DE102012201029A1 - Arrangement for securing the position of a component within a housing - Google Patents

Abstract

The invention relates to an arrangement for securing the position of a component within a housing (4), with a in the housing (4) provided chamber (11) in which a magnetorheological or electrorheological fluid (12) and which at least one supply or Removal channel (13, 14) for supplying or discharging the liquid (12) in the chamber (11) or from the chamber (11), and one for generating a magnetic or electric field in the region of the chamber (11) suitable device wherein the component (1) in dependence on the magnetic or electric field either by a within the chamber (11) via the supply and discharge channel (13, 14) due to the liquid (12) applied hydraulic pressure along a feed direction within of the housing (4) is displaceable or fixable in a given position along this feed direction.

Description

The invention relates to an arrangement for securing the position of a component within a housing.

The invention is fundamentally applicable for securing the position of any optical or mechanical components in a given (feed) position within a housing, for example in zoom lenses, zoom axicon systems or focusing systems for focusing optical or thermal radiation. Furthermore, the invention can be used both in microlithographic and in any other applications.

In many technical applications, a precise position assurance of one or more components within a housing is required during operation and / or transport. Here, in practice, demanding challenges arise, in particular when e.g. due to the existing (for example, vacuum) atmosphere, conventional clamping solutions are eliminated and / or if, due to the special precision requirements, even minimal mispositioning and a concomitant impairment of the performance characteristics of the respective system are to be avoided.

By way of example only (and without the invention being limited thereto), systems for use in microlithography are to be mentioned here, these being optical systems (eg zoom lenses or zoom axicon systems) or else focusing systems, for example for focusing thermal radiation in the thermal actuation of optical components, in-situ measurement systems, etc. can act.

Another problem which arises in practice, especially in the case of the above-mentioned focusing or objective systems, is that e.g. For the purpose of adjustment made displacement of a component along a defined feed direction usually with unwanted rotational movements about this feed direction and thus lead to a possibly incorrect or undefined target position. Substantial importance is also attached to the friction effects occurring during a positional shift, which complicate or even prevent exact positioning or securing of the position (in particular under conditions of use in the ultrahigh vacuum).

The prior art is merely an example US 2006/0158707 A1 directed.

Against the above background, it is an object of the present invention to provide an arrangement for securing the position of a component within a housing, which provides a precise position assurance in a well-defined feed position with relatively little design effort.

This object is achieved according to the features of independent claim 1.

• – eine in dem Gehäuse vorgesehene Kammer, in welcher sich eine magnetorheologische oder elektrorheologische Flüssigkeit befindet und welche wenigstens einen Zu- bzw. Abfuhrkanal zur Zuführung oder Abführung der Flüssigkeit in die Kammer bzw. aus der Kammer aufweist; und
• – eine zur Erzeugung eines magnetischen bzw. elektrischen Feldes im Bereich der Kammer geeignete Vorrichtung;
• – wobei das Bauteil in Abhängigkeit von dem magnetischen bzw. elektrischen Feld entweder durch einen innerhalb der Kammer über den Zu- bzw. Abfuhrkanal infolge der Flüssigkeit ausgeübten hydraulischen Druck entlang einer Vorschubrichtung innerhalb des Gehäuses verschiebbar oder in einer gegebenen Position entlang dieser Vorschubrichtung fixierbar ist.

An arrangement according to the invention for securing the position of a component within a housing comprises:

• - A chamber provided in the housing, in which there is a magnetorheological or electrorheological fluid and which has at least one supply or discharge channel for supplying or discharging the liquid into the chamber or from the chamber; and
• A device suitable for generating a magnetic or electric field in the region of the chamber;
• - Wherein the component as a function of the magnetic or electric field either by a within the chamber via the supply and discharge channel due to the liquid pressure exerted along a feed direction within the housing displaceable or in a given position along this feed direction can be fixed.

The invention is based in particular on the concept of a (optical or mechanical) component in question by means of a magnetorheological or electrorheological fluid, which is located in a chamber in a housing receiving the component, on the one hand by (generated by supply or discharge of the liquid) Hydraulic pressure along a feed direction to move highly precise and on the other hand, the magnetorheological or electrorheological fluid - when reaching the desired target position of the component - to use for controlled position assurance by the variably applicable magnetic or electric field in a known manner a change in viscosity or Stiffening of the liquid brought about and thus a complete positive connection with the component is effected. In this case, in particular, the magnetic or electric field during the displacement of the component is inactive and active for fixing the position of the component.

Although for the sake of simplicity, only the use of a magnetorheological fluid and accordingly the application of a magnetic field will be referred to hereinafter, the corresponding statements and embodiments can be applied analogously to the use of an electrorheological fluid or the use of an electric field. With regard to concrete more suitable Magnetorheological or electrorheological fluids is exemplified in the disclosure of the cited above US 2006/0158707 A1 directed.

