DE102009028600A8 - Positionierung eines Trägerelements - Google Patents

Positionierung eines Trägerelements Download PDF

Info

Publication number
DE102009028600A8
DE102009028600A8 DE200910028600 DE102009028600A DE102009028600A8 DE 102009028600 A8 DE102009028600 A8 DE 102009028600A8 DE 200910028600 DE200910028600 DE 200910028600 DE 102009028600 A DE102009028600 A DE 102009028600A DE 102009028600 A8 DE102009028600 A8 DE 102009028600A8
Authority
DE
Germany
Prior art keywords
positioning
carrier element
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE200910028600
Other languages
English (en)
Other versions
DE102009028600A1 (de
Inventor
Helmut Müller
Roman Sellin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss NTS GmbH
Original Assignee
Carl Zeiss NTS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss NTS GmbH filed Critical Carl Zeiss NTS GmbH
Priority to DE102009028600A priority Critical patent/DE102009028600A1/de
Publication of DE102009028600A1 publication Critical patent/DE102009028600A1/de
Publication of DE102009028600A8 publication Critical patent/DE102009028600A8/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement
    • H01J2237/20285—Motorised movement computer-controlled
DE102009028600A 2009-08-17 2009-08-17 Positionierung eines Trägerelements Ceased DE102009028600A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE102009028600A DE102009028600A1 (de) 2009-08-17 2009-08-17 Positionierung eines Trägerelements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009028600A DE102009028600A1 (de) 2009-08-17 2009-08-17 Positionierung eines Trägerelements

Publications (2)

Publication Number Publication Date
DE102009028600A1 DE102009028600A1 (de) 2011-03-03
DE102009028600A8 true DE102009028600A8 (de) 2011-06-01

Family

ID=43524740

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009028600A Ceased DE102009028600A1 (de) 2009-08-17 2009-08-17 Positionierung eines Trägerelements

Country Status (1)

Country Link
DE (1) DE102009028600A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012205317B4 (de) 2012-03-30 2018-06-28 Carl Zeiss Microscopy Gmbh Verfahren zur Einstellung einer Position eines Trägerelements in einem Teilchenstrahlgerät, Computerprogrammprodukt sowie Teilchenstrahlgerät
US9558911B2 (en) 2014-08-01 2017-01-31 Carl Zeiss Microscopy Gmbh Method for analyzing and/or processing an object as well as a particle beam device for carrying out the method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555254A (en) * 1967-04-17 1971-01-12 Gerber Scientific Instr Co Error correcting system and method for use with plotters, machine tools and the like
EP0353585A2 (de) * 1988-08-04 1990-02-07 Siemens Aktiengesellschaft Verfahren zur Bahn- und Positionskorrektur eines Werkzeugs eines Roboters
US6864488B2 (en) * 1998-10-23 2005-03-08 Canon Kabushiki Kaisha Charged particle beam exposure method and apparatus
US20050211929A1 (en) * 2004-03-29 2005-09-29 Masaki Kurokawa Charged particle beam photolithography machine, standard substrate for correcting misalignment factor of charged particle beam photolithography machine, correcting method for charged particle beam photolithography machine, and method of manufacturing electronic device
US20090039285A1 (en) * 2007-06-13 2009-02-12 Patrick Cooper Method and device for controlling and monitoring a position of a holding element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555254A (en) * 1967-04-17 1971-01-12 Gerber Scientific Instr Co Error correcting system and method for use with plotters, machine tools and the like
EP0353585A2 (de) * 1988-08-04 1990-02-07 Siemens Aktiengesellschaft Verfahren zur Bahn- und Positionskorrektur eines Werkzeugs eines Roboters
US6864488B2 (en) * 1998-10-23 2005-03-08 Canon Kabushiki Kaisha Charged particle beam exposure method and apparatus
US20050211929A1 (en) * 2004-03-29 2005-09-29 Masaki Kurokawa Charged particle beam photolithography machine, standard substrate for correcting misalignment factor of charged particle beam photolithography machine, correcting method for charged particle beam photolithography machine, and method of manufacturing electronic device
US20090039285A1 (en) * 2007-06-13 2009-02-12 Patrick Cooper Method and device for controlling and monitoring a position of a holding element

Also Published As

Publication number Publication date
DE102009028600A1 (de) 2011-03-03

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8196 Reprint of faulty title page (publication) german patentblatt: part 1a6
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final

Effective date: 20111201