DD94438A5 - - Google Patents
Info
- Publication number
- DD94438A5 DD94438A5 DD15752971A DD15752971A DD94438A5 DD 94438 A5 DD94438 A5 DD 94438A5 DD 15752971 A DD15752971 A DD 15752971A DD 15752971 A DD15752971 A DD 15752971A DD 94438 A5 DD94438 A5 DD 94438A5
- Authority
- DD
- German Democratic Republic
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7110838A FR2130955A6 (en:Method) | 1971-03-26 | 1971-03-26 | |
| FR7126053A FR2146512A6 (en:Method) | 1971-07-16 | 1971-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD94438A5 true DD94438A5 (en:Method) | 1972-12-12 |
Family
ID=26216288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD15752971A DD94438A5 (en:Method) | 1971-03-26 | 1971-09-03 |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE772057A (en:Method) |
| CH (1) | CH537096A (en:Method) |
| DD (1) | DD94438A5 (en:Method) |
| IT (1) | IT939372B (en:Method) |
| NL (1) | NL7112018A (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT406100B (de) * | 1996-08-08 | 2000-02-25 | Thallner Erich | Kontaktbelichtungsverfahren zur herstellung von halbleiterbausteinen |
-
1971
- 1971-08-31 CH CH1275771A patent/CH537096A/fr not_active IP Right Cessation
- 1971-09-01 BE BE772057A patent/BE772057A/xx unknown
- 1971-09-01 NL NL7112018A patent/NL7112018A/xx unknown
- 1971-09-03 IT IT5265471A patent/IT939372B/it active
- 1971-09-03 DD DD15752971A patent/DD94438A5/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT406100B (de) * | 1996-08-08 | 2000-02-25 | Thallner Erich | Kontaktbelichtungsverfahren zur herstellung von halbleiterbausteinen |
Also Published As
| Publication number | Publication date |
|---|---|
| CH537096A (fr) | 1973-05-15 |
| IT939372B (it) | 1973-02-10 |
| BE772057A (fr) | 1972-01-17 |
| NL7112018A (en:Method) | 1972-09-28 |