 , with which fluids can be transported.

In this way, in the embodiments of the 1 to 4 one of the two connection openings 14 as an inlet 14a and the other connection port 14 as an outlet 14b be used, with the illustrated type of coordinated operation of the elastomer actuators 4 one at the inlet 14a supplied fluid to the outlet 14b can be pumped peristaltically. The same applies mutatis mutandis to the embodiments of the 5 to 7 , where there is the possibility of several of the connection openings 14 as inlets 14a or as outlets 14b to use.

In the embodiments of the 8th to 10 is the elastically deformable walls 6 all elastomer actuators 4 forming elastomeric wall body 16 tubular and concentric with the main axis 13 arranged. In the embodiment of 10 he is from a length of rubber-elastic hose 7 educated. The peristaltic pumping function results in the embodiment of the 8th to 10 in that the tubular elastomeric wall body 16 in the area of in the axial direction of the main axis 13 successively arranged elastomer actuators 4 alternately radially compressed or expanded, so that during pumping a within the elastomeric wall body 16 in the axial direction of the main axis 13 migratory cavity formed from the alternately increasing their cross section and shrinking working chambers 8th of the juxtaposed control units 3 results.

Conveniently, the elastomeric actuators 4 all embodiments designed as electroactive polymer actuators. Although ion polymer actuators would also be conceivable in this case, the design realized in the exemplary embodiments is recommended as dielectric elastomer actuators because of the simpler structure and the easier electrical controllability 4 ,

Each of these elastomer actuators 4 contains several in one with the direction of the desired working movement 5 coincident axial direction stacked elastomeric material layers 18 , between each of which a surface-shaped and preferably flexible electrode is arranged, and wherein also the respective outermost elastomeric material layer 18 from such an electrode 22 flanked. In 1 . 3 . 4 and 8th to 10 are the electrodes 22 indicated as somewhat thicker black lines, in the other figures as area areas provided with an octagonal structure. The same elastomer actuator 4 belonging electrodes 22 are mutually connected to two external electrodes each 23 connected, so that a multilayer structure results comparable to a piezo stack arrangement. When an electrical voltage is applied, electrostatic forces of attraction arise between the individual electrodes arranged one above the other in the stacking direction so that they approach each other and thus move along the elastomer material located therebetween and in particular in the direction of the working movement 5 squeeze. This shortens the elastomer actuator 4 , If the electrical voltage is removed again and the elastomer actuator 4 deactivated again, the elastomer actuator returns 4 again due to the rubber elasticity of the elastomeric material layers 18 back to the starting position.

The outer electrodes 23 are in the embodiments of 1 to 7 on a carrier board 24 arranged, which is provided with conductor tracks and which is for example a printed circuit board. The electrodes 22 the elastomer actuators 4 are with the tracks of the carrier board 24 contacted and in this way with the example of the carrier board 24 arranged outer electrodes 23 electrically connected. At the outer electrodes 23 a drive voltage can be applied to the connected to the respective outer electrodes elastomer actuators 4 to press.

You can choose the circuit layout so that each elastomer actuator 4 is individually actuated. On the other hand, it is considered advantageous, the elastomeric actuators 4 electrically interconnect in groups, so that by applying a drive voltage in each case one or more groups of elastomer actuators 4 can be activated simultaneously.

In the embodiments of the 1 to 4 By way of example, a contacting pattern is selected which makes it possible to use three groups of elastomer actuators 4 to operate synchronized with each other, wherein the elastomer actuators located within the same group 4 be operated simultaneously. For this purpose, a total of four external electrodes 23 of which three are used for the selective supply of one drive voltage and the fourth is used as a ground terminal.

In the embodiments of the 8th to 10 are the outer electrodes 23 formed by the end portions of so-called flex conductors, which are accessible from the outside and with the electrodes 22 the various elastomer actuators 4 are contacted.

Conveniently, the elastomeric actuators 4 all tax units 3 the control group 2 in a composed of elastomeric material and electrode material composite body summarized. For example, this applies to the embodiments of 1 to 9 , This composite body is hereinafter referred to as actuator mat 25 designated. Since it is mainly composed of elastomeric material, it has rubber-elastic properties.

The actuator mat 25 contains an elastomeric body 26 containing the elastomeric material layers 18 all elastomer actuators 4 forms and expediently also the elastomeric wall body 16 Are defined. In the elastomer body 26 are the stacked electrodes in the desired distribution pattern 22 embedded in the desired stacking distance. It is possible to produce such an actuator mat 25 for example, by alternating elastomeric material layers 18 and layers of electrodes 22 be applied to each other, wherein the elastomeric material layers are preferably applied in the liquid state and then solidified. The electrode layers consist of individual, planar structured applied electrodes, which can be realized, for example, by spraying graphite material or carbon nanotube material. Within the elastomer material, which is in particular a silicone material, the mutual contacting of the various electrodes of the individual elastomer actuators 4 be accomplished by means of so-called vias or vias. The topmost elastomeric material layer 18 ultimately forms the elastomeric wall body 16 that the elastically deformable walls 6 the individual elastomer actuators 4 Are defined.