In particular, the invention enables a precise as well as easy-to-handle position assurance of an optical or mechanical component in a desired feed position within any (eg focusing or objective) system by first under well-defined exercise of the above-mentioned, naturally uniformly spreading hydraulic pressure when switched off Magnetic field, the relevant component in the desired target or feed position (eg under sensor-assisted position detection) can be moved to achieve the target position, the position assurance directly by switching on the magnetic field and the resulting positive connection of the magnetorheological fluid with the component or their To bring in socket components.

In this case, both during the required feed motion and in the position assurance achieved by positive locking unwanted friction effects and undesirable changes in position relative to the feed azimuthal direction (ie, about undesirable rotational movements of the component component) can be avoided. The invention therefore makes it possible, in particular, to secure the position of high-precision elements to be positioned in ultra-high vacuum, for example in a system for microlithography.

According to the invention, the magnetorheological (or electrorheological) fluid is used for a double function insofar as it causes the feed movement of the component hydraulically when the magnetic (or electric) field is switched off (the component in this case can be mounted resiliently over the fluid) , And on the other hand by simply turning on the magnetic (or electric field) causes the position assurance in the desired target position.

According to one embodiment, the component in the given position along the feed direction as a result of a force exerted by the magnetorheological or electrorheological fluid fit can be fixed.

According to one embodiment, the arrangement comprises at least one circumferential and the chamber bounding seal against the component or a socket of the component.

In one embodiment, the assembly may include two such seals which define within the chamber a partial volume of the magnetorheological or electrorheological fluid. Such an embodiment has the advantage that a mechanical initial stability of the component can already be ensured by two seals.

According to one embodiment, the magnetorheological or electrorheological fluid at least partially surrounds the component.

According to one embodiment, the component is resiliently mounted within the housing by the magnetorheological or electrorheological fluid when the magnetic or electric field is switched off.

According to one embodiment, the arrangement further comprises at least one means for limiting the travel of the component along the feed direction. In particular, this device can have at least one bellows, more particularly two bellows arranged on opposite sides of the component.

According to one embodiment, the device suitable for generating a magnetic or electric field in the region of the chamber has at least one coil which can be acted upon by an electric current. In this way, a rapid connection or disconnection of the magnetic field for securing or releasing the component and optionally also a variation of the magnetic field can take place. However, the invention is not limited thereto, so that in further embodiments basically e.g. It is also possible to use one or more permanent magnets for generating the magnetic field.

According to one embodiment, the arrangement further comprises at least one position sensor for detecting the given position of the component along the feed direction.

According to one embodiment, the arrangement further comprises a pump or piston system for the supply and removal of the magnetorheological or electrorheological fluid via the supply and discharge channel.

According to one embodiment, the arrangement further comprises a control, via which for the supply and removal of the magnetorheological or electrorheological fluid via the supply and discharge channel and / or the generation of a magnetic or electric field in the region of the chamber in dependence a current position of the component is adjustable.

The component may be, for example, an optical component, in particular a lens. Further the component can be arranged within a focusing device.

The arrangement according to the invention is also suitable for realizing a transport safety device of a (mechanically collected or unmounted) optical component, which e.g. can not be clamped mechanically to the transport lock, but is movable within the system. In the case of a required transport of the system, the device can be stored as described above by means of the magnetorheological or electrorheological fluid and placed in a position-stable state by applying a magnetic or electric field. After completion of the transport, the magnetic or electric field can then be turned off, and the system (e.g., a focusing system for focusing any electromagnetic radiation) can be returned to service.

• – wobei das Bauteil in einem Gehäuse gelagert wird, in welchem sich eine magnetorheologische oder elektrorheologische Flüssigkeit befindet; und
• – wobei eine Lagesicherung während des Transports des Bauteils dadurch erfolgt, dass ein magnetisches bzw. elektrisches Feld im Bereich der magnetorheologischen oder elektrorheologischen Flüssigkeit angelegt wird.

According to a further aspect, the invention thus also relates to a method for securing the transport of a component, in particular in an arrangement having the features described above,

• - Wherein the component is stored in a housing in which a magnetorheological or electrorheological fluid is located; and
• - Wherein a position assurance during transport of the component takes place in that a magnetic or electric field in the field of magnetorheological or electrorheological fluid is applied.

In this case, the component can be fixed in particular during transport as a result of a force exerted by the magnetorheological or electrorheological fluid form fit.

Further embodiments of the invention are described in the description and the dependent claims.

The invention will be explained below with reference to a preferred embodiment with reference to the accompanying drawings.

Show it:

1 a schematic cross-sectional view for explaining the structure of a device for securing a position of a component according to an embodiment of the invention; and

2 a schematic representation for explaining the operation of the provided in an inventive arrangement magnetorheological fluid.

