DD118144A1 - - Google Patents

Info

Publication number
DD118144A1
DD118144A1 DD18587975A DD18587975A DD118144A1 DD 118144 A1 DD118144 A1 DD 118144A1 DD 18587975 A DD18587975 A DD 18587975A DD 18587975 A DD18587975 A DD 18587975A DD 118144 A1 DD118144 A1 DD 118144A1
Authority
DD
German Democratic Republic
Application number
DD18587975A
Other versions
DD118144B1 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD18587975A priority Critical patent/DD118144B1/de
Publication of DD118144A1 publication Critical patent/DD118144A1/xx
Publication of DD118144B1 publication Critical patent/DD118144B1/de

Links

DD18587975A 1975-05-07 1975-05-07 Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter DD118144B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD18587975A DD118144B1 (de) 1975-05-07 1975-05-07 Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18587975A DD118144B1 (de) 1975-05-07 1975-05-07 Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter

Publications (2)

Publication Number Publication Date
DD118144A1 true DD118144A1 (it) 1976-02-12
DD118144B1 DD118144B1 (de) 1988-11-30

Family

ID=5500197

Family Applications (1)

Application Number Title Priority Date Filing Date
DD18587975A DD118144B1 (de) 1975-05-07 1975-05-07 Verfahren und einrichtung zur schnellen evakuierung kleiner behaelter

Country Status (1)

Country Link
DD (1) DD118144B1 (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0752531B1 (de) * 1995-07-06 1998-11-04 Leybold Aktiengesellschaft Vorrichtung zum raschen Evakuieren einer Vakuumkammer
US7914265B2 (en) 2004-08-20 2011-03-29 Edwards Limited Evacuation of a load lock enclosure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0752531B1 (de) * 1995-07-06 1998-11-04 Leybold Aktiengesellschaft Vorrichtung zum raschen Evakuieren einer Vakuumkammer
US6004109A (en) * 1995-07-06 1999-12-21 Balzers Und Leybold Deutschland Holding Ag Apparatus for the rapid evacuation of a vacuum chamber
US7914265B2 (en) 2004-08-20 2011-03-29 Edwards Limited Evacuation of a load lock enclosure

Also Published As

Publication number Publication date
DD118144B1 (de) 1988-11-30

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