DD96304A1 - - Google Patents

Info

Publication number
DD96304A1
DD96304A1 DD16117872A DD16117872A DD96304A1 DD 96304 A1 DD96304 A1 DD 96304A1 DD 16117872 A DD16117872 A DD 16117872A DD 16117872 A DD16117872 A DD 16117872A DD 96304 A1 DD96304 A1 DD 96304A1
Authority
DD
German Democratic Republic
Application number
DD16117872A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD16117872A priority Critical patent/DD96304A1/xx
Publication of DD96304A1 publication Critical patent/DD96304A1/xx

Links

DD16117872A 1972-02-29 1972-02-29 DD96304A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD16117872A DD96304A1 (ja) 1972-02-29 1972-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD16117872A DD96304A1 (ja) 1972-02-29 1972-02-29

Publications (1)

Publication Number Publication Date
DD96304A1 true DD96304A1 (ja) 1973-03-12

Family

ID=5485505

Family Applications (1)

Application Number Title Priority Date Filing Date
DD16117872A DD96304A1 (ja) 1972-02-29 1972-02-29

Country Status (1)

Country Link
DD (1) DD96304A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0752531A1 (de) * 1995-07-06 1997-01-08 Leybold Aktiengesellschaft Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE10302764A1 (de) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0752531A1 (de) * 1995-07-06 1997-01-08 Leybold Aktiengesellschaft Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
US6004109A (en) * 1995-07-06 1999-12-21 Balzers Und Leybold Deutschland Holding Ag Apparatus for the rapid evacuation of a vacuum chamber
DE10302764A1 (de) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer

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