DE102008025588A1 - Intracavity frequency tripler laser, particularly solid state laser for use with device, has optical resonator with internal beam waist between mirror and decoupler - Google Patents
Intracavity frequency tripler laser, particularly solid state laser for use with device, has optical resonator with internal beam waist between mirror and decoupler Download PDFInfo
- Publication number
- DE102008025588A1 DE102008025588A1 DE102008025588A DE102008025588A DE102008025588A1 DE 102008025588 A1 DE102008025588 A1 DE 102008025588A1 DE 102008025588 A DE102008025588 A DE 102008025588A DE 102008025588 A DE102008025588 A DE 102008025588A DE 102008025588 A1 DE102008025588 A1 DE 102008025588A1
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- Prior art keywords
- laser
- crystal
- sensor
- wavelength
- beam waist
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3507—Arrangements comprising two or more nonlinear optical devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3544—Particular phase matching techniques
- G02F1/3546—Active phase matching, e.g. by electro- or thermo-optic tuning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08086—Multiple-wavelength emission
- H01S3/0809—Two-wavelenghth emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0813—Configuration of resonator
- H01S3/0815—Configuration of resonator having 3 reflectors, e.g. V-shaped resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
Die Erfindung betrifft einen Intracavity frequenzverdreifachten Laser, insbesondere Festkörperlaser, mit einem optischen Resonator, der zumindest zwei hochreflektierende Spiegel bezogen auf die Grundwellenlänge aufweist, einem aktiven Medium, einem gütegeschalteten Modulator, einem ersten nichtlinearen Kristall für die Konvertierung der zweiten Harmonischen, einem zweiten nichtlinearen Kristall für die Konvertierung der dritten Harmonischen, mit einem Auskoppler zur Auskopplung eines Laserstrahls und mit zumindest zwei Spiegeln. Weiterhin betrifft die Erfindung eine Vorrichtung zur Anwendung bei einem solchen Intracavity frequenzverdreifachten Laser.The The invention relates to an intracavity frequency tripled laser, in particular solid-state lasers, having an optical resonator, the at least two highly reflective mirrors with respect to the fundamental wavelength has, an active medium, a Q-switched Modulator, a first nonlinear crystal for the Second harmonic conversion, a second nonlinear Crystal for the third harmonic conversion, with a decoupler for decoupling a laser beam and at least two mirrors. Furthermore, the invention relates to a device for use with such intracavity frequency tripled laser.
Ein
gattungsgemäßer frequenzverdreifachender Laser
ist durch die
Weiterhin
ist ein solcher Intracavity frequenzverdreifachter Laser beispielsweise
durch die
Weiterhin
ist durch die
Bei den häufig verwendeten oben genannten nichtlinearen Kristallen erweist sich in der Praxis die Antireflexbeschichtung, insbesondere UV-Beschichtung, als problematisch, da im Gebrauch langfristig ein Verschleiß nicht zu vermeiden ist, welcher zu einem Ausfall des Lasers führen kann.at the commonly used above-mentioned nonlinear crystals In practice, the antireflection coating proves to be particularly effective UV coating, as problematic, as in use long term Wear is unavoidable, resulting in a failure of the laser can lead.
Der Erfindung liegt daher die Aufgabe zu Grunde, eine Möglichkeit zu schaffen, unerwünschte Verschleißerscheinungen weitgehend zu vermeiden, um so das Ausfallrisiko wesentlich zu reduzieren. Insbesondere soll ein hierzu geeigneter Laser sowie eine zur Anwendung bei einem solchen Laser bestimmte Vorrichtung geschaffen werden.Of the The invention is therefore based on the object, a possibility to create unwanted signs of wear largely avoided so as to substantially reduce the risk of default. In particular, a laser suitable for this purpose and one for use In such a laser certain device are created.
Diese Aufgabe wird erfindungsgemäß mit einem Laser gemäß den Merkmalen der Ansprüche 1 und 8 gelöst. Die weitere Ausgestaltung der Erfindung ist den Unteransprüchen zu entnehmen.These Object is according to the invention with a laser according to the Characteristics of claims 1 and 8 solved. The others Embodiment of the invention is the dependent claims remove.
