DD118144B1 - METHOD AND DEVICE FOR FAST EVACUATION OF SMALL BOXES - Google Patents
METHOD AND DEVICE FOR FAST EVACUATION OF SMALL BOXES Download PDFInfo
- Publication number
- DD118144B1 DD118144B1 DD18587975A DD18587975A DD118144B1 DD 118144 B1 DD118144 B1 DD 118144B1 DD 18587975 A DD18587975 A DD 18587975A DD 18587975 A DD18587975 A DD 18587975A DD 118144 B1 DD118144 B1 DD 118144B1
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- container
- pressure
- evacuation
- volume
- pump
- Prior art date
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
Dazu wird eine Einrichtung verwendet, bei der der zu evakuierende Behälter über zwei Ventile mit einer Evakuierungseinrichtung, die zwei Expansionsvolumina und mindestens eine mechanische Vorvakuumpumpe aufweist, verbunden ist, wobei durch eine mit bekannten Mitteln vorgenommene Zeitsteuerung der Ventile der Einrichtung die Durchführung des Verfahrens realisiert wird.For this purpose, a device is used, in which the container to be evacuated via two valves with an evacuation device having two expansion volumes and at least one mechanical backing pump is connected, which is carried out by a time-controlled by known means timing of the valves of the device, the implementation of the method ,
Die Erfindung soll nachstehend an mehreren Ausführungsbeispielen näher erklärt werdenThe invention will be explained in more detail below on several embodiments
In der zugehörigen Zeichnung zeigen: In the accompanying drawing show:
Fig. 1: Schema der EvakuierungseinrichtungFig. 1: Scheme of the evacuation device
Fig. 2: Schema der Evakuierungseinrichtung mit einer zweistufigen VorvakuumpumpeFig. 2: Scheme of the evacuation device with a two-stage backing pump
Gemäß Fig. 1 ist der zu evakuierende Behälter 1 über ein Ventil 2 und eine Leitung 4 mit einer mechanischen Vorpumpe 6, sowie über ein Ventil 3 und die Leitung 5 mit einer mechanischen Vorpumpe 7 verbunden. Die Evakuierung von 1 geschieht nun in der Weise, daß zunächst das Ventil 2 geöffnet wird. Es findet Druckausgleich mit der Leitung 4, der Pumpe 6 und dem angebrachten zusätzlichen Volumen 8 statt, der sehr schnell geht und bis zu einem Druck von 1 bis 10 Torr führt.According to FIG. 1, the container 1 to be evacuated is connected via a valve 2 and a line 4 to a mechanical roughing pump 6, as well as via a valve 3 and the line 5 to a mechanical backing pump 7. The evacuation of 1 is now done in such a way that first the valve 2 is opened. There is pressure equalization with the line 4, the pump 6 and the attached additional volume 8 instead, which goes very fast and leads to a pressure of 1 to 10 Torr.
Danach wird Ventil 2 geschlossen und kurzzeitig Ventil 3 geöffnet. Hier expandiert das restliche in dem Behälter 1 verbliebeneThereafter, valve 2 is closed and valve 3 is opened for a short time. Here, the remaining remaining in the container 1 expands
Gas in die Leitung 5, die Pumpe 7 und den Behälter 9, der so dimensioniert ist, daß durch diese Expansion der gewünschte Druck im Behälter 1 erreicht wird.Gas in the line 5, the pump 7 and the container 9, which is dimensioned so that the desired pressure in the container 1 is achieved by this expansion.
Ventil3 wird wieder geschlossen. In der Zeit bis zur nächsten Evakuierung werden die Evakuierungszweige durch die Vorpumpen wieder auf einen niedrigen Druck evakuiert.Valve3 is closed again. In the time until the next evacuation evacuation branches are evacuated by the forepumps back to a low pressure.
Bei günstiger Gestaltung der beiden Evakuierungszweige können die Pumpen 6 und 7 die erste und die zweite Stufe einerWith a favorable design of the two Evakuierungszweige the pumps 6 and 7, the first and the second stage of a
zweistufigen Vorvakuumpumpe (beispielsweise Drehschieberpumpe) 7 (Figur 2) sein.two-stage backing pump (for example, rotary vane pump) 7 (Figure 2).
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD18587975A DD118144B1 (en) | 1975-05-07 | 1975-05-07 | METHOD AND DEVICE FOR FAST EVACUATION OF SMALL BOXES |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD18587975A DD118144B1 (en) | 1975-05-07 | 1975-05-07 | METHOD AND DEVICE FOR FAST EVACUATION OF SMALL BOXES |
Publications (2)
Publication Number | Publication Date |
---|---|
DD118144A1 DD118144A1 (en) | 1976-02-12 |
DD118144B1 true DD118144B1 (en) | 1988-11-30 |
Family
ID=5500197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD18587975A DD118144B1 (en) | 1975-05-07 | 1975-05-07 | METHOD AND DEVICE FOR FAST EVACUATION OF SMALL BOXES |
Country Status (1)
Country | Link |
---|---|
DD (1) | DD118144B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19524609A1 (en) * | 1995-07-06 | 1997-01-09 | Leybold Ag | Device for the rapid evacuation of a vacuum chamber |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0418771D0 (en) | 2004-08-20 | 2004-09-22 | Boc Group Plc | Evacuation of a load lock enclosure |
-
1975
- 1975-05-07 DD DD18587975A patent/DD118144B1/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19524609A1 (en) * | 1995-07-06 | 1997-01-09 | Leybold Ag | Device for the rapid evacuation of a vacuum chamber |
Also Published As
Publication number | Publication date |
---|---|
DD118144A1 (en) | 1976-02-12 |
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