DD255059A3

DD255059A3 - SEMICONDUCTOR DEHNSTREIFENGEBER

Info

Publication number: DD255059A3
Application number: DD26777984A
Authority: DD
Inventors: Nikolaj T Gorbacuk; Petr A Sakidon; Jurij A Tchorik; Jurij M Svarc
Original assignee: Inst Poluprovodnikov
Priority date: 1984-09-26
Filing date: 1984-09-26
Publication date: 1988-03-23

Abstract

Der Dehnstreifengeber enthaelt eine Isolierunterlage aus halbisolierendem Galliumarsenid und eine tensoempfindliche Schicht aus einer plastisch verformten monokristallinen Schicht von stark legiertem Germanium; dies gestattet, den Betriebstemperaturbereich bis 4,2 K auszudehnen.The Dehnstreifengeber contains a Isolierunterlage of semi-insulating gallium arsenide and a tensoempfindliche layer of a plastically deformed monocrystalline layer of highly alloyed germanium; this allows to extend the operating temperature range up to 4.2K.

Description

/\~ 25 5 O / \ ~ 25 5 O

OIIHCAHKE M30BPETEHMH K ABTOPCKOWOIIHCAHKE M30BPETEHMH K ABTOPCKOW

24.11.8224/11/82

3a*BKa » 3532256/25-28 MKM⁴ G OIB 7/18 Abtoph: H.T.ropöatiyK, Π.A.CaKH₁UOH, ίΟ.Α.Τχορκκ η3a * BKa »3532256 / 25-28 MKM ⁴ G OIB 7/18 Abtoph: HTropöatiyK, Π.A.CaKH ₁ UOH, ίΟ.Α.Τχορκκ η

D.M.HlBapi} 3aHBHTejib: Mhctht^t nojiynpoBO,sHHKOBD.M.HlBapi} 3aHBHTejib: Mhctht ^ t nojiynpoBO, sHHKOB

yKpanHCKOü CCP Ηβ3ΒβΗΗβ·-Η3θ6ρβτβΗΗΗ:yKpanHCKOu CCP Ηβ3ΒβΗΗβ · -Η3θ6ρβτβΗΗΗ:

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M3BecTeH nojiynpoBO,nHHKOBHii TeH3ope3ncTop, co^epaca-M3BecTeH nojiynpoBO, nHHKOBHii TeH3ope3ncTop, co ^ epaca

WyiVi H30JIHIiH0HHyK) nOjUIOÄKy H3 CHTaJIJia HJIH KepaMHKH H TeH30tiyBCTBHTeJIbHHH CJIOii H3 nOJIHKpHCTaJUIHtieCKO Ll]., WyiVi H30JIHIiH0HHYK) nOjUIOÄKy H3 CHTaJIJia HJIH KepaMHKH H TeH30tiyBCTBHTeJIbHHH CJIOii H3 nOJIHKpHCTaJUIHTieCKO Ll].,

3T0T TeH3ope3HCTop He oöecnet-MBaeT3T0T TeH3ope3HCTop Hey oöecnet MBaeT

MOH TOtJHOCTH HSMepeHHH 3 ^CJIOBHHX HH3KHX 293⁰K) B CBH3H C Β03ΗΗΚΗ0ΒβΗΗβΜ BHyTpeHHHX ΤβΜ-MOH TOtJHOCTH HSMepeHHH 3 ^ CJIOBHHX HH3KHX 293 ⁰ K) B CBH3H C Β03ΗΗΚΗ0ΒβΗΗβΜ BHyTpeHHHX ΤβΜ-

anpnKeHHH H3-3a pa3JiHxiHaxAnpnKeHHH H3-3a pa3JiHxiHax

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Hanöojiee 6jih3khm κ Η3θ6ρβτβΗΗκ ποHanöojiee 6jih3khm κ Η3θ6ρβτβΗΗκ πο

C^DfHOCTH H flOCTHraeMOM^ 3(|)φβΚΤ7 HBJlHeTCfl ΗΗΚΟΒΗΜ TeH30pe3HCT0p, CO^epHCaUiHH H30JlHIiHOHHyiOC ^ DfHOCTHH flOCTHraeMOM ^ 3 (|) φβΚΤ7 HBJlHeTCfl ΗΗΚΟΒΗΜ TeH30pe3HCT0p, CO ^ epHCaUiHH H30JlHIiHOHHyiO

Ky H3 OTBepmeHHoro CBflsytonjero η TeH30iiyBCTBMTejibHHii H3 MOHOKpHCTajuiHtiecKoro cHJibHOJierHpoBaHHoro rep-Ky H3 OTBepmeHHoro CBflsytonjero η TeH30iiyBCTBMTejibHHii H3 MOHOKpHCTajuiHtiecKoro cHJibHOJierHpoBaHHoro Rep-

O₁HHaKO H3BecTHHft jia/swiK He oÖecne^HBaeTO ₁ HHaKO H3BecHHft jia / swiK He oOne ^ HBaeT