In the following, an exemplary embodiment of an arrangement according to the invention will be described with reference to the schematic cross-sectional view in FIG 1 described.

In the example of 1 this is a component subjected according to the invention to a defined positional fixing 1 around an optical lens, which within a tubular housing in the example 4 about a version 2 is held. With "3" is a Vorschraubring called which the component 1 in the version 2 stuck over a traction.

Inside the case 4 , according to 1 between the case 4 and the version 2 , is one with a magnetorheological fluid 12 filled chamber 11 , Inlet or Abfuhrkanäle 13 . 14 a supply or discharge of the magnetorheological fluid 12 in the chamber 11 into or out of the chamber 11 to enable out.

2a Figure 3b shows, in a merely schematic representation, those in the magnetorheological fluid 12 within a carrier fluid 12a distributed, magnetically polarizable particles 12b in the state without ( 2a ) as well as with ( 2 B ) adjacent magnetic field B. In the carrier liquid 12a Depending on the specific application, it can be any suitable viscosity-adjusted liquid, for example water or a mineral or synthetic oil. The inside of the carrier liquid 12a in the form of a suspension of finely divided magnetically polarizable (eg iron) particles 12b typically (and without the invention being limited thereto) may have a size in the range of 1 to 10 μm.

The magnetic field B is preferably according to 2 B such that the magnetic field lines perpendicular to (according to 1 and 2 extending in the direction of the z-axis in the drawn coordinate system) feed direction, whereupon the magnetically polarizable particles 12b along the direction of the magnetic field lines and in this way the viscosity of the liquid 12 increase. For this example, two can be acted upon by an electric current coils (not shown) are used, via which the magnetic field in the region of the chamber 11 can be quickly switched on and off and optionally varied. Typical values of the magnetic field suitable for securing the position can only be on the order of 100 kA / m, by way of example (and without the invention being limited thereto).

Furthermore, the arrangement according to 2 two circular seals 5 . 6 on, which is against the version 2 as well as the housing 4 support and also the chamber 11 or the magnetorheological fluid contained therein 12 in three sub-volumes 11a . 11a and 11c divide. From these partial volumes 11a . 11b . 11c is the supply and discharge channel 13 with the partial volume 11c and the supply and discharge channel 14 with the partial volume 11b in fluid communication, whereas the partial volume 11a compared to the partial volumes 11b . 11c about the seals 5 . 6 , the inner wall of the housing 4 as well as the outer wall of the socket 2 is sealed.

As a result, a fluid supply via one of the supply and discharge channels 13 . 14 - Connected to a fluid discharge via the respective other supply or discharge channel 14 respectively. 13 - a hydraulic pressure on the corresponding seal 5 respectively. 6 and thus a displacement of the component 1 along a feed direction running in the direction of the element axis EA (or the z-axis), the hydraulic pressure being in the respective sub-volume 11b respectively. 11c spreads evenly and thus a well-defined, of undesirable rotational movements free translational movement of the component 1 effected in the feed direction.

The fluid supply or fluid removal of the magnetorheological fluid 12 via the supply and discharge channel 14 respectively. 13 can have a suitable (in 1 not shown) pump system or a aktuiertes piston system done. Furthermore, a shift of the component 1 individually or optionally as a group.

The movement of the component along the feed direction is limited by two mutually opposite sides of the component 1 arranged bellows 7 . 8th as well as the position of the seals 5 . 6 relative to the supply and discharge channels 13 . 14 ,

The seals 5 . 6 are preferably made of a material (eg Teflon), which on the one hand a sufficient mechanical stability and on the other hand, a sufficient radial spring action for pressing against the inner wall of the housing 4 ensures so that a seal to the inner wall of the housing 4 given is. The in the supply and discharge channels 13 . 14 set hydraulic pressure or the resulting adjusting stroke pressure at the seals 5 . 6 is so big to choose that the spring forces of the bellows 7 . 8th as well as the wall friction is overcome.

Depending on whether the component 1 in the positive or negative z-direction is to be translated, the channel 13 as a feed channel and the channel 14 operated as a discharge channel or vice versa. The feed position obtained in each case can be monitored by means of a (not shown) position sensor.

Upon reaching the desired position or the desired feed position of the component 1 there is a connection of the magnetic field, whereupon the liquid 12 due to their magnetorheological properties in the entire area covered by the magnetic field (ie in particular in the sub-volumes 11a . 11a and 11c the chamber 11 and optionally also in the supply and discharge channels 13 . 14 ) becomes stiff and, by way of a complete positive connection effected thereby, a securing of the position of the component 1 causes. If required further change in position - for example during an adjustment of the component 1 - The magnetic field is switched off again, after which a further change in position in the manner described above and under substantially frictionless conditions can be made.