In the embodiment of 1 to 7 becomes the actuator mat 25 conveniently directly on the carrier board 24 constructed and preferably electrically contacted at the same time.

The 1 to 4 show fluid flow control devices 1 in which the actuator mat 25 is formed strip-shaped. Such a design is particularly suitable for cases in which multiple and expediently all the control units 3 the control group 2 are arranged in succession in a linear array. As an example, the strip-shaped actuator mat defines 25 of the embodiment of 1 to 4 a total of six linearly lined elastomer actuators 4 , out of which a total of six also linearly aligned control units 3 result, of which the two outer expediently as connection control units 3a and the intervening pass-through control units 3b are executed.

The actuator mat 25 can also have a larger areal extent and can preferably be plate-shaped, as exemplified by the embodiments of the 5 to 7 is illustrated. Here are several and conveniently all control units 3 the control group 2 in a matrix-like distribution two-dimensionally arranged side by side. The matrix plane is perpendicular to the direction of the working movements 5 the elastically deformable walls 6 , in the 5 to 7 oriented perpendicular to the plane of the drawing.

The matrix arrangement shown makes it possible to transport or distribute fluid flows in one plane in different directions. As a result, there is the advantageous possibility of fluids to different outlets 14b split up or different, at several inlets 14a mix in fluids fed in and at a common outlet 14b to spend again. In the embodiments of the 5 to 7 each is a larger number of control units 3 as connection control units 3a executed, whose connection openings 14 depending on the application in any distribution and number as inlets 14a and / or outlets 14b for feeding or dispensing a fluid can be used.

All embodiments have in common that the elastomer actuators 4 , in their axial direction - that is, in the direction of the working movement 5 - Considered one by the contouring of the electrodes 22 predetermined outer contour 27 with several straight contour line sections 28 to have. These are the elastomer actuators 4 strung together so one-dimensionally or two-dimensionally, that adjacent elastomer actuators 4 with parallel contour line sections 28 adjoin one another. The mentioned outer contours 27 ultimately define the edge of the individual working chambers 8th , wherein the mutually adjacent, parallel contour line sections 28 define those areas in which a fluid transfer between adjacent working chambers 8th takes place when the relevant elastomer actuators 4 be operated. In different figures of the drawing are dotted flow arrows 32 suggested possible flow paths along which a fluid through the selective activation and deactivation of the elastomeric actuators 4 is transportable.

The 5 and 7 illustrate an advantageous embodiment in which the elastomeric actuators 4 or their electrodes 22 have a rectangular outer contour. The arrangement is made so that again contour line sections 28 adjacent elastomer actuators 4 are arranged parallel to each other. In this way, fluid flows in a plane in mutually perpendicular directions can be realized. It is based on 7 illustrates a possibility, a single connection opening 14 as a central inlet 14a in which a fluid is fed internally through multiple flow paths 32 to several each as outlets 14b functioning connection openings 14 is directed. Such a fluid flow control device 1 can be used as Fluidverteilvorrichtung. However, it is also possible to use with the reverse fluid transport direction, in which case a plurality of connection openings 14 as inlets 14a be used, where different fluids are fed, which then by appropriate actuation of the elastomeric actuators 4 in the various working chambers 8th be merged and mixed, then at a central outlet 14b exit as mixed fluid again.

The 7 illustrates that the outer contours 27 the individual elastomer actuators 4 quite different proportions can have each other. The 5 however, illustrates an advantageous design, in which the outer contours 27 are each square and equal in size, the elastomeric actuators 4 are arranged in a checkerboard-like distribution.

The 5 shows, moreover, an advantageous distribution of the various control units 3 , wherein in a middle area several - here four pieces - connection control units 3a are concentrated around it a plurality of passage control units 3b are grouped on the finally at opposite edge regions each again several connection control units 3a consequences. Here fluids can be supplied centrally and to the external connection openings 14 be transported further. It is advisable, groups of at least three elastomeric actuators 4 for a peristaltic pumping operation.

The 6 shows an embodiment with which elastomeric actuators 4 Grouped tightly packed in a plane, with a fluid transport not only at right angles, but also obliquely possible. This is achieved by a hexagonal outer contour of the elastomer actuators 4 or their electrodes 22 , in conjunction with a honeycomb-type arrangement, so again adjacent elastomer actuators 4 with parallel contour line sections 28 adjoin one another. Here, among other things, the possibility exists if an elastomer actuator 4 of six other elastomer actuators 4 is surrounded, a fluid line in alternatively six to perform 120 ° apart from each other flow directions.