MOi? TOtfflOCTH Η3ΜβρβΗΗίί B ^CJIOBHHX HH3KHX B CBH3H c bo3HHKHOBeHHeM BHyTpeHHHX TeMnepaTypHBDC HanpH»eHHH Π0MO i? TOtfflOCTH Η3ΜβρβΗΗίί B ^ CJIOBHHX HH3KHX B CBH3H c bo3HHKHOBeHHeM BHyTpeHHHX TeMnepaTypHBDC HanpH »eHHH Π0

J'J '

-Z--Z-

Η300ρβΤΘΗΗΗ HBJiHeTCH ΠΟΒΗΙΠβΗΗβ TOtIHOCTM HΗ300ρβΤΘΗΗΗ HBJiHeTCH ΠΟΒΗΙΠβΗΗβ TOtIHOCTM H

pacmHpeHHe padotiero ^Hana30Ha TeMnepaT^p TeH30pe3HC-Topa ,no 4,2⁰K.pacmHpeHHe padotiero ^ Hana30Ha TeMnepaT ^ p TeH30pe3HC-Topa, no 4,2 ⁰ K.

l|ejib flocTHraeTCH τθμ, trro β nojiynpoBO,EHHKpBOM TeH3ope3HCTope, coflepscameM H30jiHiiH0HHyK) ncyuioacK^ η TeH30tiyBCTBHTeJibHHH CJiOH H3 CHjibHOJierHpoBaHHoro repMa-HHH, H3 O JIHIJHOHHaH UO₁IIJIOKKa BbinOJIHeHa H3 nOJiyHSOJIHpyK)-mero apceHH^a rajijiHH, a TeH30tiyBCTBHTejibHHH cjioh - hsl | ejib flocTHraeTCH τθμ, trro β nojiynpoBO, EHHKpBOM TeH3ope3HCTope, coflepscameM H30jiHiiH0HHyK) ncyuioacK ^ η TeH30tiyBCTBHTeJibHHH CJiOH H3 CHjibHOJierHpoBaHHoro repMa-HHH, H3 O UO JIHIJHOHHaH ₁ IIJIOKKa BbinOJIHeHa H3 nOJiyHSOJIHpyK) -mero apceHH ^ a rajijiHH, a TeH30tiyBCTBHTejibHHH cjioh - hs

ΠJIaCTH^eCKH ^ΘφορΜΗρΟΒβΉΗΟΗ MOHOKpHCTajIJIHtieCKOH IIJieHKH. ÜOJiynpOBOfllHHKOBHH TeH30pe3HCT0p CO^epKHT H30JIH-ΠJIaCTH ^ eCKH ^ ΘφορΜΗρΟΒβΉΗΟΗ MOHOKpHCTajIJIHtieCKOH IIJieHKH. ÜOJiynpOBOfllHHKOBHH TeH30pe3HCT0p CO ^ epKHT H30JIH-

i^HOHHyro noflJioKK^ H3 nojiyHSOJiHp^ioniero apceHH^a rajiJiHfl, Ha KOTopyro HaHeceH TeH30tiyBCTBHTejibHHH cjioh h3 πJIacτH^e-CKH ^ΙβφθρΜΗρθΒ3ΗΗθΗ MOHOKpHCTajIJIHTieCKOH riJieHKH CHJIbHO-HOHHyro noflJioKK ^ H3 nojiyHSOJiHp ^ ioniero apceHH ^ a rajiJiHfl, Ha KOTopyro HaHeceH TeH30tiyBCTBHTejibHHH cjioh h3 πJIacτH ^ e-CKH ^ ΙβφθρΜΗρθΒ3ΗΗθΗ MOHOKpHCTajIJIHTieCKOH riJieHKH CHJIbHO-

jierHpoBaHHoro repMaHHH. 'jierHpoBaHHoro repMaHHH. '

riojiynpoBOflHHKOBfciH TeH3ope3HCTop paÖOTaeT cjieflyio-riojiynpoBOflHHKOBfciH TeH3ope3HCTop paÖOTaeT cjieflyio

0Öpa30M.0Öpa30M.

JIOHteHHH K nOJiynpOBO,IIHHKOB;öMy ΤΘΗ30ρβ3Η0Τ0-JIOHteHHH K nOJiynpOBO, IIHHKOB; öMy ΤΘΗ30ρβ3Η0Τ0-

