DE10140606B8 - Integrated memory and sensing element based on the GMR effect - Google Patents

Integrated memory and sensing element based on the GMR effect Download PDF

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Publication number
DE10140606B8
DE10140606B8 DE10140606A DE10140606A DE10140606B8 DE 10140606 B8 DE10140606 B8 DE 10140606B8 DE 10140606 A DE10140606 A DE 10140606A DE 10140606 A DE10140606 A DE 10140606A DE 10140606 B8 DE10140606 B8 DE 10140606B8
Authority
DE
Germany
Prior art keywords
sensing element
element based
integrated memory
gmr effect
gmr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10140606A
Other languages
German (de)
Other versions
DE10140606C1 (en
Inventor
Peter Schmollngruber
Henrik Dr. Siegle
Andreas Dr. Huetten
Tobias Hempel
Lucinski
Doc.Dr.hab.
Guenter Prof. Dr. Reiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE10140606A priority Critical patent/DE10140606B8/en
Publication of DE10140606C1 publication Critical patent/DE10140606C1/en
Application granted granted Critical
Publication of DE10140606B8 publication Critical patent/DE10140606B8/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N59/00Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00
DE10140606A 2001-08-18 2001-08-18 Integrated memory and sensing element based on the GMR effect Expired - Fee Related DE10140606B8 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10140606A DE10140606B8 (en) 2001-08-18 2001-08-18 Integrated memory and sensing element based on the GMR effect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10140606A DE10140606B8 (en) 2001-08-18 2001-08-18 Integrated memory and sensing element based on the GMR effect

Publications (2)

Publication Number Publication Date
DE10140606C1 DE10140606C1 (en) 2003-05-08
DE10140606B8 true DE10140606B8 (en) 2005-03-31

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE10140606A Expired - Fee Related DE10140606B8 (en) 2001-08-18 2001-08-18 Integrated memory and sensing element based on the GMR effect

Country Status (1)

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DE (1) DE10140606B8 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7436697B2 (en) 2003-03-31 2008-10-14 Matsushita Electric Industrial Co., Ltd. Memory cell, memory using the memory cell, memory cell manufacturing method, and memory recording/reading method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004032482B4 (en) * 2004-07-05 2008-01-31 Infineon Technologies Ag Sensor and method for detecting deformation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19843350A1 (en) * 1998-09-22 2000-03-23 Bosch Gmbh Robert Electronic magneto-resistive memory cell of Magnetic RAM type has magnetic sensor element in form of AMR or GMR (Giant-Magneto-resistance), enabling more compact data densities to be achieved
DE10105894A1 (en) * 2001-02-09 2002-09-05 Bosch Gmbh Robert Magnetically sensitive layer arrangement

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19843350A1 (en) * 1998-09-22 2000-03-23 Bosch Gmbh Robert Electronic magneto-resistive memory cell of Magnetic RAM type has magnetic sensor element in form of AMR or GMR (Giant-Magneto-resistance), enabling more compact data densities to be achieved
DE10105894A1 (en) * 2001-02-09 2002-09-05 Bosch Gmbh Robert Magnetically sensitive layer arrangement

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
http://www.research.ibm.com/resources/news/ 20001207_mramimages.shtl. (Stand 18.08.2001) *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7436697B2 (en) 2003-03-31 2008-10-14 Matsushita Electric Industrial Co., Ltd. Memory cell, memory using the memory cell, memory cell manufacturing method, and memory recording/reading method

Also Published As

Publication number Publication date
DE10140606C1 (en) 2003-05-08

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Legal Events

Date Code Title Description
8100 Publication of patent without earlier publication of application
8304 Grant after examination procedure
8364 No opposition during term of opposition
8381 Inventor (new situation)

Inventor name: LUCINSKI, TADEUSC

Inventor name: HUETTEN, ANDREAS, DR., 33619 BIELEFELD, DE

Inventor name: SCHMOLLNGRUBER, PETER, 71134 AIDLINGEN, DE

Inventor name: REISS, GUENTER, PROF. DR., 33602 BIELEFELD, DE

Inventor name: HEMPEL, TOBIAS, 33611 BIELEFELD, DE

Inventor name: SIEGLE, HENRIK, DR., 71229 LEONBERG, DE

Inventor name: DR.DR.HAB., POZNAN, PL

8381 Inventor (new situation)

Inventor name: SIEGLE, HENRIK, DR., 71229 LEONBERG, DE

Inventor name: HEMPEL, TOBIAS, 33611 BIELEFELD, DE

Inventor name: SCHMOLLNGRUBER, PETER, 71134 AIDLINGEN, DE

Inventor name: HUETTEN, ANDREAS, DR., 33619 BIELEFELD, DE

Inventor name: REISS, GUENTER, PROF. DR., 33602 BIELEFELD, DE

Inventor name: DOC.DR.HAB., POZNAN, PL

Inventor name: LUCINSKI, TADEUSC

8396 Reprint of erroneous front page
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20130301