For this purpose, the arrangement according to the invention can in particular also have a control circuit in which the arrangement producing the magnetic field (for example the coils which can be acted upon by electric current) as well as the supply and removal of the magnetorheological fluid 12 via the supply and discharge channels 13 . 14 depending on the signals of one or more, the current position of the component 1 detecting position sensors can be controlled.

As a result, the invention provides a (in particular in the ultra-high vacuum and friction independently feasible) infinitely adjustable adjustment possibility, wherein the magnetorheological fluid 12 perceives a double function as on the one hand on the supply and removal of the magnetorheological fluid 12 the translational displacement of the component 1 and on the other - in solidification or stiffening of the magnetorheological fluid 12 upon application of the magnetic field - about the generated positive locking the positional fixation of the component 1 is reached.

While the invention has been described in terms of specific embodiments, numerous variations and alternative embodiments, e.g. by combination and / or exchange of features of individual embodiments. Accordingly, it will be understood by those skilled in the art that such variations and alternative embodiments are intended to be embraced by the present invention, and the scope of the invention is limited only in terms of the appended claims and their equivalents.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 2006/0158707 A1 [0006, 0011]

Claims (16)

Arrangement for securing the position of a component within a housing ( 4 ), with • one in the housing ( 4 ) ( 11 ) in which a magnetorheological or electrorheological fluid ( 12 ) and which at least one supply or discharge channel ( 13 . 14 ) for supplying or discharging the liquid ( 12 ) into the chamber ( 11 ) or from the chamber ( 11 ) having; and • one for generating a magnetic or electric field in the region of the chamber ( 11 ) suitable device; • where the component ( 1 ) depending on the magnetic or electric field either through one within the chamber ( 11 ) via the supply or discharge channel ( 13 . 14 ) due to the liquid ( 12 ) applied hydraulic pressure along a feed direction within the housing ( 4 ) is displaceable or fixable in a given position along this feed direction. Arrangement according to claim 1, characterized in that the component ( 1 ) in the given position along the feed direction due to a by the magnetorheological or electrorheological fluid ( 12 ) exerted positive engagement is fixable. Arrangement according to claim 1 or 2, characterized in that these at least one against the component ( 1 ) or a version ( 2 ) of the component ( 1 ) supporting the circulating and the chamber ( 11 ) limiting seal ( 5 . 6 ) having. Arrangement according to claim 3, characterized in that these two such seals ( 5 . 6 ), which within the chamber ( 11 ) a partial volume ( 11a ) of the magnetorheological or electrorheological fluid ( 12 ) limit. Arrangement according to one of the preceding claims, characterized in that the magnetorheological or electrorheological fluid ( 12 ) the component ( 1 ) at least partially surrounds. Arrangement according to one of the preceding claims, characterized in that the component ( 1 ) when the magnetic or electric field is switched off inside the housing ( 4 ) by the magnetorheological or electrorheological fluid ( 12 ) is spring-mounted. Arrangement according to one of the preceding claims, characterized in that it further comprises means for limiting the distance of the component ( 1 ) along the feed direction. Arrangement according to claim 7, characterized in that this device at least one bellows ( 7 . 8th ), in particular two mutually opposite sides of the component ( 1 ) arranged bellows ( 7 . 8th ), having. Arrangement according to one of the preceding claims, characterized in that for generating a magnetic or electric field in the region of the chamber ( 11 ) has suitable device at least one can be acted upon by an electric current coil. Arrangement according to one of the preceding claims, characterized in that it further comprises at least one position sensor for detecting a respectively given position of the component ( 1 ) along the feed direction. Arrangement according to one of the preceding claims, characterized in that it further comprises a pump or piston system for the supply and removal of the magnetorheological or electrorheological fluid ( 12 ) via the supply or discharge channel ( 13 . 14 ) having. Arrangement according to one of the preceding claims, characterized in that it further comprises a control, via which for the supply and removal of the magnetorheological or electrorheological fluid ( 12 ) via the supply or discharge channel ( 13 . 14 ) and / or the generation of a magnetic or electric field in the region of the chamber ( 11 ) is controllable in dependence on a current position of the component. Arrangement according to one of the preceding claims, characterized in that the component ( 1 ) is an optical component, in particular a lens. Arrangement according to one of the preceding claims, characterized in that the component is arranged within a focusing device. Method for transport securing a component, in particular in an arrangement according to one of the preceding claims • wherein the component ( 1 ) in a housing ( 4 ), in which a magnetorheological or electrorheological fluid ( 12 ) is located; and wherein a position assurance during the transport of the component ( 1 ) in that a magnetic or electric field in the region of the magnetorheological or electrorheological fluid ( 12 ) is created. Method according to claim 15, characterized in that the component ( 1 ) during the Transport as a result of a magnetorheological or electrorheological fluid ( 12 ) is performed fixed form fit.

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