DD125687A1 - - Google Patents

Info

Publication number
DD125687A1
DD125687A1 DD19195076A DD19195076A DD125687A1 DD 125687 A1 DD125687 A1 DD 125687A1 DD 19195076 A DD19195076 A DD 19195076A DD 19195076 A DD19195076 A DD 19195076A DD 125687 A1 DD125687 A1 DD 125687A1
Authority
DD
German Democratic Republic
Application number
DD19195076A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD19195076A priority Critical patent/DD125687A1/xx
Priority to DE19772703857 priority patent/DE2703857A1/de
Priority to CH350477A priority patent/CH613771A5/xx
Publication of DD125687A1 publication Critical patent/DD125687A1/xx

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/201Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DD19195076A 1976-03-22 1976-03-22 DD125687A1 (fi)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DD19195076A DD125687A1 (fi) 1976-03-22 1976-03-22
DE19772703857 DE2703857A1 (de) 1976-03-22 1977-01-31 Verfahren und anordnung zur fotografischen oder fotolithografischen herstellung von teilkreisen
CH350477A CH613771A5 (en) 1976-03-22 1977-03-21 Method and arrangement for the photographic or photolithographic production of divided circles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19195076A DD125687A1 (fi) 1976-03-22 1976-03-22

Publications (1)

Publication Number Publication Date
DD125687A1 true DD125687A1 (fi) 1977-05-11

Family

ID=5503982

Family Applications (1)

Application Number Title Priority Date Filing Date
DD19195076A DD125687A1 (fi) 1976-03-22 1976-03-22

Country Status (3)

Country Link
CH (1) CH613771A5 (fi)
DD (1) DD125687A1 (fi)
DE (1) DE2703857A1 (fi)

Also Published As

Publication number Publication date
CH613771A5 (en) 1979-10-15
DE2703857A1 (de) 1977-10-06

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