DD291223A7

DD291223A7 - METHOD AND DEVICE FOR ADJUSTING LENSES

Info

Publication number: DD291223A7
Application number: DD19342476A
Authority: DD
Inventors: Thomas Demuth; Fritz Mahler
Original assignee: Thomas Demuth; Fritz Mahler
Priority date: 1976-06-21
Filing date: 1976-06-21
Publication date: 1991-06-27

Abstract

Patentansprüche: 1. Verfahren zum Justieren von Linsen, bei dem ein Bündel elektromagnetischer Strahlung einer Strahlenquelle, vorzugsweise eines Lasers, die zu justierende Linse durchdringt, an einem gekrümmten Spiegel reflektiert wird und an der Linse ein Interferenzbild erzeugt, dadurch gekennzeichnet, dass die Linse in bekannter Weise nach den auf der Linsenfläche konzentrisch zur optischen Achse liegenden Interferenzringen vorjustiert wird, dass nach dem Vorjustieren an der zu justierenden Linse zwei unterschiedliche Interferenzbilder erzeugt werden, indem die Teile eines mechanisch geteilten, gekrümmten Spiegels so gegeneinander verschoben werden, dass der Brennpunkt der zu justierenden Linse zwischen den beiden Krümmungsmittelpunkten der Spiegelteile liegt, so dass beide Krümmungsmittelpunkte der Spiegelteile und der Brennpunkt der Linse auf einer Geraden liegen, dass durch Verschieben der Spiegelteile die zwei Interferenzbilder so weit wie möglich zur Koinzidenz gebracht werden, und dass die zu justierende Linse durch Justiermittel solange verstellt wird, bis kein Koinzidenzfehlerzwischen beiden Interferenzbildern messbar ist. 2. Vorrichtung zur Durchführung des Verfahrens nach Anspruch 1, dadurch gekennzeichnet, dass an der der Strahlenquelle abgewandten Seite der zu justierenden Linse ein aus mindestens zwei Teilen bestehender, gekrümmter Spiegel angeordnet ist, dessen Teile gegeneinander versetzt oder versetzbar sind. Hierzu 1 Seite ZeichnungenA method for adjusting lenses, wherein a bundle of electromagnetic radiation of a radiation source, preferably a laser, which penetrates the lens to be adjusted, is reflected on a curved mirror and generates an interference image on the lens, characterized in that the lens in Known manner is pre-adjusted according to the lying on the lens surface concentric to the optical axis interference fringes that two different interference images are generated after the pre-adjustment of the lens to be adjusted by the parts of a mechanically split, curved mirror are shifted from each other so that the focus of adjusting lens is located between the two centers of curvature of the mirror parts, so that both centers of curvature of the mirror parts and the focal point of the lens lie on a straight line that moved by moving the mirror parts, the two interference images as far as possible for coincidence and that the lens to be adjusted is adjusted by adjusting means until no coincidence error between the two interference images is measurable. 2. Apparatus for carrying out the method according to claim 1, characterized in that on the side facing away from the radiation source of the lens to be adjusted from at least two parts existing, curved mirror is arranged, whose parts are offset from one another or displaceable. For this 1 page drawings

Description

Eine Vorrichtung zur Durchführung des Verfahrens, mit einer Strahlenquelle, einem gekrümmten Spiegel und einer dazwischen angeordneten, zu justierenden Linse besteht darin, daß an der der Strahlenquelle abgewandten Seite der zu justierenden Linse ein aus mindestens zwei Teilen bestehender, gekrümmtei Spiegel angeordnet ist, dessen Teile gegeneinander versetzt oder versetzbar sind,An apparatus for carrying out the method, with a radiation source, a curved mirror and arranged therebetween, to be adjusted lens is that on the side facing away from the radiation source of the lens to be adjusted from at least two parts existing, gekrümmtei mirror is arranged, its parts offset or displaceable,

Die Erfindung soll nachstehend an einem Ausführungsbeispiel näher erläutert werden. In der dazugehörigen Zeichnung zeigenThe invention will be explained in more detail below using an exemplary embodiment. In the accompanying drawing show

Fig. 1: eine Vorrichtung mit mechanisch geteiltem Spiegel,1 shows a device with mechanically split mirror,

Fig. 2: das interferenzbild auf einer vorjustierten Linse,2: the interference image on a pre-adjusted lens,

Fig, 3: das aus zwei Hüften bestehende Interferenzbild einer erfindungsgemäß zu justierenden Linse,FIG. 3 shows the two-hip interference pattern of a lens to be adjusted according to the invention, FIG.

Die zu justierende Linse 1 ist nach dem bekannten Interferenzverfahren vorjustiert und auf der Linse 1 entsteht ein Interferenzbild nach Fig. 2 mit konzentrischen Hell-Dunkei-Zonen 2; 3. Hierzu wird auf die US-Patentschriften 3 B07 597 und 3 542476 verwiesen.The lens 1 to be adjusted is pre-adjusted according to the known interference method, and an interference image according to FIG. 2 is produced on the lens 1 with concentric light-dark zones 2; 3. Reference is made to US Pat. Nos. 3 B07 597 and 3 542476.