Erfindungsgemäß ist also ein Laser vorgesehen, bei dem der zweite nichtlineare Kristall eine dem Auskoppler zugewandte, in einer Ebene einer internen Strahltaille angeordnete planare Stirnfläche ohne eine Antireflexbeschichtung aufweist, die senkrecht zur optischen Achse des Resonators ausgerichtet ist, und mit einer Einrichtung zur Einstellung der Temperatur des zweiten nichtlinearen Kristalls.According to the invention So provided a laser in which the second nonlinear crystal one facing the outcoupler, in a plane of an internal beam waist arranged planar face without an anti-reflective coating which is oriented perpendicular to the optical axis of the resonator is, and with a device for adjusting the temperature of the second nonlinear crystal.
Indem der Laser einen ersten Temperaturkontroller zur Einstellung der Phasenanpassungstemperatur des ersten Kristalls und einen zweiten Temperaturkontroller zur Einstellung der Phasenanpassungtemperatur des zweiten Kristalls hat, wird in einfacher Weise die Einstellung der Phasenanpassung des ersten nichtlinearen Kristalls durch die Änderung bzw. Anpassung der Temperatur möglich. Zugleich wird so eine Leistungsmaximierung erreicht. Weiterhin wird die Lebensdauer der nichtlinearen Kristalle wesentlich erhöht, weil eine Zerstörung der Antireflex-Beschichtung vermieden werden kann und der Laser somit keinem Verschleiß unterliegt. Die Strahltaille bezeichnet den engsten Querschnitt des Laserstrahls mit der planaren Wellenfront.By doing the laser has a first temperature controller for setting the Phase matching temperature of the first crystal and a second temperature controller for adjusting the phase matching temperature of the second crystal has, in a simple way, the adjustment of the phase adjustment of the first nonlinear crystal by the change or Temperature adjustment possible. At the same time, such a Maximized performance. Furthermore, the life of the Nonlinear crystals increased significantly because of destruction the anti-reflective coating can be avoided and the laser thus subject to wear. The beam waist designates the narrowest cross section of the laser beam with the planar wavefront.
Dabei ist es besonders vorteilhaft, wenn der Laser einen eine Steuereinheit umfassenden Regelkreis zur Einstellung der Temperatur hat. Hierdurch wird die Phasenanpassung entsprechend erfasster Messwerte oder Betriebsparameter des Lasers eingestellt, sodass eine optimale Anpassung an unterschiedliche Prozessbedingungen erreicht werden kann.there It is particularly advantageous if the laser has a control unit has a comprehensive control circuit for adjusting the temperature. This will the phase adaptation according to measured values or operating parameters adjusted by the laser, so an optimal adaptation to different Process conditions can be achieved.
Denkbar ist eine Anpassung durch Regelung der Laserleistung. Besonders sinnvoll ist es hingegen, wenn der Laser zur Einstellung der Temperatur eine Heiz- und/oder Kühleinrichtung hat, um so die jeweils zur Erzielung optimaler Ergebnisses erforderliche Temperatur exakt und in kurzer Zeit einstellen zu können.Conceivable is an adjustment by regulating the laser power. Especially useful It is, however, when the laser for adjusting the temperature Heating and / or cooling device has, so as to each Achieving optimal result required temperature exactly and be able to adjust in a short time.
Eine demgegenüber abweichende Ausgestaltung der vorliegenden Erfindung wird dadurch erreicht, dass der Laser einen Sensor zur Bestimmung der emittierten Leistung, insbesonde re eine Photodiode, aufweist, um so durch einen Vergleich der emittierten Leistung mit einem Soll-Wert auf eine erforderliche Änderung der Temperatur durch heizen oder kühlen zu schließen. Eine unmittelbare Messung der jeweiligen Temperatur ist daher nicht erforderlich, sodass der konstruktive Aufbau des Lasers grundsätzlich unverändert übernommen und der Sensor zur Bestimmung der emittierten Leistung als periphere Einheit ergänzt werden kann.A In contrast, deviating embodiment of the present Invention is achieved in that the laser is a sensor for Determination of the emitted power, in particular a photodiode, so as to be comparable by comparing the emitted power a desired value to a required change in temperature to close by heating or cooling. An immediate one Measurement of the respective temperature is therefore not necessary so that the structural design of the laser basically unchanged and the sensor for determination the emitted performance as a peripheral unit can be.
