DD118144A1 - - Google Patents
Info
- Publication number
- DD118144A1 DD118144A1 DD18587975A DD18587975A DD118144A1 DD 118144 A1 DD118144 A1 DD 118144A1 DD 18587975 A DD18587975 A DD 18587975A DD 18587975 A DD18587975 A DD 18587975A DD 118144 A1 DD118144 A1 DD 118144A1
- Authority
- DD
- German Democratic Republic
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD18587975A DD118144B1 (de) | 1975-05-07 | 1975-05-07 | Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD18587975A DD118144B1 (de) | 1975-05-07 | 1975-05-07 | Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter |
Publications (2)
Publication Number | Publication Date |
---|---|
DD118144A1 true DD118144A1 (it) | 1976-02-12 |
DD118144B1 DD118144B1 (de) | 1988-11-30 |
Family
ID=5500197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD18587975A DD118144B1 (de) | 1975-05-07 | 1975-05-07 | Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter |
Country Status (1)
Country | Link |
---|---|
DD (1) | DD118144B1 (it) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0752531B1 (de) * | 1995-07-06 | 1998-11-04 | Leybold Aktiengesellschaft | Vorrichtung zum raschen Evakuieren einer Vakuumkammer |
US7914265B2 (en) | 2004-08-20 | 2011-03-29 | Edwards Limited | Evacuation of a load lock enclosure |
-
1975
- 1975-05-07 DD DD18587975A patent/DD118144B1/de unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0752531B1 (de) * | 1995-07-06 | 1998-11-04 | Leybold Aktiengesellschaft | Vorrichtung zum raschen Evakuieren einer Vakuumkammer |
US6004109A (en) * | 1995-07-06 | 1999-12-21 | Balzers Und Leybold Deutschland Holding Ag | Apparatus for the rapid evacuation of a vacuum chamber |
US7914265B2 (en) | 2004-08-20 | 2011-03-29 | Edwards Limited | Evacuation of a load lock enclosure |
Also Published As
Publication number | Publication date |
---|---|
DD118144B1 (de) | 1988-11-30 |