DE10191938D2 - Device for guiding a table in the X-Y plane and air bearing table with such a device - Google Patents

Device for guiding a table in the X-Y plane and air bearing table with such a device

Info

Publication number
DE10191938D2
DE10191938D2 DE10191938T DE10191938T DE10191938D2 DE 10191938 D2 DE10191938 D2 DE 10191938D2 DE 10191938 T DE10191938 T DE 10191938T DE 10191938 T DE10191938 T DE 10191938T DE 10191938 D2 DE10191938 D2 DE 10191938D2
Authority
DE
Germany
Prior art keywords
guiding
plane
air bearing
bearing table
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10191938T
Other languages
German (de)
Other versions
DE10191938B4 (en
Inventor
Frank Brosette
Mario Schroeder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Original Assignee
Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mycrona Gesellschaft fuer Innovative Messtechnik mbH filed Critical Mycrona Gesellschaft fuer Innovative Messtechnik mbH
Priority to DE10191938T priority Critical patent/DE10191938B4/en
Publication of DE10191938D2 publication Critical patent/DE10191938D2/en
Application granted granted Critical
Publication of DE10191938B4 publication Critical patent/DE10191938B4/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
DE10191938T 2000-05-16 2001-05-14 Guide mechanism for moving table in X and Y coordinates has rail with V-shaped grooves in edges engaging carriage engaging similar grooved rail at right-angles to first rail Expired - Fee Related DE10191938B4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10191938T DE10191938B4 (en) 2000-05-16 2001-05-14 Guide mechanism for moving table in X and Y coordinates has rail with V-shaped grooves in edges engaging carriage engaging similar grooved rail at right-angles to first rail

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE20008723U DE20008723U1 (en) 2000-05-16 2000-05-16 Device for guiding a table in the X-Y plane
DE20008723.1 2000-05-16
PCT/DE2001/001787 WO2001087536A1 (en) 2000-05-16 2001-05-14 Device for guiding a table in the x-y plane and air bearing table equipped with such a device
DE10191938T DE10191938B4 (en) 2000-05-16 2001-05-14 Guide mechanism for moving table in X and Y coordinates has rail with V-shaped grooves in edges engaging carriage engaging similar grooved rail at right-angles to first rail

Publications (2)

Publication Number Publication Date
DE10191938D2 true DE10191938D2 (en) 2003-04-24
DE10191938B4 DE10191938B4 (en) 2006-03-09

Family

ID=7941542

Family Applications (2)

Application Number Title Priority Date Filing Date
DE20008723U Expired - Lifetime DE20008723U1 (en) 2000-05-16 2000-05-16 Device for guiding a table in the X-Y plane
DE10191938T Expired - Fee Related DE10191938B4 (en) 2000-05-16 2001-05-14 Guide mechanism for moving table in X and Y coordinates has rail with V-shaped grooves in edges engaging carriage engaging similar grooved rail at right-angles to first rail

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE20008723U Expired - Lifetime DE20008723U1 (en) 2000-05-16 2000-05-16 Device for guiding a table in the X-Y plane

Country Status (3)

Country Link
AU (1) AU2001265776A1 (en)
DE (2) DE20008723U1 (en)
WO (1) WO2001087536A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007093070A1 (en) * 2006-02-14 2007-08-23 Inspire AG für mechatronische Produktionssysteme und Fertigungstechnik Machine tool
CN103869835B (en) * 2014-04-01 2016-06-01 哈尔滨工业大学 Based on the three-axis air-bearing table centroid adjustment device of non-orthohormbic structure
CN106347692B (en) * 2016-09-09 2018-12-07 瑞邦晟达科技（北京）有限公司 The sampling container automatic installation apparatus of environmentally friendly unmanned plane

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218108A (en) * 1962-10-11 1965-11-16 Link Division Of General Prec Precision positioning apparatus
US3377111A (en) * 1966-02-15 1968-04-09 Optomechanisms Inc Precision coordinate axes table means
DE6921062U (en) * 1969-05-23 1969-12-11 Hamuel Werkzeugfab Kirschbaum MOVABLE WORK PIECE TABLE WITH ROLLER BEARING
EP0583035B1 (en) * 1992-08-12 1996-11-27 Koninklijke Philips Electronics N.V. Transmission mechanism, positioning device provided with such a transmission mechanism and lithographic device provided with such a positioning device

Also Published As

Publication number Publication date
DE10191938B4 (en) 2006-03-09
DE20008723U1 (en) 2001-09-27
AU2001265776A1 (en) 2001-11-26
WO2001087536A1 (en) 2001-11-22

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8364 No opposition during term of opposition
R082 Change of representative

Representative=s name: KNEFEL, CORDULA, DIPL.-PHYS., DE

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee