DD117143A1 - - Google Patents
Info
- Publication number
- DD117143A1 DD117143A1 DD17893574A DD17893574A DD117143A1 DD 117143 A1 DD117143 A1 DD 117143A1 DD 17893574 A DD17893574 A DD 17893574A DD 17893574 A DD17893574 A DD 17893574A DD 117143 A1 DD117143 A1 DD 117143A1
- Authority
- DD
- German Democratic Republic
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD17893574A DD117143A1 (en:Method) | 1974-06-04 | 1974-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD17893574A DD117143A1 (en:Method) | 1974-06-04 | 1974-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD117143A1 true DD117143A1 (en:Method) | 1975-12-20 |
Family
ID=5496033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD17893574A DD117143A1 (en:Method) | 1974-06-04 | 1974-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| DD (1) | DD117143A1 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3237047A1 (de) * | 1981-10-07 | 1983-05-26 | Hitachi, Ltd., Tokyo | Waermebehandlungs-einrichtung |
| DE4404110A1 (de) * | 1993-04-22 | 1994-10-27 | Mitsubishi Electric Corp | Substrathalter für MOCVD und MOCVD-Vorrichtung |
-
1974
- 1974-06-04 DD DD17893574A patent/DD117143A1/xx unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3237047A1 (de) * | 1981-10-07 | 1983-05-26 | Hitachi, Ltd., Tokyo | Waermebehandlungs-einrichtung |
| DE4404110A1 (de) * | 1993-04-22 | 1994-10-27 | Mitsubishi Electric Corp | Substrathalter für MOCVD und MOCVD-Vorrichtung |
| DE4404110C2 (de) * | 1993-04-22 | 1998-01-22 | Mitsubishi Electric Corp | Substrathalter für die metallorganische chemische Dampfabscheidung |