H3MeHfleTCH ero ajieKTpntjecKoe conpoTHBJie-HHe. TaK KaK HejiHHeHHOCTb ₁EeφopMa^HOHHOH xapaKTepncTH-KH CHjibHOJierHpoBaHHoro MOHOKpHCTajiJiHtiecKoro repwaHHH B flHana30He TewnepaT^p 4,2-45O⁰K Η3ΜβΗΗβτοπ Hec3?niecTBeH-HO, a TeMnepaTypHHe κοΘφφπίξΗβΗΤΗ JiHHeHHoro pacinHpeHHH repMaHHH η apceroma rajijiHH β 3T0m jinanasoHe TeMnepaT^p 6JIH3KH, το sejiHTiHHa HeJiHHeHHOCTH rpaflyHpoBotiHoü xapaK-TepHCTKKH TeH3ope3HCTopa He μθηηθτοη ot TeMnepaTypH, mo n03B0JIHeT HCn0JIb30BaTb npe^JIOÄeHHHÖ TeH30pe3HCT0p B ΙΠΗ-H3MeHfleT ero ajiektpntjecKoe conpoTHBJie-HHe. TaK KaK HejiHHeHHOCTb ₁ EeφopMa ^ HOHHOH xapaKTepncTH-KH CHjibHOJierHpoBaHHoro MOHOKpHCTajiJiHtiecKoro repwaHHH B flHana30He TewnepaT ^ p 4,2-45O ⁰ K Η3ΜβΗΗβτοπ Hec3? NiecTBeH-HO, a TeMnepaTypHHe κοΘφφπίξΗβΗΤΗ JiHHeHHoro pacinHpeHHH repMaHHH η apceroma rajijiHH β 3T0m jinanasoHe TeMnepaT ^ p 6JIH3KH, το sejiHTiHHa HeJiHHeHHOCTH rpaflyHpoBotiHoü xapaK-TepHCTKKH TeH3ope3HCTopa He μθηηθτοη ot TeMnepaTypH, mo n03B0JIHeT HCn0JIb30BaTb npe ^ JIOaeHHHÖ TeH30pe3HCT0p B ΙΠΗ-

ροκοΜ paöo^sM jiHana30He TeMnepaT^p ^o 4,2⁰K. Οηηκθηηϊο BH^TpeHHHX HanpHJKeHHH CnOCOÖCTB^eT H TO, ΐίΤΟ MOHOKpHC-TajiJiHtiecKaH njieHKa β npou;ecce H3roTOBJieHHH TeH3ope3HC-Topa no^sepraeTCH njiacTH^tecKOH ^εφορΜαΐ^ΗΗ.ροκοΜ paöo ^ sM jiHana30He TeMnepaT ^ p ^ o 4.2 ⁰ K. Οηηκθηηϊο BH ^ TpeHHHX HanpHJKeHHH CnOCOÖCTB ^ eT H TO, ΐίΤΟ MOHOKpHC-TajiJiHtiecKaH njieHKa β npou; ecce H3roTOBJieHHH TeH3ope3HC-Topa no ^ ^ sepraeTCH njiacTH tecKOH ^ ^ εφορΜαΐ ΗΗ ,

npeflJiaraeMHH nOJQ/ΠρΟΒΟ,ΙΙΗΗΚΟΒΗΗ, TeH30pe3HCT0p Π03-H3MepHTb ,nei|)opMaijHH β iflHpoKOM ^Hana30He TeMne-BnjiOTb ^o κρποΓβΗΗΗΧ TeMnepaT^p, η oÖecnetiHBaeTnpeflJiaraeMHH nOJQ / ΠρΟΒΟ, ΙΙΗΗΚΟΒΗΗ, TeH30pe3HCT0p Π03-H3MepHTb, nei |) opMaijHH β iflHpoKOM ^ Hana30He TeMne-BnjiOTb ^ o κρποΓβΗΗΗΧ TeMnepaT ^ p, η oöecnetiHBaeT

xapaKTepHCTHK^ β pacinnpeHHOM ,EHana30He HSMepseMHX ίιeφopMa^Ha #0 1,5x10"xapaKTepHCTHK ^ β pacinnpeHHOM, EHana30He HSMepseMHX ίιeφopMa ^ Ha # 0 1,5x10 "

34SG34SG

Claims

ΦΟΡΜΑ Μ30ΕΡΕΓΕΗΜΗ

ΤβΗ30ρβ3Η0Τ0ρ, ΟΟ, ϋβρΑαΙίμίΗ Η30-JIHIJHOHHYK) nO ^ JIOJKK Η TeH30tjyBCTBHTeJIbHHH CJIOft H3 CHJIb-

HOJiernpoBaHHoro repMaHHH, oTJiHyaroiqHHCfl τθμ, ^ TO, c qejibK) ποβηιπθηηη TotmocTH η pacmnpeHHH pa-, nHanaeoHa TeMnepaT ^ p, no 4,2 ⁰ K, η3οληιιηοηηεη h3 noji ^ H3OJiHp ^ K2iiero apceHH ^ a raji-

JIHH, a TeH30tjyBCTBHTeJIBHfcIÖ CJIOfi - H3 _l 3Jeφ0pMHp0BaHH0H MOHOKpHCTaJIJIHXjeCKOH UJIeHKH.

MCTO ^ HHKH HH (f) OpMaqHH, ΠρΗΗΗΤΗβ BO BHHMaHHe

3KcnepTH3e:

I.IlaHKOB D.M., BoponiHJio Γ.Μ., MapbHMOBa M.M.

MCCJIe ₁ DOBaHHe BO3MOKHOCTH C03flaHHH nOJiynpOBO, HHHKOBHX npeoÖpasoBaTejieH Ha ocHOBe tohkhx njieHOK repMaHHH. Te3HCH ^ OKJia ^ OB pecnyöjiHKaHCKOö κοΗφβρβΗΐίΗΗ "H φΗ3ΗΧίβΟΚΗβ CBOßCTBa TOHKHX ΠΛβΗΟΚ

2. (IS, A, 3254529 (προτοτΗΐΐ).