DD137276A1 - FLUID COOLER FOR WAFER TRANSFER AND METHOD FOR FIXING IT - Google Patents

FLUID COOLER FOR WAFER TRANSFER AND METHOD FOR FIXING IT

Info

Publication number
DD137276A1
DD137276A1 DD20640878A DD20640878A DD137276A1 DD 137276 A1 DD137276 A1 DD 137276A1 DD 20640878 A DD20640878 A DD 20640878A DD 20640878 A DD20640878 A DD 20640878A DD 137276 A1 DD137276 A1 DD 137276A1
Authority
DD
German Democratic Republic
Prior art keywords
fixing
wafer transfer
fluid cooler
cooler
fluid
Prior art date
Application number
DD20640878A
Other languages
German (de)
Inventor
Johannes Grund
Original Assignee
Johannes Grund
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Johannes Grund filed Critical Johannes Grund
Priority to DD20640878A priority Critical patent/DD137276A1/en
Priority to DE19792907113 priority patent/DE2907113A1/en
Priority to NL7901817A priority patent/NL7901817A/en
Priority to SU797770605A priority patent/SU1112218A1/en
Priority to HUSC000682 priority patent/HU182611B/en
Publication of DD137276A1 publication Critical patent/DD137276A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
    • F28F19/02—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/02—Header boxes; End plates
    • F28F9/026—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits
    • F28F9/028—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits by using inserts for modifying the pattern of flow inside the header box, e.g. by using flow restrictors or permeable bodies or blocks with channels

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
DD20640878A 1978-06-30 1978-06-30 FLUID COOLER FOR WAFER TRANSFER AND METHOD FOR FIXING IT DD137276A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DD20640878A DD137276A1 (en) 1978-06-30 1978-06-30 FLUID COOLER FOR WAFER TRANSFER AND METHOD FOR FIXING IT
DE19792907113 DE2907113A1 (en) 1978-06-30 1979-02-23 Flow guide body for heat transfer equipment - has cylindrical bore with channels passing towards wall of coolant inlet chamber
NL7901817A NL7901817A (en) 1978-06-30 1979-03-07 FLOW CONDUCTOR BODY FOR HEAT TRANSMISSION DEVICES AND METHOD FOR ATTACHING THEREOF.
SU797770605A SU1112218A1 (en) 1978-06-30 1979-06-06 Casing and tube heat exchanger
HUSC000682 HU182611B (en) 1978-06-30 1979-06-08 Current conducting body for heat transmitters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20640878A DD137276A1 (en) 1978-06-30 1978-06-30 FLUID COOLER FOR WAFER TRANSFER AND METHOD FOR FIXING IT

Publications (1)

Publication Number Publication Date
DD137276A1 true DD137276A1 (en) 1979-08-22

Family

ID=5513376

Family Applications (1)

Application Number Title Priority Date Filing Date
DD20640878A DD137276A1 (en) 1978-06-30 1978-06-30 FLUID COOLER FOR WAFER TRANSFER AND METHOD FOR FIXING IT

Country Status (5)

Country Link
DD (1) DD137276A1 (en)
DE (1) DE2907113A1 (en)
HU (1) HU182611B (en)
NL (1) NL7901817A (en)
SU (1) SU1112218A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3311579C2 (en) * 1983-03-30 1985-10-03 Süddeutsche Kühlerfabrik Julius Fr. Behr GmbH & Co. KG, 7000 Stuttgart Heat exchanger
DE10311529B3 (en) * 2003-03-17 2004-09-16 Tuchenhagen Dairy Systems Gmbh Device used in the food and drinks industry comprises tubular support plates having a flow region with expanded throughput cross-sections within the exchanger flange and a connecting support
EP3438596B1 (en) * 2017-08-01 2020-04-08 Provides Metalmeccanica S.r.l. Improved fluid distributor

Also Published As

Publication number Publication date
NL7901817A (en) 1980-01-03
DE2907113A1 (en) 1980-01-10
SU1112218A1 (en) 1984-09-07
HU182611B (en) 1984-02-28

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Legal Events

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