It should also be mentioned at this point that it is perfectly possible to operate within one and the same fluid flow control device 1 to realize several mutually parallel actuator levels, in each of which several control units 3 and expediently each have their own control group 2 are arranged. With help suitable Placed fluidic cross-connection channels here is the advantageous possibility to convey the fluid not only in one, but in several levels. In this case, the control units 3 in particular be arranged in a three-dimensional matrix-like distribution.

When activating an elastomeric actuator 4 As a result of the axial compression, the volume of its elastomeric material is also displaced to the side. Also, to achieve more Aktuatorhub, it is therefore advantageous if it is currently not activated elastomer actuators 4 is possible, corresponding to that of the adjacent elastomer actuators 4 to avoid the transverse load received in the axial direction. This can be done according to 3 Suitably ensure that one, several or each elastically deformable wall 6 a in the opposite fixed boundary wall 12 trained concave area 33 opposite. For this, the wall surface 17 for example, be wavy contoured or have a plurality of wells whose distribution that of the elastomer actuators 4 equivalent.

Another way to prevent mutual interference of the transversely deforming elastomer actuators 4 consists according to embodiment of the 4 in it, in the actuator mat 25 from the elastomeric wall body 16 opposite side slit-like expansion grooves 34 between adjacent elastomer actuators 4 train. They create space for the elastomer material, that of an elastomeric actuator 4 is displaced to the side during its activation.

In the embodiment of 8th and 9 is an actuator mat 25 to a winding body 35 with the main axis 13 rolled up as a center and within a sleeve-like housing peripherally enclosing 36 fixed. This results in a juxtaposition of a plurality of elastomer actuators 4 , their elastomeric material layers 18 and electrodes 22 have a spiral structure, as in 9 is illustrated. Here there is the advantage that the individual electrodes 22 of lengths of contiguous electrode strips 22a are formed, which spiral around one with the main axis 13 extending coincident center around.

Starting point for the production of a wound or rolled actuator mat 25 are expediently a plurality of rubber-elastic mat body, consisting of an elastomeric material layer 18 and a one-sided, a stripe pattern having electrode layer and put together prior to winding or rolling so that in each case an electrode layer between two elastomeric material layers 18 to come to rest. In this way results after the manufacture of the bobbin 35 a radial alternating layering of electrodes 22 , which must be contacted only once. Preferably, the winding body is set 35 from only two superimposed and coiled or rolled mat bodies of the type described together. Before being wound up, the mat bodies can also be materially bonded to form a coherent actuator mat 25 get connected.

The elastomeric material layers 18 can be designed in this design so that they are in the rolled state directly the tubular connecting pieces 15 form. Furthermore, the rolled elastomeric material structure with the already mentioned flex conductor 37 Glued to the electrodes 22 to contact and from the sleeve-like housing 36 lead out.

In the embodiment of 8th and 9 is that the working chambers 8th limiting elastomer wall body 16 directly from one of the elastomeric material layers 18 educated. Alternatively, there is also the possibility of the winding body 35 according to 10 on a separate rubber-elastic hose 7 then wind up the elastomeric wall body 16 forms.

As in 10 is illustrated, it is also possible to divide the winding body in its longitudinal direction, so that individual roll-shaped winding body units 35a present, either directly abut each other axially or by flexible, perforated cutting discs 38 be held with a certain distance from each other. The cutting discs 38 are compliant and are made of foam, for example, so that they allow sideways movement of the elastomeric actuators 4 when they are activated.

The fluid flow control device 1 can also be used in the manner of a valve and in particular allows the realization of a multi-way valve. Both switching valves and proportional valves can be generated. As a result, the deflection of the elastomer actuators 4 can be variably specified voltage-dependent, the volumes of the working chambers can be 8th specify variable and thereby specify the flow rates infinitely variable in the case of a valve function. Due to the various control options can be with the help of the fluid flow control device 1 if required, realize a freely configurable valve arrangement.