In Fig. 1 ist in Lichtrichtung hinter der zu justierenden Linse 1 ein aus gegeneinander verschobenen Teilen 4' und4" bestehender Spiegel 4 angeordnet. Der Brennpunkt 5 der Linso 1 liegt zwischen den Krümmungsmittelpunkten 6 und 6' der Spiegelteile 4' und 4" auf der optischen Achse 7. Die von einer Strahlenquelle 8 auf den Spiegel 4 auftreffenden und von diesem reflektierten Strahlen erzeugen auf der Linse 1 ein Interferenzmuster, wie es in Fig. 3 dargestellt'ist. Dieses Interferenzmuster besteht aus zwei ungleich gemusterten Teilen 9 und 10. Durch Verschieben der Spiegelteile 4' und 4" parallel bzw. gegeneinander werden die gemusterten Teile 9 und 10 des Interferenzbildes annähernd in eine einheitliche Musterung etwa nach Fig. 2 übergehen. Der Restunterschied der Muster der Teile 9 und 10 wird durch Justierbewegungen an der Linse 1 beseitigt, wodurch ein hochpräziser Justierzustand c er Linse 1 erreicht wird, welcher über einen teildurchlässigen Spiegel 11 vom Ort 12 aus beobachtet werden kann.1, a mirror 4 consisting of mutually displaced parts 4 'and 4 "is arranged in the light direction behind the lens 1 to be adjusted, the focal point 5 of the lens 1 lying between the centers of curvature 6 and 6' of the mirror parts 4 'and 4" on the optical axis 7. The rays impinging upon and reflected by a radiation source 8 on the mirror 4 generate an interference pattern on the lens 1, as shown in FIG. This interference pattern consists of two unequally patterned parts 9 and 10. By moving the mirror parts 4 'and 4 "parallel or against each other, the patterned parts 9 and 10 of the interference image will be approximately in a uniform pattern as shown in Fig. 2. The residual difference of the patterns the parts 9 and 10 is eliminated by adjusting movements on the lens 1, whereby a high-precision adjustment state c he lens 1 is achieved, which can be observed via a partially transparent mirror 11 from the location 12 from.

Das erfindungsgumäße Verfahren und die Vorrichtung zur Durchführung desselben haben den Vorteil, daß eine hochgenaue Linsenjustierung mit geringem Zeitaufwand erzielt wird.The erfindungsgumäße method and the device for carrying out the same have the advantage that a high-precision lens adjustment is achieved with little expenditure of time.

Claims

1. A method for adjusting lenses, in which a bundle of electromagnetic radiation of a radiation source, preferably a laser, which penetrates the lens to be adjusted, is reflected on a curved mirror and generates an interference image on the lens, characterized in that the lens in a known manner is pre-adjusted according to the lying on the lens surface concentric to the optical axis interference fringes that two different interference images are generated by the Vorjustieren on the lens to be adjusted by the parts of a mechanically split, curved mirror are shifted from each other so that the focus of the lens to be adjusted between the two points of curvature of the mirror parts, so that both centers of curvature of the mirror parts and the focal point of the lens lie on a straight line, that the two interference images are brought to coincidence as far as possible by displacing the mirror parts, and the lens to be adjusted is adjusted by adjustment means until no coincidence error between the two interference images is measurable.

2. A device for carrying out the method according to claim Ί, characterized in that on the side facing away from the sputtering source side of the lens to be adjusted is arranged consisting of at least two parts, curved mirror whose parts are offset from one another or displaceable.

For this 1 page drawings

The invention relates to a method and a device for adjusting lenses, wherein a bundle of electromagnetic radiation of a radiation source, preferably a laser, which lies through the lens to be adjusted, is reflected by a curved mirror and generates an interference image on the lens.

Various methods and devices are known which are used for adjusting lenses. These methods include the ghosting method, which involves the implementation of a variety of devices, all based on observing the deflection of an electromagnetic beam reflected from the lens surface to be inspected, and providing information about the alignment state of the lens.

Other known methods and devices for adjusting lenses are the transmitted light method and the interference method.

In Durchiichtverfahren penetrated by a bundle of electromagnetic radiation, the lens to be adjusted, the adjustment state is directly related to the degree of distraction.

In the interference method, interference images formed on the lens surfaces of concentric light-dark zones and symmetrical to the optical axis are generated, the position of which is used to adjust the lens.

The disadvantage of the reflective image process results with increasing use of anti-reflective coated lenses from the low light intensity of the reflective image, which is the limit for the accuracy of this method is reached.

The disadvantage of the transmitted light and interference methods, which are generally known as additional or supplementary methods, is the too low accuracy of this principle for the adjustment of precision objectives.

The purpose of the invention is to eliminate the disadvantages of the prior art and to increase the labor productivity and accuracy in lens alignment.

The object of the invention is to provide an adjustment method that measures and adjusts a shift or tilt of the lens to be adjusted from the ideal alignment position to 0.2 pm accuracy regardless of the reflectivity of the lens surfaces to be adjusted.

According to the invention, the object of the invention in a method for adjusting lenses, in which a bundle of electromagnetic radiation of a radiation source, preferably a laser, which penetrates the lens to be adjusted, is reflected on a curved mirror and generates an interference image on the lens, is achieved, in that the lens is pre-adjusted in a known manner according to the interference rings lying on the lens surface concentric with the optical axis that two different interference images are generated after the pre-adjustment of the lens to be adjusted by the Toile a mechanically split, curved mirror are shifted against each other so that the focal point of the lens to be adjusted between the two centers of curvature of the mirror parts is such that both centers of curvature of the mirror parts and the focal point i'er lens lie on a straight line, that by moving the mirror parts, the two interferers as far as possibly be coincident, and that the lens to be adjusted by adjusting as long as vei, tslit until no coincidence error between the two interference images is measurable.