Die weitere Aufgabe, eine Vorrichtung mit einem Sensor zur Erfassung von Betriebsgrößen eines Lasers zu schaffen, wird erfindungsgemäß mit einer Steuereinheit zum Vergleich erfasster Betriebsgrößen mit zumindest einem Sollwert und mit einer Einrichtung zur Einstellung einer bestimmten Temperatur gelöst. Hierdurch können also bei einem Laser mit einem zweiten nichtlinearen Kristall mit einer unbeschichteten Stirnoberfläche in der internen Strahltaille die auftretenden Verluste der Grundwellenlänge nahezu vollständig vermieden werden.The further object to provide a device with a sensor for detecting operating variables of a laser, is achieved according to the invention with a control unit for comparing detected operating variables with at least one target value and with a device for setting a specific temperature. As a result, in a laser with a second nonlinear crystal with an uncoated front surface in the internal beam tail le the occurring losses of the fundamental wavelength are almost completely avoided.
Hierbei hat die Vorrichtung einen Sensor zur Erfassung der Ausgangsleistung des Laserstrahls, um so auf einen unmittelbaren Zugang zu den nichtlinearen Kristallen verzichten zu können. Die Messung kann somit insbesondere berührungslos erfolgen, sodass sich die Vorrichtung auch zur Nachrüstung bei bereits bestehenden Anlagen eignet.in this connection the device has a sensor for detecting the output power of the laser beam so as to have immediate access to the nonlinear Refrain from crystals. The measurement can thus in particular contactless, so that the device Also suitable for retrofitting in existing systems.
Zur Einstellung der jeweils erforderlichen Temperatur weist die Einrichtung Heiz- und/oder Kühlelementen auf, um so eine Soll-Temperatur des ersten nichtlinearen Kristalls bzw. des gesamten Lasers einstellen zu können.to Setting the required temperature, the device Heating and / or cooling elements, so as a target temperature of the first nonlinear crystal or the entire laser to be able to.
Die
Erfindung lässt verschiedene Ausführungsformen
zu. Zur weiteren Verdeutlichung ihres Grundprinzips ist eine davon
in der Zeichnung dargestellt und wird nachfolgend beschrieben. Diese
zeigt in einer Prinzipdarstellung einen Intracavity frequenzverdreifachten
Festkörperlaser
ZITATE ENTHALTEN IN DER BESCHREIBUNGQUOTES INCLUDE IN THE DESCRIPTION
Diese Liste der vom Anmelder aufgeführten Dokumente wurde automatisiert erzeugt und ist ausschließlich zur besseren Information des Lesers aufgenommen. Die Liste ist nicht Bestandteil der deutschen Patent- bzw. Gebrauchsmusteranmeldung. Das DPMA übernimmt keinerlei Haftung für etwaige Fehler oder Auslassungen.This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.
Zitierte PatentliteraturCited patent literature
- - US 5850407 A [0002] US 5850407 A [0002]
- - JP 2000-338530 [0003] - JP 2000-338530 [0003]
- - WO 01/93381 A1 [0003] WO 01/93381 A1 [0003]
- - JP 11-284269 [0004] JP 11-284269 [0004]
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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DE102008025588A DE102008025588A1 (en) | 2008-05-28 | 2008-05-28 | Intracavity frequency tripler laser, particularly solid state laser for use with device, has optical resonator with internal beam waist between mirror and decoupler |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008025588A DE102008025588A1 (en) | 2008-05-28 | 2008-05-28 | Intracavity frequency tripler laser, particularly solid state laser for use with device, has optical resonator with internal beam waist between mirror and decoupler |
Publications (1)
Publication Number | Publication Date |
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DE102008025588A1 true DE102008025588A1 (en) | 2009-12-10 |
Family
ID=41268610
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DE102008025588A Ceased DE102008025588A1 (en) | 2008-05-28 | 2008-05-28 | Intracavity frequency tripler laser, particularly solid state laser for use with device, has optical resonator with internal beam waist between mirror and decoupler |
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DE (1) | DE102008025588A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019201857A1 (en) * | 2018-04-16 | 2019-10-24 | Universität Hamburg | Method and apparatus for frequency conversion and amplification of laser radiation by means of nonlinear media in optical resonators |