Apart from the embodiment of the 10 is common to all embodiments in common that independently operable elastomer actuators 4 in a common, unified actuator mat 25 are summarized. This facilitates manufacturing and handling in assembling the fluid flow control device 1 ,

Claims (19)

Fluid flow control device, having at least two connection openings (14) enabling a fluid passage and having at least one control group (2) comprising at least three control units (3) each having a working chamber (8) delimited by an elastically deformable wall (6) and one for Causing a working movement (5) of the deformable wall (6) which serves to change the volume of the working chamber (8) and which are fluidically connected in series with their working chambers (9), at least two control units (3) as a connection control units (3a) are formed with an opening into the associated working chamber (8) connection opening (14), between which at least one as a passage control unit (3b) without connection opening (14) formed control unit (3) such that by selectively activating and deactivating the elastomeric actuators (4) a fluid transport through juxtaposed working chambers (8) through between at least two connection openings (14) hervorufbar, characterized in that a plurality of elastomer actuators (4) of the control group (2) in at least one rubber-elastic actuator mat (25) combined and made of several common and stacked Elastomer material layers (18) are constructed. Fluid flow control device according to Claim 1 , characterized in that all elastomer actuators (4) of the control group (2) are combined in a rubber-elastic actuator mat (25). Fluid flow control device according to Claim 1 or 2 , characterized in that the rubber-elastic actuator mat (25) has between the elastomeric material layers (18) arranged flexible electrodes (22). Fluid flow control device according to one of Claims 1 to 3 , characterized in that the elastically deformable wall (6) of each control unit (3) is formed directly from the associated elastomeric actuator (4). Fluid flow control device according to one of Claims 1 to 4 characterized in that at least a part of the control units (3) the elastically deformable wall (6) is movable into a shut-off position in which a fluid passage through the associated working chamber (8) is prevented, in particular by the elastically deformable wall (6 ) to a working chamber (8) delimiting stationary boundary wall (12) of the fluid flow control device (1) can be pressed. Fluid flow control device according to one of Claims 1 to 5 characterized in that it comprises a fixed boundary wall (12) delimiting the working chambers (8) of all the control units (3) of the control group (2) and comprising the elastically deformable walls (6) of all control units (3) of the control group (2) opposite, wherein expediently the connection openings (14) in the stationary boundary wall (12) are formed. Fluid flow control device according to Claim 5 or 6 , characterized in that the elastically deformable wall (6) of at least one control unit (3) and expediently each control unit (3) opposite a concave area (33) of the stationary boundary wall (12). Fluid flow control device according to one of Claims 1 to 7 , characterized in that the elastomeric actuators (4) are designed as electroactive polymer actuators, in particular as dielectric elastomer actuators. Fluid flow control device according to one of Claims 1 to 8th , characterized in that at least one actuator mat (25) is plate-shaped or strip-shaped. Fluid flow control device according to one of Claims 1 to 8th , characterized in that at least one actuator mat (25) rolled up to a winding body (35) and suitably surrounded by a sleeve-like housing (36), wherein the actuator mat (25) consists in particular of several superimposed mat bodies. Fluid flow control device according to one of Claims 1 to 10 , characterized in that the actuator mat (25), expediently on one side, between adjacent elastomer actuators (4) with expansion grooves (34) is provided, the transverse expansions of the elastomer actuators (4) allow. Fluid flow control device according to one of Claims 1 to 11 , by in that several and expediently all the control units (3) of the control group (2) are arranged in succession in a linear row. Fluid flow control device according to one of Claims 1 to 11 , characterized in that several and expediently all the control units (3) of the at least one control group (2) are arranged in a matrix-like multi-dimensional distribution. Fluid flow control device according to one of Claims 1 to 11 , characterized in that several and expediently all the control units (3) of the control group (2) are arranged side by side in a two-dimensional matrix-like distribution transversely to the direction of the working movements (5). Fluid flow control device according to one of Claims 1 to 14 , characterized in that the elastomer actuators (4), viewed in its axial direction, have an outer contour (27) with straight contour line sections (28) and are lined up in such a way that adjacent elastomer actuators (4) are provided with parallel contour line sections (28 ) adjoin one another, wherein by coordinated activation and deactivation of the elastomer actuators (4) a fluid transfer between adjacent working chambers (8) in the region of contiguous contour line sections (28) can be caused. Fluid flow control device according to one of Claims 1 to 15 , characterized in that the elastomer actuators (4), viewed in its axial direction, have a rectangular and in particular square outer contour, wherein they are expediently arranged in a checkerboard distribution, so that adjacent elastomer actuators (4) with mutually parallel contour line sections (28 ) adjoin one another. Fluid flow control device according to one of Claims 1 to 15 , characterized in that the elastomer actuators (4), viewed in its axial direction, have a hexagonal outer contour and are strung together in the manner of a honeycomb structure, so that adjacent elastomer actuators (4) with mutually parallel contour line sections (28) adjacent to each other. Fluid flow control device according to one of Claims 1 to 17 , characterized in that it is designed as a peristaltic pumping device in which by alternately activating and deactivating adjacent elastomer actuators (4) a fluid transport between the working chambers (8) of adjacent control units (3) can be caused. Fluid flow control device according to one of Claims 1 to 18 , characterized in that it is designed as a pumping device or as a fluid mixing device or as a fluid distribution device or as a valve device.

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