CN115411600A (en) * | 2022-11-02 | 2022-11-29 | 安徽华创鸿度光电科技有限公司 | 266nm ultraviolet laser frequency combination technical device without walk-off and use method |
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US5577059A (en) * | 1995-05-09 | 1996-11-19 | Samsung Electronics Co., Ltd. | Second harmonic generation method and apparatus |
US5671232A (en) * | 1995-05-07 | 1997-09-23 | Samsung Electronics Co., Ltd. | Second harmonic generation method and apparatus |
US5850407A (en) | 1997-11-25 | 1998-12-15 | Lightwave Electronics Corporation | Third-harmonic generator with uncoated brewster-cut dispersive output facet |
JPH11284269A (en) | 1998-03-13 | 1999-10-15 | Sei Josan | Solid laser third harmonic ultraviolet light output resonator structure |
US6002695A (en) * | 1996-05-31 | 1999-12-14 | Dpss Lasers, Inc. | High efficiency high repetition rate, intra-cavity tripled diode pumped solid state laser |
JP2000338530A (en) | 1999-05-25 | 2000-12-08 | Nec Corp | Wavelength conversion device for laser light and method for its conversion |
EP0748008B1 (en) * | 1995-06-05 | 2001-08-29 | Hitachi Metals, Ltd. | Laser and applications |
WO2001093381A1 (en) | 2000-06-02 | 2001-12-06 | Coherent, Inc. | Passively modelocked harmonic-generating laser |
US6532100B1 (en) * | 1999-08-04 | 2003-03-11 | 3D Systems, Inc. | Extended lifetime frequency conversion crystals |
US7016389B2 (en) * | 2003-01-24 | 2006-03-21 | Spectra Physics, Inc. | Diode pumped laser with intracavity harmonics |
US20060098698A1 (en) * | 2004-11-10 | 2006-05-11 | Lightwave Electronics Corporation | Frequency-converting lasers with non-linear materials optimized for high power operation |
-
2008
- 2008-05-28 DE DE102008025588A patent/DE102008025588A1/en not_active Ceased
Patent Citations (11)
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US5671232A (en) * | 1995-05-07 | 1997-09-23 | Samsung Electronics Co., Ltd. | Second harmonic generation method and apparatus |
US5577059A (en) * | 1995-05-09 | 1996-11-19 | Samsung Electronics Co., Ltd. | Second harmonic generation method and apparatus |
EP0748008B1 (en) * | 1995-06-05 | 2001-08-29 | Hitachi Metals, Ltd. | Laser and applications |
US6002695A (en) * | 1996-05-31 | 1999-12-14 | Dpss Lasers, Inc. | High efficiency high repetition rate, intra-cavity tripled diode pumped solid state laser |
US5850407A (en) | 1997-11-25 | 1998-12-15 | Lightwave Electronics Corporation | Third-harmonic generator with uncoated brewster-cut dispersive output facet |
JPH11284269A (en) | 1998-03-13 | 1999-10-15 | Sei Josan | Solid laser third harmonic ultraviolet light output resonator structure |
JP2000338530A (en) | 1999-05-25 | 2000-12-08 | Nec Corp | Wavelength conversion device for laser light and method for its conversion |
US6532100B1 (en) * | 1999-08-04 | 2003-03-11 | 3D Systems, Inc. | Extended lifetime frequency conversion crystals |
WO2001093381A1 (en) | 2000-06-02 | 2001-12-06 | Coherent, Inc. | Passively modelocked harmonic-generating laser |
US7016389B2 (en) * | 2003-01-24 | 2006-03-21 | Spectra Physics, Inc. | Diode pumped laser with intracavity harmonics |
US20060098698A1 (en) * | 2004-11-10 | 2006-05-11 | Lightwave Electronics Corporation | Frequency-converting lasers with non-linear materials optimized for high power operation |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019201857A1 (en) * | 2018-04-16 | 2019-10-24 | Universität Hamburg | Method and apparatus for frequency conversion and amplification of laser radiation by means of nonlinear media in optical resonators |
US11367991B2 (en) | 2018-04-16 | 2022-06-21 | Universität Hamburg | Method and apparatus for frequency conversion and amplification of laser radiation using non-linear media in optical resonators |
CN115411600A (en) * | 2022-11-02 | 2022-11-29 | 安徽华创鸿度光电科技有限公司 | 266nm ultraviolet laser frequency combination technical device without walk-off and use method |
CN115411600B (en) * | 2022-11-02 | 2023-02-28 | 安徽华创鸿度光电科技有限公司 | Separation-free 266nm ultraviolet laser frequency combination technology device and use method |
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